准分子激光器
准分子激光器 原理
准分子激光器原理准分子激光器是一种利用准分子过程产生激光的装置。
它是一种半导体激光器，其工作原理基于准分子现象。
准分子激光器常用于医疗美容、激光打标、激光切割等领域。
准分子激光器的工作原理可以分为以下几个步骤：吸收、激发、自发辐射和受激辐射。
准分子激光器通过半导体材料吸收外部能量。
当外部能量与半导体材料的能带之间的能级相匹配时，半导体材料吸收能量并将电子激发到导带中。
这个过程称为吸收。
接下来，激发的电子在导带中自由运动，碰撞并与其他自由电子进行能量交换。
当电子通过与其他自由电子碰撞时，它们可能会失去能量并回到较低的能级。
这个过程称为自发辐射。
在自发辐射过程中，电子从高能级跃迁到低能级，释放出光子能量。
然后，在自发辐射的基础上，如果有一个外部光子与被激发的电子的能级匹配，这个外部光子将与电子相互作用，使电子跃迁到一个更高的能级。
这个过程称为受激辐射。
在受激辐射过程中，电子从低能级跃迁到高能级，释放出与外部光子相同频率和相位的光子。
受激辐射引发的光子会通过半导体材料中的反射和放大效应进行多次反射和放大，从而形成激光。
激光的相干性和单色性取决于半导体材料的结构和控制参数。
准分子激光器的工作原理可以通过调整半导体材料的能带结构和控制电流来实现。
激光器的结构通常包括半导体材料、反射镜和光学腔。
半导体材料通过控制电流来实现能带结构的调整，从而控制激光的频率和功率。
反射镜用于反射和放大光子，光学腔用于提供多次反射和放大的环境。
准分子激光器利用准分子过程产生激光。
它通过吸收外部能量、激发电子、自发辐射和受激辐射等过程来产生激光。
准分子激光器的工作原理基于半导体材料的能带结构和电流控制。
通过调整能带结构和控制电流，可以实现对激光频率和功率的控制。
准分子激光器在医疗美容、激光打标、激光切割等领域有着广泛的应用前景。
准分子激光器 技术
准分子激光器技术准分子激光器技术准分子激光器是一种利用激光技术进行眼科手术的设备。
它使用激光对角膜进行切削，从而改变其形状，以矫正视力问题。
准分子激光器技术已经成为近视、远视、散光等眼科疾病的常见治疗方法。
准分子激光器技术的原理是利用激光束对角膜进行切削。
激光束可以精确地去除角膜上的组织，从而改变其曲率，使光能够准确地聚焦到视网膜上，从而矫正视力。
这种切削过程非常精确，可以达到几微米的精度，对于不同的视力问题可以进行相应的切削。
在准分子激光手术中，首先需要对患者的眼睛进行测量和检查，确定其视力问题的类型和程度。
然后，医生会使用准分子激光器对角膜进行切削。
切削过程通常很快，只需几分钟时间。
手术后，患者需要恢复一段时间，通常几天到几周不等。
准分子激光器技术具有许多优点。
首先，它是一种非侵入性的手术，不需要进行任何切口。
这意味着手术过程中不会有出血或伤口感染的风险。
其次，准分子激光器技术可以精确地矫正视力问题，能够在眼睛表面进行微小的切削，避免了传统手术中可能出现的不对称或过度切削的问题。
然而，准分子激光器技术也有一些限制和风险。
首先，手术的效果可能因个体差异而有所不同，有些人可能无法完全摆脱眼镜或隐形眼镜的依赖。
其次，手术过程中可能会出现一些并发症，如干眼症、角膜炎等。
因此，在考虑准分子激光手术时，患者需要与医生充分沟通，了解手术的风险和效果。
近年来，随着激光技术的不断发展，准分子激光器技术也在不断改进。
新型的准分子激光器设备可以更准确地进行角膜切削，有效降低手术风险。
同时，一些新的治疗方法和术后护理措施也使患者的恢复更加快速和舒适。
准分子激光器技术是一种常见的眼科手术方法，用于矫正不同类型的视力问题。
它通过精确的激光切削角膜来改变其形状，从而使光能够准确聚焦在视网膜上，达到矫正视力的目的。
虽然该技术存在一些限制和风险，但随着技术的不断进步，准分子激光器技术将会在眼科领域继续发挥重要作用，为更多视力问题的患者提供有效的治疗方案。
准分子激光器的光脉冲宽度和输出功率
准分子激光器的光脉冲宽度和输出功率
标准分子激光器是由一些复杂的激光元件如激光源、多模滤波器、可调带宽高效率放大器、峰值功玗控制以及电子锁定电路等组成的高端激光设备，是目前世界上使用最为广泛的激光器。
它的主要特点有：
1、光脉冲宽度：标准分子激光器的光脉冲宽度可以调节，其激光脉冲宽度的
标准可达到3ns-50ns，可以根据实际应用进行合理调整。
2、输出功率：标准分子激光器可以实现最高输出功率达100mw-1000mw，可
以调节范围交大，可以根据应用需要精确调节功率输出范围。
3、杂散激光：标准分子激光器可以有效减少杂散激光，从而提高激光器系统
的成像质量和功玗质量。
4、操作方便：标准分子激光器拥有高效率的操作平台，可以快速调节脉冲宽
度和功玗输出，提升用户的操作体验。
5、催化反应：标准分子激光器的光谱线宽度可以调节，因此，它可以实现高
效催化反应，满足各种不同的催化反应需求。
6、精度和准确性：标准分子激光器拥有精度高、准确性高，可以实现快速响
应时间和测量精度。
7、可靠性：标准分子激光器具有良好的可靠性，能有效降低激光器系统的维
护成本，对环境污染也最小化。
总而言之，标准分子激光器可以实现高精度、可靠性高、可调节性高及催化反应等多种特性，它的光脉冲宽度和输出功玗可以迅速调节，且具有高度效率。
因此，标准分子激光器可以满足各种实际应用的需求，成为目前世界上极为普及的激光器。
准分子激光技术
