外文翻译的中英文

Flexible High-Output Nanogenerator Based on Lateral ZnO Nanowire Array

基于弹性Nanogenerator血库的横向氧化锌纳米线阵列

Guang Zhu,? Rusen Yang,? Sihong Wang, and Zhong Lin Wang*

广朱、Rusen得来,杨泗洪县得来王建民,王建民、众林*

School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245

材料科学与工程学院,佐治亚理工学院,亚特兰大,乔治亚州30332 - 0245

ABSTRACT We report here a simple and effective approach, named scalable sweeping-printing-method, for fabricating flexible high-output nanogenerator (HONG) that can effectively harvesting mechanical energy for driving a small commercial electronic component. The technique consists of two main steps. In the first step, the vertically aligned ZnO nanowires (NWs) are transferred to a receiving substrate to form horizontally aligned arrays. Then, parallel stripe type of electrodes are deposited to connect all of the NWs together. Using a single layer of HONG structure, an open-circuit voltage of up to 2.03 V and a peak output power density of ～11 mW/cm3 have been achieved. The generated electric energy was effectively stored by utilizing capacitors, and it was successfully used to light up a commercial light-emitting diode (LED), which is a landmark progress toward building self-powered devices by harvesting energy from the environment. This research opens up the path for practical applications of nanowire-based piezoelectric nanogeneragtors for self-powered nanosystems.

摘要本文报告一个简单而有效的方法,可扩展的sweeping-printing-method命名,因为制作灵活(香港)nanogenerator血库,能有效地收获机械能量来驱动小型商业电子器件。该技术包括两个主要的步骤。在第一步的氧化锌奈米线垂直对齐(NWs)转移到一个接收基体形成横向对齐的数组。然后,平行条纹沉积类型的电极连接所有的新创建在一起。采用单层结构的香港,一个开路电压2.03 V,输出功率密度峰值～11 mW / cm3已经达成。所产生的电力能源有效利用电容器存储,并成功用于照亮一个商业发光二极管,这是一个具有里程碑意义的进步对建立自我动力的设备被收获能量从环境。该研究为实际应用nanowire-based路径的压电nanogeneragtors nanosystems为自我动力。

KEYWORDS Nanogenerator, ZnO, nanowire, light-emitting diode, self-powering

关键词Nanogenerator、氧化锌和纳米线、发光二极管、self-powering

Energy harvesting is critical to achieve independent and sustainable operations of nanodevices, aiming at building self-powered nanosystems. 1-3 Taking the

能量收获是关键和可持续经营实现独立设备,以建设nanosystems自我动力。1 - 3以

forms of irregular air flow/vibration, ultrasonic waves, body movement, and hydraulic pressure, mechanical energy is ubiquitously available in our living environment. It covers a wide range of magnitude and frequency from cell contrac-tion to ocean waves. The mechanical-electric energy conver-sion has been demonstrated using piezoelectric cantilever working at its resonating mode. 4-7 However, the applicabil-ity and adaptability of the traditional cantilever based energy harvester is greatly impeded by the large unit size, large triggering force and specific high resonance frequency. Recently, a series of rationally designed nanogenerators (NGs) with piezoelectric nanowires (NWs) have shown great potentialtoscavengetinyandirregularmechanicalenergy. 8-15 However, insufficient electric output hinders their practical applications. We report here a simple and effective ap-proach, named scalable sweeping-printing-method, for fab-ricating flexible high-output nanogenerator (HONG). An open-circuit voltage of up to 2.03 V and a peak output power density of ～11 mW/cm3 have been achieved. The generated electric energy was effectively stored by utilizing capacitors, and it was successfully used to light up a commercial light-emitting diode (LED), which is a landmark progress toward building self-powered devices by harvesting energy from the environment. Furthermore, by optimizing the density of the NWs on the substrate and with the use of multilayer integra-tion, a peak output power density of ～0.44 mW/cm2 and volume density of 1.1 W/cm3 are predicted.

