原子力显微镜 XE-100 AFM

XE-100 High Accuracy Small Sample SPM

PSIA

XE-100

Anodized Aluminum Surface (0.5×0.5 µm )

(Sample Courtesy of Prof. J.K. Lee, Seoul National University.)

Steel Surface (10×

10

µm

)STI Patterns on Photomask (5×5 µm )

Self Assembled Monolayers (10×10 µm )

MFM Image of Hard Disk (30×30 µm )

>>>>>Semiconductors Data Storage & Magnetic Materials

Biotechnology & Life Sciences

Plastics & Polymers

Materials & Surface Characterizations

Wide Range of Applications NC-AFM Image of porous Polymer (6×

6

µm )

XE system produces higher quality images faster . Z scanner

of the XE system has a resonance frequency significantly

higher than those of conventional piezoelectric tube

scanners. The result is greater feedback performance and

faster and more accurate data acquisition. Also, since z

scanner is physically separated from x-y scanner

, there is no

coupling between the x-y plane and the z scanner.

from the Nano Techn SPM with Improved Scan Accuracy, Scan Speed, and Optical Vision

Superior optical microscope provides direct

on-axis view with unprecedented clarity.

All optical elements – objective lens, tube lens,

and CCD camera – are rigidly fixed on a single

body and move together for focusing and

panning to keep the highest quality intact.

Z scanner moves only the cantilever and the

detector (PSPD), while the laser, steering mirror

and aligning mechanisms are fixed on the head

frame. Laser beam bouncing off the second mirror

hits the same point on PSPD regardless of the z

scanner motion, and only the deflection of the

cantilever is monitored on the PSPD.

New XE scan system provides distortion-free scan.

By separating z scanner from x-y scanner , we can

eliminate the cross talk between the x-y and z axes.

We can achieve high scan accuracy and fast

z-tracking speed. Since the sample is scanned only in

x-y direction, large samples as well as small samples

can be scanned at sufficiently high speeds.High Quality Optical Microscope*Advanced Scan System*

x-y scanner

z

s

c

a

n n

e r

user convenience, and serviceability.

nology Leader

*Patent pending

Forming AFM image by dilation J.S. Villarrubia, J. Res. Natl. Inst. Stand. T echnol. 102, 425 (1997)

Geometrical interpretation of erosion:

Reconstructed image is equivalent to the

minimum of tip's envelope