准分子激光技术准分子激光技术（Excimer Laser Technology）是一种高精度的激光技术，广泛应用于眼科手术中的近视、远视和散光矫正手术。
它通过激光在眼角膜上的准确照射，改变角膜的形状从而改善视力问题。
准分子激光技术是一项非侵入性的手术，患者在手术中不需要经历切削和缝合过程，因此风险较小且恢复较快。
手术过程中，患者的眼睛会被固定在手术床上，然后医生会使用准分子激光器来矫正角膜的形状。
激光的作用是通过去除角膜上的微薄组织来改变其曲率，从而达到矫正视力的效果。
准分子激光技术的核心部分是准分子激光器。
准分子激光器是一种特殊的激光器，它能够产生高能量的紫外光。
这种紫外光的波长能够与角膜组织的分子结构相匹配，从而使得激光能够精确地去除角膜上的组织。
准分子激光器还具有很高的聚焦能力，可以在极短的时间内将光能集中到非常小的区域，从而减少了对周围组织的伤害。
准分子激光技术的矫正效果是通过改变角膜的形状来实现的。
对于近视患者，激光会去除角膜中央的组织，使其变得更平坦。
对于远视患者，激光会去除角膜外围的组织，使其变得更陡峭。
对于散光患者，激光会去除角膜上不规则的部分，使其变得更加规则。
通过这样的矫正，光线能够正确地聚焦在视网膜上，从而改善患者的视力。
准分子激光技术有很多优点。
首先，它是一种非常精确的技术，可以在微米级别上进行调整。
其次，手术过程简单快捷，通常只需要几分钟就可以完成。
此外，准分子激光技术还可以根据患者的个体情况进行个性化调整，以达到最佳的矫正效果。
然而，准分子激光技术也存在一些风险和局限性。
手术过程中，患者可能会感到一些不适，如疼痛、灼热或刺痛。
术后可能会有视力模糊、干涩或光敏等短期不适感。
此外，准分子激光技术对于视力矫正的效果也存在一定的限制，对于高度近视或散光患者的矫正效果可能不如预期。
因此，在接受准分子激光手术前，患者需要经过详细的评估和咨询，以确定手术是否适合自己。
准分子激光技术是一种高精度、非侵入性的眼科手术技术，可以有效地矫正近视、远视和散光等视力问题。
准分子激光原理及应用
准分子激光原理及应用准分子激光（Excimer Laser）是一种利用准分子态原子或分子之间的能量跃迁来产生激光辐射的器件，其工作原理基于准分子激发态的产生和退激发过程。
准分子激光器的核心是一个放电腔室，其中含有一种或多种稀有气体、反应性气体和惰性气体的混合物，如氩气和氯气，或者氙气和氟气。
这些气体通过高压电离放电，产生等离子体态。
随后，气体混合物中的能级跃迁导致处于激励能级的原子或分子与激发态的原子或分子相互作用，形成准分子激发态。
在准分子激发态的作用下，反应性气体分子经历了电化学反应，形成活化的原子或分子，并且激发态的原子或分子获得了高度激发的态。
当能级激发达到足够高的时候，原子或分子之间的能量差足够大，会产生能量释放。
在准分子激光器放电过程中，放电电子与反应性气体分子发生反应后释放出的能量被激发气体吸收，使激发态的气体分子进一步激发.准分子激光器激发态分子的寿命非常短暂，只有几纳秒的时间。
在这个时间内，激发态分子会发生电荷转移或电化学反应，产生高能量的光子，即激光。
通过与激光增大器中的谐振腔相互作用，光就会被放大，形成一束强度高、相干性好、波长短的激光束。
准分子激光器的应用非常广泛。
其中一个主要应用领域是眼科手术，特别是屈光手术。
通过对角膜进行精确雕刻，准分子激光器可以有效地矫正人眼的屈光度和折光度，从而改善人们的视力。
除了眼科手术，准分子激光器还用于皮肤病治疗，如色素斑和痤疮的去除，因为其高能量光束可以选择性地杀死皮肤中的特定细胞或微生物。
此外，准分子激光器还在半导体行业中被广泛用于晶片制造。
在集成电路的制作过程中，激光器可以用来切割边缘、气泡、坑洞和材料表面的缺陷。
由于准分子激光器可以精确控制激光束的位置和能量，因此可以实现微米级别的切割和蚀刻，从而提高晶片的制造精度和可靠性。
除了以上应用，准分子激光器还在光刻、显微成像、光谱分析、医学研究等领域有着重要作用。
准分子激光器可以产生高能量、短脉冲的激光束，具有较高的可调谐性和窄束宽的特点，因此在这些领域具有独特的优势。
准分子激光器
谢谢观看
诞生及发展
第一台准分子激光器于1970年诞生，它利用强电子束激励液态氙，获得氙准分子的激射作用，激光波长为 1720埃。随后，气相氙分子以及其它稀有气体准分子，稀有气体氧化物准分子（氧化氪、氧化氙、氧化氩等）， 金属蒸气-稀有气体准分子（氙化钠等）；稀有气体单卤化物准分子（氟化氙、氟化氩、氟化氪、氯化氙、溴化氙、 碘化氙、氯化氪等），金属卤化物准分子（氯化汞、溴化汞等）和金属准分子（钠准分子等）陆续诞生。准分子 激光物质具有低能态的排斥性，可以把它有效地抽空，故无低态吸收与能量亏损，粒子数反转很容易，增益大， 转换效率高，重复率高，辐射波长短，主要在紫外和真空紫外（少数延伸至可见光）区域振荡，调谐范围较宽。 它在分离同位素，紫外光化学，激光光谱学，快速摄影，高分辨率全息术，激光武器，物质结构研究，光通信， 遥感，集成光学，非线性光学，农业，医学，生物学以及泵浦可调谐染料激光器等方面已获得比较广泛的应用， 而且可望发展成为用于核聚变的激光器件。
眼科使用的准分子激光,是以氩气(Argon)和氟气( Fluoride)为工作气体产生的激光。所谓准分子激光，是 指受激二聚体（惰性气体和卤素两种元素）所产生的激光，波长范围为157～353nm，所属紫外激光波段。用于临 床的氟化氩(ArF)混合物产生的波长为193nm的超紫外冷激光.
