Lithographic Lenses
太阳镜自带滤镜效果-世界一秒变瑰丽
太阳镜自带滤镜效果世界一秒变瑰丽Forget rose-colored glasses. It's time to see the world through an Instagram filter. And thanks to a new start-up, you'll soon be able to do exactly that.忘掉玫红色的太阳镜吧，现在是时候通过Instagram的滤镜来看世界了。
多亏一家新兴公司的发明，你很快能看到这样一个更加瑰丽的世界。
The company, Tens, has launched an IndieGogo campaign to create tinted sunglasses that give the world a similar look to that of an Instagram photo or polaroid picture. Or as the company tells it, a "real life photo filter" that "lend[s] an uplifting tint to the world beyond the lens."这家名叫Tens的公司通过IndieGogo的融资活动，创造出一款有色太阳镜。
借助它来看世界时，效果会像Instagram上的照片或者宝丽莱图片一般。
或者，借这家公司的话来说就是“给真实世界加上照片滤镜效果”，即“通过镜片，为世界增添一抹令人心动的色彩”。
This picture shows how the Tens' lenses would transform a normal scene into an Instagram-like wonderland (or over-saturated headache, depending on your opinion).上图显示了普通的景致通过Tens牌镜片所转变成的Instagram那样仙境般的效果(或者是色彩过渡饱和而让人头痛的效果，这取决于你怎么看了)。
隐形眼镜的发明作文
隐形眼镜的发明作文英文回答：The invention of contact lenses revolutionized the way people with vision problems see the world. Contact lenses are small, thin, and curved discs that are placed directly on the surface of the eye to correct vision. They are a convenient and comfortable alternative to traditional eyeglasses.Contact lenses were first invented in the late 19th century by a German ophthalmologist named Adolf Fick. However, it was not until the 1960s that contact lenses became widely available and popular. The first contact lenses were made of glass, which made them uncomfortable to wear and prone to breakage. But with advancements in technology, contact lenses are now made of soft, flexible materials that allow for better comfort and breathability.One of the main advantages of contact lenses is theirability to provide a wider field of vision compared to eyeglasses. Unlike glasses, which can obstruct peripheral vision, contact lenses sit directly on the eye, providing a more natural and unobstructed view. This is especially beneficial for athletes and those who lead an active lifestyle.Another advantage of contact lenses is their cosmetic appeal. Many people prefer contact lenses over glasses because they do not alter their appearance. Contact lenses are virtually invisible, allowing wearers to maintain their natural look. Additionally, contact lenses can be used to change the color of the eyes, enhancing one's overall appearance.Furthermore, contact lenses offer convenience and freedom. Unlike glasses, which can easily get lost or broken, contact lenses are worn directly on the eye, eliminating the need to constantly adjust or clean them. Contact lenses also do not fog up in cold weather or get wet in the rain, making them a more practical choice for outdoor activities.In conclusion, the invention of contact lenses has greatly improved the lives of people with vision problems. They provide better vision, are more comfortable to wear, and offer greater convenience and freedom. Whether forvision correction or cosmetic purposes, contact lenses have become an indispensable tool for many individuals.中文回答：隐形眼镜的发明彻底改变了视力问题患者看世界的方式。
光学显微镜英语作文
光学显微镜英语作文Title: The Marvels of the Optical Microscope。
The optical microscope, a marvel of scientific ingenuity, has revolutionized our understanding of the microscopic world. Its development, spanning centuries, represents a fusion of optical principles, engineering prowess, and scientific curiosity. In this essay, we delve into the intricate workings of the optical microscope, its historical significance, contemporary applications, and the profound impact it has had on various fields of study.Historical Evolution:The origins of the optical microscope can be traced back to the late 16th century, with the pioneering work of Dutch spectacle makers such as Hans Jansen and his son Zacharias. Their invention of the compound microscope laid the foundation for subsequent advancements in microscopy. However, it was Antony van Leeuwenhoek, a Dutch tradesmanand amateur scientist, who made significant strides in improving the design and magnification capabilities of the microscope. His observations of microorganisms through simple microscopes opened new frontiers in biology and medicine.Throughout the following centuries, the optical microscope underwent numerous refinements and enhancements, propelled by the contributions of notable scientists and inventors. The development of achromatic lenses in the 18th century by John Dollond mitigated color aberrations, vastly improving image clarity. In the 19th