Extreme Ultraviolet Emission from Clusters of Galaxies Inverse Compton Radiation from a Rel
澳大利亚研制纳米电子束曝光系统是制作微小纳米电了元件的最佳设备

综合信息澳大利亚研制纳米电子束曝光系统是制作微小纳米电了元件的最佳设备据澳大利亚莫纳什大学网站报道,澳大利亚研究人员正在研制世界最强大的纳米设备之一——电子束曝光系统(EBL)。
该系统可标记纳米级的物体,还可在比人发直径小1万倍的粒子上进行书写或者蚀刻。
电子束曝光技术可直接刻画精细的图案,是实验室制作微小纳米电子元件的最佳选择。
这款耗资数百万美元的曝光系统将在澳大利亚亮相,并有能力以很高的速度和定位精度制出超高分辨率的纳米图形。
该系统将被放置在即将完工的墨尔本纳米制造中心(M CN)内,并将于明年3月正式揭幕。
M CN的临时负责人阿彼得凯恩博士表示,该设备将帮助科学家和工程师发展下一代微技术,在面积小于10纳米的物体表面上实现文字和符号的书写和蚀刻。
此外,这种强大的技术正越来越多地应用于钞票诈骗防伪、微流体设备制造和X射线光学元件的研制中,还可以支持澳大利亚同步加速器的工作。
凯恩说:“这对澳大利亚科学家研制最新的纳米仪器十分重要,其具有无限的潜力,目前已被用于油漆、汽车和门窗的净化处理,甚至对泳衣也能进行改进。
而M CN与澳大利亚同步加速器相邻,也能吸引更多的国际研究团队的目光。
”M CN的目标是成为澳大利亚开放的、多范围的、多学科的微纳米制造中心。
该中心将支持环境传感器、医疗诊断设备、微型纳米制动器的研制,以及新型能源和生物等领域的研究和模型绘制。
除电子束曝光系统外,M CN中还包含了高分辨率双束型聚焦离子束显微镜、光学和纳米压印光刻仪、深反应离子蚀刻仪和共聚焦显微镜等众多设备。
凯恩认为:能够介入这种技术使我们的科学家十分兴奋,它可以确保我们在未来十年内在工程技术前沿领域的众多方面保持领先地位,也将成为科学家在纳米范围内取得更大成就的重要基点。
章从福 摘38。
激光等离子体13.5 nm极紫外光刻光源进展

激光等离子体13.5 nm极紫外光刻光源进展宗楠, 胡蔚敏, 王志敏, 王小军, 张申金, 薄勇, 彭钦军, 许祖彦引用本文:宗楠, 胡蔚敏, 王志敏, 王小军, 张申金, 薄勇, 彭钦军, 许祖彦. 激光等离子体13.5 nm极紫外光刻光源进展[J]. 中国光学, 2020, 13(1): 28-42. doi: 10.3788/CO.20201301.0028ZONG Nan, HU Wei-min, WANG Zhi-min, WANG Xiao-jun, ZHANG Shen-jin, BO Yong, PENG Qin-Jun, XU Zu-yan. Research progress on laser-produced plasma light source for 13.5 nm extreme ultraviolet lithography[J]. Chinese Optics, 2020, 13(1): 28-42. doi: 10.3788/CO.20201301.0028在线阅读 View online: https:///10.3788/CO.20201301.0028您可能感兴趣的其他文章Articles you may be interested in深紫外光刻光学薄膜Optical coatings for DUV Lithography中国光学. 2015(2): 169 https:///10.3788/CO.20150802.0169高功率皮秒紫外激光器新进展New progress in high-power picosecond ultraviolet laser中国光学. 2015(2): 182 https:///10.3788/CO.20150802.018210kW级直接输出半导体激光熔覆光源的研制与热效应分析10 kW CW diode laser cladding source and thermal effect中国光学. 2019, 12(4): 820 https:///10.3788/CO.20191204.0820大功率半导体激光合束进展Advance on high power diode laser coupling中国光学. 2015(4): 517 https:///10.3788/CO.20150804.0517陶瓷表面放电光泵浦源放电特性研究Discharge characteristics of optical pumping source by ceramic surface discharge中国光学. 2019, 12(6): 1321 https:///10.3788/CO.20191206.1321第13卷㊀第1期2020年2月㊀㊀㊀㊀㊀㊀㊀㊀㊀㊀㊀㊀㊀㊀中国光学㊀㊀㊀㊀㊀㊀㊀ChineseOptics㊀㊀㊀㊀Vol.13㊀No.1㊀Feb.2020㊀㊀收稿日期:2019 ̄04 ̄11ꎻ修订日期:2019 ̄05 ̄14㊀㊀基金项目:国家重点研发项目(No.2016YFB0402103)ꎻ中科院关键技术团队项目(No.GJJSTD20180004)ꎻ国家重大科研装备研制项目(No.ZDYZ2012 ̄2)ꎻ国家重大科学仪器设备开发专项(No.2012YQ120048)ꎻ国家自然科学重点基金项目(No.61535013)ꎻ中科院理化所所长基金(No.Y8A9021H11)SupportedbyNationalKeyResearchandDevelopmentProjectofChina(No.2016YFB0402103)ꎻKeyTechnolo ̄gyTeamProjectofChineseAcademyofSciences(No.GJJSTD20180004)ꎻNationalMajorResearchandDevel ̄opmentProjectofChina(No.ZDYZ2012 ̄2)ꎻNationalMajorScientificInstrumentsandEquipmentDevelopmentProjectofChina(No.2012YQ120048)ꎻNationalNaturalScienceFoundationofChina(No.61535013)ꎻFundofTechnicalInstituteofPhysicsandChemistryꎬChineseAcademyofSciences(No.Y8A9021H11)文章编号㊀2095 ̄1531(2020)01 ̄0028 ̄15激光等离子体13.5nm极紫外光刻光源进展宗㊀楠1ꎬ2∗ꎬ†ꎬ胡蔚敏1ꎬ3ꎬ†ꎬ王志敏1ꎬ王小军1ꎬ张申金2ꎬ薄㊀勇1ꎬ彭钦军1ꎬ2∗ꎬ许祖彦1ꎬ2(1.中国科学院固体激光重点实验室ꎬ中国科学院理化技术研究所ꎬ北京100190ꎻ2.中国科学院功能晶体与激光技术重点实验室ꎬ中国科学院理化技术研究所ꎬ北京100190ꎻ3.中国科学院大学ꎬ北京100049)†共同贡献作者摘要:半导体产业是高科技㊁信息化时代的支柱ꎮ光刻技术ꎬ作为半导体产业的核心技术之一ꎬ已成为世界各国科研人员的重点研究对象ꎮ本文综述了激光等离子体13.5nm极紫外光刻的原理和国内外研究发展概况ꎬ重点介绍了其激光源㊁辐射靶材和多层膜反射镜等关键系统组成部分ꎮ同时ꎬ指出了在提高激光等离子体13.5nm极紫外光源输出功率的研究进程中所存在的主要问题ꎬ包括提高转换效率和减少光源碎屑ꎮ特别分析了目前已实现百瓦级输出的日本Gigaphoton公司和荷兰的ASML公司的极紫外光源装置ꎮ最后对该项技术的发展前景进行了总结与展望ꎮ关㊀键㊀词:13.5nm极紫外光刻技术ꎻ激光等离子体ꎻ极紫外光源ꎻ转换效率ꎻ光源碎屑ꎻ预脉冲激光中图分类号:O432.1㊀㊀文献标识码:A㊀㊀doi:10.3788/CO.20201301.0028Researchprogressonlaser ̄producedplasmalightsourcefor13.5nmextremeultravioletlithographyZONGNan1ꎬ2∗ꎬ†ꎬHUWei ̄min1ꎬ3ꎬ†ꎬWANGZhi ̄min1ꎬWANGXiao ̄jun1ꎬZHANGShen ̄jin2ꎬBOYong1ꎬPENGQin ̄Jun1ꎬ2∗ꎬXUZu ̄yan1ꎬ2(1.KeyLabofSolidStateLasersꎬTechnicalInstituteofPhysicsandChemistryꎬChineseAcademyofSciencesꎬBeijing100190ꎬChinaꎻ2.KeyLabofFunctionalCrystalsandLaserTechnologyꎬTechnicalInstituteofPhysicsandChemistryꎬChineseAcademyofSciencesꎬBeijing100190ꎬChinaꎻ3.UniversityofChineseAcademyofSciencesꎬBeijing100049ꎬChina)†Theseauthorscontributedequally∗CorrespondingauthorꎬE ̄mail:zongnan@mail.ipc.ac.cnꎬpengqinjun@163.comAbstract:Thesemiconductorindustryisthebackboneofthehigh ̄techandinformationage.Lithographytech ̄nologyꎬoneofthecoretechnologyofthesemiconductorindustryꎬhasbecomeakeyresearchsubjectalla ̄roundtheworld.Thisarticlemainlydiscussesthelightsourceof13.5nmExtremeUltravioletLithography(EUVL)byusingLaser ̄ProducedPlasma(LPP).Itmakesabriefintroductiontotheprinciplesbehindthistechnologyandthedevelopmenthistoryofthisfieldathomeandabroad.Theintroductionsincludethemateri ̄alsusedinthemultilayermirrorꎬandrationalefortheselectionofmaterialsꎬtheshapeanddesignofthetargetandthetypeoflaser.AtthesametimeꎬthisarticlepointsoutthatthemainproblemsfortheEUVLarelightdebrisreductionandtheconversionefficiencyimprovementofEUVlight.Thispaperalsogivesspecialanalysisofthelightsourceoutputdevicesof13.5nmEUVLmachinesproducedbyinternationalfamouscompa ̄nies GigaphotonofJapanandASMLoftheNetherlandsꎬwhichcangeneratemorethan100WlevelEUVpower.Finallyꎬthisarticlesummarizesandforecastsfutureresearchrelatedtothistechnology.Keywords:13.5nmExtremeUltravioletLithography(13.5nm ̄EUVL)ꎻLaser ̄ProducedPlasma(LPP)ꎻextremeultravioletsourceꎻConversionEfficiency(CE)ꎻlightdebrisꎻpre ̄pulselaser1㊀引㊀言㊀㊀自20世纪50年代末起ꎬ半导体行业因集成电路(IntegratedCircuitsꎬICs)等相关技术的兴起开始突飞猛进地发展[1]ꎮ到目前为止ꎬ该行业俨然已成为当今世界各行各业都不可或缺的 支柱 ꎮ1965年ꎬ高登 摩尔(GoldonMoore)曾提出ꎬ在半导体行业的发展史上将会出现一条不变的规律 摩尔定律(Mooreᶄslaw)[2]ꎮ该定律的内容为:每隔约1年半至两年左右ꎬ在价格不变的前提下ꎬ单个芯片上晶体管的数目和性能均会增长1倍[3]ꎮ在过去的几十年中ꎬ半导体行业一直遵循着这条规律高速发展ꎬICs中每个硅晶片上的晶体管数目有近乎千万倍的增长ꎮ光刻技术ꎬ作为半导体产业的核心技术之一ꎬ是一种用于ICs制造的图案形成技术ꎮ通常ꎬ光刻技术所用到的部件有光刻光源ꎬ掩模版ꎬ光刻胶等ꎮ而其工艺流程一般包括涂胶(光刻胶)ꎬ前烘ꎬ曝光ꎬ显影ꎬ坚膜ꎬ刻蚀和去胶等ꎮ光刻技术的原理是通过改变ICs中每个晶圆上节点的最小特征尺寸(最小分辨率)ꎬ来决定每个芯片内晶体管的数目ꎮ电路节点的最小特征尺寸可通过瑞利公式得出[4]ꎮ通过瑞利公式可知ꎬ减小工艺因子常数kꎬ增大光学系统的数值孔径NA以及减小曝光光源的波长λ均可以使最小线宽(节点)d变小ꎮ然而ꎬ前两种方案的技术难度越来越大ꎬ人们几乎已经将其做到了极限ꎮ所以ꎬ通过缩短曝光波长λ来减小线宽已成为目前光刻技术的主要研究方向ꎮ在光刻技术的发展历程中ꎬ科研人员们不断地在探索更短曝光波长的可能性ꎮ上世纪80年代至90年代初期ꎬ光刻主要采用高压放电汞灯产生的波长436nm(G线)和365nm(I线)作为光源ꎮ汞灯普遍应用于步进曝光机ꎬ从而实现0.35μm的特征尺寸[5]ꎮ自上世纪90年代中期后ꎬ深紫外光刻技术(DeepUltravioletlithographyꎬDUVL)开始逐渐占据光刻技术的主导地位ꎮ工业上开始使用深紫外波段(DUVUltravioletꎬDUV)248nm的KrF和193nm的ArF准分子激光器作为曝光光源[6]ꎮ随后ꎬ当光源发展为157nm的F2准分子激光器时ꎬ由于光刻胶和掩模材料的局限ꎬ使得157nm光刻技术受到了很大的限制ꎮ研究人员们发现充入浸没液后ꎬ193nm光源等效波长小于157nmꎮ另外193nm光刻机技术相对成熟ꎬ开发者只需重点解决浸没技术相关的问题ꎬ因而采用浸没技术的193nm光源逐渐取代157nm光源继续成为主流技术[5]ꎮ目前ꎬ荷兰AdvancedSemiconductorMaterialLithography(ASML)公司于2018年生产的NXT:2000i(采用193nm光源)产品为现有最高水平的DUV光刻机ꎬ其分辨率为38nmꎮNXT:2000i结合多次曝光套刻技术可将线宽缩小至7~5nmꎮ此外ꎬNXT:2000i是ASML旗下套刻精度(Overlay)最高的DUV光刻机产品ꎬ其数值可达1.9nm(5nm节点要求Overlay至少为2.4nmꎬ7nm节点要求Overlay至少为92第1期㊀㊀㊀㊀㊀宗㊀楠ꎬ等:激光等离子体13.5nm极紫外光刻光源进展3.5nm)[7]ꎮ但是由于多次曝光套刻技术过于复杂ꎬ使得生产成本大幅增加ꎬ而器件的产量却大幅降低[8]ꎮ可以看出ꎬDUVL技术已经达到极限ꎬ研究人员们很难再将其所得到的线宽缩至更小的范围ꎮEUVL采用极紫外波段(ExtremeUltravioletꎬEUV)光源进行光刻ꎬ是最有潜力实现大规模工业化和商业化生产的光刻技术[9]ꎮEUVL通过将曝光波长大幅减小(一个量级以上)来实现更小节点光刻ꎬ其一次曝光线宽的数值可达10nm以内[10]ꎮ在EUV波段中ꎬ13.5nm的EUV(13.5nm ̄EUV)光源的可行性已被理论和实验研究所验证ꎬ并已成功运用到现有的商业光刻机中ꎮ2㊀EUVL技术的历史与现状㊀㊀EUVL技术于上世纪80年代末由美国和日本的相关研究人员提出ꎬ他们指出用波长为10~30nm的EUV光作为光刻机的光源可以大幅缩小ICs的最小特征尺寸ꎮ随后ꎬ一些国家的公司和研究机构对EUVL的发光原理ꎬ实现过程以及工业化生产等方面进行了大量研究ꎮ如:国际著名公司(如:IntelꎬGigaphotonꎬASML等)ꎬ著名研究机构(如:美国SandiaNationalLaboratory(SNL)ꎬLawrenceLivermoreNationalLaboratory(LLNL)ꎬLawrenceBerkleyNationalLaboratory(LBNL)ꎻ日本产业技术综合研究所等)以及许多知名大学(如:美国普渡大学ꎬ加利福尼亚大学ꎻ日本九州大学ꎻ瑞士苏黎世联邦理工学院等)ꎮ经过近30多年的研究ꎬEUVL技术获得巨大进展ꎬASML㊁Intel及Nikon等公司均有EUVL演示样机的报道[3ꎬ11ꎬ12]ꎬ但目前仅ASML有在售产品ꎮ国内对EUVL技术的研究起步较晚ꎬ主要是由中国科学院和部分高校的一些团队在进行相关研究工作ꎮ中国科学院长春光学精密机械与物理研究所(简称长春光机所)对EUVL的研究较早ꎬ自上世纪90年代末就对EUV光和X射线成像技术进行了相关研究ꎮ国内第一套EUV光刻原理装置是于2002年由长春光机所研制出来的ꎬ该款装置的出现标志着我国实现了对EUVL原理性的贯通ꎮ2008年ꎬ国家科技重大专项(02专项)将EUVL技术列为 32~22nm装备技术前瞻性研究 重要攻关任务ꎬ长春光机所为 极紫外光刻关键技术研究 项目的牵头单位ꎮ该项目研究团队经过8年的研究ꎬ最终研制出线宽为32nm的EUV光刻投影曝光装置ꎮ2017年ꎬ 极紫外光刻关键技术研究 项目通过验收[13]ꎮ此外ꎬ中国科学院上海光学精密机械研究所的蔡懿等人[14]ꎬ长春理工大学林景全课题组[9]ꎬ哈尔滨工业大学李小强等人[1]以及华中科技大学㊁同济大学等相关课题组[15 ̄16]均对EUVL的靶材选取㊁驱动光源设计㊁碎屑处理系统等装置进行了理论和实验研究ꎮEUVL技术是每年国际光学工程学会会议(SocietyofPhoto ̄OpticalInstrumentationEngineers(SPIE)Conference)所讨论的主要议题之一ꎮEUVL光刻机主要由3部分组成:EUV光源系统㊁EUV光反射收集系统以及照明曝光刻蚀系统组成ꎮ由于EUV光波长较短ꎬ能量较高ꎬ其在介质中存在较为强烈的吸收ꎮ研究人员通过不断地优化和改进EUV光的收集装置ꎬ最终采用多个多层膜反射镜组合成EUV光学反射收集系统ꎮ照明曝光刻蚀系统是将收集到的EUV光通过多层膜反射镜系统传送到光刻掩模版(掩模版上含有所需要的电路信息)上ꎮEUV光再同样通过多层膜反射镜系统最终聚焦到硅晶片上进行曝光刻蚀ꎮEUV光源的产生方案有很多ꎬ是下文所要介绍的重点内容ꎮ3㊀极紫外光刻的核心 光源技术㊀㊀为满足极紫外光刻需求ꎬ其光源应具有如下性能:(1)输出功率达百瓦量级ꎬ且功率波动小ꎻ(2)较窄的激光线宽ꎻ(3)较高的系统效率ꎻ(4)可接受的体积和重量ꎻ(5)可长时间㊁高可靠性运转ꎻ(6)维修㊁维护成本低ꎻ(7)低污染ꎮ目前ꎬ主要有4种方案可以获得EUV光源ꎬ分别是:同步辐射源㊁激光等离子体(LaserPro ̄ducedPlasmaꎬLPP)㊁放电等离子体(DischargedProducedPlasmaꎬDPP)和激光辅助放电等离子体(Laser ̄assistedDischargePlasmaꎬLDP)ꎮ选取哪一种方案ꎬ并如何运用该方案以大幅提高EUVL03光刻机光源的功率来满足大规模工业生产(HighVolumeManufacturingꎬHVM)的需要成为世界各国所必须攻克的主要难题之一ꎮ3.1㊀同步辐射源㊁LPP㊁DPP㊁LDP原理和比较同步辐射源的优点是可以产生高功率的EUV光ꎬ而且它对光学原件无碎屑污染ꎬ故可以长时间稳定地输出EUV光ꎮ但是ꎬ过于复杂和庞大的装置构造以及极其高昂的造价等都表明同步辐射源并不适用于HVM生产[9]ꎮLPP㊁DPP和LDP都是通过高能量束使靶材产生较高的温升ꎬ从而产生高温㊁高密度的等离子体并发射EUV光ꎮ虽然它们的形成方法有所差异ꎬ但却可以使用相同靶材ꎮLPP是以高强度的脉冲激光为驱动能源照射靶材ꎬ使靶材产生高温等离子体并辐射EUV光ꎮ图1是激光等离子体产生EUV光的示意图[17]ꎮ其中ꎬ采用数十千瓦功率的激光从一圆孔进入打在液滴Sn靶上ꎬ产生的极紫外光通过多层介质膜反射镜反射汇聚在中心焦点(IntermediateFocusꎬIF)处ꎮ图1㊀LPP ̄EUV光源示意图Fig.1㊀Schematicoflaser ̄producedplasmaforEUVlightsourceDPP是将靶材涂覆在阳极和阴极之间ꎬ两个电极在高压下产生强烈的放电使靶材产生等离子体ꎮ由于Z箍缩效应ꎬ当洛伦兹力收缩等离子体时ꎬ等离子体被加热ꎬ产生EUV光ꎮ图2是放电等离子体产生EUV光的示意图[17]ꎮ其中ꎬ靶材也为Sn靶ꎮSn靶后面为一组叶片ꎬ即所谓的 箔片陷阱 ꎬ可防止Sn碎屑到达叶片后面的收集器(即反射镜)而使其被污染ꎮ最后ꎬEUV光汇聚于IF点ꎮLDP是将LPP与DPP结合起来ꎬ先用脉冲激光照射靶材ꎬ使靶材细化ꎬ再运用DPP技术放电使靶材产生EUV光ꎮ对比上述4种方案ꎬ由于同步辐射源的缺点极难被克服ꎬ目前可以实现工业化EUV光刻机生产的方案为后3种ꎮDPP和LDP具有很多相似之处ꎬ它们均可以通过增大放电电流的功率来提高EUV光的输出功率ꎮ但是ꎬ在靶材产生等离子体的过程中ꎬ一定会对电极产生热负荷和腐蚀ꎬ造成关键元件的损坏ꎬ所以需要经常清理和更换电极ꎮ此外ꎬDPP的产生过程中伴随着大量的光学碎屑ꎬ严重地损坏了光学收集系统ꎮ上述问题尚未找到较好的解决办法ꎬ因而ꎬDPP和LDP方案都很难维持长时间的稳定工作状态ꎻ而LPP是以高功率激光辐射靶材ꎬ这相较于DPP和LDP方案ꎬ因没有损伤电极的困扰而较大地消减了装置的热负荷ꎬ产生的光源也较为稳定ꎮ而且ꎬLPP所产生的碎屑量低于DPPꎮ从长远的发展趋势上看ꎬ鉴于LPP的诸多优点ꎬ现用于HVM的方案多以LPP为主ꎮ荷兰的ASML公司和日本的Giga ̄photon公司都已经做出了性能良好的基于LPP的EUV光源ꎮ下文将主要介绍如何提高LPP光源的转换效率(ConversionEfficiencyꎬCE)以及如何减少LPP光源碎屑等关键技术ꎮ图2㊀DPP ̄EUV光源示意图Fig.2㊀Schematicofdischarge ̄producedplasmaforEUVlightsource3.2㊀多层膜反射镜由于光子能量极高的EUV光几乎可被所有介质所吸收ꎬEUV多层膜反射镜作为光学系统的重要元件成为了EUV光源的一项关键技术ꎬ需实现EUV波段的高反射率[18]ꎮ近年来ꎬ科研人员们通过研究发现ꎬ采用Mo/Si多层膜制备出的反射镜对中心波长为13.5nm㊁光谱带宽(Band ̄13第1期㊀㊀㊀㊀㊀宗㊀楠ꎬ等:激光等离子体13.5nm极紫外光刻光源进展widthꎬBW)在2%以内EUV光的反射率可达70%[19]ꎮ通过将Mo原子和Si原子交替排列ꎬ可使13.5nm的EUV光在其中发生干涉ꎬ从而得到较高的反射效率[20]ꎮ3.3㊀EUV光源CE(EUV ̄CE)的提高对于商业化大规模生产的EUV光刻机ꎬ如何在降低成本的情况下提高晶圆的生产率是一个极为重要的问题ꎮ到目前为止ꎬ根据ASML公司2017年所生产的最新EUV光刻机设备NXE:3400B的参数可得ꎬ在实际光刻生产中ꎬ该款设备每小时操作的晶圆数目可以达到125片以上ꎮ这就要求EUV光源在进入光刻系统以前ꎬIF点的输出功率必须在205W以上ꎮ目前为止ꎬASML公司和Gigaphoton公司的EUV光源设备均可输出250W较为稳定的EUV光ꎬ最大值甚至可以达到375W[21 ̄22]ꎮ然而ꎬ相较于EUV光刻机高昂的成本而言ꎬ这样的生产效率和输出功率仍然有较大的提升空间ꎮ因而ꎬ找到如何能够有效提高EUV光源CE的方案已成为了EUVL的一个重点研究方向ꎮ光源的CE值是指EUV输出能量除以输入激光能量并换算成百分数后所得到的数值ꎮ目前ꎬ提高CE的途径主要有以下几种:(1)优选靶材组份及形态ꎻ(2)优选激光源ꎻ(3)采取双脉冲的方案ꎮ3.3.1㊀靶材的选取选择中心波长为13.5nm㊁2%带宽内的EUV光作为光刻光源是由Mo/Si多层膜反射镜的特性所决定的ꎬ而能在此波段发出EUV光的靶材有很多种ꎮ研究人员通过相关的理论和实验研究发现ꎬ氙(Xe)㊁锂(Li)㊁锡(Sn)等为该波段范围内的主要靶材ꎮ通过仿真计算的方法可以得到11镜系统在不同靶材(SnꎬLiꎬXe)中近垂直入射方向的反射率[23 ̄24]ꎮ其中Sn在13.5nm波长处的反射率占比最大ꎮ最初ꎬ人们比较关注Li靶[25]ꎮ锂的类氢离子Li2+的Lyα跃迁恰好与波长为13.5nm的EUV光谱相对应ꎮ可是当稳态Li等离子体处在高温的环境下时ꎬ会有极少量的Li2+离子处于电离平衡态[26]ꎬ也就是说ꎬ等离子体仅由剩余的原子核和自由电子组成ꎬ并且无任何谱线发出ꎮT.Hi ̄gashiguchi和A.Nagano等人的研究表明ꎬ基于LPP的Li靶产生的13.5nm ̄EUV光的CE只有1%~2%左右ꎮ较低的CE表明ꎬLi靶并不能作为EUVL光源中的最佳靶材[27 ̄28]ꎮ随后ꎬ人们又对Xe靶做了相关研究ꎮ因为Xe靶是清洁能源ꎬ所以它具有不产生碎屑ꎬ对光学系统损伤小ꎬ可以长期工作而无需更换光学元件等优点[29]ꎮ然而通过实验可以发现ꎬ基于LPP的Xe靶产生13.5nm ̄EUV光的CE仅有1%左右ꎬ主要由Xe元素的一种离子Xe10+在4d8ң4d75p的跃迁产生ꎬ除了较为低下的CE外ꎬXe的光谱纯度也较差[30]ꎮ最后ꎬ基于LPP的Sn靶在13.5nmꎬ2%带宽内的EUV来源极为广泛ꎬ主要由Sn等离子体中的高价态离子Sn8+ ̄Sn12+跃迁形成[31]ꎬ相关文献给出了Sn8+㊁Sn9+㊁Sn10+㊁Sn11+离子的EUV谱线跃迁图[32]ꎮ目前ꎬSn的EUV ̄CE值可达5%~6%[21]ꎮ研究人员发现固体Sn靶几何形状的差异对EUV辐射也有很大影响ꎮ因此ꎬ人们对包括平板形靶㊁限腔形靶㊁球形靶㊁空腔形靶㊁纳米结构靶㊁液滴形靶在内的固体Sn靶进行了相关研究[26]ꎮ早期ꎬ人们以平面Sn作为靶材ꎮ然而ꎬ用激光照射平板Sn靶ꎬ会造成被激光光束聚焦中心照射部分靶材的温度远高于周围其他部分ꎮ而由于存在较大的温度梯度ꎬ中心部分的等离子体膨胀速度快ꎬ周围部分的等离子体膨胀速度慢ꎮ速度较慢的等离子体会对速度较快的等离子体所在的区域ꎬ也就是EUV发射主导区域(EmissionDomi ̄nantRegionꎬEDR)所发出的EUV光存在较为强烈的吸收ꎬ进而影响EUV ̄CE[9]ꎮ针对平面靶材的这一缺点ꎬ2003年ꎬT.Tomie等人通过使用双脉冲照射Sn的限腔形靶并在入射激光相反的方向收集EUV光ꎮ该方案证明了限腔形Sn靶相较于平板Sn靶具有更高的EUV ̄CE[33]ꎻ2005年ꎬY.Tao等人也为克服平板靶材的缺点ꎬ在Sn条靶材的底部放置了具有一定厚度和宽度的碳氢薄膜ꎮ然后ꎬ用激光光束照射Sn条靶材和碳氢薄膜ꎬ使Sn条为被脉冲激光束聚焦中心照射的部分ꎬ而碳氢薄膜则为激光光斑边缘的照射部分ꎮ因为碳氢等离子体质量小ꎬ其膨胀速度较快ꎬ该方案成功地消减了由于温度分布不均匀性对EDR区所产生的影响ꎬ使得EUV ̄CE提高了1.423倍[34]ꎻ同年ꎬY Shimada等人尝试将Sn靶材的形状由平板换为了球形ꎮ他们将直径为几微米的球形塑料靶材表面涂满厚度为微米量级的Snꎬ最终得到了最大值为3%的CE[35]ꎻ2008年ꎬS.Yuspeh等人同样研究了球形Sn靶对EUV ̄CE的影响ꎮ结果与Y Shimada等人的结论一致ꎬ球形Sn靶具有较高的CEꎬ而且CE会随着Sn靶直径与焦斑大小比值的减小而逐渐增加[36]ꎻ2010年ꎬS.S.Harilal等人研究了凹槽形靶对EUV ̄CE的影响ꎮ他们发现当脉冲激光打在平板Sn靶上的同一点的脉冲数量逐渐增多时ꎬ等离子体EUV ̄CE从2.7%增加到了5%ꎬ而辐射EUV的等离子体区域也较之前拉长了近一倍[37]ꎻ2014年ꎬT.Cum ̄mins等人对楔形结构的Sn靶做了相关研究ꎬ并最终发现楔形Sn靶的EUV ̄CE约为3.6%[38]ꎻ后来ꎬ为降低离子碎屑㊁提高EUV ̄CEꎬ人们开始逐渐减小Sn靶的尺寸ꎬ并最终将液滴Sn靶作为主要研究对象ꎮ这是因为液滴Sn靶好操控且碎屑较少ꎬ故其CE较高ꎮ一些光源供应公司对液滴Sn靶进行了相关研究ꎬ最终确定将其作为EUV光刻机光源的辐射靶材[39 ̄40]ꎮ世界知名高校九州大学(日本)㊁大阪大学(日本)ꎬ苏黎世联邦理工学院(瑞士)等大学也较早开展了对液滴Sn靶的研究[41]ꎮ目前ꎬ用于HVM的EUV光刻机光源均是采用液滴Sn靶ꎮ虽然液滴Sn靶能达到较为理想的EUV ̄CEꎬ但其时间和空间的不稳定性为光刻机光源的设计和制造增加了难度[26]ꎮ3.3.2㊀驱动光源的选择选择LPP作为EUV驱动光源时ꎬ激光波长㊁激光脉宽以及入射激光光束聚焦情况的改变均可以影响EUV ̄CE[42 ̄45]ꎮCO2激光器与Nd:YAG激光器是较为合适的EUVL激光器ꎮ因为这两种激光器的输出功率较大ꎬ能量转换效率高ꎬ可以实现高功率的EUV光输出ꎮ2007年ꎬJ.White等人分别通过将上述两种类型的激光器照射Sn靶ꎬ分析了不同激光波长对EUV ̄CE的影响ꎮ当能量等条件相同时ꎬ用波长分别为10.6μm㊁1064nm㊁355nm的激光照射Sn靶产生EUV光ꎮ他们发现相较于使用Nd:YAG激光脉冲ꎬ使用CO2激光脉冲能获得较高的CE(两者比值为2.2)ꎬ而且辐射出的EUV光功率也较高[42]ꎮ图3为CO2激光与Nd:YAG激光诱发激光等离子体EUV辐射区域与激光能量沉积区域的比较[45]ꎮ由图3可以看出ꎬCO2激光之所以具有更高的CE是因为脉冲激光能量沉积区与EUV辐射区相距不远ꎬ这样便于激光能量快速转移到等离子体中辐射EUV光ꎮ同年ꎬ日本EUVL系统发展协会的AkiraEndo等人进行了类似的实验ꎮ他们发现用CO2激光作为驱动光源产生碎屑数量少ꎬ光谱纯度高[46 ̄47]ꎮ图3㊀Nd:YAG激光(a)与CO2激光(b)等离子体激光能量吸收区域和极紫外辐射区域Fig.3㊀Laserenergyabsorptionregionsandextremeultravioletradiationregionsfromdifferentlaser ̄producedplasma.