波长为193nm的ArF准分子激光，进行屈光手术的机理就是光化学效应。准分子激光单个光子的能量大约是 6.4eV，而角膜组织中肽键与碳分子键的结合能量仅为3.6eV。当其高能量的光子照射到角膜，直接将组织内的分 子键打断，导致角膜组织碎裂而达到消融切割组织的目的，并且由于准分子激光脉宽短（10～20nm），又是光化 学效应切除。因此，对切除周围组织的机械损伤和热损伤极小（﹤0.30μm）。
准分子激光器
什么是准分 子激光？
准分子激光是一种气体激光, 它的工作气体是由常 态下化学性质稳定的惰性气体原子如He 、 Ne 、Ar 、 Kr 、Xe 和化学性质较活泼的卤素原子如F 、Cl 、Br 等 组成。一般情况下,惰性气体原子是不会和别的原子形 成分子的, 但是如果把它们和卤素元素混合,再以放电的 形式加以激励,就 能成为激发态的分子,当激发态的分子 跃迁回基态时,立刻分解、还原成本来的特性,同时释放 出光子, 经谐振腔共振放大后, 发射出高能量的紫外光 激光。这种处于激发态的分子寿命极短, 只有10ns , 故 称为“准分子”( Excimer)。
准分子激光器 的原理和应用
组员：王卓彦、翁国斌、叶芊
什么是准分 子？
准分子是一种在激发态复合成分子,而在基态离解 成原子得不稳定缔合物,激光跃迁发生在束缚 的激发态 到排斥的基态,属于束缚—自由跃迁。1970年,巴索夫等 利用强流电子束泵浦液态氙,获得Xe激光振荡,其波长在 176nm,这是第一台准分子激光器,稍后美国洛斯阿拉莫 斯实验室报道了气相氙的激光输出,并在Kr(145.7nm)、 Ar(126.1nm)获得激光输出。1974年美国Kansan州立大 学 报道了稀有气体卤化物在紫外波段的强荧光辐射,这 一结果引起了激光界的极大兴趣,短短六个月, 美国海军 实验室便获得了溴化氙(282nm)激光输出,阿符科公司获 得了氟化氙(351nm)、氟化氪 (248nm)、氯化氙(308nm) 的激光输出,桑迪亚实验室则获得了氟化氢(193nm)的真 空紫外输 出,每个脉冲能量达百焦耳以上。
准分子激光 器眼科临床
激光治疗屈光不正手术在十多年的发展过程中, 随 着高新技术的不断应用, 技术日趋完美。从早 期的大光 斑扫描技术到现在广泛应用的小光斑飞点扫描技术, 解 决了术后中心岛效应和角膜浑浊问 题, 能够获得完美的 光学抛面, 使术面光滑、平整; 角膜地形图的应用和波 前像差引导下的个体化切 削技术,使切削精度大大提高, 真正做到“量眼定做”; 主动眼球跟踪技术解决了术眼转 动产生的角膜 偏中心切削, 使准分子激光始终处于角膜 中心约6mm 大小的区域内进行渐进式切削, 提高了手术 的 精确度。另外, 随着准分子激光治疗屈光不正手术发 展起来的其他技术如角膜板层刀技术、计算机 辅助软 件技术等等也有了长足发展,大大增强了手术的安全性。
准分子气原理
准分子激光器的工作原理是基于准分子的形成和解体过程中的能量释放来产生激光。
准分子是一种短暂存在的激发态分子，通常由稀有气体和卤素或金属元素组成。
它们在电子激发状态下形成，但在返回到基态时会迅速分解，释放出能量。
准分子激光器就是利用这一过程来产生激光的。
具体原理如下：
1. 激发过程：在准分子激光器中，通过电子束、放电或其他方式激发气体混合物，使得气体分子达到激发态并形成准分子。
2. 激光发射：准分子在返回到基态时会释放出光子，这些光子具有相同的波长和相位，从而形成了高度相干的光——即激光。
3. 波长特性：由于准分子激光器工作在紫外波段，它们具有短波长、高光子能量的特点，这使得它们在许多工业应用中具有优势。
准分子激光器的应用非常广泛，包括材料加工（如半导体晶片的刻蚀）、医疗手术、科学研究等。
它们的一些主要特点包括波长短、光子能量大、平均功率高，以及能够进行脉冲工作等。
总的来说，准分子激光器的设计和优化是一个复杂的过程，涉及到对气体高压放电等离子体深紫外激光系统的深入理解和研究。
随着技术的发展，准分子激光器在各个领域的应用也在不断扩展和完善。
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Superior Reliability&PerformanceA Full Line of Excimer LasersAs the world’s largest laser manufacturer and the leader in excimer technology,we manufacture and ship more excimer lasers than all other laser companies combined. We’re also the only laser company that makes virtually every other commercially available type of pulsed and continuous-wave ultraviolet laser.We have applications labs on three continents with each lab fully equipped for UV studies. We’ll also share our40-plus years of UV experience with you.So,whatever your UV laser application is,you’ll get the best solution when you work with Coherent.Cover:Excimer Lasers for Flat Panel Display Production Coherent offers the following advantages:•UV technology leader•Professional applications laboratory facilities worldwide •High power and high pulse energy•High repetition rate•Extremely compact light sources•OEM integration and custom performance parameters•Beam management systems•Superior customer-focused service and support2Superior Reliability&Performance••tech.sales@3Laser Selection Guide4Excimer Lasers4Applications Matrix 7Applications Labs Worldwide 9Excimer LasersExciStar XS 10Xantos XS12BraggStar Industrial Series 14IndyStar 18COMPexPro 20COMPexPro 150T 22LPXpro Series 24LAMBDA SX26On-Site Requirements32UV Optical Systems and Components34VarioLas Family 35GeoLasPro375X Optical Subsystems 39CrystaLas 40Components41Laser Measurement and Control Accessories44Contents•Toll Free:(800)527-3786•Tel:(408)764-4983•Fax:(800)362-1170Wavelength (nm)Max.Energy (mJ)Max.Repetition Rate (Hz)ExciStar XS 11571200/5001935200/5002488200/5003514200/500Xantos XS 11571500193550024885003514500BraggStar Industrial Series 1BraggStar Industrial 19371000248101000BraggStar Industrial LN 193>0.5100024821000IndyStar 119381000248121000COMPexProCOMPexPro 501931005024815050COMPexPro 10019320020/10024840020/10030825020/10035120020/100COMPexPro 150T 1932505024845050COMPexPro 20019340010/5024870010/5030750010/5035130010/50Laser Selection GuideExcimer Lasers1Max.energy (mJ)is stabilizedenergy.4Superior Reliability &Performance • •tech.sales@Wavelength (nm)Max.Energy (mJ)Max.Repetition Rate (Hz)LPXpro SeriesLPFpro 20015750200LPXpro 210193450100248800100308500100351400100LPXpro 220193300200248550200308300200351200200LPXpro 305193600502481100503087005035140050LAMBDA SXLAMBDA SX C-Series 300Hz 3081050300LAMBDA SX K-Series 2481000300LAMBDA SX C-Series 600Hz308900600Laser Selection GuideExcimerLasers5•Toll Free:(800)527-3786•Tel:(408)764-4983•Fax:(800)362-1170Applications Matrix16This matrix shows only a sampling of many possible applications for our lasers.Please contact us regarding your application.Superior Reliability&Performance••tech.sales@7Applications