century, the introduction of the condenser and objective lenses with higher numerical apertures further enhanced resolution and contrast, enabling the visualization of finer details.Working Principles:At its core, the optical microscope operates on the principles of optics and magnification. Light from a source, typically an adjustable condenser, passes through the specimen mounted on a slide. The objective lens, positionedbeneath the specimen, magnifies the image formed by the transmitted light. This magnified image is then further enlarged by the eyepiece, allowing for visual observationor photographic documentation.Key factors influencing the performance of an optical microscope include magnification, resolution, and contrast. Magnification refers to the degree of enlargement of the specimen, while resolution determines the level of detail that can be discerned. Contrast, on the other hand, influences the clarity and visibility of structures within the specimen. By optimizing these parameters, researchers can obtain clear and detailed images for analysis.Contemporary Applications:The optical microscope remains an indispensable tool in various scientific disciplines, including biology, medicine, materials science, and forensics. In biology, itfacilitates the study of cellular structures, tissues, and microorganisms, elucidating fundamental processes of life. Medical professionals rely on microscopes for the diagnosisof diseases, analysis of blood samples, and examination of pathological tissues.In materials science, optical microscopy enables the characterization of materials at the microstructural level, aiding in the development of new materials and quality control processes. Forensic scientists utilize microscopes to examine trace evidence such as fibers, hairs, and fingerprints, assisting in criminal investigations andlegal proceedings.Impact and Future Prospects:The impact of the optical microscope on scientific advancement cannot be overstated. It has played a pivotal role in unraveling the mysteries of the microscopic realm, leading to groundbreaking discoveries and technological innovations. From the elucidation of cell biology to the development of life-saving medical treatments, its contributions are immeasurable.Looking ahead, advancements in microscopy technologycontinue to push the boundaries of what is possible. Emerging techniques such as confocal microscopy, fluorescence microscopy, and super-resolution microscopy offer unprecedented capabilities for imaging and analysis at the nanoscale. These advancements hold promise for further insights into complex biological processes, the development of novel therapeutics, and the exploration of new frontiers in science and technology.In conclusion, the optical microscope stands as a testament to human curiosity, ingenuity, and the relentless pursuit of knowledge. From its humble beginnings to its contemporary applications, it remains a cornerstone of scientific inquiry and discovery. As we venture into the future, the optical microscope will undoubtedly remain an indispensable tool in our quest to unlock the mysteries of the microscopic world.。
眼视光专业英语-Glasses
3. What are the types of lenses?
High index plastic lense
require strong prescriptions lighter and thinner no “coke bottle ” anymore
3. What are the types of lenses?
Photochromic lenses
tinted when exposed to sunlight
no need for prescription sunglasses
3. What are the types of lenses?
Polarized sunglasses
reducing reflected sun glare may cause LCD appear
invisible
4. Care for Eyeglasses
Home Task
remember the words and phrases read the text finish the exercise after the unit
3. What are teric lenses
spherical in shape differing degrees of curvature thinner and flatter > standard
lenses larger usable portion
Contents
What are glasses? Types of Glasses Types of Modern lenses Dialogues
光学镜头术语中英文对照