(a)Nd:YAGlaserand(b)CO2laser㊀㊀2009年ꎬS.S.Harilal等人研究入射激光光束聚焦情况对EUV ̄CE的影响时发现ꎬ当激光正33第1期㊀㊀㊀㊀㊀宗㊀楠ꎬ等:激光等离子体13.5nm极紫外光刻光源进展好聚焦到Sn靶上时并不能获得最理想的CE值ꎮ为此ꎬ他们通过相关实验找出了获得最佳CE时激光在靶材上的光斑尺寸ꎬ并发现最佳聚焦条件时的CE值比聚焦到靶材上时的CE值高了近25%[44]ꎻ同年ꎬ基于上述现象ꎬKasperczuk等人解释了激光聚焦条件影响EUV ̄CE的原因ꎮ实际上ꎬ聚焦会使靶材初始等离子状态受到极大影响ꎬ因而后续的激光脉冲会与受影响的初始等离子体相互作用而影响实验结果ꎮ3.3.3㊀双脉冲作用效果有学者研究发现ꎬ可以先用预脉冲照射液滴Sn靶ꎬ产生初始等离子体碎片ꎮ设计好延迟时间后ꎬ再用高功率密度的主脉冲照射初始等离子体碎片ꎬ产生高温㊁高密度的等离子体并辐射EUV光ꎮ这种方案的优势在于预脉冲使液滴体积变大ꎬ易于后面的主脉冲与其发生作用ꎬ提高了主脉冲激光的利用率以及最终的CE值ꎮ在双脉冲照射实验中ꎬ常使用Nd:YAG激光作为预脉冲激光源ꎬ可有效地提高EUV ̄CEꎮ这是因为Nd:YAG激光具有更深的穿透深度㊁更高的等离子体临界密度ꎬ可气化更多的靶材等优点[26]ꎮ2008年ꎬShinsukeFujioka等人采用Nd:YAG激光(预脉冲)和CO2激光(主脉冲)照射液滴Sn靶[48]ꎮ他们的实验结果表明双脉冲激光辐射液滴Sn靶产生的EUV ̄CE基本都高于单脉冲激光所产生的EUV ̄CEꎻ2012年ꎬFreeman等人将预脉冲激光波长分别设置为266nm(4倍频的Nd:YAG激光)和1064nmꎬ研究了不同预脉冲波长对CO2激光辐射Sn靶产生EUV光的影响[49]ꎮ他们发现ꎬ1064nm预脉冲激光相较于266nm预脉冲激光所产生的离子碎屑少ꎬ这间接证明了用1064nm的Nd:YAG激光器作为预脉冲激光时ꎬ碎屑粒子具有更低的动能ꎮ3.4㊀碎屑问题LPP通过激光辐射靶材产生高温㊁高密度的等离子体并辐射EUV光ꎮ在此过程中ꎬ必然会产生一定数量的碎屑ꎮ这些碎屑主要由熔融液滴㊁微粒团簇㊁中性碎屑原子和高能离子组成[33]ꎮ其中ꎬ速度最慢的微粒团簇ꎬ直径大约在微米量级以上ꎬ运动速度约为103cm/s左右ꎻ高能离子因具有较高能量而运动最快ꎬ速度可达106~107cm/s[50]ꎻ中性粒子碎屑的速度介于上述两者之间ꎮ碎屑问题作为EUV光刻机大规模工业化生产过程中不可忽视的问题之一ꎬ其影响具体表现在:(1)碎屑会损伤光源的收集系统ꎬ碎屑中的高能离子会撞击多层膜反射镜ꎬ造成多层膜反射镜结构被破坏ꎮ同时ꎬ能量较低㊁速度较慢的中性碎屑粒子有一定的概率会附着在多层膜反射镜上ꎬ吸收生成的EUV光并加热多层膜反射镜ꎬ进一步破坏其结构ꎮ无论是高能粒子还是中性原子ꎬ都会使多层膜反射镜的反射率降低ꎬ导致EUV光刻机设备中的一些反射镜需要时常更换ꎬ从而影响光源长时间的稳定工作ꎻ(2)中性粒子等碎屑会吸收EUV辐射ꎬ而且亚微米级的微粒团簇和熔融液滴因不能完全被运用到产生EUV辐射的过程中而被浪费ꎬ这些均可能限制EUV ̄CEꎮ综上所述ꎬ减少LPP ̄EUV过程中所产生的碎屑是极为重要的ꎮ对于微米量级以上的碎屑ꎬ可以通过上一小节中所提到的双脉冲激光辐射方案除去[51]ꎮ对于其他种类的碎屑问题ꎬ科研人员们也分别做了大量实验研究ꎮ2003年ꎬG.Niimi等人通过在光源的收集装置中添加磁场研究了LPP离子碎屑的特性ꎮ结果发现ꎬ在磁场的作用下ꎬ离子信号有明显的下降ꎬ而且距离磁场越近ꎬ下降比例越明显[52]ꎻ2007年ꎬS.S.Harilal等人又在有磁场的光源收集系统中加入了缓冲气体ꎬ实验发现缓冲气体不仅可以减缓高能碎屑离子ꎬ同时也能抑制中性碎屑粒子[53]ꎻ2012年ꎬ孙英博等人在光源系统中充入氩气㊁氦气等缓冲气体ꎬ研究了不同种类的缓冲气体对Sn离子碎屑缓解效果的影响[54]ꎮ目前市售EUV光刻机产品均采用将充入惰性气体或氢气和外加磁场相结合的方案除去碎屑[21ꎬ55]ꎮ充入惰性气体的好处在于:(1)充入气体的分子与碎屑离子相撞ꎬ降低了其运动速度ꎬ流动的气体还可将碎屑离子吹到远离多层膜反射镜的区域ꎬ减少其对光学收集系统的损害ꎻ(2)当充入的气体是氢气时ꎬ靠近器壁的氢气通过放电的方式形成电容耦合的氢气等离子体ꎬ其中的H自由基可以与Sn粒子发生化学反应ꎬ反应的化学方程式为Sn(s)+4H(g) SnH4(g)ꎬ产生了热蒸汽SnH4ꎬ通过真空抽吸的容器可以去除热气体和43Sn蒸气ꎮ加入磁场的优点在于:(1)因为EUV光为主要由Sn离子和电子组成的Sn等离子体发射ꎬ所以几乎所有的Sn离子都可以通过拉莫尔运动而被强磁场捕获ꎻ(2)一些中性原子可以通过与离子碰撞的方式ꎬ发生电荷交换成为离子而被磁场捕获ꎮ最终这些碎屑粒子均可被碎屑收集装置所收集ꎮ4㊀目前13.5nm ̄EUV光刻机光源产品㊀㊀目前ꎬ已经收购Cymer公司(世界领先的激光源供应商)的荷兰光刻机巨头ASML公司和日本Gigphoton公司几乎垄断了全球激光光刻机光源产业ꎬ他们都可以独立地制造出基于LPP的EUV光刻机光源ꎮASML公司于1984年成立ꎬ公司的总部现位于荷兰费尔德霍芬ꎬ是一家半导体设备制造和销售公司ꎮ目前ꎬ英特尔ꎬ三星ꎬ中芯国际等国际知名公司都从ASML公司采购光刻机ꎬ其市场份额已达到70%ꎮ售价1亿美元一台的EUV光刻机ꎬ全世界仅ASML公司可以生产ꎮ2017年ꎬ全世界出货的光刻机中有198台由ASML所制造ꎬ其中EUV光刻机为11台[13]ꎻ2018年全世界出货的光刻机中有224台为ASML公司制造ꎬ较2017增长13.13%ꎬ其中13.5nm ̄EUV光刻机销售量为18台ꎬ较2017年增加了63.64%[56]ꎮ2019年ꎬASML公司EUV光刻机的年销量将达到30台ꎮ图4将ASML公司近年来所生产的几款EUV光刻机设备参数进行了对比(NXE:3400C为即将发售的产品)[21]ꎮ由图4可以看出ꎬNXE系列产品每小时操作的晶圆数目从最初的60片(光源IF点聚焦功率为100W)增长到125片(光源IF点聚焦功率为245W)ꎮ2018年年末至2019年年初ꎬASML公司改良后的NXE:3400B(光源IF点聚焦功率为250W)产品ꎬ每小时的晶圆操作数可达145个ꎬ分辨率可达13nm以下ꎬOverlay为1.7nm(满足5nm节点的工艺需求)ꎮASML公司在2019年下半年推出的新款产品NXE:3400C每小时操作的晶圆数为155~170片ꎬ其overlay预计可达1.5nm[57]ꎮ到2020年后ꎬASML公司还预计将新版本产品光源IF点聚焦功率提升到350W以上[2]ꎮ图4㊀ASML ̄EUVL ̄NXE系列产品Fig.4㊀ASML ̄EUVL ̄NXEseriesofproducts㊀㊀Gigaphoton公司于2000年在日本栃木县小山市成立ꎮ不同于ASML等光刻机公司ꎬGigapho ̄ton是一家激光器光源供应商ꎮ它自成立以来一直为全球包括ASMLꎬNikonꎬCanon等半导体行业巨头提供激光光源ꎬ其光源技术一直处于世界领先水平ꎮGigaphoton于2002展开了对EUV光源的研究ꎮ到目前为止ꎬGigaphoton公司共设计了3款13.5nm ̄EUV光源产品ꎬ它们分别是Proto#1ꎬProto#2和Pilot#1ꎮProto#1的设计重点是碎片减缓技术ꎻProto#2作为优化CE的设备ꎻPilot#1的设53第1期㊀㊀㊀㊀㊀宗㊀楠ꎬ等:激光等离子体13.5nm极紫外光刻光源进展。
外星人是否存在的英语作文

外星人是否存在的英语作文英文回答:The Existence of Extraterrestrial Life: A Scientific Inquiry.The question of whether extraterrestrial life exists has captivated humanity for centuries. From ancient myths and folklore to modern scientific inquiry, the search for intelligent beings beyond Earth continues to inspire awe and speculation.From a scientific perspective, the search for extraterrestrial life is guided by two fundamental principles: the Drake equation and the Fermi paradox. The Drake equation attempts to estimate the number of potentially habitable planets in the Milky Way galaxy based on factors such as the rate of star formation, the fraction of stars with planets, and the likelihood of those planets supporting life. While the estimates vary widely, theequation suggests that there could be a significant number of habitable planets in our galaxy.The Fermi paradox, on the other hand, poses the question: "If life is so common, why haven't we detected it yet?" Despite decades of radio telescope observations, space exploration missions, and SETI (Search for Extraterrestrial Intelligence) programs, we have yet to establish contact with extraterrestrial civilizations. This apparent contradiction has led to a range of hypotheses, including the Great Filter theory, which suggests that there are barriers that prevent most civilizations from advancing to a detectable level of intelligence.Recent astronomical discoveries have provided further impetus to the search for extraterrestrial life. The confirmation of exoplanets, planets outside our solar system, has shown that our Milky Way galaxy is teeming with planetary systems. Moreover, the discovery of potentially habitable exoplanets, such as TRAPPIST-1 and Proxima Centauri b, has raised the possibility that life may exist not only on Earth but also on nearby planets.中文回答:外星人是否存在,一个科学探究。
外星文明猜想(英文作文)

Certainly! Here’s an essay exploring the conjectures about extraterrestrial civilizations, delving into the scientific, philosophical, and speculative aspects of the topic. Extraterrestrial Civilizations: The Great Beyond and Our Place in the CosmosThe universe, vast and ancient, stretches its arms across 93 billion light-years of observable space, containing billions of galaxies, each with billions of stars. Within this cosmic tapestry, the question of whether we are alone has captivated human minds for centuries. This essay explores the conjectures surrounding extraterrestrial civilizations, from the scientific theories to the speculative musings that fuel our imaginations.The Drake Equation: A Mathematical Framework for SpeculationAt the heart of the search for extraterrestrial intelligence (SETI) lies the Drake equation, formulated by astronomer Frank Drake in 1961. This mathematical framework attempts to estimate the number of active, communicative civilizations in the Milky Way galaxy. Variables include the rate of star formation, the fraction of stars with planetary systems, the number of planets capable of supporting life, the fraction of those planets where life actually emerges, the fraction of those life-bearing planets that develop intelligent life, the fraction of those that develop a civilization with technology, and the length of time such civilizations release detectable signals into space. While many of these variables remain unknown, the Drake equation serves as a tool for structured speculation and highlights the immense challenge in estimating the likelihood of extraterrestrial life.The Fermi Paradox: Where Are They?The Fermi paradox, named after physicist Enrico Fermi, poses a compelling question: Given the vastness of the universe and the high probability of habitable worlds, why have we not encountered any evidence of extraterrestrial civilizations? This paradox has led to numerous hypotheses. Perhaps civilizations tend to destroy themselves before achieving interstellar communication. Or, advanced civilizations might exist but choose to avoid contact with less developed species, adhering to a cosmic form of the “prime directive” seen in science fiction. Alternatively, the distances between stars could simply be too great for practical interstellar travel or communication, making detection exceedingly difficult.The Search for TechnosignaturesIn the quest for extraterrestrial intelligence, scientists have focused on detecting technosignatures—signs of technology that might indicate the presence of a civilization elsewhere in the universe. These include radio signals, laser pulses, or the dimming of stars due to megastructures like Dyson spheres. SETI projects, such as the Allen Telescope Array and Breakthrough Listen, scan the skies for anomalous signals that could be attributed to alien technology. While no definitive technosignatures have been found to date, the search continues, driven by advances in technology and a growing understanding of the cosmos.Astrobiology: Life Beyond EarthAstrobiology, the study of the origin, evolution, distribution, and future of life in the universe, offers insights into the conditions necessary for life. Research in astrobiology has revealed that life can thrive in extreme environments on Earth, suggesting that the conditions for life might be more widespread in the universe than previously thought. The discovery of exoplanets in the habitable zones of their stars, where liquid water can exist, increases the probability of finding environments suitable for life.Continued exploration of our solar system, particularly of Mars and the icy moons of Jupiter and Saturn, holds promise for uncovering signs of past or present microbial life. The Philosophical ImplicationsThe possibility of extraterrestrial civilizations raises profound philosophical questions about humanity’s place in the universe. Encountering another intelligence would force us to reevaluate our understanding of consciousness, culture, and ethics. It could lead to a new era of global unity as humanity comes together to face the challenges and opportunities of interstellar diplomacy. Conversely, it might also highlight our vulnerabilities and prompt introspection on our stewardship of the planet and our responsibilities as members of the cosmic community.Concluding ThoughtsWhile the existence of extraterrestrial civilizations remains a conjecture, the pursuit of answers has expanded our understanding of the universe and our place within it. The search for life beyond Earth is not just a scientific endeavor; it is a philosophical journey that challenges us to consider our origins, our destiny, and our role in the vast cosmic drama unfolding around us. Whether we find ourselves alone or part of a galactic community, the quest for knowledge about the universe and our place in it is one of humanity’s most enduring and inspiring pursuits.This essay explores various aspects of the conjectures surrounding extraterrestrial civilizations, from the scientific frameworks used to estimate their likelihood to the philosophical implications of their existence. If you have specific areas of interest within this broad topic, feel free to ask for further elaboration! If you have any further questions or need additional details on specific topics related to extraterrestrial life or astrobiology, please let me know!。