MatrixExamples of Marking and Surface Treatment Applications•Toll Free:(800)527-3786•Tel:(408)764-4983•Fax:(800)362-1170Applications Labs Worldwide8Applications MatrixMost source Superior Reliability &Performance • •tech.sales@9Coherent Japan YokohamaCoherent,Inc.Santa ClaraCoherent GmbH,G¨0ttingenApplications Labs WorldwideOur laser Please information,please go to page 50.Application Lab,Göttingen•Toll Free:(800)527-3786•Tel:(408)764-4983•Fax:(800)362-117010Excimer Lasers2.Key Features and Customer Benefits Key Features Customer Benefits Ultra-Compact•Low investment costs Lightweight Design•Flexible integrationAlmeta XS Tube Design •Extended tube lifetime•High pulse-to-pulse stability•Available at 157,193,248and 351nm wavelengths Corona Preionization •Homogeneous beam profile Solid-State Switch •Immediate operation•Maintenance-free operation Energy Monitor •Preset stabilized energy operation(optional)1.DescriptionExciStar™XS excimer lasers are tabletop systems with an ultra-compact design for easy installation and operation.Due to the integration of the new Almeta XS™tube design,they deliver excellent results in low pulse energy applications.Featuring soft corona preionization,the ExciStar XS provides a homogeneous energy distribution and high pulse-to-pulse stability.Solid-state switching provides immediate and main-tenance-free operation,and units are available with maxi-mum repetition rates of 200Hz and 500Hz.ExciStar XSExcimer Lasers3.Specifications 1Wavelength (nm)157193248351Max.Repetition Rate (Hz)200/500200/500200/500200/500Max.Pulse Energy (mJ)28126Stabilized Pulse Energy (mJ)1584Average Pulse Power 2<0.2/0.51/2.5 1.6/40.8/2Energy Stability 2(sigma,%)2/32/32/32/3Beam Dimensions (FWHM,V x H,mm 2)6x 36x 36x 36x 3Beam Divergence (FWHM,V x H,mrad 2)2x 12x 12x 12x 1Pulse Duration (ns)(typ.)55551All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at stabilized energy and maximum repetition rate (200/500Hz).Superior Reliability &Performance • •tech.sales@5.Accessories Part No.Product Description Use part Energy monitornumber of matching laser type On requestElectromechanical shutter (available only in combination with the energy monitor)4.Weight/Utilities/Dimensions Weight 58kg/128lbs.Cooling Air-cooledElectrical230V,50or 60Hz,2000VAC,16A (recommended external fuse),single-phase Dimensions 649x 300x 400mm (L x W x H)(25.6x 11.8x 15.7in.)ExciStar XSExcimerLasersE x c i m e r L a s e r sSpecifications (continued)Wavelength (nm)157193248351Part No.EXS-200-157nm-XS EXS-200-193nm-XS EXS-200-248nm-XS EXS-200-351nm-XS (200Hz,without energy monitor)-w/o emon -w/o emon -w/o emon -w/o emon 111588111158791115884On request Part No.EXS-200-157nm-XS EXS-200-193nm-XS EXS-200-248nm-XS EXS-200-351nm-XS (200Hz,with energy monitor)1115882111588011158851157175Part No.EXS-500-157nm-XS EXS-500-193nm-XS EXS-500-248nm-XS EXS-500-351nm-XS (500Hz,without energy monitor)-w/o emon -w/o emon -w/o emon -w/o emon 112441111244131124415On requestPart No.EXS-500-157nm-XS EXS-500-193nm-XS EXS-500-248nm-XS EXS-500-351nm-XS (500Hz,with energy monitor)1124412112441411244161148001Excimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsGas Management•Equipped with a completegas management system,including premix gas cylinder•No additional external gascompartment necessary•Compliant with GermanTÜV safety standardsAlmeta XS Tube Design•Extended tube lifetime•High pulse-to-pulse stability•Available at157,193,248and351nm wavelengthsCorona Preionization•Homogeneous beam profileSolid-State Switch•Immediate operation•Maintenance-free operationEnergy Monitor•Preset stabilized energyoperation1.DescriptionXantos™XS excimer lasers are compact,fully integrated sys-tems that are very easy to install.For ease of use in the lab,theXantos XS housing contains a complete laser module based onthe ExciStar XS,plus a pre-mixed gas cylinder that includes gashandling and complies with all necessary gas safety standards.Xantos XS lasers are best suited for low pulse energy applica-tions,such as spectroscopy and precision material processing.Featuring soft corona preionization,the Xantos XS providesa homogeneous energy distribution and high pulse-to-pulsestability.Solid-state switching ensures immediate,mainte-nance-free operation.Xantos XS lasers are available formaximum repetition rates of500Hz,and standard versionsare equipped with an energy monitor,as well as an electro-mechanical shutter.Xantos XSExcimer Lasers3.Specifications1Wavelength(nm)157193248351Max.Repetition Rate(Hz)500500500500Max.Pulse Energy(mJ)28126Stabilized Pulse Energy(mJ)1584Average Pulse Power2(W)0.5 2.542Energy Stability2(sigma,%)3333Beam Dimensions(FWHM,V x H,mm2)6x36x36x36x3Beam Divergence(FWHM,V x H,mrad2)2x12x12x12x1Pulse Duration(typ.)55551All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at stabilized energy and maximum repetition rate.5.AccessoriesNo accessories available.4.Weight/Utilities/Dimensions Weight 170kg/374.8lbs.Cooling Air-cooledElectrical230V,50to 60Hz,2000VAC,16A (recommended external fuse),single-phaseDimensions 900x 400x 1045mm (L x W x H)(35.4x 15.8x 41.1in.)