表面电阻率测试标准

表面电阻率测试标准

1 Purpose:

目 的：

1.1To define the requirements and procedures of surface resistivity test.

本文旨在定义表面电阻测量的要求和步骤。

2 Scope:

范 围：

2.1The test method described in the document cover direct-current procedures for

the determination of DC surface resistance and surface resistivity of electrical

materials.

本方法用来测量电气材料的直流表面电阻，表面电阻率。

2.2This document shall be applicable to solid materials and products used and/or

produced by PEAK, except of metal materials..

本规范适用于必佳公司内生产及使用的,除金属材料外，其它固体材料及产 品的表面电阻和/或表面电阻率的测试。

3 Instrument ：

测试仪器

3.1MCP-HT260 Resistivity meter

MCP-HT260型电阻率测试仪

3.2Model PSI-870 Surface Resistance/Resistivity Indicator

PSI-870 型 表面电阻/表面电阻率测试仪

3.3PRF-912 miniature concentric ring fixture

PRF-912型微型同心环型电极

3.4SRM-110 Surface Resistivity Meter

SRM-110 型表面电阻率测试仪。

4 External Reference documents:

外部参考文件：

4.1ASTM D257-93 ：Standard test methods for DC resistance or conductance of

insulating materials

绝缘材料的直流电阻或电导实验方法

4.2ASTM D4496: Test method for DC resistance or conductance of moderately

conductive materials

中等导电材料的直流电阻或电导实验方法。

5 Definitions

定 义

5.1 Moderately conductive-Describe a solid material having a volume resistivity

between 1 and 10,000,000 ohm-cm.

中等导电性：指固体材料的体积电阻率在10-10,000,000ohm-cm

5.2Surface resistance (Rs)-The ratio of the DC voltage applied to the two electrodes

( on the surface of a specimen) to the current between them. expressed in

ohm.(symbol is Ω)

表面电阻(Rs)-施加在试样表面上两电极间的直流电压与通过两电极间的电

流的比值 ；单位是欧姆（ohm,）符号 Ω

5.3 Surface resistivity(ρs)-The surface resistance multiplied by that ratio of the

specimen dimensions (width of electrodes defining the current path divided by

the distance between electrodes) which transforms the measured resistance to

that obtained if the electrodes had formed the opposite sides of a square.

Remarks:Surface resistivity is expressed in ohms. It is popularly expressed also

as ohms/square.(the size of the square is immaterial).

表面电阻率(ρs)---平行于材料表面上电流方向的电位梯度与单位宽度上的 电流之比。

注： 表面电阻率的单位是欧姆（ohm, Ω），通常也写为欧姆/平方面积 （ohms/square）， 此处平方面积的大小是非实质的量。

6 General Requirements:

总体要求：

6.1The lab assistant involved in the measurement shall be trained and certified.

实验人员应培训合格方可作业。

6.2 Unless otherwise specified，the minimum sample quantities shall be 3 pieces and

3 points on each sample.

除非特别要求，最少3个测试样品, 每个样品测3个点。

6.3 Both sides/surfaces of samples shall be tested

样品的两面 都应进行测试。

6.4 Unless otherwise specified, Before test starting , sweep off dirt , dust , sweat

stains and other contamination on sample surface with a piece of clean soft cloth.

除非另有要求，测试前，用干净软布擦去样品表面的脏物，灰尘和汗等。

7 Test specimen

实验样品。

7.1The specimen may be of any practical form consistent with the particular

objective, such as flat plates, tapes or tubes.

试样可为任何实际的形状，如平板，带状或管状。

7.2A minimum of three specimen is required.

每种材料最少需要测三个样品。

8 Conditioning.

状态调节

8.1Unless otherwise specified or required, the specimen shall be conditioned under

the condition of 23±2oC and 50±5%RH.

除非另有要求或说明，测试前试样应在温度23±2oC，相对湿度50±5%的 条件下进行状态调节。

9 Test Procedure for MCP HT260

使用MCP HT260的测试 步骤：

9.1 Operation environment for the instrument is :temperature:0 ~40°C, relative

humidity below 80%.