超过硅极限的弹道二维晶体管

超过硅极限的弹道二维晶体管
目前,已经研发出一种新型的弹道二维硒化铟(InSe)晶体管,这是世界上迄今为止速度最快、能耗最低的二维半导体晶体管。
其实际性能超过了英特尔商用最先进的硅基晶体管。
这种晶体管采用了三层InSe构建超短弹道晶体管,通过掺杂钇诱导的相变方法实现了铟硒场效应晶体管的欧姆接触,同时将硒化铟场效应晶体管的沟道长度缩小到10nm。
此外,这种新型晶体管室温下的弹道率高达83%,远高于硅基晶体管的弹道率(低于60%),有望实现兼具高性能和低功耗的芯片。
在弹道晶体管中,电子像子弹一样穿过沟道没有受到碰撞,能量没有散射损失,所以弹道率越高的器件,能量利用效率越高。
这一新型晶体管的研发解决了实现高性能二维晶体管的多个重要挑战,是二维电子器件研究的重要里程碑,具有重要的科学意义。
Extreme Ultraviolet (EUV) Sources for Lithography based on Synchrotron Radiation

PREPRINTExtreme Ultraviolet (EUV) Sources for Lithography based onSynchrotron RadiationGuiseppe Dattoli1, Andrea Doria1, Gian Piero Gallerano1, Luca Giannessi1, Klaus Hesch2, Herbert O. Moser6, Pier Luigi Ottaviani1, Eric Pellegrin3, Robert Rossmanith2*,Ralph Steininger2, Volker Saile4, Jürgen Wüst51ENEA INN-FIS-LAC, Frascati, Italy2Synchrotron Radiation Research Group, 3 Institute of Solid State Physics, 4 Institute of Microstructure Technology, 5 Technology Transfer and Marketing, ForschungszentrumKarlsruhe6 Singapore Synchrotron Light Source SSLS, National University of Singapore*Corresponding author, Forschungszentrum Karlsruhe, Synchrotron Radiation Research Group FGS, P. O. Box 3640, D-76021 Karlsruhe, Germany, Tel. ++49 7247 82 6179, FaxSubmitted to Nuclear Instruments and Methods A______Work supported by the German Ministry for Research and Education BMB+F under contract No. 01 M 3103 AAbstract:The study presented here was initiated by a discussion to investigate the possibility of using synchrotron radiation as a source for the Next Generation Lithography (NGL) based on the EUV-concept (Extreme Ultra-Violet; here 13.5 nm or 11.3 nm radiation, respectively). The requirements are: 50 W, 2% bandwidth and minimal power outside this bandwidth. Three options were investigated. The first two deal with radiation from bending magnets and undulators. The results confirm the earlier work by Oxfords Instrument and others that these light-sources lack in-band power while emitting excessive out-of-band radiation. The third approach is a FEL (Free Electron Laser) driven by a 500 MeV linear accelerator with a superconducting mini-undulator as radiation emitting device. Such a device would produce in-band EUV-power in excess of 50 W with negligible out-of-band power.PACS classification codes: 07.85.Qe; 81.16.Nd; 41.60.-m1. IntroductionLithography, the technique for manufacturing microelectronic semiconductor devices such as processors or memory chips, presently uses deep UV (DUV) radiation. The main radiation source is the 193 nm line of an ArF excimer laser [1]. Future sources will be F2 lasers at a wavelength of 157 nm and eventually H2 lasers at a wavelength of 127 nm.In addition, advanced lithography technologies (Next Generation of Lithography: NGL) based on EUV, X-ray photons, electrons, and ions are being investigated by chip makers and equipment manufacturers.The competing technologies are: SCALPEL electron lithography (Scattering with Angular Limitation in Projection Electron-Beam Lithography) [2], Ion Projection Lithography [3], X-ray Proximity Lithography [4] and Extreme UV Lithography [5]. The latter is being considered as one of the most promising. In the US a program to develop this technology was set up as early as in 1994 by the EUV LLC (Limited Liability Corporation) in cooperation with the VNL (Virtual National Lab). Members of VNL are LLNL (Lawrence Livermore National Lab), LBNL (Lawrence Berkeley National Lab) and Sandia National Lab. In Japan the ASET consortium was funded (Association of Super-Advanced Electronics Technologies) [6].During the research phase the needs for a EUV source suitable for future production lines were identified. The main requirements are:Wavelength: 13.5 nm (=92 eV) or 11.3 nmBandwidth: 2%Output power: 25 W (first step) and later 50 WIn addition, the power radiated outside this band has to be less than 500 W to avoid thermal problems on the optics. The development of a suitable source is one of the big challenges in EUV lithography.Basically, powerful sources of EUV photons may be based on either plasmas [7] (produced by laser irradiation of matter or by gas discharges) or on relativistic electrons (synchrotron radiation).In Europe, the development of synchrotron radiation-based EUV sources [8] was partly supported by the European Union within the framework of the EUCLIDES program [9]. Similar investigations were performed in Japan [10] and the USA [11]. The studies showed that conventional storage rings with and without additional magnets (normal conducting or superconductive wigglers or undulators) do not fulfil all the above-mentioned specifications for the EUV source.The German Federal Ministry of Education and Research initiated at the beginning of 2000 a program on plasmas generated by lasers or gas discharges as sources of EUV light for the next generation lithography (NGL). In the initial phase of this project it was felt that sources based on synchrotron radiation should be reconsidered. In the first quarter of 2000 the authors presented their report. The present paper is a shortened version of this report. The result was that among all possible sources based on synchrotron radiation only a Free Electron Laser can meet the above mentioned stringent requirements at 13.5 nm. In summer 2000 a group at DESY published independently a paper in which the design of a SASE Free Electron Laser source for lithography at 70 nm is described [33 ] confirming at least in principle the viability of the FEL concept.2. Incoherent radiation from the storage ringsIn the following the results already obtained in the EUCLIDES study are summarized for reference. A model storage ring is shown in fig.1. The parameters which are needed to calculate the emitted photon intensity at 13.5 nm within the required bandwidth of 2% are - electron energy–magnetic field strength – electron currentThe maximum storable current depends on two limitations: beam instabilities and intrabeam scattering (Touschek-Effect) [12]. Beam instabilities can be defeated by feedback systems. The Touschek lifetime for an unpolarized beam is approximatelyVcNC r acc x e 232')([sec]1ζπ= (1) where r e = 2,8.10-15 m (classical electron radius). N is the number of particles per bunch. Assuming a 500 MHz RF frequency N is equal to 1,25.1010 for a stored beam of 1 A. γ is the ratio between energy and rest energy.The rest of the parameters describes the particle density in relation to the region in which the particles are stable, the so-called energy acceptance.εacc is the energy acceptance of the storage ring. A particle gets lost when the scattering is so violent that a particle changes its energy by more than that. The scattering probability depends on the density of the particles in the bunch. The parameter ζ = (εacc /γσ´x )2. σ´x is the divergence in the beam.For ζ ≤ 10-2 the following approximation is valid C(ζ) ≅ -ln(1,732ζ)-1.5. The bunch volume V is 8 π3/2σx σy σL . Typical Touschek life times for a 1 A beam are summarized in Table I.The strong dependence of the Touschek effect on the energy indicates that the preferred storage rings are operating at higher energies: 0.3 GeV and higher.The spectral power ∆P of the emitted synchrotron radiation in Watts per eV, per mrad horizontal angle ϑ and integrated over the vertical angle is given by formula (2) [12], [13]. [])(][][][73.8//24y G m r A I GeV E eV mrad Watt P =∆∆ϑϑ (2) with ³∞=y d Ky y G ηη)()(3/522 and c Phot E E y /=I is the stored beam current, E is the energy of the stored beam and K is the modified Bessel function. E Phot is the photon energy and E c is the so-called critical photon energyE c [eV] = 2218.3 ][][3m r GeV E r is the bending radius. r and the bending field B in Tesla are related by the equation: r[m] = 3.34][][T B GeV E (3) The power emitted at 13.5 nm per mrad horizontal angle within a 2% bandwidth is according to (2) [])(][][][1746.0/24y G m r A I GeV E mrad Watt P =∆∆ϑϑ (4) Figs. 2 and 3 show the results of equation (4). The assumed current is 1 A in all cases.In conclusion it can be said that for ca. 100 eV photons the spectral density has a maximum at fields near 1.5 to 2 T. It follows from fig. 3 that the spectral power increases the higher the energy is. The optimum values can be reached with room temperature magnets (1.5 T) and high energies (in other words with fairly large machines).The maximum angle over which photons can be collected is 6.28 rad (the full circumference of the storage ring). The maximum in-band power as a function of energy and field strength is shown in fig. 4 for a stored beam of 1A. Fig. 5 shows 2 D cuts of figure 4.From these curves it is obvious that the 50 W requirement with a stored beam of 1 A can only be met at energies significantly above 1 GeV. The maximum collectible power at an energy of 0.6 GeV is 27 W. This in-band power has to be compared with the total radiated power:P T [kW] = 88.5 [][][]m r A I GeV E 4 (5)which is for 0.6 GeV and 1.5 T (r = 1.336 m) ca. 8.6 kW. The power ratio (defined as in-band power P/total power P T ) is )(.01239.02y G P P T= (6) The power ratio is shown in fig. 6. The maximum values are obtained at low fields. This argument confirms that high beam energy and low magnetic fields are the optimum parameters. A storage ring of 0.6 GeV and a field of 1.5 T might be a fair compromise to obtain a total in-band power of more than 25 W.It is obvious all the formulas mentioned in the previous chapter valid for bending magnets are also valid for wigglers. The wiggler has two advantages over a bending magnet. Firstly, the photons are emitted into a cone centred around the direction of motion of the beam. The collection of photons is easier with a wiggler than with a bending magnet. Secondly, since there is no net deflection, it is easier to choose the optimum field.Wigglers with a small maximum beam deflection angle α are called undulators. The K-value is defined in the following way:K= α.