透镜系列术语中英文对照单透镜Simple (Single) Lenses球透镜Ball Lenses歪像透镜Anamorphic Lenses圆锥透镜Conical Lenses柱状透镜，环形透镜Cylindrical & Toroidal Lenses非球面透镜Aspheric Lenses反射折射透镜Catadioptric Lenses绕射极限透镜Diffraction-Limited LensesGRIN透镜GRIN Lenses (Graduated Refractive Index Rod)微小透镜阵列Micro Lens Arrays准直透镜Collimator Lenses聚光透镜Condenser Lenses多影像透镜Multiple Image Lenses傅利叶透镜Fourier Lenses菲涅尔透镜Fresnel Lenses替续透镜Relay Lenses大口径透镜(直径150mm以上) Large Aperture Lenses (150mm) 复合透镜Complex Lenses红外线透镜Infrared Lenses紫外线透镜Ultraviolet Lenses激光透镜Laser Lenses望远镜对物镜Telescope Objectives Lenses显微镜对物镜Microscope Objectives Lenses接目镜Eyepieces Lenses向场透镜Field Lenses望远镜头Telephoto Lenses广角镜头Wide Angle Lenses可变焦伸缩镜头Variable Focal Length Zoom LensesCCTV镜头CCTV Lenses影印机镜头Copy Machine Lenses传真机镜头Facsimile Lenses条码扫描器镜头Bar Code Scanner Lenses影像扫描器镜头Image Scanner Lenses光碟机读取头透镜Pick-up Head LensesAPS相机镜头APS Camera Lenses数位相机镜头Digital Still Camera Lenses液晶投影机镜头Liquid Crystal Projector Lenses镜面系列术语中英文对照平面镜Flat Mirrors球面凹面镜，球面凸面镜Spherical Concave and Convex Mirrors 抛物面镜，椭圆面镜Off-Axis Paraboloids and Ellipsoids Mirrors 非球面镜Aspheric Mirrors多面镜Polygonal Mirrors热镜Hot Mirrors冷镜Cold Mirrors玻璃，玻璃/陶瓷面镜Glass and Glass-Ceramic Mirrors双色向面镜Dichroic Mirror金属面镜Metal Mirrors多层面镜Multilayer Mirrors半涂银面镜Half-Silvered Mirrors激光面镜Laser Mirrors天文用面镜Astronomical Mirrors棱镜系列术语中英文对照Nicol棱镜Nicol PrismsGlan-Thomson棱镜Glan-Thomson PrismsWollaston棱镜Wollaston PrismsRochon棱镜Rochon Prisms直角棱镜Right-Angle; Rectangular Prisms五面棱镜Pentagonal Prisms脊角棱镜Roof Prisms双棱镜Biprisms直视棱镜Direct Vision Prisms微小棱镜Micro Prisms滤光镜系列术语中英文对照尖锐滤光镜Sharp Cut (off) Filters色温变换滤光镜，日光滤光镜Colour Conversion/Daylight Filters 干涉滤光镜Interference Filters中性密度滤光镜Neutral Density Filters空间/光学匹配滤光镜Spatial/Optical Matched Filters双色向滤光镜Dichroic Filters偏光滤光镜Polarizing Filters排除频带滤光镜Rejection Band Filters可调式滤光镜Turnable Filter超窄频滤光镜Ultra Narrowband Filters色吸收滤光镜Absorption Filters红外吸收/反射滤光镜Infrared Absorbing/Reflecting Filters红外透过滤光镜Infrared Transmitting Filters紫外吸收滤光镜Ultraviolet Absorbing Filters紫外透过滤光镜Ultraviolet Transmitting Filters针孔滤光镜Pinhole Filters有色玻璃滤光镜Colored-Glass Filters塑胶滤光镜Plastic Filters照像用滤光镜Photographic Filters全像滤光镜Holographic Filters微小干涉滤光镜Micro Interference Filters。
雪镜技术特性Giro镜片透光率
Optimized Lens Tints优质彩色镜片Night夜晚Clear (90% VLT*)A very high quality clear lens for use atnight or in extreme low light conditions.透明（90%透光率）非常高清晰的镜片适合夜间或者极低光环境下使用。
Overcast / Storm阴天/风雪Persimmon Blaze (50% VLT*)Our performance-tuned proprietarypersimmon tint, now with a fiery scarletflash coating to heighten detail andcontrast in low-light conditions.柿子色火焰（50%透光率）我们针对柿子色进行性能微调的专利镜片，现在加上了火红闪光的镀膜，在弱光条件下增强细节和对比度。
Persimmon Boost (52% VLT*)A proprietary tint with multi-layer flashcoating that heightens detail and depthperception in low light conditions. This is agreat storm tint.柿子色推进器（52透光率）拥有多层闪光镀膜的专利色彩镜片，增强弱光下的细节和深度知觉。
这是一片优异的风雪镜片。
Persimmon 57 (57% VLT)A performance tint that heightensdetail and contrast when light is flat.柿子色57（57%透光率）一款高性能色彩镜片，在光线平淡的情况下增强细节和对比度。
Mixed CloudsAmber Scarlet 40 (40% VLT)A high-performance amber base tint withmulti-layer flash coating that heightensdetail and depth perception in variablelight conditions.多云琥珀红40 （40%透光率）高性能琥珀基底镜片加上多层闪光镀膜，在变换的光线条件下增强细节和对比度。
眼视光专业英语Glasses ppt课件
Technical English For Optometric Students
4. Care for Eyeglasses
clean & dry place away from potential damage
clean with water & a non-lint cloth check eye prescription annually routine eye exams
Technical English For Optometric Students
Words and Phrases
aesthetic [i:sˈθetɪk] adj. 审美的n. 美学标准，美感；审美观 aspheric lenses [æz'ferɪk] n. 非球面镜片 curvature [ˈkɜ:vətʃə(r)] n. 弯曲；曲率；曲度 dashboard[ˈdæʃbɔ:d] n. 仪表板；挡泥板 photochromic lenses [fəʊtə'krəʊmɪk] n. 光致变色镜片 polarized sunglasses['pəʊləraɪzd] n. 偏光太阳镜 polycarbonate lenses [ˌpɒliˈkɑ:bənət] n. 聚碳酸酯镜片 safety glasses [ˈseifti ˈglɑ:sɪz] 安全眼镜 stereoscopy [ˌsterɪ'ɒskəpɪ] n. 立体视法，立体镜学 tinted [tɪntɪd] adj. 带色彩的 trivex lenses [ˈtrɪvɪt] n. 高级氨基甲酸乙酯聚合物镜片 ultraviolet [ˌʌltrəˈvaɪələt] adj. 紫外线的n. 紫外线辐射；紫外光
Synopsys CODE V optical design software说明书
CODE V Optical Design Software Design, Optimize and Fabricate Reliable Imaging OpticsSynopsys’ Optical Solutions Group is one of the world’s leading developers of optical design and analysis tools, with CODE V®imaging design software, LightTools® illumination design software, LucidShape® products for automotive lighting design, and RSoft™ products for photonic and optical communication design. The group is also an independent supplier of optical systems design services, with more than 4,800 completed projects in imaging, illumination and optical systems engineering.Since its worldwide introduction in 1975, CODE V has been instrumental in the development of highly advanced optical systems, sometimes with profound effects on business and culture. It has been used in the development of revolutionary applications such as the compact disk player. CODE V algorithms are a keyand dominant technology in the design of the microlithographic lenses that permit the imaging of ultra-fine lines on computer chips—a necessary ingredient in the continuing improvement of computer speeds.CODE V software has contributed significantly to important technological advances