ELIVAC真空泵
世界真空泵十大品牌
世界真空泵十大品牌一、品牌概述真空泵是一种能够将容器内的气体或者蒸汽抽出的设备，被广泛应用于工业创造、科学研究、医疗设备等领域。
在全球范围内，有许多知名的真空泵品牌，它们以其卓越的性能、可靠的质量和广泛的应用领域而闻名。
二、品牌排名及介绍1. Edwards作为全球率先的真空和抽气技术提供商，Edwards在真空泵领域具有广泛的应用经验和专业知识。
其产品包括干式真空泵、涡轮份子泵、罗茨真空泵等，广泛应用于半导体、光伏、电子、医疗等行业。
2. Leybold作为真空科技领域的领导者之一，Leybold提供各种类型的真空泵，包括旋片泵、涡轮份子泵、干式真空泵等。
其产品广泛应用于半导体、光伏、化学、食品等行业。
3. Pfeiffer Vacuum作为真空技术领域的领导者，Pfeiffer Vacuum提供各种类型的真空泵和真空系统。
其产品包括旋片泵、涡轮份子泵、干式真空泵等，广泛应用于半导体、光伏、科学研究等领域。
4. Busch作为全球率先的真空泵和系统解决方案提供商，Busch提供各种类型的真空泵，包括旋片泵、涡轮份子泵、罗茨真空泵等。
其产品广泛应用于食品、医疗、化工等行业。
5. Agilent作为科学仪器和分析解决方案的领导者，Agilent提供各种类型的真空泵和真空系统。
其产品包括旋片泵、涡轮份子泵、干式真空泵等，广泛应用于科学研究、医疗设备等领域。
6. Osaka Vacuum作为真空泵和真空设备的创造商，Osaka Vacuum提供各种类型的真空泵和真空系统。
其产品包括旋片泵、涡轮份子泵、干式真空泵等，广泛应用于半导体、光伏、化学等行业。
7. KNF作为真空泵温和动泵的创造商，KNF提供各种类型的真空泵温和动泵。
其产品广泛应用于医疗、科学研究、分析仪器等领域。
8. Becker作为真空泵和压缩机的创造商，Becker提供各种类型的真空泵和压缩机。
其产品广泛应用于食品、医疗、化工等行业。
9. Leybold作为真空科技领域的领导者之一，Leybold提供各种类型的真空泵，包括旋片泵、涡轮份子泵、干式真空泵等。
爱发科真空泵维修工厂安全操作及保养规程
爱发科真空泵维修工厂安全操作及保养规程引言爱发科真空泵是工业生产中常见的一种设备，在使用过程中需要进行正确的操作和定期的保养，以确保设备的安全和可靠性。
本文将介绍爱发科真空泵的安全操作规程和保养规程，以帮助维修工厂工作人员正确使用和维护这款设备。
1. 安全操作规程1.1 设备准备在进行任何操作之前，确保以下准备工作已经完成：•检查设备是否处于关机状态，确保安全。
•确保设备周围环境清洁，无杂物和障碍物。
•确认工作场所的通风良好，防止有害气体积聚。
•戴上适当的个人防护装备，如安全眼镜、手套等。
1.2 启动操作以下是爱发科真空泵的启动操作步骤：1.检查设备电源是否连接正常，确保供电稳定。
2.打开设备主电源，确保设备处于待机状态。
3.检查设备连接管路是否正常，防止泄漏。
4.打开真空泵的阀门，逐步增加泵速，以避免突然增加的负荷。
5.检查真空泵的运行是否平稳，观察是否有异常噪音或震动。
1.3 关闭操作以下是爱发科真空泵的关闭操作步骤：1.先关闭真空泵的阀门，逐步减小泵速，降低负荷。
2.断开设备的电源，确保设备停止运行。
3.清理设备周围的杂物和泄漏物。
4.定期检查设备管路和密封件的磨损情况，及时更换。
1.4 应急处理在出现以下情况时，应立即进行应急处理：•发现设备漏电或电线起火时，立即切断电源并通知相关人员。
•发现设备发生异常噪音或振动，立即停止设备并检查原因。
•发现设备泄漏有害气体或液体时，迅速通风并采取防护措施。
2. 保养规程爱发科真空泵的定期保养是确保设备长期高效运行的关键。
以下是爱发科真空泵的保养规程：2.1 清洁维护定期清洁设备的外表面和内部部件，确保设备无积尘和杂物。
2.2 润滑保养定期为设备进行润滑保养，以延长设备寿命和提高运行效率。
2.3 管路维护定期检查设备的管路连接是否松动或泄漏，及时修复或更换。
2.4 磨损部件更换定期检查设备的磨损部件，如密封件、滤网等，及时更换。
2.5 运行记录定期记录设备的运行情况和维护记录，以进行问题分析和改进。
ILMVAC真空泵说明书P4Z-P23Z
Types P 4 Z, P 12 ZP 6 Z, P 17 ZP 8 Z, P 23 Z3023162008-02-25We are constantly working on the further development of all our product types.Reprinting or reproduction of this manual, including extracts, is not allowed without the prior written permission of ILMVAC GmbH.All rights under the copyright laws are expressly reserved by ILMVAC GmbH.We reserve the right to make changes and amendments.ILMVAC GmbHAm Vogelherd 2098693 Ilmenau, GermanyTelephone: +49 36 77 60 40Fax: +49 36 77 60 41 10E-mail: info@ilmvac.deInternet: http://www.ilmvac.deContentsContents1Important Information (5)1.1General Information (5)1.2Target Groups (5)1.3Intended Use (5)1.4Use for an Unauthorized Purpose (5)1.5Safety Devices (6)1.6Meaning of the Warning notes (6)1.7Product Standards, Safety Regulations (6)2Basic Safety Instructions (7)2.1General Information (7)2.2Electricity (7)2.3Mechanical Systems (7)2.4Hazardous Substances (8)2.5High Temperatures (8)3Description (9)3.1Design (9)3.1.1Advantages (9)3.2Area of Application (10)3.3Function (10)3.3.1Working Principle (10)3.3.2Vacuum-tightness when switching off the suction port valve (11)3.3.3Gas ballast (12)3.4Scope of Delivery (12)3.5Accessories optional (13)3.5.1Overview and order numbers (13)3.5.2Condenser AKS 16 and AKS 25 (13)3.5.3Condenser AKD 16 and AKD 25 (14)3.5.4Main stream oil filter (14)3.5.5ILMVAC – Types of oil (15)3.5.5.1Features and applications (15)3.5.5.2Technical data (15)4Technical Data (16)4.1Dimensions (16)4.2Intake Pressure / Pumping Speed – Diagrams (17)4.3Device data (18)5Installation and Operation (20)5.1Unpacking (20)5.2General references (20)5.3Installation and Connection (20)5.4Connecting to the electricity supply (21)5.4.1Type of motor protection (21)5.5Selecting the operating oil (21)5.5.1Importance for the choice of the right oil (21)5.5.2Oil for drawing off oxygen (22)5.6Operation (23)5.6.1Starting-up (23)5.6.1.1Oil level (23)5.6.1.2Operating temperature (23)302316 3Contents5.7Use of the gas