[including signal lamp]Xantos XSExcimerLasersE x c i m e r L a s e r sSpecifications (continued)Wavelength (nm)157193248351Part No.Xantos XS-500-Xantos XS-500-Xantos XS-500-Xantos XS-500-(always includes energy monitor 157nm 193nm 248nm 351nm and electromechanical shutter)1123361112336211233631123364Excimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsIndustrial Design•High uptime•Low maintenanceFutureTube•Metal/ceramic tube design forextended lifetimesCorona Preionization•Homogenous beam profileSolid-State Pulser•"Soft"discharge for better point-ing stability and energy stability•Especially suitable forFBG WritingLine-Narrowed•With line-narrowing moduleBraggStar Version for maximized temporalcoherenceAir-Cooled•Quick and easy integration(water-cooled optional)•Optional external heatexchanger for water cooling athigh repetition rates1.DescriptionThe BraggStar™Industrial Series is a versatile UV light sourcethat delivers excellent performance for all types of:•Phase Mask Fiber Bragg Grating(FBG)Writing•Interferometric FBG Writing•High Spatial Coherence Applications•Precision Interferometric Applications(typical for line-narrowed(LN)version)Two versions are available:BraggStar Industrial and BraggStarIndustrial LN.The BraggStar Industrial,which is available at193nm and248nm wavelengths,provides repetition rates upto1000Hz.It also features the FutureTube™design,coronapreionization and solid-state pulser technology.The"LN"ver-sion includes a line-narrowing module for lower bandwidthoperation.Overall,BraggStar lasers are compact,highly effec-tive systems that are easy to install and easy to operate.BraggStar Industrial SeriesExcimer Lasers3.Specifications1BraggStar Industrial BraggStar Industrial LN Wavelength(nm)193248193248Max.Repetition Rate(Hz)1000100010001000Max.Pulse Energy(mJ)111614Stabilized Pulse Energy(mJ)710>0.52Average Pulse Power2(W)710>0.52Energy Stability2(sigma,%)3363Beam Dimensions(FWHM,V x H,mm2)6x36x36x1.56x1.5Beam Divergence(FWHM,V x H,mrad2)2x12x12x12x1Pulse Duration(ns)(typ.)12151215BraggStar Industrial SeriesExcimerLasersE x c i m e r L a s e r s3.Specifications 1(continued)BraggStar IndustrialBraggStar Industrial LNT emporal Coherence (FWHM,µm)>30>120>3000>3000Spatial Coherence (FWHM,µm)>700>1500>300>600Spectral Bandwidth 3(FWHM)natural natural <15<15Wavelength (nm)193248193248Part No.BSI 1000-BSI 1000-BSI 1000-BSI 1000-(always includes energy monitor)193nm-FT 248nm-FT 193nm-FT-248nm-FT-line narrowed line narrowed 4-06-0022-0634-06-0018-064112441711216661All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at stabilized energy and maximum repetition rate.3Calculated using temporal coherence data.Excimer LasersBraggStar Industrial SeriesExcimer Lasers4.Weight/Utilities/DimensionsBraggStar Industrial BraggStar Industrial LN Weight135kg/298lbs.140kg/309lbs.Cooling Air-cooled,optionally Air-cooled,optionallywater-cooled by external water-cooled by externalheat exchanger heat exchanger Electrical230V,50or60Hz,2000VAC,230V,50or60Hz,2000VAC,16A(recommended external fuse),16A(recommended external fuse),single-phase or two phases single-phase or two phases Dimensions(L x W x H)978x380x837mm978x380x837mm(38.5x15.0x33.0in.)(38.5x15.0x33.0in.)5.AccessoriesPart No.Product Description3-15-0004-000External heat exchangerKB200V —19"version (for 50or 60Hz and 100,115,200,208and 230V),Cooling capacity 2.0kW,water-to-airBraggStar Industrial SeriesExcimerLasersE x c i m e r L a s e r sExcimer LasersIndyStarExcimer Lasers1.DescriptionThe IndyStar series represents the successor of the ExciStarS-Industrial.With the integrated new tube technology“Almeta”the IndyStar provides multiple lifetimes forconsumables like LDU(laser discharge unit)and optics aboutseveral billion pulses compared to the ExciStar S-Industrial.IndyStar excimer lasers are highly effective light sources,featuring a compact design and easy integration