集成电路版图设计7

Spacing
Minimum Width Spacing Surrwenku.baidu.comund Spacing Surround Spacing
N Well to N Well
Active Active to Active P diff to N Well N diff to N Well N Active to N Well P Active to N Well
范例NMOS管相关图层的尺寸
• • • • • Active 14*5 N Select 18*9 Poly 2*9 Active Contact 2*2 Metal1 4*4
范例反相器相关图层的尺寸
• ndiff to N Well 5 Lambda • PMOS 基板节点元件 N Well 15*15 Active 5*5 N Select 9*9 Active Contact 2*2 Metal1 4*4 • NMOS 基板节点元件 Active 5*5 P Select 9*9 Active Contact 2*2 Metal1 4*4
2 Lambda
2 Lambda 1.5 Lambda 2 Lambda 2 Lambda 3 Lambda
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
7.2 Metal1 to Metal1 Spacing 7.3 Metal1 Overlap of PolyContact 7.4 Metal1 Overlap of ActiveContact 8.1 Via Exact Size 8.2 Via to Via Spacing 8.3 Metal1 Overlap of Via 8.4a Via to PolyContact spacing 8.5b. Via to ActiveContact Spacing 8.5a Via to Poly Spacing
Spacing
Exact Width Surround Spacing Spacing Minimum Width
Poly Contact to Poly Contact
Active Contact Active Contactto field active Active Contactto Active Contact Active Contact to gate1 Metal1
Rule Distance
10 Lambda
0
1.3 Well to Well (Same potential ) Spacing
2.1 Active Minimum Width 2.2 Active to Active Spacing 2.3a Source/Drain Active to Well Edge 2.3b Source/Drain Active to Well spacing 2.4a WellContact (Active) to Well Edge 2.4b SubsContact(Active) to Well spacing
Rule Type Rule Layers
Spacing Surround Surround Exact Width Spacing Surround Spacing Spacing Spacing Metal1 to Metal1 Poly Contact to Metal1 Active Contact to Metal1 Via NotOnPad Via NotOnPad to ViaNotOnPad Via NotOnPad to Metal1 Via NotOnPad to Poly Contact Via NotOnPad to Active Contact Via NotOnPad to Poly
6 Lambda
3 Lambda 3 Lambda 5 Lambda 5 Lambda 3 Lambda 3 Lambda
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
3.1 Poly Minimum Width 3.2 Poly to Poly Spacing 3.3 Gate Extension out of Active 3.4a/4.1a Source/Drain Width 3.4b/4.1b Source/Drain Width 3.5 Poly to Active Spacing 4.2a/2.5 Active to N-Select Edge 4.2a/2.5 Active to P-Select Edge 4.3a Select Edge to ActCnt
6.1A Active Contact Exact Size 6.2A FieldActive Overlap of ActCnt 6.3A ActCnt to ActCnt Spacing 6.4A Active Contact to Gate Spacing 7.1 Metal1 Minimum Width
集成电路版图设计7
教师：张喜凤
内容提要
• • • • PMOS管版图的绘制 NMOS管版图的绘制 CMOS反相器版图的绘制 LVS反相器
需说明的问题
• 一个files里可以包含多个cell • 编辑时可先按照pdf文档的提供的编辑顺 序及尺寸进行编辑绘图，完成后可以尝 试变换尺寸及位置查看错误所在，有利 于领会DRC（设计规则检查） • 绘图单位为lambda
范例反相器相关图层的尺寸
• 输入端口（poly contact） Poly contact 2*2 Poly 5*5 Metal1 10*4 Via 2*2 Metal2 4*4 • 输出端口 Via 2*2 Metal2 4*4
图层的定义
预期效果
• 能够识别电路图 • 能够绘制电路图 • 能够进行LVS对比
Exact Width Surround Not Exist Poly Contact Poly Contact to Field Poly PolyCnt_not_on_Poly
Rule Distance
2 Lambda 1.5 Lambda
5.3A PolyContact to PolyContact Spacing
ActCnt_not_on_act
Active to Poly N Select P Select N Select to N Select P Select to P Select pSelect&nSelect Not Selected Active 2 Lambda 2 Lambda 2 Lambda 2 Lambda 2 Lambda
需说明的问题
• 截面流程的定义（以文件lights.xst为 例）： • Step说明： • gd或grow/deposit 成长或淀积 • e或etch 刻蚀 • id或impant/diffuse 布植/扩散
图层说明
• • • • • • • • • • Well 阱 Active 有源区 Source/Drain active（p/n diff） 源/漏有源区 Well contact 阱接触 Poly 多晶硅 N-select n型选择区 Metal1 金属1 Via 通孔 ActiveContact 有源区接触 Metal2 金属2
Rule Distance
2 Lambda 2 Lambda 2 Lambda 3 Lambda 3 Lambda 1 Lambda 2 Lambda 2 Lambda 1 Lambda
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
4.3b Select Edge to ActCnt
Rule Type
Rule Type
Surround Spacing Surround Minimum Width
Rule Layers
Via NotOnPad to Poly ViaNotOnPad to Active ViaNotOnPad to Active Metal2
Rule Distance
2 Lambda 2 Lambda 2 Lambda 3 Lambda
Rule Type
Minimum Width Spacing Extension Extension Extension Spacing Surround Surround Surround
Rule Layers
Poly Poly to Poly Active to Poly Poly to n Active Poly to p Active Poly to Active Active not in NPN to NSelect Active not in NPN to PSelect Active Contact to ndiff
Surround
Rule Layers
Active Contact to pdiff
Rule Distance
1 Lambda
4.3c Not Exists: ActCnt not on Active
4.3 Gate Extension out of Active 4.4a Select Edge Width 4.4b Select Edge Width 4.4c Select to Select Spacing 4.4d Select to Select Spacing 4.5 Not Existing: pSel Overlap of nSel 4.6 Not Existing: Not Selected Active Extension Minimum Width Minimum Width Spacing Spacing Not Exist Not Exist
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
5.1A Poly Contact Exact Size 5.2A/5.6B FieldPoly Overlap of PolyCnt 5.2b Not Exists: PolyCnt not on Poly
Rule Type Rule Layers
9.2 Metal2 to Metal2 Spacing
9.3 Metal2 Overlap of Via1
Spacing
Surround
Metal2 to Metal2
Via to Metal2
4 Lambda
1 Lambda
范例PMOS相关图层的尺寸
• • • • • • N Well 24*15 Active 14*5 P Select 18*9 Poly 2*9 Active Contact 2*2 Metal1 4*4
Rule Distance
3 Lambda 1 Lambda 1 Lambda 2 Lambda 3 Lambda 1 Lambda 2 Lambda 2 Lambda 2 Lambda
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
8.5b Via(On Poly) to Poly Edge 8.5c Via to Active Spacing 8.5d Via (On Active) to Active Edge 9.1 Metal2 Minimum Width
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
1.1 Well Minimum Width
1.2 Well to Well (Different potential ) Not checkd
Rule Type
Minimum Width
Minimum Width
Rule Layers
N Well