本仪器可适应的实验环境条件是：温度0°C -40°C ，相对湿度小于80%。

9.2 Turn on power switch

打开电源开关。

9.3 Push [PROBE] key to set probe type as HRS. Each time key is pushed probe

type indicator change. HRS turns on ，at the same time resistivity correction factor 10.09 shows in data indicator. press [ENTER] key to finish the setting 按[PROBE]键设置探针类别为HRS ：每按一次[PROBE]键，探针类别改变 一次。HRS 点亮。同时电阻校正因子10.09显示在数据显示器上，按

[ERTER]键结束设置。

9.4 Push [TIMER] Key to set test time. Generally choose 10 seconds.

按[TIMER]键设置测试时间,通常设为10秒。

9.5 Push [SPLY VOLT] key to select supplied voltage. Each time key is pushed,

supplied voltage indicator changed accordingly. refer to Table 1 to select a suitable voltage:

按[SPLY VOLT]键设定测试电压。参照表1选择合适的测试电压。

9.6 Push [AUTO/MANUAL] key ，select measuring range mode.by and

key. 按

[AUTO/MANUAL]键

,用 和 键选择测量范围设定模式

9.6.1 Generally use “AUTO” mode. 通常选择“自动”(AUTO)模式.

Table 1: Test Voltage and Effective Measuring Range.

表 1 测试电压及有效测试范围

No. 序号 Supplied Voltage 测 试 电 压 （V ，伏） Measuring Range 测 试 范 围 （ohm, 欧姆， Ω）

Effective Measuring

Range 有 效 测 试 范 围 （ohm, 欧姆，Ω） 1 10 10 4 -10 10 1.00X10 4 -9.99X10

10 2 100 10 6 -10 11 1.00X10 6 -9.99X10

11 3 250 10 6 -10 11 1.00X10 6 -9.99X10

11 4 500 10 7 -10 12 1.00X10 7 -9.99X10

12 9.6.2At manual mode, most suitable range can be set. however, it need to do

measurement in auto mode first to get the whole range of surface resistivity of the material

手动（MANUAL ）模式下可设定最合适的测量范围。但首先应在自动 模式下进行测试,以获得材料表面电阻的最大范围。

9.7 Push [SINGL PRNT] key to set print mode. select single print mode .each time

measuring is completed, measuring data is print out.

按[SINGL PRNT]键设定打印方式,选择单次打印方式（SINGLE），每次测 量完成，数据即被打印出来。

9.8 Push [UNIT] key to select Ω/□as measuring unit.

按[UNIT]键择Ω/□为测量单位。

9.9 Place the sample on the insulative side of support plate, then press the MCP

probe against sample to ensure the surface of electrode and sample in fully and

intimately contact.

把待测样品平放在垫板的绝缘的一面上，然后，把MCP 电极放在样品表

面上，施加一定的力 使电极表面与样品表面紧密接触。

9.10 Push [START/HOLD] key, measurement start, the “MEASURE ‘lights on and

twinkles during measurement.

按下[START/HOLD]键，测量开始，“MEASURE”(测量) 灯亮并在测量过

程中持续闪烁。

9.11 During measurement, S.R data is indicated at measured data indicator.

测量期间，表面电阻率值显示在测试值指示器上。

9.12 Measuring result is automatically printed out after measurement.

测量结束后，结果自动打印出来。

9.13 Repeat step 9.9-9.12 to start another test..

重复9.9-9.12进行下一次测量。

9.14 Turn off the power when test finished.

实验结束后， 关闭仪器电源。

10 Test Procedures for SRM-110

使用SRM-110的测试过程

10.1 General description.

一般性说明

10.1.1 Table 2 detailed the readings and corresponding effective

measurement range of SRM-110.

SRM-110的读数及相应的有效测量范围见表2

Table 2 Readings and corresponding effective measurement range of SRM-110

表2 SRM-110的读数及相应的有效测量范围

No. 序号 Display segment

读 数

(ohms/sq.)

Effective measurement range

有效测量范围

(ohms/sq.)

1 10 4 <10 4

2 10 5 10 4 -10 5.5 (10 4 -3.16x10 5 )

3 10 6 10 5.5 -10 6.5 (3.16x10 5 -3.16x10 6 )

4 10 7 10 6.

5 -10 7.5 (3.16x10

6 -3.16x10

7 )

5 10 8 10 7.5 -10 8.5 (3.16x10 7 -3.16x10 8 )

6 10 9 10 8.5 -10 9.5 (3.16x10 8 -3.16x10 9 )

7 10 10 10 9.5 -10 10.5 (3.16x10 9 -3.16x10 10)

8

10 11 10 105 -10 11.5 (3.16x10 10 - 9

10 12 10 11.5 -10 12.5 (3.16x10 11 - 10 10 12.5 >10 12.5 (>3.16x10 12 )

10.1.2 When power on the meter, check if the battery of the meter is fully

charged or not. If the low battery indicator lamp is on （refer to fig.2）. It need to be recharged Please recharge it with supplied charger for about 12 hours. in advance (refer to the SRM manual for re-charging time of the

battery) and it can not be used during charging.