形式的不规则的气流/振动、超音波、肢体动作、液压、机械能量可在我们的生存环境而传播。它涵盖了广泛的程度和频率,从细胞contrac-tion海浪。电力能源的conver-sion已经被证实使用压电悬臂梁的工作在其产生共鸣的模式。4 - 7然而,applicabil-ity和适应性,传统的基础能源矿车悬臂大大阻碍大单位的大小、大型触发力和特定的高谐振频率。最近,一系列的合理设计nanogenerators(上天)(NWs)压电奈米线表现出极大的potentialtoscavengetinyandirregularmechanicalenergy。然而,这个不足,不妨碍电力输出的实际应用。这里我们报告一个简单而有效的ap-proach,名叫可扩展的sweeping-printing-method,灵活nanogenerator fab-ricating血库(香港)。一个开路电压2.03 V,输出功率密度峰值～11 mW / cm3已经达成。所产生的电力能源有效利用电容器存储,并成功用于照亮一个商业发光二极管,这是一个具有里程碑意义的进步对建立自我动力的设备被收获能量从环境。此外,通过优化的密度在基底,另外采用多层integra-tion,输出功率密度峰值～0.44 mW /平方厘米和体积密度为1.1 W / cm3进行预测。

* To whom correspondence should be addressed. E-mail: zlwang@https://www.360docs.net/doc/e010314035.html,.

*通信所应处理。电子邮件:zlwang@https://www.360docs.net/doc/e010314035.html,。

?Authors with equal contribution

作者以同样的贡献得来

Received for review: 6/3/2010

收到评:6/3/2010

Published on Web: 07/21/2010

在网上公布:07/21/2010

The mechanism of converting mechanical energy by a single ZnO NW that is laterally bonded to a substrate has been discussed in details in our previous report. 13 Owing to much smaller diameter of the NW compared to the substrate thickness, outward bending of the substrate induces a uniaxial tensile strain in the NW. Because of the piezoelectric property of the ZnO NW, the stress results in a piezoelectric field along the length, which causes a transient charge flow in the external circuit. The Schottky contact at the bonded ends can regulate the charge flow. As a result, the bending and releasing of the single-wire-NG gives rise to an alternat-ing flow of the charges in the external circuit. In this work, the power output has been scaled up with the integration of hundreds of thousands of horizontally aligned NWs, which was made by a scalable sweeping-printing-method that is simple, cost-effective, and highly efficient.

机械能量转换的机制,由一个单一的氧化锌西北是粘结基体横向已经详细讨论了在我们先前的报告。13因为较小的直径比基体厚度西北,拓展弯曲基底的单向拉伸应变诱发在西北方向移动。由于压电特性的氧化锌NW应力导致压电场沿长度,使一个暂时的费用流的外部电路。肖特基接触,保税结束,能调节电荷的流动。作为一个结果,弯曲和释放的single-wire-NG产生一个alternat-ing流量的费用在外部电路。在这部作品中,输出功率已经扩大了于一体的成千上万的横向对齐NWs,由一个可扩展的sweeping-printing-method,简单、高效,效率高。

The method consists of two main steps. In the first step, the vertically aligned NWs are transferred to a receiving substrate to form horizontally aligned arrays. The major components of the transfer setup are two stages (Figure 1a). Stage 1 has a flat surface that faces downward and holds the vertically aligned NWs; stage 2 has a curved surface and holds the receiving substrate. Polydimethylsiloxane (PDMS) film on the surface of stage 2 is used as a cushion layer to support the receiving substrate and enhances the alignment of the transferred NWs. The radius of the curved surface of stage 2 equals the length of the rod supporting the stage, which is free to move in circular motion (Supporting Infor-mation Figure S1). In the second step, electrodes are depos-ited to connect all of the NWs together.

