MA150e_Brochure_110127

L i t h o g r a p h y

B o n d i n g W e t P r o c e s s i n g T e s t i n g

P r i n t i n g M o d e s

Reliable sub-micron printing with SUSS diffraction reducing optics

1450

741448

1460

L i t h o g r a p h y

ALIGNMENT STAGE

Travel Range (X,Y)±3 mm Travel Range (0)

±3oMechanical Resolution (X,Y)0.1μm Mechanical Resolution (0)

4x10-5o

Microscope Type

Motorized Dual Video DVM6

TSA Auto Alignment Mode (Prox.)

120 wph:

1μm alignm.accuracy 1 sec exposure time BSA Auto Alignment Mode (Prox.)

140 wph:

1.5μm alignm.accuracy 1 sec exposure time First Mask Mode

170 wph:

1 sec exposure time

Vacuum Pressure <-0.8 bar (<200 hPa absolute)150 mm Hg or 6” Hg Consumption 0.5 m 3/h (17.5 ft 3/h)

Nitrogen Pressure

2-3 bar (29-43.5 psi)

Consumption

350W 0.35 m 3/h (12.25 ft 3/h)1000W 0.9 m 3/h (31.50 ft 3/h)1500W 2.35 m 3/h (82.25 ft 3/h)Power

350W 1.5kW (CIC1200)1000W 2.5kW (CIC1200)ALIGNMENT MICROSCOPE

CYCLE TIME

UTILITIES