ballast when switching on (24)5.7.1Operation with gas ballast when drawing off condensable vapours (24)5.7.2Closing down (26)5.8Storage (26)5.9Scrap Disposal (26)6Maintenance and Servicing (27)6.1Maintenance Performed by the User (27)6.1.1Oil level control (27)6.1.2Topping-up the oil (27)6.1.3Oil check (28)6.1.4Oil change (28)6.1.4.1Draining the oil (28)6.1.4.2Filling up with oil (29)6.1.4.3Flushing (29)6.1.5Changing the oil type (29)6.2Maintenance by the Manufacturer (30)6.2.1Servicing (30)6.3Damage Report (30)7Troubleshooting (31)8Overview of spare parts (33)8.1Gasket set (33)8.2Maintenance kit (34)8.3View of spare part P 4 Z, P 6 Z, P 8 Z (35)8.3.1List of spare parts P 4 Z, P 6 Z, P 8 Z (36)8.4View of spare part P 12 Z, P 17 Z, P 23 Z (37)8.4.1List of spare parts P 12 Z, P 17 Z, P 23 Z (38)4 302316Important InformationInformation1 ImportantInformation1.1 GeneralThe ILMVAC Rotary Vane Pumps conform to the following directives:• 2006/95/EC Low Voltage DirectiveDirective• 2006/42/EC MachineryCompatibility Directive• 2004/108/EC ElectromagneticThe CE sign is located on the rating plate. Observe the binding national and local regulationswhen fitting the pump into installations.Our products are sold worldwide and can therefore be equipped with the typical nationalplugs and for the various voltages. You will find more information about the available pumpdesigns under http://www.ilmvac.de.Groups1.2 TargetThis Operating Manual is intended for the personnel planning, operating and maintainingILMVAC Rotary Vane Pumps.This group of people includes:• Designers and fitters of vacuum apparatus,• Employees working on commercial laboratory and industrial vacuum technology applica-tions and• Service personnel for rotary vane pumps.The personnel operating and maintaining the rotary vane pumps must have the technicalcompetence required to perform the work that has to be done.The user must authorize the operating personnel to do the work that has to be done.The personnel must have read and understood the complete Operating Manual before usingthe rotary vane pumps.The Operating Manual must be kept at the place of use and be available to the personnelwhen required.Use1.3 Intended• The layout of the rotary vane pump must be appropriate for the conditions of use. Theuser bears the sole responsibility for this.• The rotary vane pump may only be operated under the conditions stated– in the "Technical Data" section,– on the type plate, and– in the technical specification for the order concerned.1.4 Use for an Unauthorized PurposeIt is forbidden to use the pump for applications deviating from the technical data stated onthe type plate or the conditions stated in the supply contract, or to operate it with missing ordefective protective devices.302316 5Important InformationDevices1.5 SafetyMeasures such as the following are for the safety of the operating personnel:• electrical connection with a protective conductor (operating mode S1) and an earthing plug• Motor protection device (thermal) and• “Hot Surface" label on the pump body (warning notice).The rotary vane pump must not be operated without these elements.1.6 Meaning of the Warning notesTake note of the warning notes. They are in the following box:CAUTION ! / WARNING !Hazard which may lead to serious injuries or material damage.1.7 Product Standards, Safety RegulationsILMVAC Rotary Vane Pumps meet the following product standards:DIN EN 292-1, DIN EN 292-2 Safety of machines, basic terminologyDIN EN 1012-2 Compressors and vacuum pumpsDIN EN 60204-1 Electrical equipment of machinesEN 50110-1 (DIN VDE 0105-100) Operation of electrical installationsEN 61010-1 Safety for laboratory devicesEN 50081-1-2 Electromagnetic compatibility (EMC)Generic specification - Interference resistancefor residential, business