全球半导体晶体生长仿真著名商业软件FEMAG之FEMAG-CZ - Czochralski Crystal Growth Simulation

全球半导体晶体生长仿真著名商业软件FEMAG FEMAG-CZ - Czochralski Crystal Growth Simulation
by FEMAGSoft
FEMAG-CZ is a global crystal growth simulation software taking into account the furnace geometry, the materials and the operating conditions in order to provide the user with all the information required for his process development and optimization.
Global heat transfer, Thermo-elastic stresses, Defect prediction, Melt flow and Heater power.
Features
∙» Evolution of the solid/liquid interface shape (dynamic simulation)
∙» Thermal gradients in the liquid and solid phase
∙» Heat fluxes in the overall furnace
∙» Thermal-stresses in the crystal and hotzone components
∙» Continuous feeding
∙» Species (dopants and impurities) segregation and concentration
∙» Magnetic fields
Supported Languages:English
Supported Technologies
Operating Systems:Linux
Programming Languages:C/C++
Product Type(s):Software
Additional Product Information
FEMAG family products provide so-called ''global calculations'' , meaning that all the constituents of the furnace are taken into account, together with all heat transfer modes within and between them (conduction, convection and radiation). The modelling of conduction includes the possibility of temperature-dependent and anisotropic conductivity. The modelling of radiative heat exchanges assumes diffuse radiation and can take into account semi-transparent materials through wavelength-dependent radiative properties.
The flow in the melt phase can be modelized by a laminar and/or turbulent model. It takes into account natural convection, due to temperature-dependent density and surface tension, and forced convection due to crystal, crucible and/or polycrystal - in case of the FZ process - rotations, possibly under the influence of a magnetic field (axial, cusp, rotating or transverse). Melt flow calculation also considers the effect of gas flow and of tangential forces due to induction (if any) on melt surface.
The flow in the gas phase, as a result of an imposed flow rate at gas inlet and of temperature-dependent density, can be modelized by a laminar or a turbulent model.
The heating of the process is modelized: ohmic heaters (one or several, coupled or independent) or inductors. In the case of multiple heaters, the user has the possibility to control the heating powers by imposing a specific temperature at given control points.
The shapes of interfaces and free-surfaces of the system are calculated. The solidification front and melting front - in case of the FZ process - shapes are calculated taking into account heat dissipation (or absorption) proportional to the growth rate. The melt/gas interface is calculated, as a result of a balance of surface tension, gravity and normal forces due to induction (for the FZ process), providing an accurate meniscus shape.
The processes can be modelized by a quasi-steady or by a time-dependent model. The quasi-steady model takes into account the effect of growth rate on heat transfer while assuming a fixed position for all constituents. The time-dependent model considers a geometry that evolves due to crystal lengthening and melt shrinking. It also takes into account the transient effects due to the thermal inertia of all constituents, and due to the inertia of the solidification front shape.
Global heat transfer. Temperature isolines are separated by 50 K.。