γ = 0.94. B[T]. λu [cm] (7) Constructive interference in the vicinity of the beam axis happens when:λPhot =()22222/12θγγλ++K n u (8) θ is the angle between electron beam axis and the photon detector. A measured spectrum of the first harmonics of an undulator depending on the angle is shown in fig. 7. In fig. 7 angle and photon energy are clearly related (depending on the emittance of the beam). This is described by (8) [28].The undulator condition (8) has to be fulfilled for 13.5 nm. This condition limits the number of possible solutions for the period length. In addition, a general rule states that the period length should not be shorter than 4 times the gap width of the undulator. If this rule is not observed, than the field acting on the beam becomes too small [14].The formula used in Table I for the total power radiated from an undulator isP[W] = ][][][26.722cm K N A I GeV E u u (9)N u is the number of periods. The calculated in-band power for an undulator is shown (as an example) in fig. 8. The parameters of different undulators are summarized in Table II. The first harmonics of all undulators is close to 13.5 nm.Despite the fact that the maximum obtainable power does not fulfil the stringent requirement the undulator has clear advantages over wigglers.The K-values in Table I are in the order of 1 to 2. According to formula (7) the magnetic fields of the undulator are larger than 1 T. These values are larger than those achieved with conventional permanent magnet undulators. In Brookhaven [15] and Karlsruhe [16] independent concepts for using superconductors rather than arrays of permanent magnets havebeen under discussion. Recently Karlsruhe together with a group at Mainz [20] have been able to demonstrate the viability of such a concept under normal beam conditions. Fig. 7 shows the measured spectrum from these experiments.Fig. 9 shows the principle of a superconductive undulator. The field is generated by a superconductive wire in an iron matrix (darker parts in fig. 9). The superconductive wires are close to the beam. The undulator is indirectly cooled by liquid helium not shown in figure9. The parameters for this specific undulator are: period length 14 mm and K=2 (1.5 T) [30]. The calculated undulator field is shown in fig. 10.3. The Free Electron Laser approachIt has been shown in the previous chapters that the specifications for the source defined in the introduction, 50 W within a 2 % bandwidth at 13.5 nm, is barely achievable to obtain with a conventional synchrotron radiation source.In 1951 Motz was the first to point out that the intensity of a photon beam emitted by electrons can be increased by coherent superposition [18]. The logic is as follows. If each electron emits a photon the resulting electric field E total is:¦=nn total E E (10)E n is the electric field of the individual photons. The intensity is proportional to E 2total. . When the phases of the photons have a random distribution (incoherent light) the cross terms cancel and the averaged sum isI =2..E N E E j j i i =¦¦ (11)where N is the number of electrons.When the phases of the electrons are identically and they are not randomly distributed the cross-terms do not disappear and the intensity is N 2 times the intensity of a single electron. This is obviously the case when the electrons are concentrated in bunches. The length of these bunches (so-called micro-bunches) must be smaller than the wavelength. The micro-bunches are separated by a multiple of a wavelength.If this argument is turned around, then most of the intensity of a conventional synchrotron radiation source is destroyed by incoherence or, if expressed in other terms, by the random distances of the emitting electrons. When the electrons have distances which are smaller than the emitted light wave the intensity can be increased by an enormous factor (N is a very big number).Since 1951 this principle has been experimentally investigated with great success by various groups and this has changed dramatically the design of synchrotron light sources [19], [20] and beam diagnostics tools [21].In order to operate a FEL effectively the following conditions on the emittance have to be fulfilled [29].a.) Particles with an angle to the beam axis do not fulfil the resonance condition (8). The electron velocity in the direction of the axis is changed by –x´2/2 ( x´ is the angle relative to the axis). In order to keep the electron within a half-wave over the whole undulator length, the condition 2/12¸¹·¨©§≤′L x Phot λ (12)has to be fulfilled, where L is the length of the undulator [31] .b.) The spot-size of the optical mode is given by 2/1¸¹·¨©§≤λR x Phot (13)where R is the Raleigh length (the distance in which the area of a diffracted wave doubles). Typically the Raleigh length is one-half of the interaction length L.The restrictions c.) and d.) are usually combined to one requirement [22] πλε4Phot ≤ (14)Equation (14) requires that the horizontal and vertical emittance of the beam has to be smaller than 1.07 nm. In a linac the emittance shrinks with energy (adiabatic damping)ε = εn / γ (15) where εn is the so-called normalized emittance. The magnitude of the normalized emittance depends on the gun. For a photo-cathode gun εn is close to 10-6 m.rad (depending on current, bunch length etc.) [23]. Following equation (15) γ has to be 1000 or higher (linac energy equal or above 500 MeV). Assuming a gradient of 20 MeV/m, the linac is 27.5 m (or close to 30 m) long. For 0.52 GeV and K = 1.4 the period length of the undulator is 1.43 cm according to equation (8). The peak field is circa 1.05 T according to equation (7). Linacs with more than 40 MeV/m are available, so that the minimum length of the linac is about 15 m.The SASE FEL [32] is generally described by analytical methods. The fundamental parameter in this description is the gain length L G , the length in which the FEL power increases by a factor of e. The gain length depends on the power density of the emitted light. The power density is a function of the undulator properties (K-value, period length), the beam properties (peak current, energy, β-functions, emittance, energy spread etc.) and the properties of the optical beam (diffraction). In order to separate the different influences the following parameters are introduced:L G = Su ρχπλ34 = S L G 0 (16) where ρ is the so called Pierce parameter 3/123221).].,1[(241»¼º«¬ª=πβελγππρA peak u I I K K JJ (17)The Pierce parameter describes the emission of synchrotron radiation. I A is 17 kA (Alven current) and the rest of the parameters are explained in previous equations. χ and S are correction parameters describing the influence of the diffraction and the energy spread. The diffraction effects are described by the parameter S in (16):»»¼º««¬ª»¼º«¬ª+=222041/1πελβPhot GL S (18)and produce the curve shown in fig. 11 [24]. The curve has a minimum close to a beta of 0.3 m with a slight slope towards higher beta-functions.A beta function of 2 m throughout the whole undulator is an acceptable compromise. The undulator shown in fig. 9 has to be modified in such a way that it focuses in both directions. The focusing in both directions in an undulator with permanent magnets was demonstrated at DESY for the first time [35]. A similar effect can be achieved for the superconductive undulator either by shaping the iron poles in an appropriate way. A study on SASE and superconductive undulators can be found in [26].Up to now the influence of the energy spread was not taken into account. The energy spread leads to a broadening of the laser line and finally to a loss of gain. The influence of the energy spread is described by the function χ in a complex way. χ is determined by three parameters:()()σβµεε2= ()()2222003un G K L λγβεπλββµ= ()()γβελββµn G L 0013= (19)All 3 parameters depend on β and on the energy spread σε. The parameters have to fulfil an integral equation and a solution is only possible by numerical techniques. The function )(βχ is a solution of the integral equation:χπµπµεπµχ=−−³∞−+−012)(23)1(1)1(12ds s i s i e e s s i (20) χ depends somewhat on β but strongly on the energy spread.The FEL process starts from the radiation emitted in the first gain length of the undulator. The number N of undulator periods in the first gain length (equation (16)) is ρπ341=G N (21) and the spontaneous peak power P emitted during the first gain length (peak current Peak I ): ()PhotG Peak n G electron L I K JJ N GeV E x W P λβεβ22219],1[][1048.1][= (22) For a relative energy spread of 10-4 this value is circa 19 W for a beta-function of 2.5 m. The development of the power along the undulator axis z is described by()()G L z e P z P 9β= (23)The amplification is stopped by an undulator with constant period length at the saturation length z sat G peak G satL P P L z +¸¸¹·¨¨©§=)(9ln β (24) with][][109GeV E A I P Peak Peak ρ=In the following it is assumed that the beta-function is 0.5 m. As shown before, all results depend strongly on the beta function.The development of the peak power, including saturation, is ¸¸¹·¨¨©§−+=19)(19)(G G L z Peak L zz e P P e P P ββ (25) The dependence of the peak power on the undulator length is shown for two cases (energy spread of 10-4 and an energy spread of 5.10-4) in figs. 12 and 13. The peak current I peak is 200A. Obviously, the final peak power is the same in both cases. The energy spread only defines the length of the undulator [27].The peak power of one pulse is ca. 1.33. 108 W. One pulse with an assumed bunch length of 3 psec produces an energy of π2.3.10-12 1.33 108 J or about 1 mJ. In order to produce a cw power of 50 W, a pulse repetition rate of 50 kHz is required.The required average current is fairly modest. Working on the basis of a 1.5 GHz linac RF system (bucket repetition of time of 0.67 nsec) the average current is200(3/667)(5.104/1,5.109) A = 30µA.4. Possible Layout of the FEL sourceA possible layout of the EUV laser system for a wafer fab is shown in fig. 14. It is assumed that the EUV source (linac, undulator etc.) will be located in the basement of the factory. The EUV radiation enters the clean room via evacuated pipes which come up through the floor. The normalized emittance of the beam (assumed to be10-6) determines the energy of the linac: 500 MeV.The accelerating structures can be either superconductive (Nb-cavities) or normal conducting (Cu-cavities).Normal conductive cavities allow simple and short structures: energy gains of up 40 MeV/m and higher are possible. The length of the linac would be less than 15 m.The accelerating gradient for superconductive linacs is at the moment ≥20 MeV/m and, as a result, a superconducting linac will be almost twice as long as a room temperature linac.The accelerated beam is directly sent to a 11m long SASE undulator. All bends along the trajectory have to be isochronous in order to prevent bunch lengthening.The installation of most of the equipment in auxiliary and/or distant rooms, such as the basement is an integral part of the following layout considerations. Fig. 14 shows one possible way of distributing the EUV light. A central linac provides a distributed undulator system with an electron beam. The beam is switched by magnets to the undulators. The fact that several SASE superconducting undulators are fed from one linac reduces the capital cost per stepper.ConclusionThe German Federal Ministry of Education and Research initiated a program on plasmas generated by lasers or gas discharges as sources of EUV light (50 W at 13.5 nm, bandwidth 2%) for the next generation lithography (NGL). In the initial phase of this project it was feltthat sources based on synchrotron radiation should be reconsidered. The aim of this report is to investigate such sources.The report starts with investigations into the emitted power of small storage rings with energies of less than 0.6 GeV. The total emitted power collected over the entire circumference is less than 50 W (stored current of 1 A).In a next step storage rings were equipped with wigglers. It is easier to collect the wiggler radiation but the conclusions are similar: the total emitted power is insufficient.In the following step storage rings with undulators have been studied. Under certain circumstances these devices have clear advantages over the wiggler system. In undulators the emitted photons can interfere coherently. This fact makes it possible to amplify the intensity within the required bandwidth and minimize it outside. In order to optimise the output power, superconducting mini-undulators are required.Free Electron Lasers (FELs) consisting of linacs and undulators produce light with a high degree of coherence and of high power. Unwanted out-of-band-radiation is almost completely eliminated. The study shows that the so-called SASE technique (Self Amplified Stimulated Emission) can easily produce the required EUV power. The SASE effect was already observed experimentally at wavelengths as low as 80 nm.As a result, synchrotron radiation (mainly FELs) can easily fulfil the stringent requirements for the Next Generation of Lithography based on EUV when suficet space is forseen in a wafer fab.AcknowledgementsThis study is based on numerous discussions with and contributions from many colleagues. The authors would like to thank them. It is impossible to mention all names of the individuals who contributed to this study. Our special thanks go to DESY (Prof. Schneider, Prof. Materlik, Dr. Rossbach, Dr. Pflueger and the SASE FEL team), to ESRF (Dr. Elleaume and his team), BNL (Dr. Ben-Zvi and colleagues), Swiss Light Source (Prof. Wrulich, Dr. Ingold), ENEA (Prof. Renieri), Elettra (Dr. Walker and colleagues), JLab (Dr. Neil), University of Virginia (Prof. Norum, Prof. Gallagher), LBNL (Dr. Jackson, Dr. Robin and colleagues), Duke University (Profs. Edwards and Litivenko), UCLA (Prof. C. Pellegrini), ACCEL (Drs. Klein, Krischel, Schillo and Geisler), and many others.9. Literature[1] B. Nikolaus, O. Semprez, G.Blumenstock, P. Das, 193 nm Microlithography and DUVLight Source Design, Lithography Resource, Edition 9, March 1999, ICG Publishing Ltd., London UK[2] G. R. Bogart, et al., 200 mm SCALPEL mask development, Proc.SPIE, Vol 3676,Emerging Lithography Techniques III, p. 171, Y.Vladimirski, Editor, Santa Clara1999 [3] R. 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Whitehurst, Experiments on Radiation by fast Electron Beams, J. Appl. Physics, Vol. 24 (1953)826[20] J. Rossbach et al., A VUV free electron laser at the TESLA test acility at DESY, Nucl. Instr. Meth. 375 (1996) 269R.Tatchyn et al., Research and development toward a 4.5-1.5 Angstroem linac coherent Light source (LLS) at SLAC, A375 (1996) 274S. ton et al., Status of the Advanced Photon Source low-energy undulator testline, Nucl. Instr.Meth. A 407 (1998)8V. N.Litivenko et al., First UV/visible lasing with the OK-4/Duke storage ring FEL ;Nucl. Instr.Meth. A 407 (1998)8。