该方法包括两个主要的步骤。在第一步,垂直地对齐NWs是转移到一个接收基体形成横向对齐的数组。主要部件的安装两个阶段转移(图1)。阶段1有一个平面朝向下且具有垂直地对齐NWs;舞台2有一个曲面并持有接收板上。以聚二甲基硅氧烷(PDMS)的油膜将摩擦表面上的第二阶段作为垫层支持接收基体和提高对准的转让NWs。曲面的半径相等的第二阶段杆的长度支持阶段的产物,是自由移动圆心的运动(支持彻底图S1)。第二步,depos-ited电极连接所有的新创建在一起。

Vertically aligned ZnO NWs on Si substrates were syn-thesized using physical vapor deposition method. 16,17 The dense and uniform NWs have the length of ～50 μm, diameter of ～200 nm, and growth direction along the c-axis

垂直地对齐在硅衬底氧化锌便利是syn-thesized物理气相沉积方法使用。16、17密集的、有统一的新创建的长度μm～50,直径～200海里,沿着c-axis增长方向

? 2010 American Chemical Society 3151 DOI: 10.1021/nl101973h | Nano Lett. 2010, 10, 3151–3155

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FIGURE 1. Fabrication process and structure characterization of the HONG. (a) Experimental

setup for transferring vertically grown ZnO NWs to a flexible substrate to make horizontally aligned ZnO NW arrays with crystallographic alignment. (b) SEM image of as-grown vertically aligned ZnO NWs by physical vapor method on Si substrate. (c) SEM image of the as-transferred horizontal ZnO NWs on a flexible substrate.

图1。工艺过程及结构表征香港。(一)实验装置对转移垂直生长氧化锌NWs一个灵活的基体横向对齐使西北阵列氧化锌晶体排列。扫描电镜照片(b)的垂直对齐as-grown氧化锌NWs 物理气方法在硅基片上。扫描电镜照片(c)的水平上as-transferred氧化锌NWs柔性衬底材料。

(d) Process of fabricating Au electrodes on horizontal ZnO NW arrays, which includes photolithography, metallization, and lift-off. (e) SEM image of ZnO NW arrays bonded by Au electrodes. Inset: demonstration of an as-fabricated HONG. The arrowhead indicates the effective working area of the HONG.

(d)制作金电极过程中水平氧化锌西北数组,它包括光刻、金属化、发射。(e)的扫描电镜照片所结合氧化锌西北金电极阵列。插图:一个as-fabricated香港的示范。箭头表示香港的有效工作区域。

(Figure 1b, Supporting Information Figure S2). The same growth direction of NWs guarantees the alignment of the piezoelectric potentials in all of the NWs and a successful scaling up of the output, which will be elaborated later. A small piece of Si substrate with grown ZnO NWs was mounted onto stage 1 (Figure 1a) and a piece of Kapton film with the thickness of 125 μm was attached to stage 2 (Figure 1a). The distance between the receiving substrate and NWs was precisely controlled to form a loose contact between the two. The receiving substrate then counterclockwise swept across the vertical NWs arrays, which were detached from Si substrate and aligned on the receiving substrate along the direction of sweeping due to the applied shear force (Figure 1a). The as-transferred NWs are presented in Figure 2c with an estimated average density of 1.1 × 106 cm-2. The length variation is probably due to the fact that not all of the NWs were broken off at the roots.

(图1 b,支持信息图S2)。另外一样生长方向的校准,保证了压电电位在所有的便利,一个成功的比例增加的输出,将阐述之后。一小块硅衬底与成长氧化锌便利上安装了第一阶段(图1 A)和一块Kapton膜厚度的125μm是附属于第二阶段(图1)。之间的距离是接收基底,精确控制的便利,形成一个松散的联系二者的区别。然后逆时针方向接收基质席卷垂直新创建数组,它是与硅基片上接受基质和结盟的方向扫沿由于应用剪切力(图1)。介绍了as-transferred NWs 图2 c估计平均密度为1.1×106 cm-2。长度变化可能是由于这样的事实:并不是所有的新创建被折下来于萌芽之中。

Next, the evenly spaced electrode pattern over the aligned NWs was first defined using photolithography and then

其次,间隔均匀的电极排列模式by首次定义使用光刻和即可

followed by sputtering 300 nm thick Au film (Figure 1d). After lifting off the photoresist, 600 rows of stripe-shaped Au electrodes with 10 μm spacing were fabricated on top of the horizontal NW arrays (Figure 1e). Au electrodes form Schottky contacts with the ZnO NWs, which are mandatory for a working NG. 8,18 Approximately 3.0 × 105 NWs in an effective working area of 1 cm2, as pointed by an arrowhead in Figure 1d (inset), are in contact with electrodes at both ends. Finally, a PDMS packaging over the entire structure can further enhance mechanical robustness and protect the device from invasive chemicals.