andoperation,delivering superior results in demandingapplications,such as photomask inspection(classificationand detection of mask defects)and micromachining forindustrial demands.Featuring corona preionization and solid state pulsertechnology the IndyStar series provides up to1000Hzrepetition rates and is available at193nm and248nmwavelengths.2.Key Features and Customer BenefitsKey Features Customer BenefitsIndustrial Design•High uptime•Low maintenanceCorona Preionization•Homogeneous beam profileSolid-State Pulser•"Soft"discharge for better pointingstability and energy stability•No warm-up timeAlmetaTube•All metal sealed tube design forextended lifetimes about severalbillion pulsesIntegrated•Preset stabilized energy operationEnergy MonitorAir-Cooled•Quick and easy integration(water-cooled•Optional external heat exchangeroptional)for water cooling at high repetitionrates3.Specifications1AlmetaTube ArF KrFWavelength(nm)193248Max.Repetition Rate(Hz)10001000Max.Pulse Energy(mJ)1216Stabilized Pulse Energy(mJ)812Average Pulse Power2(W)812Energy Stability2(sigma,%)<2<2Beam Dimensions(FWHM,V x H,mm2)6x36x3Beam Divergence(FWHM,V x H,mrad2)2x12x1Pulse Duration(typ.)881All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at stabilized energy and maximum repetition rate.IndyStarExcimer Lasers4.Weight/Utilities/DimensionsWeight135kg/298lbs.Cooling Air-cooled;optionally water-cooledby external heat exchangerElectrical230V,50/60Hz,2000VAC,16A(recommended external fuse),single-phase or two phasesDimensions978x380x837mm(L x W x H)(38.5x15.0x33.0in.)(including signal lamp)5.AccessoriesPart No.Description3-15-0004-000External heat exchanger KB200V—19"version(for50/60Hz and100,115,200,208and230V),cooling capacity2.0kW,water-to-air ExcimerLasers Specifications(continued)Wavelength193248Part No.IndyStar193IndyStar248(always includes energy monitor)11416611147638Excimer LasersCOMPexProExcimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsCeramic Preionization•Unmatched pulse-to-pulsestability•Increased pulse energy•Increased static gas lifetimeIntegrated Vacuum Pump•Compact standalone designand Halogen FilterIntegrated,Purgable•Preset stabilized energyEnergy Monitor operationAir-Cooled(up to20Hz),•Quick and easy integrationSingle-PhaseCompliances Met•RoHS1.DescriptionCOMPexPro™lasers are highly effective light sources,featuringa compact design and easy installation and operation.Theydeliver superior results in demanding applications,such assolid sampling systems(LA-ICP-MS),material research(PLD)and precise material processing.Featuring new ceramic preionization,the COMPexPro pro-vides multi-hundred millijoules output,plus unmatchedpulse-to-pulse stability.The COMPexPro also comes with animproved gas processor that extends both gas and opticslifetimes.3.Specifications1Wavelength COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro(nm)50102110201205 Maximum Pulse Energy2(mJ)193100200200400400248150400400700700308-250250500500351-200200300300 Maximum Average Power3(W)19344124152487730730308-516420351-412315 Maximum Repetition Rate(Hz)All50201001050Pulse Duration(FWHM)(ns)All2020202525Energy Stability(sigma,%)All11111Beam Dimensions(FWHM,V x H,mm2)All14x524x1024x1024x1024x10 Beam Divergence(FWHM,V x H,mrad2)All2x13x13x13x13x11All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at10Hz.3Measured at maximum repetition rate.E x c i m e r L a s e r sCOMPexProExcimer Lasers4.Weight/Utilities/Dimensions WeightCOMPexPro 50/100270kg/PexPro 200325kg/716lbs.CoolingWater,2to 3l/min.(0.5to 0.8gal./min.),15to 20°CElectricalCOMPexPro 50/100230V,±10%,16A,50/60Hz switchable,1-phaseCOMPexPro 200115V,±10%,25A,50/60Hz switchable,1-phase OptionsUnstable resonator optics Dimensions (L x W x H)COMPexPro 50/1001282x 375x 793mm (51x 15x 31in.)COMPexPro 2001682x 375x 793mm (67x 15x 31in.)5.AccessoriesPart No.Product Description26082610Unstable resonator optics 193nm (COMPexPro 50and 100)26082710Unstable resonator optics 248nm (COMPexPro 50and 100)26082810Unstable resonator optics 308nm (COMPexPro 100)26082910Unstable resonator optics 351nm (COMPexPro 100)26083010Unstable resonator optics 193nm (COMPexPro 200)26083110Unstable resonator optics 248nm (COMPexPro 200)26083210Unstable resonator optics 308nm (COMPexPro 200)26083310Unstable resonator optics 351nm (COMPexPro 200)262456Unstable resonator adapter (COMPexPro 50,100and 200)1149339Beam aligner1132990Temperature stabilization moduleSpecifications (continued)WavelengthCOMPexPro COMPexPro COMPexPro COMPexPro COMPexPro (nm)50102110201205Part No.