across a wide spectrum of fields such as projection displays, medical instrumentation, advanced military technology and space exploration.Because of its established reputation for excellence and quality performance, CODE V is the software of choice when optics are critical to the success of a product or project.Exceptional Software SupportTechnical SupportWith CODE V, you get much more than the highest-rated optical design and analysis software available. You also get access to more than 50 person-years of optical engineering experience through our technical support staff. Whether you choose e-mail or our toll free phone number to request assistance, degreed optical engineering professionals are ready to answer your questions.Training, Documentation and Online ResourcesWe offer many options for learning CODE V. Attend classes at our Pasadena, California facility, attend classes offered worldwide by our international representatives, or schedule an onsite class at your facility that has been tailored to your needs. Complete, examples-based documentation and a dedicated customer website with video tutorials, FAQs, example models, macros, tips and training materials are also available to help you be successful with CODE V.OverviewUsing CODE V, our engineers played a key role in the design and implementation of all the primary null lenses used in the highly successful Hubble SpaceProgram UpdatesWe release extensive program updates approximately once ayear to add major new features. We also provide regular program updates with customer-requested enhancements. All software updates, ongoing technical support, and access to extensive content on our Customer Support Portal are included in our standard license.Pre-Tested and Pre-ApprovedOne of our most important strengths is the synergy between our optical engineering services and software development efforts. Our engineers provide ideas, guidance, testing and feedback for the development of CODE V . For example, expert tools based on unique algorithms developed by our engineers, such as Glass Expert and Asphere Expert, help automate the design process and save you time and effort. Most importantly, before you use the latest version of CODE V for engineering problem solving, you can be confident that the software has been put through its paces by a dedicated team of engineers working at the cutting edge of optical technology.Figure 1: CODE V utilizes a standard Windows ® user interface with many navigation and usability features.Navigation toolbarCommand window Status barNavigation toolbarStatus bar Command window Tabbed output windowsExtensive help capabilitiesLDM spreadsheet Customizable chartingApplicationsFrom the extreme UV to beyond the infrared and from consumer products to government hardware, CODE V will handle your optical imaging applications. CODE V’s state-of-the-art algorithms, user-friendly interface and intelligent defaults speed time to market and maximize the quality of your optical solution. Some applications and related CODE V features include:• Injection molded plastic lenses—environmental analysis and material tolerances• Grating spectrometers—wavelength dependent multi-configuration features• Digital camera lenses—tolerance and fabrication analysis features • High-NA lithography optics—polarization ray tracing • Reconnaissance lenses—glass optimization with partial dispersion control• Telescopes and other visual systems—true afocal modeling • Space-borne systems—environmental analysis • Laser scanning systems—diffraction beam propagation analysis• Infrared and UV systems—special material characterization • Telecommunication systems—fiber coupling efficiency computations• Segmented aperture systems—non-sequential ray tracing featuresView a gallery of CODE V applications at com/optical-solutions/codev/application-gallery.htmlApplications and DesignFigure 2: CODE V is the dominant software of choice to meet the stringent optimization, analysis and tolerancing demands of the integrated circuitmanufacturing industry.Figure 3: CODE V optimization delivers the best possible zoom lens designs. Global Synthesis is highly effective for zoom lenses and excellent chromatic correction is possible with powerful glass optimization. CODE Vincludes specialized features for zoom lens analysis that help youbuild the best lens, not just design one.Figure 4: Tilted and decentered reflective systems are easy to set up in CODE V. User-defined optimization constraints allow easy control of optical bundle