物理学专业英语

华中师范大学物理学院物理学专业英语仅供内部学习参考!2014一、课程的任务和教学目的通过学习《物理学专业英语》,学生将掌握物理学领域使用频率较高的专业词汇和表达方法,进而具备基本的阅读理解物理学专业文献的能力。
通过分析《物理学专业英语》课程教材中的范文,学生还将从英语角度理解物理学中个学科的研究内容和主要思想,提高学生的专业英语能力和了解物理学研究前沿的能力。
培养专业英语阅读能力,了解科技英语的特点,提高专业外语的阅读质量和阅读速度;掌握一定量的本专业英文词汇,基本达到能够独立完成一般性本专业外文资料的阅读;达到一定的笔译水平。
要求译文通顺、准确和专业化。
要求译文通顺、准确和专业化。
二、课程内容课程内容包括以下章节:物理学、经典力学、热力学、电磁学、光学、原子物理、统计力学、量子力学和狭义相对论三、基本要求1.充分利用课内时间保证充足的阅读量(约1200~1500词/学时),要求正确理解原文。
2.泛读适量课外相关英文读物,要求基本理解原文主要内容。
3.掌握基本专业词汇(不少于200词)。
4.应具有流利阅读、翻译及赏析专业英语文献,并能简单地进行写作的能力。
四、参考书目录1 Physics 物理学 (1)Introduction to physics (1)Classical and modern physics (2)Research fields (4)V ocabulary (7)2 Classical mechanics 经典力学 (10)Introduction (10)Description of classical mechanics (10)Momentum and collisions (14)Angular momentum (15)V ocabulary (16)3 Thermodynamics 热力学 (18)Introduction (18)Laws of thermodynamics (21)System models (22)Thermodynamic processes (27)Scope of thermodynamics (29)V ocabulary (30)4 Electromagnetism 电磁学 (33)Introduction (33)Electrostatics (33)Magnetostatics (35)Electromagnetic induction (40)V ocabulary (43)5 Optics 光学 (45)Introduction (45)Geometrical optics (45)Physical optics (47)Polarization (50)V ocabulary (51)6 Atomic physics 原子物理 (52)Introduction (52)Electronic configuration (52)Excitation and ionization (56)V ocabulary (59)7 Statistical mechanics 统计力学 (60)Overview (60)Fundamentals (60)Statistical ensembles (63)V ocabulary (65)8 Quantum mechanics 量子力学 (67)Introduction (67)Mathematical formulations (68)Quantization (71)Wave-particle duality (72)Quantum entanglement (75)V ocabulary (77)9 Special relativity 狭义相对论 (79)Introduction (79)Relativity of simultaneity (80)Lorentz transformations (80)Time dilation and length contraction (81)Mass-energy equivalence (82)Relativistic energy-momentum relation (86)V ocabulary (89)正文标记说明:蓝色Arial字体(例如energy):已知的专业词汇蓝色Arial字体加下划线(例如electromagnetism):新学的专业词汇黑色Times New Roman字体加下划线(例如postulate):新学的普通词汇1 Physics 物理学1 Physics 物理学Introduction to physicsPhysics is a part of natural philosophy and a natural science that involves the study of matter and its motion through space and time, along with related concepts such as energy and force. More broadly, it is the general analysis of nature, conducted in order to understand how the universe behaves.Physics is one of the oldest academic disciplines, perhaps the oldest through its inclusion of astronomy. Over the last two millennia, physics was a part of natural philosophy along with chemistry, certain branches of mathematics, and biology, but during the Scientific Revolution in the 17th century, the natural sciences emerged as unique research programs in their own right. Physics intersects with many interdisciplinary areas of research, such as biophysics and quantum chemistry,and the boundaries of physics are not rigidly defined. New ideas in physics often explain the fundamental mechanisms of other sciences, while opening new avenues of research in areas such as mathematics and philosophy.Physics also makes significant contributions through advances in new technologies that arise from theoretical breakthroughs. For example, advances in the understanding of electromagnetism or nuclear physics led directly to the development of new products which have dramatically transformed modern-day society, such as television, computers, domestic appliances, and nuclear weapons; advances in thermodynamics led to the development of industrialization; and advances in mechanics inspired the development of calculus.Core theoriesThough physics deals with a wide variety of systems, certain theories are used by all physicists. Each of these theories were experimentally tested numerous times and found correct as an approximation of nature (within a certain domain of validity).For instance, the theory of classical mechanics accurately describes the motion of objects, provided they are much larger than atoms and moving at much less than the speed of light. These theories continue to be areas of active research, and a remarkable aspect of classical mechanics known as chaos was discovered in the 20th century, three centuries after the original formulation of classical mechanics by Isaac Newton (1642–1727) 【艾萨克·牛顿】.University PhysicsThese central theories are important tools for research into more specialized topics, and any physicist, regardless of his or her specialization, is expected to be literate in them. These include classical mechanics, quantum mechanics, thermodynamics and statistical mechanics, electromagnetism, and special relativity.Classical and modern physicsClassical mechanicsClassical physics includes the traditional branches and topics that were recognized and well-developed before the beginning of the 20th century—classical mechanics, acoustics, optics, thermodynamics, and electromagnetism.Classical mechanics is concerned with bodies acted on by forces and bodies in motion and may be divided into statics (study of the forces on a body or bodies at rest), kinematics (study of motion without regard to its causes), and dynamics (study of motion and the forces that affect it); mechanics may also be divided into solid mechanics and fluid mechanics (known together as continuum mechanics), the latter including such branches as hydrostatics, hydrodynamics, aerodynamics, and pneumatics.Acoustics is the study of how sound is produced, controlled, transmitted and received. Important modern branches of acoustics include ultrasonics, the study of sound waves of very high frequency beyond the range of human hearing; bioacoustics the physics of animal calls and hearing, and electroacoustics, the manipulation of audible sound waves using electronics.Optics, the study of light, is concerned not only with visible light but also with infrared and ultraviolet radiation, which exhibit all of the phenomena of visible light except visibility, e.g., reflection, refraction, interference, diffraction, dispersion, and polarization of light.Heat is a form of energy, the internal energy possessed by the particles of which a substance is composed; thermodynamics deals with the relationships between heat and other forms of energy.Electricity and magnetism have been studied as a single branch of physics since the intimate connection between them was discovered in the early 19th century; an electric current gives rise to a magnetic field and a changing magnetic field induces an electric current. Electrostatics deals with electric charges at rest, electrodynamics with moving charges, and magnetostatics with magnetic poles at rest.Modern PhysicsClassical physics is generally concerned with matter and energy on the normal scale of1 Physics 物理学observation, while much of modern physics is concerned with the behavior of matter and energy under extreme conditions or on the very large or very small scale.For example, atomic and nuclear physics studies matter on the smallest scale at which chemical elements can be identified.The physics of elementary particles is on an even smaller scale, as it is concerned with the most basic units of matter; this branch of physics is also known as high-energy physics because of the extremely high energies necessary to produce many types of particles in large particle accelerators. On this scale, ordinary, commonsense notions of space, time, matter, and energy are no longer valid.The two chief theories of modern physics present a different picture of the concepts of space, time, and matter from that presented by classical physics.Quantum theory is concerned with the discrete, rather than continuous, nature of many phenomena at the atomic and subatomic level, and with the complementary aspects of particles and waves in the description of such phenomena.The theory of relativity is concerned with the description of phenomena that take place in a frame of reference that is in motion with respect to an observer; the special theory of relativity is concerned with relative uniform motion in a straight line and the general theory of relativity with accelerated motion and its connection with gravitation.Both quantum theory and the theory of relativity find applications in all areas of modern physics.Difference between classical and modern physicsWhile physics aims to discover universal laws, its theories lie in explicit domains of applicability. Loosely speaking, the laws of classical physics accurately describe systems whose important length scales are greater than the atomic scale and whose motions are much slower than the speed of light. Outside of this domain, observations do not match their predictions.Albert Einstein【阿尔伯特·爱因斯坦】contributed the framework of special relativity, which replaced notions of absolute time and space with space-time and allowed an accurate description of systems whose components have speeds approaching the speed of light.Max Planck【普朗克】, Erwin Schrödinger【薛定谔】, and others introduced quantum mechanics, a probabilistic notion of particles and interactions that allowed an accurate description of atomic and subatomic scales.Later, quantum field theory unified quantum mechanics and special relativity.General relativity allowed for a dynamical, curved space-time, with which highly massiveUniversity Physicssystems and the large-scale structure of the universe can be well-described. General relativity has not yet been unified with the other fundamental descriptions; several candidate theories of quantum gravity are being developed.Research fieldsContemporary research in physics can be broadly divided into condensed matter physics; atomic, molecular, and optical physics; particle physics; astrophysics; geophysics and biophysics. Some physics departments also support research in Physics education.Since the 20th century, the individual fields of physics have become increasingly specialized, and today most physicists work in a single field for their entire careers. "Universalists" such as Albert Einstein (1879–1955) and Lev Landau (1908–1968)【列夫·朗道】, who worked in multiple fields of physics, are now very rare.Condensed matter physicsCondensed matter physics is the