(F-Version)All11244091113836111383811151291115131Part No.(XeCl-Version)All-1113837111383911151301115132Excimer LasersCOMPexPro150TExcimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsCombination of•Magnetic assist for high lifetimeCOMPexPro110F and of electrical componentsCOMPexPro205F•NovaTube inside for optimizeddischarge conditions/minimizedwear of electrode material•Integrated electrostatic gaspurification minimizes gasconsumption•Ceramic preionization for highoutput stability•Delay stabilized high voltagecircuitsLine Narrowing Module•Tunable•Low bandwidth•Improved temporal coherenceIntegrated,Purgable•Preset stabilized energyEnergy Monitor operationCompliances Met•RoHS1.DescriptionThe COMPexPro™150T represents a special version of the verysuccessful COMPexPro PexPro150T is a combina-tion of two lasers(COMPexPro110and COMPexPro205),oper-ating in oscillator-amplifier-mode plus a tunable line narrow-ing module.It offers a unique combination of performancecharacteristics:narrow line width,high optical power density,low beam divergence and broad tunability.3.Specifications1COMPexPro150T ArF COMPexPro150T KrF Wavelength(nm)193248Maximum Pulse Energy2(mJ)250450Maximum Average Power3(W)1020Maximum Repetition Rate(Hz)5050Pulse Duration(FWHM)(ns)2525Energy Stability(sigma,%)11Beam Dimensions(FWHM,V x H,mm2)10x2410x24Beam Divergence(FWHM,V x H,mrad2)<0.2<0.2Bandwidth(FWHM,pm)<3<31All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.E x c i m e r L a s e r sCOMPexPro 150TExcimer Lasers4.Weight/Utilities/Dimensions Weight 750kg/1653lbs.CoolingWater,2to 10l/min.(0.5to 2.6gal./min.),5to 20°CElectrical400/208VAC ±10%,50/60Hz switchable,3-phasesOptionsUnstable resonator optics Dimensions (L x W x H)1960x 800x 1350mm (72x 31.5x 53.2in.)5.Accessories Part No.Product Description26082610Unstable resonator optics 193nm (COMPexPro 100)26082710Unstable resonator optics 248nm (COMPexPro 100)26083010Unstable resonator optics 193nm (COMPexPro 200)26083110Unstable resonator optics 248nm (COMPexPro 200)1149339Beam aligner1132990Temperature stabilization module3.SpecificationsCOMPexPro 150T ArFCOMPexPro 150T KrF Part No.(F-version)11567741156774Excimer LasersLPXproExcimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsAdaptable Resonator•Fit to application requirementsConfigurationFlexible Pulse Energy•Advanced process controlF-version•193,248,351nm operationC-version•308nm operationTrue Specs•Reliable long-term operationInternal Burst Generator•Programmable laser pulsesRugged Laser Frame•Unmatched beam stabilityLongest Gas Life•Low operation costs1.DescriptionLPXpro™is a family of RoHS compliant excimer lasers,offered at wavelengths of193,248,308and351nm,withoutput powers as high as90W at248nm.The LPFpro familyexpands wavelength range to vacuum UV with157nm.Thebeam quality,high pulse energy,short pulse length and highpeak power of LPXpro and LPFpro lasers combine to optimizeUV applications.These characteristics,plus their proven reliability and lowcost of ownership make LPXpro lasers suitable for a widerange of demanding,high precision processing tasks.Theseinclude drilling,pulsed laser deposition(PLD),laser directpatterning(LDP),laser lift off(LLO)and cleaning.3.Specifications1Wavelength LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro(nm)210220240305205220 Max.Pulse Energy2(mJ)157––––50401934503001606004002502488005503001100––3086500300–700––351400*********––Max.Rep.Rate(Hz)100200300/4005050200 Max.Average Power3(W)157–––– 2.5719335502425154024880908050––30864550–30––35135353015––Energy Stability4(1sigma)(%)112133 Pulse Duration5(ns)202020251515 Beam Dimensions5(V x H)(mm2)10x2410x2410x2010x2410x2410x24 Beam Divergence5(V x H)(mrad2)1x31x31x31x32x62x61All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Single pulse up to10Hz.3Measured at maximum repetition rate.4Specified at248nm.5Typical,FWHM.LPXpro ExcimerLasers4.Weight/Utilities/DimensionsWeightLPFpro/LPXpro200400kg/880lbs.LPXpro305430kg/946lbs. Cooling Water,<_7l/min.(1.8gal./min.),15to20°C Electrical208or400VAC,50/60Hz3-phaseDimensions(L x W x H)Laser Head1966x800x474mm3(77x32x19in.3) Power Supply460x185x750mm3(18x7x30in.3)5.AccessoriesPart No.Product Description26083020Unstable resonator optics193nm(external resonator configuration)26083120Unstable resonator optics248nm(external resonator configuration)26083220Unstable resonator optics308nm(external resonator configuration)26083320Unstable resonator optics351nm(external resonator configuration)953187Unstable Resonator Output Coupler157nm(LPFpro)953186Unstable Resonator Rear Mirror157nm26083010260831102628561149339ExcimerLasers3.Specifications(continued)LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro210220240305205220 Part No.