and industrial areas, and small businesses EN 50082-1-2 Electromagnetic compatibility (EMC)Generic specification - Interference emissionfor residential, business and industrial areas, and small businesses EN 55014 Radio disturbance characteristics of electrical equipment andsystemsEN 61000-3-2/3 Electromagnetic compatibility (EMC)Directive 2006/42/EC Law and Administration Regulations relating to MachineryDirective 2002/95/EC RoHS Restriction of use of certain hazardous substancesThe following additional safety regulations apply in the FR Germany:BGV A2 Electrical equipment and operating materialsVBG 5 Power-driven machinesBGR 120 Guidelines for laboratoriesBGI 798 BG hazard assessment in the laboratoryBGG 919 Accident prevention regulations for "compressors"BGR 189 (BGR 195; 192; 197) Use of protective working clothesObserve the standards and regulations applying in your country when you use the rotaryvane pumps.6 302316Basic Safety Instructions2 Basic Safety InstructionsInformation2.1 GeneralWarning notices must be observed. Disregarding them may lead to damage to health andproperty.The rotary vane pumps must be operated by personnel who can detect impending dangersand take action to prevent them from materialising.The manufacturer or authorized authorised workshops will only service or maintain the rotaryvane pump if it is accompanied by a fully completed damage report. Precise information a-bout the contamination (also negative information if necessary) and thorough cleaning of therotary vane pump are legally binding parts of the contract.Contaminated rotary vane pumps and their individual parts must be disposed of in accor-dance with the legal regulations.The local regulations apply in foreign countries.2.2 ElectricityRotary vane pumps of operation mode S1 are supplied. Please note that the testing must berepeated in accordance with DIN EN 0105, DIN EN 0702 and BGV A 2 in case of portabledevices of operation mode S1. The local regulations apply in foreign countries.Please note the following when connecting to the electrical power supply system:• The electrical power supply system must have a protective connector according to DINVDE 0100-410 (IEC 60364-4-41).• The protective connector must not have any breaks.• The connecting cable must not be damaged.Systems2.3 MechanicalImproper use can lead to injuries or material damage. Observe the following instructions:• Only operate the rotary vane pumps with the specified flange-mounting components.• Hazardous substances must be separated out as far as this is technically possible beforethey reach the pump.• External mechanical stresses and vibrations must not be transmitted to the pump. Onlyuse flexible vacuum hoses for connecting Rotary Vane Pumps.• The pump must not be used to suck up fluids. Lay the exhaust pipe so that it slopesdownwards, so allowing condensate to flow out of the pump. Collect the condensate anddispose of it in an environmentally compatible manner.• Maintain a space of least 20 cm between the pump and adjacent parts in order to enablethe pump to cool.CAUTION !Solid particles in the pumping medium impair the pumping action and can lead todamage. Prevent solid particles penetrating into the pump!302316 7Basic Safety InstructionsSubstances2.4 HazardousCAUTION !The operating company bears the responsibility for the use of the rotary vane pump.Hazardous substances in the gases to be pumped can cause personal injuries and property damage. Pay attention to the warning notices for handling hazardous substances.The local regulations apply in foreign countries.Combustible GasesExamine before switching on whether that can form gas combustible gas/air mixtures which can be promoted! Consider the regulations of the guideline 1999/92/EC.It is not permitted to pump