field of physics that deals with the macroscopic physical properties of matter. In particular, it is concerned with the "condensed" phases that appear whenever the number of particles in a system is extremely large and the interactions between them are strong.The most familiar examples of condensed phases are solids and liquids, which arise from the bonding by way of the electromagnetic force between atoms. More exotic condensed phases include the super-fluid and the Bose–Einstein condensate found in certain atomic systems at very low temperature, the superconducting phase exhibited by conduction electrons in certain materials,and the ferromagnetic and antiferromagnetic phases of spins on atomic lattices.Condensed matter physics is by far the largest field of contemporary physics.Historically, condensed matter physics grew out of solid-state physics, which is now considered one of its main subfields. The term condensed matter physics was apparently coined by Philip Anderson when he renamed his research group—previously solid-state theory—in 1967. In 1978, the Division of Solid State Physics of the American Physical Society was renamed as the Division of Condensed Matter Physics.Condensed matter physics has a large overlap with chemistry, materials science, nanotechnology and engineering.Atomic, molecular and optical physicsAtomic, molecular, and optical physics (AMO) is the study of matter–matter and light–matter interactions on the scale of single atoms and molecules.1 Physics 物理学The three areas are grouped together because of their interrelationships, the similarity of methods used, and the commonality of the energy scales that are relevant. All three areas include both classical, semi-classical and quantum treatments; they can treat their subject from a microscopic view (in contrast to a macroscopic view).Atomic physics studies the electron shells of atoms. Current research focuses on activities in quantum control, cooling and trapping of atoms and ions, low-temperature collision dynamics and the effects of electron correlation on structure and dynamics. Atomic physics is influenced by the nucleus (see, e.g., hyperfine splitting), but intra-nuclear phenomena such as fission and fusion are considered part of high-energy physics.Molecular physics focuses on multi-atomic structures and their internal and external interactions with matter and light.Optical physics is distinct from optics in that it tends to focus not on the control of classical light fields by macroscopic objects, but on the fundamental properties of optical fields and their interactions with matter in the microscopic realm.High-energy physics (particle physics) and nuclear physicsParticle physics is the study of the elementary constituents of matter and energy, and the interactions between them.In addition, particle physicists design and develop the high energy accelerators,detectors, and computer programs necessary for this research. The field is also called "high-energy physics" because many elementary particles do not occur naturally, but are created only during high-energy collisions of other particles.Currently, the interactions of elementary particles and fields are described by the Standard Model.●The model accounts for the 12 known particles of matter (quarks and leptons) thatinteract via the strong, weak, and electromagnetic fundamental forces.●Dynamics are described in terms of matter particles exchanging gauge bosons (gluons,W and Z bosons, and photons, respectively).●The Standard Model also predicts a particle known as the Higgs boson. In July 2012CERN, the European laboratory for particle physics, announced the detection of a particle consistent with the Higgs boson.Nuclear Physics is the field of physics that studies the constituents and interactions of atomic nuclei. The most commonly known applications of nuclear physics are nuclear power generation and nuclear weapons technology, but the research has provided application in many fields, including those in nuclear medicine and magnetic resonance imaging, ion implantation in materials engineering, and radiocarbon dating in geology and archaeology.University PhysicsAstrophysics and Physical CosmologyAstrophysics and astronomy are the application of the theories and methods of physics to the study of stellar structure, stellar evolution, the origin of the solar system, and related problems of cosmology. Because astrophysics is a broad subject, astrophysicists typically apply many disciplines of physics, including mechanics, electromagnetism, statistical mechanics, thermodynamics, quantum mechanics, relativity, nuclear and particle physics, and atomic and molecular physics.The discovery by Karl Jansky in 1931 that radio signals were emitted by celestial bodies initiated the science of radio astronomy. Most recently, the frontiers of astronomy have been expanded by space exploration. Perturbations and interference from the earth's atmosphere make space-based observations necessary for infrared, ultraviolet, gamma-ray, and X-ray astronomy.Physical cosmology is the study of the formation and evolution of the universe on its largest scales. Albert Einstein's theory of relativity plays a central role in all modern cosmological theories. In the early 20th century, Hubble's discovery that the universe was expanding, as shown by the Hubble diagram, prompted rival explanations known as the steady state universe and the Big Bang.The Big Bang was confirmed by the success of Big Bang nucleo-synthesis and the discovery of the cosmic microwave background in 1964. The Big Bang model rests on two theoretical pillars: Albert Einstein's general relativity and the cosmological principle (On a sufficiently large scale, the properties of the Universe are the same for all observers). Cosmologists have recently established the ΛCDM model (the standard model of Big Bang cosmology) of the evolution of the universe, which includes cosmic inflation, dark energy and dark matter.Current research frontiersIn condensed matter physics, an important unsolved theoretical problem is that of high-temperature superconductivity. Many condensed matter experiments are aiming to fabricate workable spintronics and quantum computers.In particle physics, the first pieces of experimental evidence for physics beyond the Standard Model have begun to appear. Foremost among these are indications that neutrinos have non-zero mass. These experimental results appear to have solved the long-standing solar neutrino problem, and the physics of massive neutrinos remains an area of active theoretical and experimental research. Particle accelerators have begun probing energy scales in the TeV range, in which experimentalists are hoping to find evidence for the super-symmetric particles, after discovery of the Higgs boson.Theoretical attempts to unify quantum mechanics and general relativity into a single theory1 Physics 物理学of quantum gravity, a program ongoing for over half a century, have not yet been decisively resolved. The current leading candidates are M-theory, superstring theory and loop quantum gravity.Many astronomical and cosmological phenomena have yet to be satisfactorily explained, including the existence of ultra-high energy cosmic rays, the baryon asymmetry, the acceleration of the universe and the anomalous rotation rates of galaxies.Although much progress has been made in high-energy, quantum, and astronomical physics, many everyday phenomena involving complexity, chaos, or turbulence are still poorly understood. Complex problems that seem like they could be solved by a clever application of dynamics and mechanics remain unsolved; examples include the formation of sand-piles, nodes in trickling water, the shape of water droplets, mechanisms of surface tension catastrophes, and self-sorting in shaken heterogeneous collections.These complex phenomena have received growing attention since the 1970s for several reasons, including the availability of modern mathematical methods and computers, which enabled complex systems to be modeled in new ways. Complex physics has become part of increasingly interdisciplinary research, as exemplified by the study of turbulence in aerodynamics and the observation of pattern formation in biological systems.Vocabulary★natural science 自然科学academic disciplines 学科astronomy 天文学in their own right 凭他们本身的实力intersects相交,交叉interdisciplinary交叉学科的,跨学科的★quantum 量子的theoretical breakthroughs 理论突破★electromagnetism 电磁学dramatically显著地★thermodynamics热力学★calculus微积分validity★classical mechanics 经典力学chaos 混沌literate 学者★quantum mechanics量子力学★thermodynamics and statistical mechanics热力学与统计物理★special relativity狭义相对论is concerned with 关注,讨论,考虑acoustics 声学★optics 光学statics静力学at rest 静息kinematics运动学★dynamics动力学ultrasonics超声学manipulation 操作,处理,使用University Physicsinfrared红外ultraviolet紫外radiation辐射reflection 反射refraction 折射★interference 干涉★diffraction 衍射dispersion散射★polarization 极化,偏振internal energy 内能Electricity电性Magnetism 磁性intimate 亲密的induces 诱导,感应scale尺度★elementary particles基本粒子★high-energy physics 高能物理particle accelerators 粒子加速器valid 有效的,正当的★discrete离散的continuous 连续的complementary 互补的★frame of reference 参照系★the special theory of relativity 狭义相对论★general theory of relativity 广义相对论gravitation 重力,万有引力explicit 详细的,清楚的★quantum field theory 量子场论★condensed matter physics凝聚态物理astrophysics天体物理geophysics地球物理Universalist博学多才者★Macroscopic宏观Exotic奇异的★Superconducting 超导Ferromagnetic铁磁质Antiferromagnetic 反铁磁质★Spin自旋Lattice 晶格,点阵,网格★Society社会,学会★microscopic微观的hyperfine splitting超精细分裂fission分裂,裂变fusion熔合,聚变constituents成分,组分accelerators加速器detectors 检测器★quarks夸克lepton 轻子gauge bosons规范玻色子gluons胶子★Higgs boson希格斯玻色子CERN欧洲核子研究中心★Magnetic Resonance Imaging磁共振成像,核磁共振ion implantation 离子注入radiocarbon dating放射性碳年代测定法geology地质学archaeology考古学stellar 恒星cosmology宇宙论celestial bodies 天体Hubble diagram 哈勃图Rival竞争的★Big Bang大爆炸nucleo-synthesis核聚合,核合成pillar支柱cosmological principle宇宙学原理ΛCDM modelΛ-冷暗物质模型cosmic inflation宇宙膨胀1 Physics 物理学fabricate制造,建造spintronics自旋电子元件,自旋电子学★neutrinos 中微子superstring 超弦baryon重子turbulence湍流,扰动,骚动catastrophes突变,灾变,灾难heterogeneous collections异质性集合pattern formation模式形成University Physics2 Classical mechanics 经典力学IntroductionIn physics, classical mechanics is one of the two major sub-fields of mechanics, which is concerned with the set of physical laws describing the motion of bodies under the action of a system of forces. The study of the motion of bodies is an ancient one, making classical mechanics one of the oldest and largest subjects in science, engineering and technology.Classical mechanics describes the motion of macroscopic objects, from projectiles to parts of machinery, as well as astronomical objects, such as spacecraft, planets, stars, and galaxies. Besides this, many specializations within the subject deal with gases, liquids, solids, and other specific sub-topics.Classical mechanics provides extremely accurate results as long as the domain of study is restricted to large objects and the speeds involved do not approach the speed of light. When the objects being dealt with become sufficiently small, it becomes necessary to introduce the other major sub-field of mechanics, quantum mechanics, which reconciles the macroscopic laws of physics with the atomic nature of matter and handles the wave–particle duality of atoms and molecules. In the case of high velocity objects approaching the speed of light, classical mechanics is enhanced by special relativity. General relativity unifies special relativity with Newton's law of universal gravitation, allowing physicists to handle gravitation at a deeper level.The initial stage in the development of classical