其次是溅射300海里厚金膜(图1 d)。起飞后光刻胶,600排stripe-shaped金电极间距10μm碳纳米管基西北的顶部水平阵列(图1 e)。金电极肖特基接触形式氧化锌便利,这是一个有工作的NG强制性。8约3.0×105另外18有效工作区1平方厘米,指出一个箭头在图1 d(插图),在接触电极的两端。最后,在整个结构(PDMS)包装能进一步增强鲁棒性和保护装置机械从侵入性的化学物质。

The working principle of the HONG is illustrated by the schematic diagrams in Figure 2a,b. NWs connected in parallel collectively contribute to the current output; NWs in different rows connected in serial constructively improve the voltage output. The same growth direction of all NWs and the sweeping printing method ensure that the crystal-lographic orientations of the horizontal NWs are aligned along the sweeping direction. Consequently, the polarity of

香港的工作原理,说明了在图2的原理图a、b。by并联输出电流集体贡献;另外不同的行连接在串行积极增进电压输出。相同的增长方向和全面的便利的印刷方法确保crystal-lographic 水平方向的排列沿扫另外的方向。因此,极性的

? 2010 American Chemical Society 3152 DOI: 10.1021/nl101973h | Nano Lett. 2010, 10, 3151-–3155

?2010美国化学学会3152土井:/ nl101973h |学报。纳米、10、3155——

FIGURE 2. Working principle and output measurement of the HONG. (a) Schematic diagram of HONG’s structure without mechanical deformation, in which gold is used to form Schottky

contacts with the ZnO NW arrays. (b) Demonstration of the output scaling-up when mechanical deformation is induced, where the “(” signs indicate the polarity of the local piezoelectric potential created in the NWs. (c) Open circuit voltage measurement of the HONG. (d) Short circuit current measurement of the HONG. The measurement is performed at a strain of 0.1% and strain rate of 5% s-1 with the deformation frequency of 0.33 Hz. The insets are the enlarged view of the boxed area for one cycle of deformation.

图2。工作原理和输出测量的香港。(一)原理图,以及香港的结构没有机械变形,其中黄金用做肖特基接触形式氧化锌西北的数组。(b)示范的输出机械变形诱导放大,那里的”(“迹象显示的极性压电潜在创造了当地便利。(c)开断电压测量的香港。(d)短路电流测量的香港。根据测量应变和应变率为5%,0.1% s-1频率与变形0.33赫兹。扩大的小图是观点的一个周期框区域的变形。

the induced piezopotential is also aligned, leading to a macroscopic potential contributed constructively by all of the NWs (Figure 2b).

诱导piezopotential也是对齐,导致了宏观潜在的建设性的便利(图2 b)。

To investigate the performance of the HONG, a linear motor was used to periodically deform the HONG in a cyclic stretching-releasing agitation (0.33 Hz). The open-circuit voltage (V oc) and the short-circuit current (Isc) were measured with caution to rule out possible artifacts. 19 At a strain of 0.1% and strain rate of 5% s-1, peak voltage and current reached up to 2.03 V and 107 nA, respectively. Assuming that all of the integrated NWs actively contribute to the output, the current generated by a single NW is averaged to be ～200 pA; and the voltage from each row is ～3.3 mV in average. Considering the size of the working area of the nanogenerator (1 cm2) (Figure 1e, inset), a peak output power density of ～0.22 μW/cm2 has been achieved, which is over 20-fold increase compared to our latest report based on a more complex design. 14 For nanowires with the diameter of ～200 nm, the power volume density is ～11 mW/cm3, which is 12-22 times of that from PZT based cantilever energy harvester. 6,7 The durability test and further characterization were performed, which prove the stability and robustness of the HONGs (Supporting Information Figure S3). V oltage linear superposition test verified the proposed working principle of the HONGs (Supporting In-formation Figure S4).