打开电源后，观 察电能是否充足：如电池电量指示灯亮（参见图

2）， 表示电量不足。应先使用指定的充电充电器充电约12小时，然 后使用。不可以边充电边使用。

10.2 Place specimens on an insulative flat surface.

把待测试样放在一绝缘平台上。

10.3 Switch on the Surface Resistivity Meter (SRM) and place it on the specimen. as

indicated on Figure 1,And then check the readings on the SRM

打开电阻测试仪(SRM)开关，把它放在样品上（如图1），测试样品表面 电阻，看SRM 上显示的读数。

S A M P L E

S R M -110

Fig. 1: Demonstration of surface resistivity test

图 1：表面电阻率测试示意图

10.4 During the test, be sure that the parallel bar or the foot （electrodes ） of the

SRM is fully and intimately contact with the sample surface. Refer Figure 2. 测试时，电阻测试仪支脚（电极）一定要与黑盒表面充分，紧密接触，参 见图2。

O F F /O N F O O T

(E L E C T R O D E )

S R M -110

S W I T C H

S A M P L E

L O W

B A T T E R Y

Fig 2:Demonstration of surface resistivity test-II

图 2：表面电阻率测试示意图-II

10.5 If necessary, record the readings of the SRM-110 in the data record sheet.

必要时，将电阻仪的读数记录在数据记录单上。

11 Test Procedures for PSI-870

使用PSI-870 的测试步骤。

11.1 General description of PSI-870

PSI-870的一般性说明。

11.1.1 Figure 3 detailed the name

of each part of the instrument.

图 3 给出了仪器各部分的名称。.

11.1.2 The PSI-870 has eleven(11)

LED’s provide resistance( lower scale)

and resistivity (upper scale)

measurement indication in one decade

increments.

PSI-870有 11个 LED 灯指示表面电

阻（下排刻度）和表面电阻率

（ 上排刻度 ） 的测试结果 ，

Figure 3: Demonstration of PSI-8 相连两个刻度间相差一个数量级

图 3： PSI-870 简 图

（十进位）。 11.1.3 The decade changeover point from one decade to another is ± 1/2 decade on logarithmic scale, i.e,3.16x10 n . see table 3 for

detail ..

从一个数量级到下一个数量级的转变点为对数坐标上十进位点的± 1/2处，

即3.16x10 n ,表3 给出了详细范围。

Table 3 Readings and corresponding effective measurement range of PSI-870

表 3 PSI-870的读数及相应的有效测量范围

No. 序号 Readings 读数 (ohms or ohms/sq.) Effective measurement range

有效测试范围

(ohms or ohms/sq.)

1 10

2 (LOWER scale only) （仅限下排刻度）

3.16x10 1 -3.16x10 2 2 10 3 3.16x10 2 -3.16x10

3 3 10

4 3.16x10 3 -3.16x10

4 4 10

5 3.16x10 4 -3.16x10

5 5 10

6 3.16x10 5 -3.16x10

6 6 10

7 3.16x10 6 -3.16x10

7 7 10 8 3.16x10 7 -3.16x10

8

8 10 9 3.16x10 8 -3.16x10 9

9 10 10 3.16x10 9 -3.16x10 10

10 10 11 3.16x10 10 -3.16x10 11

11 10 12 （UPPER scale only）

（仅上排刻度）

3.16x10 11 -3.16x10 12

12 Insulative（绝缘） >3.16x10 11 ohms or >3.16x10 12

ohms/sq.

11.1.4 Instrument resolution is one order of magnitude.

本仪器的分辨率是一个数量级。

11.2 Initial Operational Check

初始操作检查

11.2.1 Once a new battery is installed in the PSI-870,or each time the

instrument is used, and whenever the instrument’s performance or battery

function are in question, check its initial function as follows.

在安装了新电池，每次使用前，或对仪器性能，电池功能有疑问时，

依以下步骤检查仪器的基本功能。

11.2.2 Place the instrument, with electrodes down, on a clean metal flat plate.

Measure the resistance of the plate using the operation procedures A

described in next paragraph.