gases that are combustible or prone to explosion.Aggressive gasesThe rotary vane pumps is not certified according to ATEX guidelines 94/9/EC.Poisonous gasesUse a separator when pumping poisonous or harmful gases. Prevent such substances from leaking out of the appliance or pump. Treat these substances according to the applicableenvironmental protection regulations.Test the strength and leak-tightness of the connecting lines and the connected apparatus.Prevent environmental poisons, e.g. mercury, getting into the rotary vane pumps.Fulfil the requirements, for example:• German Hazardous Substances Regulation (GefStoffV) of 23. December 2004• Regulations 2006/121/EC (classification, packaging and identification of hazardous sub-stances),• Manufacturer's safety data sheets on hazardous substances.Temperatures2.5 HighThe rotary vane pump may heat up as a result of the temperature of the gas being pumpedand through intrinsic heating. The temperature of the rotary vane pump heads can reach80 °C during operation.Prevent the following maximum permissible temperatures from being exceeded.• + 40 °C for the environment, and• + 20 °C for the gas to be pumped.The motor is protected against overload by a suitable protective device.8 302316Description3 Description3.1 DesignThe ILMVAC P - Z series vacuum pumps are oil-sealed, two-stage rotary vane vacuumpumps.The drive motor is directly flange-mounted onto the motor cover of the pump holder.The pump shaft and the motor shaft are connected to each other by an elastic coupling.The bearings of the interior pump body are force-fed lubricated sliding bearings.1 Rotary knob for setting the gas ballast valve(direction of rotation: to the left = open, to the right = closed)2 Screw-plug for oil filling3 Type plate4 Oil inspection glass5 Oil drain screw-plug6 On / Off switch7 Drive motor8 Suction port9 Exhaust portFig. 1 Rotary Vane Pump P 23 Z3.1.1 Advantages• extremely compact construction and consequently small dimensions and low weight• vacuum pump is sealed after switching• quite running with low intake pressures• a gas ballast valve enables condensing vapours to be pumped out, it achieves a high tolerance ofwater vapour pressure• Suction and exhaust ports are designed with small flanges according to pneurop standard• The oil level can be checked on the oil level gauge• Important parts are easy to service and replace• The powerful oil circuit strengthens the purging and cleans the pump of particles of dirt and con-densates.• The rotary vanes are made of a special plastic. They are not affected by corrosion and not dam-aged by dirt particles and have very good sliding properties.• All elastomer seals are made of Viton.302316 9Description3.2 Area of ApplicationThe range of application of our oil-sealed rotary vane pumps encompasses the entire field of vacuum technology, both for use in the laboratory and in industry.The task is to create end pressures (partial) down to around 10 -4 mbar• as a single pump• as a fore-pump for oil diffusion pumps or as turbo-molecular pumps.The rotary vane pump can pump out biological, toxic and radioactive gases and vapours,and evacuate containers or vacuum installations up into the high vacuum range.Description The pump body is subdivided into several chambers by the eccentrically arranged rotorwhich has two radically sliding vanes. The volume of each chamber changes cyclically as the rotor turns. This sucks the gas into the intake opening. The gas flows through the dirt filter,which is connected to the centring ring, into the pump body. After the intake opening is clo-sed by the vane, the gas is transported onwards and compressed.A dosed quantity of air (gas ballast) can be let into the pump body during the compression byopening the gas ballast valve. This prevents