Leybold APS 培训资料

7
Introduction into LEYBOLD APS source
Plasma ignition step2
Push the button „SOURCE“ to ignite the plasma The APS controller adjusts the following values automatically : Coil current Icoil = 4A Argon #1 flow = 4sccm Discharge voltage VD = 150V The electrons are being accelerated through the magnetic field. By impact between electrons and Argon-atoms positively loaded Ar+ ions are created (+ additional electrons). The plasma is ON. Ar 1
Anode
Ar 1
Ar 1 Coil Current ICoil Heater Current IH UH
Discharge Current ID
UD
Heater Voltage
TP250
Discharge Voltage
Discharge Current ID = constant & Argon Flow = constant Change Graphite Heater Power PH PH ↑ - U Discharge ↓ - BIAS ↓ - Icoil ↑ PH↓ - U Discharge ↑ - BIAS ↑ - Icoil ↓
BIAS Control ON
APS
Graphite Heater Power Control ACTIVE
Discharge Voltage (no control-read only)
APS Shutter Delay Time IGNITION
Ar 1/2 Ramp Time
ADJUST
1.5-1.9KW 1.5215A Graphite Heater Warm Up Ramp Slope 1A/s Graphite Heater Warm Up Wait Time
Alzenau, October 2005 G.Kruppa
Training SyrusPro Fujian Castech
2
Introduction into LEYBOLD APS source
Advanced Plasma Source
Alzenau, October 2005 G.Kruppa Training SyrusPro Fujian Castech 3
N
e e e
Ar e e
e e e e e e e e e
Ar e Ar e e e e
Plasma : ions and electrons = neutral
„spiraling“ electrones
magnetic coil magnetic field direction
e e
S
anode Lanthanhexaborit (LaB6)cathode
TA150
Alzenau, October 2005 G.Kruppa Training SyrusPro Fujian Castech 5
Introduction into LEYBOLD APS source
Open EB-gun shutter
EBG
Power Rate
BIAS Control OFF
e
anode
Lanthanhexaboride- magnetic field line cathode (LaB6)
Training SyrusPro Fujian Castech 10
Alzenau, October 2005 G.Kruppa
Introduction into LEYBOLD APS source
Ar 1/2 Start Flow Ar 1/2 Trigger Delay
Discharge Current
Ar 1/2 End Flow
5sec 5sec 300sec
Pre Discharge Current
Pre Discharge Time
5sec
„PLASMA READY“ Trigger
Introduction into LEYBOLD APS source
magnetic coils oxygene inlet anode tube LaB6 cathode ceramic insulators graphite heater
water cooling circuit
Alzenau, October 2005 G.Kruppa
Influence of Ar #1 and Ar#2
influence Argon #2 mainly responsible for distribution of plasma across the dome/planetary holder Ar 2 influence Argon #1 mainly responsible for impedance between cathode and anode
cloud of electrons
Heater Current IH VH
Heater Voltage
VH
electrons e-
Heater power supply TP250
Alzenau, October 2005 G.Kruppa
Training SyrusPro Fujian Castech
Training SyrusPro Fujian Castech
4
Introduction into LEYBOLD APS source
BIAS Voltage Control OFF
LaB6 Cathode
Ar 2BIAS来自eee-eee-
Ar 2
Discharge Current ID = constant, Coil Current Icoil = constant Change Argon Flow Ar 1 ↑ - U Discharge ↓ - BIAS ↓ Ar 1 ↓ - U Discharge ↑ - BIAS ↑ Argon Flow = constant, Coil Current Icoil = constant Change Discharge Current ID ↑ - U Discharge ↑ - BIAS ↑ ID ↓ - U Discharge ↓ - BIAS ↓ BIAS Voltage Control ON (Bias ctrl. by Coil Current) Discharge Current ID = constant Change Argon Flow Ar 1 ↑ - U Discharge ↓ - BIAS ↓ - Icoil ↑ Ar 1 ↓ - U Discharge ↑ - BIAS ↑ - Icoil ↓ Argon Flow = constant Change Discharge Current ID ↑ - U Discharge ↑ - BIAS ↑ - Icoil ↓ ID ↓ - U Discharge ↓ - BIAS ↓ - Icoil ↑
Open APS-shutter
Alzenau, October 2005 G.Kruppa
Training SyrusPro Fujian Castech
6
Introduction into LEYBOLD APS source
Plasma ignition step1
•Push the button „HEATER“ to turn ON the graphite heater. •The discharge current ramps up to approx. 215A. •The LaB6 cathode‘s temperature reaches approx. 1800°C ° •Electrons are being emitted from the LaB6 cathode.
Alzenau, October 2005 G.Kruppa
Training SyrusPro Fujian Castech
9
Introduction into LEYBOLD APS source
+
e e
+
e plasma
+ +
Ar e e e e e e Ar e e e e
+
„gas –shower“ ( O2 ) e Ar e e e e e e e e e By impact Argon-ions create atomic oxygene needed for a fast oxidation process „spiraling“ electrones
Ar+
Argon ions Ar+ TP250 electrons e-
Discharge Current ID
VD
Heater Voltage
e-
Ar
ee-
TA150
Alzenau, October 2005 G.Kruppa Training SyrusPro Fujian Castech
8
Introduction into LEYBOLD APS source
See the light.
Welcome