Disco 扩片机
DDS 2300
Fully Automatic Die Separator
D A F
DAF
DAF Die Attach Film DAF Burr pick up DDS2300 DAF
DBG DAF
DBG Dicing Before Grinding DAF DAF DAF DAF DS2300 DAF
DAF
2-13-11 143-8580
Phone:03-4590-1100 Fax:03-4590-1075 www.disco.co.jp
2012.01
DDS 2300
Fully Automatic Die Separator
mm
300
DTF2-8-1
DTF2-12 DTF2-12-1
V AC200, 208, 220, 240
10 %
UV
V
AC200 240 10 %
kW 5.2
kW 1.6
UV
kW 6.6
kW 4.4
kVA 8.0
kVA MPa
0.5 0.8 0.01
L/min
ANR 166
MPa
0.5 0.8 0.01
L/min
ANR 890
651
2
MPa
N 2
L/min(ANR)
100
11.5
MPa
0.25 0.4 0.01
L/min
ANR 0.5
0.03
m 3/min 3.0 m 3/min
W D H
mm 1,200 1,550 1,800
330mm
UV
mm 700 750 1,520
mm
kg 900
kg
kg
160
UV
-15 0.1 ppm 0.01 m/99.5 % 20 ~25 1 4 C
? DAF ? DBG DAF ?
DAF
DAF DAF
DAF
(die bonding process)
DDS2300
·
UV UV
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