and component clearances in off-axis reflective systems. CODE V optimized this “Before” system to this “After” system in a singleoptimization run in seconds on an Intel ®2.67 GHz dual-core PC.Figure 5: The winning design from the International Optical Design Conference “Camera in a Can” lens design contest was optimized using Global Synthesis. Synopsys optical engineers use Global Synthesis onevery applicable design project.Design OptimizationOptimization capabilities are often the most importantconsideration when choosing optical design software. CODE V’s award-winning, proprietary optimization algorithms are considered unsurpassed by industry leaders. Features include:• RMS blur, wavefront variance, MTF , fiber coupling efficiency and a fully user-defined error function• The Reduce Tolerance Sensitivity control (SAB) allows direct optimization of the as-built RMS wavefront error to reduce sensitivity of optical systems to manufacturing tolerances, improve as-built performance and minimize production costs • The best, most effective global optimization algorithm available • Step Optimization (STP) accelerates optimization convergence and navigates complicated solution spaces more effectively to find optical system solutions with smaller error functions compared to traditional damped-least-squares optimization • Intelligent optimization defaults and general constraints • Effective exact constraint handling• Support of weighted and penalty function constraint handling • Easy definition of user-defined constraints• Glass Expert and Asphere Expert that automatically choose the best set of glasses and optimal asphere locations• Significant feedback to allow you to confirm optimizationprogress and guide variable, constraint or optimization control changes if neededLike many optical design programs, CODE V’s local optimization (optimizing to find the local minimum of the error function) is based on damped least squares. However, several proprietary enhancements make CODE V’s optimization algorithm the most effective available. CODE V’s exact constraint handling, using Lagrange multipliers, separates control of constraints from the error function so that the error function optimization does not stall while attempting to hold heavily weighted constraints. You can develop the best solution—with the correct specifications—that fits the space available.CODE V’s intelligent optimization defaults work well for the vastmajority of systems, but can be overridden if desired. CODE V’s RMS blur, wavefront variance and MTF error functions cover the majority of applications, but you can also define you own merit function. CODE V offers smart defaults, with as little or as much control as you require and consistently yields the best designs. This efficiency results in more freedom to perform useful engineering work insteadof time-consuming tweaks of the error function.AnalysisCODE V’s analysis algorithms are recognized for their accuracy and speed, and match measurements of real-world hardware. Over tens of thousands of fabricated customer designs, more than 150 person-years of in-house engineering experience and thousands of daily development test cases assure the quality of CODE V performance predictions—even on the most complex optical systems.CODE V’s extensive suite of analysis capabilities include:• Many diagnostic evaluation options (for example, transverse ray aberration or OPD curves)• Many geometrical and diffraction-based image evaluation options (for example, spot diagrams and MTF)• Non-sequential ray tracing• Polarization ray tracing, including birefringent material modeling • General diffraction beam propagation • Partial coherence 1D and 2D image analysis • Fiber coupling efficiency • Illumination analysis• Thermal infrared narcissus analysis • 2D image simulationCODE V’s beam propagation analysis accurately predicts intensity, amplitude and phase characteristics of the diffracted optical beam anywhere in the optical system. Beam Synthesis Propagation(BSP), originally developed for NASA to solve the stringent accuracy challenges of the Terrestrial Planet Finder mission, sets an industry standard for accuracy, efficiency and ease of use. It uses a beamlet-based algorithm with proprietary enhancements designed to deliverextremely accurate and efficient modeling of diffracted wavefronts propagating through an optical system. BSP’s groundbreaking Pre-Analysis feature automatically recommends analysis settings based on your lens system and delivers an