(F-Version,400V)112012511201291152299112013311201371120139 Part No.(F-Version,208V)112012611201301152300112013411201381120140 Part No.(C-Version,400V)11201271120131–1120135––Part No.(C-Version,208V)11201281120132–1120136––Excimer LasersLAMBDA SXExcimer Lasers2.Key Features+Customer BenefitsKey Features Customer BenefitsIndustrial Design•Rugged and reliable•Modular setupIndustrial Interfaces•Integrated industrial PC•Serial interface RS-232•Direct Control Port(DCP)foreasy integration intoworkstationsExternal Resonator•Excellent beam-pointing stability•SlideValves for tube windowmaintenanceSealed and Purged•Long optics lifetimes,suitable forBeam Path rugged industrial enviromentsHigh-Stability NovaTube•Outstanding energy stability—NovaPowerSwitch™significantly below1%(rms)High UV Laser Power•Lowest costs per Watt UVFlexible Pulse Energy•Advance process controlExternal Resonator•Unmatched beam stability1.DescriptionThe LAMBDA SX™industrial excimer laser series provideshighly stabilized UV power to the production floor.It isdesigned to deliver the best energy stability available,and also features a number of innovative technologies forunsurpassed performance and reliability.PowerLokProprietary PowerLok™technology brings every pulse of aburst train to the desired energy level.PowerLok employs aself-learning algorithm,utilizing a look-up table to smoothencycling bursts.TimeLokProprietary TimeLok™technology stabilizes the trigger-to-pulse delay of all-solid-state HV switch-driven excimer lasersand minimizes the time jitter.TimeLok also employs aself-learning algorithm,utilizing a look-up table for delaystabilization in any operation mode.Onboard Diagnostics and LoggingThe last10,000values of HV,energy and sigma are storedin a ring buffer and are continuously updated from pulse topulse.This enables detailed logging of laser operations.e-DiagnosticsProvides external online data acquisition and analysis(optional).Allows tracking and analysis of laser performanceexternally on a notebook PC.Supports predicted maintenanceand process parameter control.LAMBDA SX C-Series 300HzExcimerLasersE x c i m e r L a s e r s3.Specifications 1LAMBDA SX 300CLAMBDA SX 200C Wavelength (nm)308308Maximum Stabilized Pulse Energy (mJ)800to 1000550to 670Maximum Stabilized Average Power (W)300200Maximum Repetition Rate (Hz)300300Energy Stability (rms,%)<_2<_1Pulse Duration (FWHM)(ns)2922Beam Dimensions (FWHM,V x H,mm 2)235x 1335x 12Beam Divergence (FWHM,V x H,mrad)<_4.5x 1.5<_4.5x 1.5Beam-Pointing Stability (V x H)<_0.45x 0.15<_0.45x 0.15Dynamic Gas Lifetime>40>40(at max.stabilized energy)(mio.pulses)Part No.11214461139027LAMBDA SX 300C,400VAC,50/60HzLAMBDA SX 200C,400VAC,50Hz 1139028LAMBDA SX 200C,400VAC,60Hz 1All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2At 1.0m from beam exit.4.Weight/Utilities/Dimensions LAMBDA SX 300C LAMBDA SX 200C Weight 1400kg/3086lbs.1370kg/3020lbs.Cooling Water,12to 28l/min.Water,12to 28l/min.(3.2to 7.4gal./min.),10to 15°C (3.2to 7.4gal./min.),10to 15°C Electrical26kVA,3-phase,400VAC,18kVA,3-phase,400VAC,50or 60Hz,190to 480VAC 50or 60Hz,190to 480VAC (with optional transformer)(with optional transformer)Dimensions 2500x 850x 1925mm 2500x 850x 1925mm (L x W x H)(98.5x 33.3x 76in.)(98.5x 33.3x 76in.)Excimer LasersLAMBDA SX C-Superb300HzExcimer Lasers2.Key Features+Customer BenefitsKey Features Customer BenefitsBest Pulse Stability High annealing homogeneityFlexible Pulse Energy Advanced process&cost controlStable Beam Parameter High annealing yield1.DescriptionThe LAMBDA SX315C is a superb performance excimer lasermainly designed for Excimer Laser Annealing.The highquality demand in OLED display manufacturing requireshigh grade lowtemperature poly-Silicon(LTPS)which canbe created only with high performance excimer lasers.4.Weight/Utilities/DimensionsWeight1400kg/3086lbs.Cooling Water,12to28l/min.(3.2to7.4gal./min.),10to15°CElectrical26kVA,3-phase,400VAC50or60Hz,190to480VAC(with optional transformer)Dimensions(L x W x H)2500x850x1925mm(98.5x33.3x76in.)3.Specifications1LAMBDA SX315CWavelength(nm)308Maximum Stabilized800to1050Pulse Energy(mJ)Maximum Stabilized315Average Power(W)Maximum Repetition Rate(Hz)300Energy Stability(rms,%)<_1。