SiTime-MEMS晶振

Feb 2009
US-Taiwan High Tech Forum
BioMEMS
Microfluidics > Implantables <
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Profusa Sensor Patch Concept
Implantation syringe
RF Link
Timing Chips
• 10%/year growth • $1.4B in 2005 • $2.3B in 2010
• $4.7B in 2010
– 18B units
Total Market will be ~$7B in 2010. 30% of apps are in portable devices, where size and power are critical.
Microtechnologies in the New Decade
Kurt Petersen, PhD
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Growth of MEMS
1970
60’s - 70’s Industrial
1980
80’s Medical
1990
80’s - 90’s Automotive
2000
2000’s
2010
2010’s
Consumer Bio-MEMS + Consumer
Market Size - units
105
106
107
108
109
1010
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Billions of MEMS Devices
• Avago has shipped nearly 2B MEMS RF filters since 2003
This Market dwarfs any other MEMS application.
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MEMS Resonators
• • • • Under development for over 40 years First demonstration by Westinghouse in 1965 Devices have never been able to compete with quartz ppm accuracy requirement places a severe constraint on the replacement of quartz crystals for timing applications • Drift over time and stress, as well as temperature hysteresis, are huge problems which were not solved during 40 years of MEMS development - until now
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SiTime Resonating MEMS Device
• Single Crystal Silicon Element • Quad Resonator • Single-point attachment, so no stresses due to packaging • 300μm on a side, 10μm thick • Electrostatic deflection • High quality vacuum chamber
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“Providing DNA/RNA test results
when and where they are needed”
Cepheid GeneXpert
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Microfluidic Cartridge
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SEM photos
SiTime Packaging
Standoff Stitch Bonds Gold thermosonic wire bonds MEMS Chip Kobe CMOS Chip
0.8mm
MEMS die
CMOS die
Leadframe
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MEMS FirstTM Cross Section
Manufacturing Partner: Jazz Semiconductor
0.4 μm gap 10 μm beam thickness
MEMS First means that the MEMS is built first, before any circuitry and sealed at 1100ºC. Water vapor is eliminated.
100 nm
Glass Substrate Fluorescent Signal
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Pacific Biosciences DNA Sequencing
By the end of the decade, individuals will get their entire genome sequenced for <$1000
Valve Open
Valve Closed
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Pacific Biosciences DNA Sequencing
fluorescently labeled nucleotides
double stranded DNA
single stranded DNA Zero Mode Waveguide in Metal Film tethered polymerase
Gas Chromatograph on a wafer
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Cepheid Microfluidics; 1998
200 μm
500 μm
150 μm
Flow Cytometry
DNA concentration
Weir or Filter
fabricated with DRIE (Deep Reactive Ion Etching)
The Largest Potential MEMS Market
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The Quartz and Timing Marketplace
Quartz Crystals
• 8.5%/year growth • $3.1B in 2005
– 10B units
Mail Sorting Environment
1728 mail sorting machines in the US Postal Service. Each performs one Anthrax test/hour.
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Cepheid GeneExpert Infinity
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BioMEMS
> Microfluidics < Implantables
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Microfluidics:
Professor Jim Angell at Stanford started much of the early MEMS research.
Glucose sensor
The chemical sensor itself is totally passive: no electronics inside the body !!
Insulin pump
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BioMEMS: Implantables
• CardioMEMS
Implantable pressure sensor Resonant inductor/capacitor Capacitor changes with pressure Resonant frequency is detected by an external RF “wand” – Made from bonded glass plates with inductor inside – FDA approved for implant inside repaired aneurysms to monitor blood “leakage” back into the aneurysm
– as of Nov 2008
• Cepheid will have shipped about $1B in MEMS microfluidic products since 1996
– as of Dec 2010
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SiTime Oscillators
30
Frequency Error (ppm) Frequency ppm error
20
10
0
-10
-20
-30
-40
-50
-40
-30
-20
-10
0
10
20 30 Tem perature (C)
40
50
60
70
80
90
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