mechanics is often referred to as Newtonian mechanics, and is associated with the physical concepts employed by and the mathematical methods invented by Newton himself, in parallel with Leibniz【莱布尼兹】, and others.Later, more abstract and general methods were developed, leading to reformulations of classical mechanics known as Lagrangian mechanics and Hamiltonian mechanics. These advances were largely made in the 18th and 19th centuries, and they extend substantially beyond Newton's work, particularly through their use of analytical mechanics. Ultimately, the mathematics developed for these were central to the creation of quantum mechanics.Description of classical mechanicsThe following introduces the basic concepts of classical mechanics. For simplicity, it often2 Classical mechanics 经典力学models real-world objects as point particles, objects with negligible size. The motion of a point particle is characterized by a small number of parameters: its position, mass, and the forces applied to it.In reality, the kind of objects that classical mechanics can describe always have a non-zero size. (The physics of very small particles, such as the electron, is more accurately described by quantum mechanics). Objects with non-zero size have more complicated behavior than hypothetical point particles, because of the additional degrees of freedom—for example, a baseball can spin while it is moving. However, the results for point particles can be used to study such objects by treating them as composite objects, made up of a large number of interacting point particles. The center of mass of a composite object behaves like a point particle.Classical mechanics uses common-sense notions of how matter and forces exist and interact. It assumes that matter and energy have definite, knowable attributes such as where an object is in space and its speed. It also assumes that objects may be directly influenced only by their immediate surroundings, known as the principle of locality.In quantum mechanics objects may have unknowable position or velocity, or instantaneously interact with other objects at a distance.Position and its derivativesThe position of a point particle is defined with respect to an arbitrary fixed reference point, O, in space, usually accompanied by a coordinate system, with the reference point located at the origin of the coordinate system. It is defined as the vector r from O to the particle.In general, the point particle need not be stationary relative to O, so r is a function of t, the time elapsed since an arbitrary initial time.In pre-Einstein relativity (known as Galilean relativity), time is considered an absolute, i.e., the time interval between any given pair of events is the same for all observers. In addition to relying on absolute time, classical mechanics assumes Euclidean geometry for the structure of space.Velocity and speedThe velocity, or the rate of change of position with time, is defined as the derivative of the position with respect to time. In classical mechanics, velocities are directly additive and subtractive as vector quantities; they must be dealt with using vector analysis.When both objects are moving in the same direction, the difference can be given in terms of speed only by ignoring direction.University PhysicsAccelerationThe acceleration , or rate of change of velocity, is the derivative of the velocity with respect to time (the second derivative of the position with respect to time).Acceleration can arise from a change with time of the magnitude of the velocity or of the direction of the velocity or both . If only the magnitude v of the velocity decreases, this is sometimes referred to as deceleration , but generally any change in the velocity with time, including deceleration, is simply referred to as acceleration.Inertial frames of referenceWhile the position and velocity and acceleration of a particle can be referred to any observer in any state of motion, classical mechanics assumes the existence of a special family of reference frames in terms of which the mechanical laws of nature take a comparatively simple form. These special reference frames are called inertial frames .An inertial frame is such that when an object without any force interactions (an idealized situation) is viewed from it, it appears either to be at rest or in a state of uniform motion in a straight line. This is the fundamental definition of an inertial frame. They are characterized by the requirement that all forces entering the observer's physical laws originate in identifiable sources (charges, gravitational bodies, and so forth).A non-inertial reference frame is one accelerating with respect to an inertial one, and in such a non-inertial frame a particle is subject to acceleration by fictitious forces that enter the equations of motion solely as a result of its accelerated motion, and do not originate in identifiable sources. These fictitious forces are in addition to the real forces recognized in an inertial frame.A key concept of inertial frames is the method for identifying them. For practical purposes, reference frames that are un-accelerated with respect to the distant stars are regarded as good approximations to inertial frames.Forces; Newton's second lawNewton was the first to mathematically express the relationship between force and momentum . Some physicists interpret Newton's second law of motion as a definition of force and mass, while others consider it a fundamental postulate, a law of nature. Either interpretation has the same mathematical consequences, historically known as "Newton's Second Law":a m t v m t p F ===d )(d d dThe quantity m v is called the (canonical ) momentum . The net force on a particle is thus equal to rate of change of momentum of the particle with time.So long as the force acting on a particle is known, Newton's second law is sufficient to。
将生命推向极致

将生命推向极致
惜友
【期刊名称】《发明与创新(综合科技)》
【年(卷),期】2006(000)012
【摘要】泰戈尔的哲理诗中有句名言:当你把所有的错误都关在门外,真理也就被拒绝了。
这话意味深长且发人深省,向世人揭示出其实“讨厌”的错误也有不菲的价值。
【总页数】1页(P1)
【作者】惜友
【作者单位】无
【正文语种】中文
【中图分类】G
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a r X i v :a s t r o -p h /9712049v 1 3 D e c 1997A STROPHYSICAL J OURNAL L ETTERS ,IN PRESSPreprint typeset using L A T E X style emulateapjEXTREME ULTRA VIOLET EMISSION FROM CLUSTERS OF GALAXIES:INVERSE COMPTON RADIATION FROM ARELIC POPULATION OF COSMIC RAY ELECTRONS?C RAIG L.S ARAZINDepartment of Astronomy,University of Virginia,P.O.Box 3818,Charlottesville,V A 22903-0818;cls7i@,ANDR ICHARD L IEUDepartment of Physics,University of Alabama,Huntsville,AL 35899;lieur@Astrophysical Journal Letters,in pressABSTRACTWe suggest that the luminous extreme ultraviolet (EUV)emission which has been detected recently from clus-ters of galaxies is Inverse Compton (IC)scattering of Cosmic Microwave Background (CMB)radiation by low energy cosmic ray electrons in the intracluster medium.The cosmic ray electrons would have Lorentz factors of γ∼300,and would lose energy primarily by emitting EUV radiation.These particles have lifetimes comparable to the Hubble time;thus,the electrons might represent a relic population of cosmic rays produced by nonthermal activity over the history of the cluster.The IC model naturally explains the observed increase in the ratio of EUV to X-ray emission with radius in clusters.The required energy in cosmic ray electrons is typically 1–10%of the thermal energy content of the intracluster gas.We suggest that the cosmic ray electrons might have been produced by supernovae in galaxies,by radio galaxies,or by particle acceleration in intracluster shocks.Subject headings:cosmic rays —galaxies:clusters:general —intergalactic medium —radiation mechanisms:nonthermal —ultraviolet:general —X-rays:general1.INTRODUCTIONRecently,observations of clusters of galaxies with the Ex-treme Ultraviolet Explorer (EUVE )Deep Survey instrument us-ing the Lexan B filter have revealed extreme ultraviolet (EUV)emission in excess of that expected from the previously ob-served,X-ray emitting intracluster medium (ICM).The pass-band of this instrument is 65–248eV .The excess EUV emission is seen in the Virgo cluster (Lieu et al.1996b,c),Coma clus-ter (Lieu et al.1996a),Abell 1795(Mittaz,Lieu,&Lockman 1997),Abell 2199,and Abell 4038(Bowyer,Lieu,&Mittaz 1997).The observed EUV luminosities in this band,correctedfor Galactic absorption,range from L EUV ≈9×1042h −250erg s−1in Virgo to L EUV ≈2×1045h −250erg s−1in A1795(where the Hubble constant is H o =50h 50km s −1Mpc −1).In all of the cases except A2199,there is an associated soft X-ray excess seen in the ROSAT PSPC spectra of the clusters.The ratio of EUVE to PSPC fluxes and the correction for Galactic absorp-tion indicate that the emitted spectrum drops rapidly with pho-ton energy across the EUVE band.In A1795,the best-fit model for the spectrum implies that the average emitted photon energy is h νEUV ≈75eV .The clusters with detected excess EUV emission are varied in their other properties.Virgo is not as rich as the others.Sev-eral have cooling flows in their centers,but Coma and A4038do a has a strong radio halo,but A1795and A2199do not.Virgo is the closest cluster,while A1795is at a redshift of z =0.0631.The EUV emission is extended over a scale comparable to the size of the cluster.In the three more distant clusters (A1795,A2199,and A4038),the EUV emission falls off with radius more slowly than the cluster X-ray emission,so that the ratio ofEUV emission to X-ray emission increases rapidly with radius.Virgo and Coma do not show such a trend,but are closer than the others,so the same angular scale doesn’t correspond to as large a physical radius.In the papers reporting the discovery of this EUV emis-sion from clusters,a thermal emission model from diffuse gas was suggested.The temperature of this gas would be T warm ∼(1−10)×105K.While it is natural to suggest such a model,given that the X-ray emission from clusters is produced by ther-mal emission from diffuse gas with a higher temperature,there are a number of concerns with this hypothesis (Fabian 1996).First,a rather large mass of this warm gas is required.In A1795,this mass is ≈1015h −5⁄250M ⊙,which is about the virial mass of the cluster (Mittaz et al.1997).Moreover,gas at these temper-atures cools very rapidly.In A1795,the total cooling rate ofgas would exceed 105h −250M ⊙yr −1.There is no obvious energy source for this gas;Mittaz et al.suggest accretion of interclus-ter gas at a very high rate (∼>105h −250M ⊙yr −1).In this thermal model,the bulk of the radiation would be line emission.A search for the O VI line,which occurs at longer wavelengths but is produced in gas of the same temperature,did not detect the line in some of the same clusters which show EUV emis-sion (Dixon,Hurwitz,&Ferguson 1996).Finally,the observed spatial distribution of EUV emission and the fact that the ratio of EUV to X-ray emission increases strongly with radius is not an obvious consequence of this model.Although a small amount of EUV emission might have been expected in the centers of cooling flow clusters if the gas contin-ues to cool below X-ray emitting temperatures,this cannot be the explanation of the observed EUV emission (Fabian 1996).First,the EUV emission is much too luminous,and would im-ply cooling rates ∼>102times higher than those seen in X-rays.12EUV FROM CLUSTERS Second,not all of the clusters with EUV emission have coolingflows.Finally,the spatial distribution of the EUV emission isthe opposite of that expected for coolingflow gas;in A1795,forexample,most of the EUV luminosity is at large radii,while thecoolingflow gas is located at the cluster center