vapours condensing in the vacuum pump.The maximum tolerance of water vapour pressure is 40 mbar.Oil is injected into the pump body for sealing and lubrication. An oil pump pumps oil out ofthe oil reservoir into a pressure oil lubrication system that feeds all the bearings. The low-mounted oil suction pipe achieves a large usable oil reserve.At the outlet valve, the compressed gas is pumped out of the pump body through the ex-haust port. The oil carried along with the gas is separated out by a filter (accessory).3.3.2 Vacuum-tightness when switching off the suction port valveVacuum-tightness when the pump is switched off is achieved by means of the hydraulicallyactuated suction port valve (HV-valve).The hydraulically actuated suction port valve closes the suction port vacuum-tight when theunit is shut down. This prevents venting and oil flowing back into a connected receptacle.1 Hydraulic piston2 Valve disk3 Pull-back spring4 Suction opening5 Venting holeFig. 3 Suction port valve (HV-valve)Descriptionballast3.3.3 GasCAUTION !Condensable vapours may only be extracted when the gas ballast valve is open,when the vacuum pump is at operating temperature and within the limits of the ma-ximum tolerance of water vapour pressure!Condensation occurs if the maximum water vapour pressure tolerance of 60 mbar isexceeded.When pumping condensable vapours, they may be compressed during the compressionphase above the saturated vapour pressure and condense.This causes considerable deterioration in the vacuum pump’s performance:• ultimate pressure is not achieved• corrosion occurs• heavy oil contamination and formation of emulsions.When the gas ballast valve opens (to the left), air flows into the compression space. The airflowing in keeps the partial pressure of the condensable medium so low that the pressureneeded to open the outlet valve is reached before the medium condenses.CAUTION !Operating with gas ballast increases the operating temperature of the vacuum pumpby 5 – 10 K.Should condensate form despite actuation of the gas ballast device, the suction port must be closed and the pump operated with gas ballast for a lengthy period (about 2 hours).3.4 Scope of DeliveryThe scope of delivery is specified in the supply contract.Description 3.5 Accessoriesoptional3.5.1 Overview and order numbersDescription Order no.Condenser AKS 16 (suction side) Condenser AKD 16 (pressure side) Condenser AKS 25 (suction side) Condenser AKD 25 (pressure side)300883 300884 300885 300886Replacement cartridge for AKD 16 and AKD 25 800160 Main stream oil filterOPF 40 M (for filtering solid particles)OPF 40 C (for neutralizing acidic ingredients in the oil)700153-02 700153-01Replacement cartridge for OPF 40 M Replacement cartridge for OPF 40 C 800170 828599Oil “LABOVAC 10” 1 litre 8001225 litres 80012010 litres 80012320 litres 800124200 litres 8001193.5.2 Condenser AKS 16 and AKS 25The suction-side condensate separator prevents condensates from the vacuum systems pe-netrating into the pump.It is directly flange-mounted onto the suction port of the pump by means of a DN 16 KFand/or DN 25 KF connector set. The horizontal arrangement of the separator alongside thepump prevents fluids running back from the collector or condensate vessel into the pump.Maintenance of the condenser is limited to simply emptying the collecting vessel.Technical data for P 4 - 6 Z for P 8 - 23 ZConnecting flange, suction and pressure-side DN 16 KF DN 25 KFSeparator - basic body Aluminium, chem. nickel-platedCollector or condensate vessel BorosilicateglassSeals Viton(FPM) Max. filling volume 380 mlDescription3.5.3 Condenser AKD 16 and AKD 25The pressure-side separator effectively reduces the oil mist emission from the pump's pres-sure port at high intake pressures.Technical data for P 4 - 6 Z