accurate answer in the shortest time possible.Partial coherence analysis can predict image structure of one- or two-dimensional objects based on fully coherent to fully incoherent illumination through an optical system. For photonic systems, fiber coupling efficiency of a diffraction image into a single mode fiber can be predicted, including the effects of misalignments and fiber tip cleavage angles.Analysis, Tolerancing and Fabrication SupportFor photonics systems, some useful CODE V features include gradient index materials, polarization ray Figure 6: Beam Synthesis Propagation’s beamlet-based wave propagation algorithm performs beam propagation analysis more accurately andefficiently than any other commercially available tool.Decompose initialCODE V is COM-enabled and can be used as a server application for other COM-enabled applications for specialized analysis tasks. CODE V’s Macro-PLUS is a powerful, yet easy-to-learn macro programming language with access to a broad range of lens constructional data and analysis output. It can greatly simplify repetitive tasks, and supports efficient generation of custom analysis, such as line and surface charts.Most CODE V analysis option inputs can be customized, butyou aren’t burdened with making all the choices. Intelligentinput defaults are provided in all options, based on our software knowledge of the computational algorithm and engineering knowledge about the appropriate defaults for real-world problems. You can have confidence in CODE V’s results. Tolerancing and Fabrication SupportCODE V is used to design optics destined for hardware and has many advanced capabilities to speed time to market and solve production problems before the design reaches manufacturing. You can be confident of delivering the best performing as-built optical design with minimized recurring and non-recurring costs. Features include:• Accurate and extremely fast tolerancing using CODE V’sproprietary wavefront differential algorithm• Optimization access to the fast wavefront differential algorithm for directly optimizing as-built RMS wavefront error• Singular Value Decomposition algorithm to determine the most effective compensator set• Interactive tolerancing spreadsheet to modify tolerance values and instantly see the effect on system performance andcompensator motion• Traditional finite differences and Monte Carlo tolerancingsupport• Interferogram interface for applying measured interferograms to the system model• Automatic system alignment optimization based on as-builtinterferogram analysis• CAD export using IGES, SAT and STEP file formats• Mechanical zoom lens CAM computation• Lens element weight and cost analysis (material andfabrication costs)CODE V’s sensitivity and inverse sensitivity (automatic error budgeting) tolerancing capabilities are based on measurable performance metrics such as RMS wavefront, MTF, distortion, Zernike wavefront coefficients and more. Multiple compensators can be declared and if desired, restricted to compensating subsets of tolerances. Boresight compensation can also be included. CODE V’s interferogram interface allows measured surface deformation or system wavefront data to be imported into CODE V and included as part of the lens model. CODE V’s alignment optimization is used to automatically guide the alignment of an as-built optical system using measured wavefront data. Whether your hardware is for the consumer, commercial or government markets, if you are planning to build your optical designs, then CODE V’s integrated design, analysis and fabrication support features make it the best optical software for the job.Figure 7: CODE V’s transverse ray aberration curves, pupil maps, spot diagrams, MTF curves and point spread function plots use advanced algorithms to ensure the most accurate results.Figure 8: A stellar interferometer showing interference fringes produced from separated apertures using non-sequential surface ray tracing anddiffraction analysis features.Comprehensive Features©2018 Synopsys, Inc. All rights reserved. Synopsys is a trademark of Synopsys, Inc. in the United States and other countries. A list of Synopsys trademarks is。
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Extended H = 16320
(b) NA =0.54, yimax = 10.6mm, λ =434nm (g-line)
Extended H = 34600
(d) NA =0.57, yimax = 15.6mm, λ =365nm (i-line) JP-H8-190047(A)
Slide 13
Micrascan I – 4x NA 0.35
Reduction step-and-scan Continued use of broadband DUV
700-500 nm node
Ref: U.S.Patent 4,747,678 Shafer et al.