电极向下，把仪器放在一干净的金属平板上。测试此平板的表面电

阻。

11.2.3 If the lowest decade LED(10 3 on UPPER scale and 10 2 on LOWER scale)

does not light, the unit is not functioning properly or the battery is dead.

otherwise it indicates a very “conductive” material measurement.

如果电阻最小LED指示灯（上排10 3 ，下排10 2 ）不亮，说明仪器不正 常或电池没电）。反之说明材料是非常导电的。此项检查合格。

11.2.4 Place the instrument, with electrodes down, on a clean plastic insulating flat

plate .Measure the resistance of the plate .

电极向下，把仪器放在一干净的绝缘塑料平板上，测试其表面电阻。 11.2.5If the RED LED located at the right end of the scale briefly, then the RED

center panel “Exceeds PSI-870 Range” LED should light. This indicates a

very high resistance “insulative” material measurement. Otherwise it means

the unit is not functioning properly, or the battery is dead.

若刻度最右端的红色LED灯闪一下，然后前面板中心的“超出PSI-870 范围“（Exceeds PSI-870 Range）红色LED灯亮。说明测量的是绝缘材 料。此项检查合格。反之， 说明仪器功能不正常或电池没电。

11.2.6 If the initial operational check is ok, then proceed to measurement

procedures. otherwise, change battery or have authorized personnel check

and fixed the problem.

若上述检查合格，则可以进行测量操作。否则，更换电池或让指定人

员检查并修复仪器。

11.3 Procedure-A: measure the surface resistivity with the brass bar electrodes.

方法 A： 用条状铜电极测量表面电阻。

11.3.1 Place the sample to be measured on an insulative flat surface

把待测样品放在一绝缘平面上。

11.3.2 Place the electrode switch on top of the equipment to

the ”ELECTRODES OFF” position.（right side）

把仪器顶部的电极选择开关放在“ELECTRODES ON“位置上（右

边）

11.3.3 Place the PSI-870 on the surface to be measured, electrodes down

against the test material. Make sure the electrode switch is in

the ”ELECTRODES ON” position.

使电极与待测面相对，把PSI-870 放在待测样品上。

11.3.4 Apply an proper and balanced force by hand，so that the full length of

each electrode is making even contact with the sample surface. Otherwise a

measurement error of up to one magnitude may occur

用手施加适当的且平衡的力，使电极长度方向上各处与样品表面均匀

接触。否则，引起的测试误差可能会达到一个数量级。

11.3.5 Place your index finger directly on the GREEN “Press to Test “ button

and pushing the “Press to Test” button.

用食指按下前面板上绿色的开始测试按钮（Press to Test）。

11.3.6 Continue applying steady pressure until one LED remains on, indicting

a stable measurement.( Approximately 5 seconds)。

保持一稳定的压力直至有一个LED灯持续亮起（约5 秒钟）

11.3.7 Read the LED indication from the UPPER scale to get surface

resistivity ohms/square.

读LED指示灯上排的刻度得到表面电阻率值。

11.3.8 Read the LED indication from the LOWER scale to get surface

resistance in ohms.

读LED指示灯下排的刻度得到表面电阻值。

11.4 Procedure-B: measure surface resistivity with the PRF-912 micro probe

方法B；用PRF-912微型电极测试表面电阻率

11.4.1 Connect the additional test cable to PRF-912 by BNC connection system：

Locate the 2 locking studs on the fixture’s male connector. Match them to

grooves of the female connector. Then simply push and twist the female

connector clockwise until it locks on to the fixture.

Refer to fig3.

用同轴电缆插头把附加电缆线与PRF-912连接

好：把电极接线端子上的2个销子与电缆接线端

子上的槽对齐，然后往里推并顺时针旋转电缆的端子直到它与电极锁紧。

连接方法参见图3.

Fig.3 Connect additional cable to PRF-912’s BNC fixture

图3：附加电缆与PRF-912电极的连接

11.4.2 Place the electrode switch on top of the equipment to

the ”ELECTRODES OFF” position.

把仪器顶部的电极选择开关拨到左边“ELECTRODES OFF“位置。

11.4.3 Insert one lead of the cable into each input jack of the resistance

reference input & Auxiliary connections at the top end of the unit.

把电缆的两个接线头分别插入仪器顶部的辅助插孔内。

11.4.4 Place the PRF-912 vertically on the test area and lower it until the

spring loaded center electrode makes direct contact with the material under

test..

