薄膜电阻率测量系统设计

摘要

电阻率是电子材料的重要参考性能数，薄膜电阻率的测量备受关注。采用传统四探针高电阻率测量方法测量薄膜电阻率，需要加入较多的修正才能得到精确的结果。因此，研究薄膜电阻率的测量系统原理、软硬件集成方法等具有很重要的意义和应用价值。

在综合比较各种电阻率测量方法的基础上，本设计采用双电测组合法测量薄膜电阻率。首先，系统研究双电测组合法薄膜电阻率测量原理，跟据测量要求改进电阻率的计算方法，极大的简化相关修正，提高测量结果的可靠性和精确度。其次，基于单片机的Rymaszewski四探针双电测组合法设计了薄膜电阻率自动化测量系统。在8051单片机的控制下，利用基于CD4052芯片的接口电路实现电流探针，电压探针的自动切换，并通过单片机控制实现两次电压测量；同时根据两次测量结果编程完成范德堡修正因子的计算，最终实现薄膜电阻率自动测量和显示，建立基于8051单片机的双电测四探针薄膜电阻率测量系统。实验结果表明，所设计的自动测量系统不仅可以满足多种薄膜电阻率测量要求，而且提高了测量精度和自动化程度，同时精简了薄膜电阻率测量过程。

关键词：四探针双电测组合法;范德堡修正因子;CD4052;薄膜电阻率

Abstract

Attention is mainly paid to the measurement of resistivity--an important property of

thin film. Owing to apply traditional four-probe method on film sample resistivity

measurement, complex corrections are required in order to acquire an accurate result and sample will easily be scratched during the measuring process when using manual four-probe equipment. Therefore, the measurement theory, software and hardware integration method by

virtual instrumentation for thin film resistivity automatic system are of important value.

In comprehensive comparative measurement method of resistivity, on the basis of the design USES double electrical measurement group legal measuring film resistivity. First, system research double electrical measurement is the legitimate film resistivity measurements of the principle with according to measurement requirements, the calculation method of improving resistivity, greatly simplified related correction, improve the reliability and precision measurement result. Secondly,Based on SCM Rymaszewski four-point probe double electrical measurement group the film resistivity legitimate design automation measuring system. In 8051 under the control of the single chip microcomputer based on CD4052 chip interface circuit implements current probe, voltage probe to switch, and through the single-chip microcomputer control achieve two voltage measurement; And according to two measurement results programmed Vanderbilt correction factor calculation, and finally achieve the film resistivity of automatic measurement and display, based on the single chip microcomputer 8051 double electrical measurement of four probe film resistivity measuring system. The experimental result shows that the design of automatic measurement system can not only meet a variety of film resistivity measurement requirements, and improve the measuring precision and automation degree, and streamline film resistivity measurement process.

Keywords: dual electro measurement with four point probes; van der Pauw correction factor ; CD4052;Film resistivity

目录

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