where the gasdensity is highest.Fabian(1997)proposed a thermal model which avoids manyof these problems.He suggested that the warm gas was locatedin turbulent mixing layers at the interface between embeddedcold clouds(with T∼104K)and the ICM(T∼108K).Thepower source for the EUV emission is then the thermal energycontent of the ICM,which is large.Energetically,this modelworks for most of the clusters,but may have difficulties with thevery luminous EUV emission of A1795.The gas in the mixinglayers is recycled,so that the cooling rates can be greatly re-duced.It is not clear that this model would predict the extendedspatial distribution of the EUV emission when compared to theX-ray emission.2.INVERSE COMPTON EMISSIONThe difficulties with the thermal model for the EUV emis-sion have led us to consider a nonthermal model,in which thisradiation is produced by Inverse Compton(IC)scattering ofCosmic Microwave Background(CMB)radiation by low en-ergy cosmic ray electrons.Because it has the largest luminosityand posed the greatest problems for the thermal model,we willuse parameters for the EUV emission drawn from the obser-vations of A1795(Mittaz et al.1997).Consider a CMB pho-ton with a frequencyνCMB which is scattered by a relativisticelectron with an energy ofγm e c2,whereγis the Lorentz fac-tor.On average,the resulting IC photon will have an energyof hνIC =(4⁄3)γ2 hνCMB .The typical photon in the CMBhas an energy of hνCMB ≈2.8kT CMB,where T CMB=2.73K isthe temperature of the CMB.If we associate hνIC with the av-erage energy of EUV photons detected from a cluster,then theaverage Lorentz factor of the cosmic ray electrons isγ ≈300hνEUV3⁄π)γ2(eB⁄m e c)sinα,whereαis the pitch angle of the electron.This givesνrad ∼<5×105γ 1µG Hz,(2)where the inequality comes from the fact that sinα≤1.Thus,this radio emission would be well-below the Earth’s iono-spheric cut-off,and unobservable.The ratio of the luminosityof the synchrotron emission to that of the IC emission isL radU CMB≈0.095 B300n e300 2cm−3.(5)This inequality is satisfied in most of the volume of a typi-cal cluster,and is particularly true at the outer radii where theEUV excess seems to be strongest(Mittaz et al.1997).How-ever,at the centers of rich clusters,particularly in the coolingflows,the ICM density exceeds n crit and Coulomb losses maybe dominant.This might help to explain the lack of detectableEUV emission in these regions(Mittaz et al.1997),althoughthe brightnesses of the soft X-ray emission there also makes itmore difficult to separate EUV and X-ray emission.IC losses will dominate for the low energy cosmic raysneeded to produce the observed EUV emission from clusters.The lifetime of these particles is thent IC=γm e c23σT cγ2U CMB=7.7×109 γSARAZIN&LIEU3due to the total history of particle acceleration and activity overmost of the lifetime of the universe in any diffuse regions(with n e∼<n crit).To our knowledge,this unique role of the EUV spectral band has not been appreciated previously.On the otherhand,the energy density of the CMB increases with redshift as U CMB∝(1+z)4.The lifetime for IC losses becomes much shorter than the Hubble time for redshifts z∼<2.3.REQUIRED ENERGY IN COSMIC RAYSLet n CR(γ)dγbe the number density of cosmic ray electrons with Lorentz factors betweenγandγ+dγ.Define an average Lorentz factor asγ ≡n cr(γ)γ2dγ3σT1045ergs−1 γE gas=0.085 L EUV300 −1×M gas7×107K −1,(10)where M gas is the mass of the ICM,and T is its average tem-perature.The ratio of pressures is lower by a factor of two, since the cosmic rays are relativistic and the thermal gas is not. Thus,the production of the observed EUV emission in clusters requires a relic cosmic ray electron population with an energy density and pressure which are1–10%of that of the thermal gas.One concern is that the inclusion of cosmic ray ions may in-crease the total CR energy significantly.If the cosmic rays have a very steep energy spectrum,and if the number of cosmic ray ions at150MeV(γ≈300in electrons)is reduced because these particles are not relativistic,then the increase in pressure due to ions might only be a factor of a few.On the other hand,cosmic ray ions outnumber electrons by a factor of∼102at the top of the Earth’s atmosphere(e.g.,Webber1983).4.SPATIAL DISTRIBUTION OF EUV EMISSIONThe Inverse Compton model naturally explains the spatial distribution of the EUV emission and the fact the EUV to X-ray ratio increases rapidly with radius.The X-ray emission from the ICM is due to electron-ion collisions,and its emis-sivity is proportional to the square of the gas density.The In-verse Compton emission is due to collisions between cosmic ray electrons and CMB photons;the distribution of the latter is uniform.Thus,the Inverse Compton emissivity is linearly pro-portional to density,and the resulting surface brightness will decline with radius less rapidly than that for the X-ray emis-sion.As a specific but probably oversimplified model,let us as-sume that the pressure of the cosmic ray electrons,P CR,is pro-portional to the thermal gas pressure P gas.Further assume that the energy spectrum of the cosmic rays is independent of ra-dius.For this calculation,we will assume that the thermal gas pressure in a cluster is represented by the“beta model”with P gas(r)∝[1+(r⁄r c)]−3β⁄2.Here,r is the radius and r c is the core radius.Then,the EUV surface brightness varies as I EUV(r)∝[1+(r⁄r c)]−3β⁄2+1⁄2,while the X-ray surface brightness varies as I X(r)∝[1+(r⁄r c)]−3β+1⁄2.The ratio of the EUV to X-ray surface brightness goes as I EUV⁄I X∝1⁄P gas∝[1+(r⁄r c)]3β⁄2.F IG. 1.—The ratio of EUV to X-ray surface brightness in A1795as a function of projected radius(Mittaz et al.1997).The solid curve is the“beta model”prediction for this ratio in the Inverse Compton theory,assuming a con-stant cosmic ray to gas pressure ratio.The parameters of the beta model are taken from thefit to the X-ray surface brightness by Briel&Henry(1996).Figure1shows the observed ratio of EUV to X-ray surface brightness measured for several annuli in A1795(Mittaz et al. 1997).For comparison,the results of this simple beta model are shown.The parameters of the beta model(r c andβ)were taken from thefit to the observed X-ray emission by Briel& Henry(1996);there are no free parameters in this model ex-cept for the overall normalization.Given the many simplifying assumptions in this model,the detailed agreement is probably fortuitous.However,the comparison does show that the Inverse Compton model can explain the qualitative radial behavior of the EUV surface brightness.5.DISCUSSIONNormally,nonthermal emission processes produce broad power-law spectra,partly as a result of power-law energy spec-trum of the cosmic ray electrons.The observations of clus-ters suggest that the EUV emission drops rapidly in going from EUV to soft X-ray photon energies.On the low energy side,the total energies involved would be large and the surface bright-nesses would violate observational limits if the spectrum con-tinued to rise down to the near UV and optical bands.However, there are reasons to think that the CR electron population in4EUV FROM CLUSTERSclusters might peak near the energies required to produce the EUV emission(γ≈300).On the higher energy side,the elec-tron population will be depleted by IC losses over the age ofthe cluster[eq.(6)].For continual particle injection,this steep-ens the exponent of a power-law energy spectrum by unity.Ifmost of the CRs were injected early in the history of the cluster,the effect would be larger.On the lower energy side of the CR spectrum,electrons will lose energy rapidly to Coulomb losseseven at low ICM densities[eq.(4)].What is the ultimate source of these relic cosmic ray elec-trons,which have accumulated over the lifetime of the cluster?Note that we typically need E CR∼3×1061erg,although the values in A1795are a factor of10larger[eq.(9)].This im-plies that the ratio of the cosmic ray electron energy to that ofthe thermal gas is typically∼1%,but with a value of∼10%in A1795.One possible source for these cosmic rays would be super-novae,supernova remnants,and pulsars associated with the stellar population in the galaxies.The present rate of star for-mation in the early-type galaxies in rich clusters is rather low, and the Type Ia supernovae produced by the older stellar pop-ulation occur at too low a rate to give the required number of cosmic rays.However,it is believed that these galaxies had much higher supernova rates in the past.The heavy element abundances in clusters provide a useful constraint on the over-all number of such supernovae.As a simple example,let us as-sume that each supernova produces0.5M⊙of heavy elements and a total cosmic ray electron energy(from the supernova,its remnant,pulsar,etc.)of1049erg.Then,the production of a half-solar heavy element abundance in the ICM will generate a cosmic ray electron population of E CR⁄E gas∼1%.This might be barely adequate.One concern is that the cosmic ray elec-trons might experience strong Coulomb or adiabatic losses be-fore they reach the ICM.Another worry is that the early-type galaxies in clusters may have experienced most of their star formation and supernovae before z∼2,and the cosmic rays would have also undergone strong IC losses.A prediction of this model for the origin is that the EUV properties of clusters might be relatively uniform from cluster to cluster,just as the abundances of heavy elements in the ICM are fairly constant. Another possibility is that the cosmic rays may have come from radio galaxies,quasars,or other AGNs in the cluster over its lifetime.The total cosmic ray electron energy required cor-responds to10–100Cyg-A radio sources,and the present day radio luminosity function of clusters suggests that there are too few bright radio galaxies to produce the cosmic rays.However, the energy content of radio sources and their radio luminosities are not necessarily well-correlated.Moreover,there is evidence that both the general population of luminous radio galaxies and quasars was higher in the past,and that they were more com-monly associated with clusters of galaxies.In this model,one might expect large variations in the EUV luminosity of other-wise similar clusters,which would be associated with the small number statistics of particularly energetic AGN.Finally,the cosmic ray electrons might have been gener-ated in situ in the ICM by particle acceleration associated with shocks and/or strong turbulence.Unless the ICM underwent strong preheating,most of the gas must have passed through high Mach number shocks with velocities∼103km s−1.These would include overall cluster accretion shocks(if much of the cluster formed from a single large perturbation)and/or subclus-ter merger shocks if the cluster formed hierarchically.In the interstellar medium of our Galaxy,shocks of this velocity asso-ciated with supernova remnants also produce cosmic ray elec-trons with about1–10%of the shock energy.This could lead to a population of such electrons in the ICM with E CR⁄E gas∼1–10%.In this model,modest variations in the EUV luminosity from cluster to cluster might be expected as a result of varia-tions in their detailed histories.The IC model for the EUV emission of clusters predicts a continuum spectrum for the emission.On the other hand,in the thermal model most of the emission is in lines.Thus, spectra of this component could decide between thermal and nonthermal models.The cosmic ray electrons required by the IC model would also generate some gamma-ray emission via the scattering of higher energy photons and bremsstrahlung. 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