把PRF-912 电极垂直放到待测表面上,使其中心电极与试样表面接触。

11.4.5 Apply sufficient pressure on the probe until the center and outer

spring loaded electrode are partially compressed while in contact with the

test material. This will insure reproducible measurement

对电极施加足够的力,使内外弹簧电极都部分受压，且与待测材料表面

接触。以保获得可重复的测试结果。

11.4.6 Hand held the PSI-870, , then push the green “Press to Test” button on

the front of the panel..

Note :being careful not to touch the brass electrodes by your body or

materials. during the test mode, otherwise the indicated reading may be

affected.

手持PSI-870，按下前面板上绿色的开始测试按钮（Press to Test）

注意：在这种测试模式下， 不要使身体或其它材料与铜电极接触。否

则会影响测试结果。

11.4.7 Continue pushing the “Press to Test “ button until one LED remains

on, indicating a stable measurement.(about 5 seconds).

保持一稳定的压力直至有一个LED灯持续亮起（约5 秒钟）

11.4.8 Read the LED indication from the UPPER scale to get surface

resistivity ohms/square.

读LED指示灯上排的刻度得到表面电阻率值。

11.4.9 Read the LED indication from the LOWER scale to get surface

resistance in ohms.

读LED指示灯下排的刻度得到表面电阻值。

11.5 Procedure C-measurement of point to point resistance.

方法C-测量两点之间的表面电阻

11.5.1 Connect the additional test cable to standard banana plug through

BNC connectors. refer to 11.6.1 for connection procedure.

把附加测试电缆与香蕉插头通过同轴电缆插座连接好，连接方法参考

11.6.1

11.5.2 Other fixtures, NFPA electrodes, extended leads, clips or clamps can

be connected to above assembly to measure general resistance of other

materials.

可把其它的电极，导线，夹子等与上述组件连接进行测试。

11.5.3 Place the electrode switch on top of the equipment to

the ”ELECTRODES OFF” position.

把仪器顶部的电极选择开关拨到左边“ELECTRODES OFF“位置。

11.5.4 Insert one lead into each input jack of the “resistance reference input

& Auxiliary connections” at the top end of the unit,

把电缆的两个接线头分别插入仪器顶部的辅助插孔内。

11.5.5 Position the plugs directly over test area ,apply appropriate pressure

on the plug to insure the two tips of the plug are in intimate contact with the

test material. This will insure reproducible measurement.

把插头放到待测试样表面并施加适当的力， 使插头的两脚与试样紧密

接触，以保获得可靠的测试结果。

11.5.6 Hand held the PSI-870,being careful not to touch the brass electrodes,

then push the “Press to Test” button on the front of the panel.

手持PSI-870，按下前面板上绿色的开始测试按钮（Press to Test）

注意：在这种测试模式下， 不要使身体或其它材料与铜电极接触。否

则会影响测试结果。

11.5.7 Continue pushing the “Press to Test “ button until one LED remains

on, indicating a stable measurement.(about 5 seconds).

保持一稳定的压力直至有一个LED灯持续亮起（约5 秒钟）

11.5.8 The resistance in Ohms between the two tip points is read from the

UPPER scale above the LED’s.

Note? The UPPER scale unit of measure in this Rtt measurement mode is ohms,

not ohms/sq.

指示灯上排的刻度（读数）即两点之间的表面电阻。单位欧姆（ohm,Ω）

注意：在测量两点间的表面电阻时，LED指示灯上排刻度的单位是欧姆

（ohm,Ω）.

12 Test Report

测试报告

12.1 Following information shall be included in the formal test report at least.

正式的测试报告至少包括以下内容

12.1.1 A description and identification of the material.

材料说明，如名称，牌号，制造商，颜色等。

12.1.2 Shape and dimensions of the test specimen

样品形状及尺寸。

12.1.3 Type of test instrument.

测试仪器的型号。

Conditioning of the specimen.（hours at humidity and temperature, etc.）

试样的状态调节情况（温湿度处理条件等）

12.1.4 Test conditions and parameters .

测试条件及参数。

12.1.5 Measured values of surface resistance and/or resistivity.

表面电阻和/或电阻率的测试值。

13 Others

其它

13.1 For more information on, please refer to the respective operation manual of each

instrument.

更为详细的说明， 请参考各仪器的操作说明。