探讨香港的性能,从而建立了一个线性马达是用来定期变形的循环stretching-releasing风潮在香港(0.33赫兹)。寄生偏置电压(V oc)和短路电流(Isc)测定了注意排除可能失真。19在紧张的0.1%和应变率为5% s-1、峰值电压和电流达到2.03伏特和107钠,分别。假设所有的综合NWs积极促成输出,当前的产生是由一个单一的西北平均是～200名乘客,电压由每一行是～平均3.3 mV。考虑工作区域的大小的nanogenerator(1平方厘米)(图1 e、插图),峰值功率密度的0.22～μW /平方厘米已经实现,超过增加了20我们的最新报告相比,基于一个更复杂的设计。14与直径的奈米线～200海里,电源体积密度是～11 mW / cm3,这是12-22倍之压电悬臂梁的基础能源的矿车。6、7个耐久性试验和进一步进行了表征,证明了稳定性和鲁棒性的HONGs(提

供的信息图S3)。电压线性叠加的验证工作原理的基础上提出HONGs(支持图(S4)接受方)。

Further scaling up the power output is expected to be technically feasible. If NWs can be uniformly and densely packed as a monolayer over the entire working area, and all can actively contribute to the output, the maximum power area density is expected to reach ～22 μW/cm2. The power volume density is anticipated to be improved up to ～1.1 W/cm3. With 20 layers of such NW arrays stacked together, the power area density would be boosted up to ～0.44 mW/cm2. 进一步提高输出功率预计将技术上可行。另外,如果可以统一作为一个单层密集在整个工作区域,都能积极促成输出,最大功率面积密度预计达到22～μW /平方厘米。电源体积密度有望得到改善到1.1 W / cm3～。与20层的堆叠在一起西北阵列,电力面积密度将提升到～0.44 mW /平方厘米。

The performance of the HONG is affected by strain and strain rate. For a given strain rate (5% s-1), an increase in strain leads to a larger output (Figure 3a,b). Likewise, at a constant strain (0.1%), the output is proportional to the strain rate (Figure 3c,d). Beyond a certain strain and strain rate, saturation of the magnitude occurs, probably due to the converse piezoelectric effect, which is the strain created by the piezopotential and it is opposite to the externally induced strain. It is noticed that 0.1% strain is sufficient to induce effective output, which is much smaller than the 6% fracture strain of the ZnO NW predicted theoretically.20

香港的性能受应变及应变率。对于一个给定的应变率(5% s-1),提高应变导致一个更大的输出(图3 a,b)。同样的,在一个恒应变(0.1%),输出是成正比的应变率(图3 c、d)。超过一定的应变及应变率、饱和度级的发生,可能是因为其逆压电效应,这是由piezopotential应变,它相对于外部诱发紧张。人们注意到足以引起0.1%应变有效输出,这远远低于6%的断裂应变的氧化锌西北theoretically.20预测

Storing the generated energy and driving functional devices are extremely important steps toward practical applications of the nanogenerator. In this work, they were accomplished by using a charging-discharging circuit with two consecutive steps (Figure 4). The circuit function is determined by the status of a switch (Figure 4a inset). The

存储所产生的能量和驱动功能设备是极其重要的步骤nanogenerator实际的应用。在这部作品中,他们采用了两个连续的步骤charging-discharging电路(图4)。电路功能是由交换器的状态(图4 a插图)。这

? 2010 American Chemical Society 3153 DOI: 10.1021/nl101973h | Nano Lett. 2010, 10,

3151-–3155

?2010美国化学学会3153土井:/ nl101973h |学报。纳米、10、3155——