Nov 8, 2006
k 1 NA
k2
nλ NA2
λ
k1 and k2 are functions of the lithographic process (reticle, photoresist, illumination) and the level of residual aberrations in the projection optics
Practical
Some limits are moveable, with innovation
David M Williamson Practical Optics, COS
Slide 11
Nov 8, 2006
3-mirror Offner 1x NA 0.14
3000-1500 nm node
Ref: I. Adesida – Semiconductors in the Nanotechnology era
Nov 8, 2006
David M Williamson
Practical Optics, COS
Slide 3
Transistor scaling and research roadmap Top Down
Slide 12
Micralign M500 - 1x NA 0.166
1200-800 nm node
DUV, 248nm, broadband (Hg lamp)
Ref: U.S.Patent 4,293,186 Offner
Nov 8, 2006
David M Williamson
Practical Optics, COS
waves r.m.s.
0.21 -33 -22 -11 0 11 22 33 44
Ref: SPIE Proc. 1049 (1989) Williamson
Z6 Z5 Z8 Z7 Z11
Reticle Field Position (mm)
Nov 8, 2006
David M Williamson
Practical Optics, COS
Slide 6
Extended Lagrange Invariant
2 1.8 1.6 1.4 1.2 1 0.8 0.6 0.4 0.2 0 1980 1985 1990 1995 Year 2000 2005
Actinic Laser beam
Reticle Plane Focusing Lens
Test lens
Retro-Mirror
Nov 8, 2006
David M Williamson
Practical Optics, COS
Slide 15
PMI-measured Zernike aberrations across field
A.U.
10
S201A
S203B S204B S205C S306C S307E S308F
PMI technology applied
1
Diffraction-Limited?? λ/14 RMS = 71 mλ RMS Marechal's criterion
1985 1990 1995
1980
0.02 microns
Nov 8, 2006
David M Williamson
Practical Optics, COS
Slide 17
Aberrations compensateable by element shifts
Symmetrical 3rd order Using OSA ordering (e.g. Zemax) Spherical aberration Coma Astigmatism Distortion (Barrel-Pincushion) Asymmetric 2nd order On-axis coma On-axis astig. Astigmatic field tilt Tangential, Sagittal distortion
2000
2005
Small aberrations!! 5-15 mλ RMS
Nov 8, 2006
David M Williamson
Practical Optics, COS
Slide 10
Limits to expansion?
Theoretical
Zero aberrations NA =1 (in air) K1 = 0.25 (0 and 1st diffracted orders) Glass (Fused Silica) blank diameter and optical quality - homogeneity, birefringence λ= 193nm (157nm) – glass transmission
B
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ble u Do
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18 y
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1985
1990
1995 Year
2000
2005
Mainframe Mini
Nov 8, 2006
PC
Workstation Laptop
Slide 2
David M Williamson
Practical Optics, COS
Microlithography - Nanolithography
David M Williamson Practical Optics, COS
Slide 19
Nov 8, 2006
Sensitivity to element axial shift
Compensators:
0.15 0.1 0.05 0 -0.05 -0.1 -0.15 1 3 5 7 9 11 13 15 17
Wavelength[um]
NA
k1
Normalized feld size
Normalized extended H
Extended H:
Nov 8, 2006
NA yi max λ k1
Practical Optics, COS
Slide 7
David M Williamson
Extended H = 8840
Increased ~ 20x
Slide 8
Nov 8, 2006
David M Williamson
Practical Optics, COS
Current Generation
First Generation
Nov 8, 2006
David M Williamson
Practical Optics, COS
David M Williamson
Practical Optics, COS
Slide 14
Phase-Measuring Interferometry – wavefront and distortion vs. field position
Reference Mirror Beamsplitter Wafer Plane
Lithographic Lenses
David M. Williamson
Slide 1
Moore’s Law – an enabler and example of exponential expansion – number of transistors per chip
1.E+10 The number of transisters per chip 1.E+09 1.E+08 1.E+07 1.E+06 1.E+05 1.E+04 1980
Extended H = 66000
(f) NA =0.68 yimax = 13.2mm, λ =248nm (KrF) JP-2000-121933(A)
Extended H = 170000
(h) NA =0.85 yimax = 13.8mm, λ =193nm (ArF) JP-2004-252119(A)
Slide 4
Exponential Expansion in Microlithography – The Lagrange Invariant
H = n(uh uh) = n′(u ′h u ′h) = n′u ′η ′
Ref: M.J. Kidger, Fundamental Optical Design
Compensators
To have independent control of all the second and third-order aberrations effected by element movements requires: 4 independent axial adjustments 4 independent decentration adjustments clocking, or change of astigmatic elements In addition to first-order image parameters: symmetrical - linear magnification and focus asymmetric - image tilt and decentration