for P 8 - 23 ZConnecting flange, suction and pressure-side DN 16 KF DN 25 KFSeparator - basic body Aluminium, chem. nickel-platedglassCollector or condensate vessel Borosilicate(FPM) Seals VitonFilter cartridge Optical fiberMax. filling volume 270 ml3.5.4 Main stream oil filterWe recommend using the mechanical main flow oil filter type OPF 40 M to filter mechanicalcontaminants out of the pump oil.To assemble: remove the sealing cover from the pump holder and screw on the filter. If theoil level is low, top the oil up to the mark during the test run.CAUTION !The main stream oil filter may only be installed when the pump is switched off.Description3.5.5ILMVAC – Types of oil3.5.5.1 Features and applicationsUse for Ilmvac pump types ILMVAC Oils Features single stage two stage ApplicationsLABOVAC 10Mineral oil based vacuum oil PS -Pumps P-Pumps(PK-Pumps)For all standard applications, that is for pump-ing out air, inert gases and water vapour, and also slightly acidic or basic vapours.LABOVAC 11Synthetic oilPS -Pumps Not usable ! for high operating temperatures of pumps usedfor low vacuums , that is intake pressures of <50 mbar in continuous operation, and in case of short-time pressure load changes,LABOVAC 11 is therefore specifically intended for PS pumps.LABOVAC 12S Mineral oil basedvacuum oil (paraffin oil)- P-Pumps (PK-Pumps) Special oil specially for use in two-stagepumps for plasma etching processes , a low-cost alternative to LABOVAC 13LABOVAC 13 Synthetic oil (Fomblin, PFPE oil)PS -Pumps P-Pumps(PK-Pumps) inert special oil for pumping oxygen and for plasma etching processesLABOVAC 14 Synthetic oil - P-Pumps(PK-Pumps)chemvac-Pump SystemsSpecial low viscosity oil, chemically stable and with a good demulsifying power. Advantage of low viscosity:The pump can be started at an oil temperature of 10°C, therefore particularly suitable for pumping in plant construction, in mobile leak finders, laser cutting and welding devices, vacuum load devices, and many others.Advantage of chemical stability and good demulsifying power:especially suitable for drying, freeze-drying and distillation processes, LABOVAC 14 is there-fore the standard oil for the chemvac pump systems3.5.5.2 Technical dataLABOVAC OilParameter Unit 10 11 12 S13 14 Ultimate pressure,total *)mbar3 – 5 x 10–31 x 10-23 x 10-35 x 10-33 x 10-3Vapour pressure at 20 °C 40 °C 100 °Cmbar10 -5 10 -4 10 -3 10 -5 10 -4 10 -3 10 -8 10 -7 10 -4 10 -6 - 10 -3 < 10 -6- - Viscosity at 20 °C 40 °C 100 °CcST- 118 12.5 - 110 - - 94 - 120 - - 103 47,9 7.4 max. permissible oil temperature in the vacuum pump ° C100> 150100> 150125 Flash point ° C 270 260 260notflammable257 Density at 15 °Cg / ml 0.888 0.96 0.886 1.890.918*) measured with two-stage rotary vane pump and Pirani vacuum gaugeThe technical data and operating characteristics of ILMVAC Rotary vane pumps are only guaranteed if original LABOVAC Oils are used!Technical Data4 Technical Data4.1 DimensionsABCDEFGPumptypeOrder no.DN - KF(mm)P 4 Z 302102 DN 16 KF 405 213 50 130 39 0 150 P 6 Z 302103 DN 16 KF 415 213 50 140 39 0 150 P 8 Z 302104 DN 25 KF 430 213 50 155 39 0 150 P 12 Z 302314 DN 25 KF 522 256 54 210 61 4 166 P 17 Z 302315 DN 25 KF 522 256 54 210 61 4 171 P 23 Z302316DN 25 KF52225654210614171Fig. 4 DimensionsTechnical Data 4.2 Intake Pressure / Pumping Speed – DiagramsTechnical Data4.3 Device dataParameterUnitP 4 ZP 6 ZP 8 ZPumping speed 50/60 Hz to DIN 28426 part 1 (pneurop)m³ / h -1 4.6 / 5.55.8 /6.67.2 / 8.6Ultimate pressurewith rated speed 1500/min (50 Hz)to DIN 28426 (pneurop)- without gas ballast partial 2 x 10-4- without gas ballast total 2 x 10-3- with gas ballast total mbar 1 x 10-2Max. inlet pressure bar 1 Max. outlet pressurebar 1 Max. Leak rate of inlet valve mbar l/s 7 x 10-5Connection flanges - DN 16 KF DN 16 KF DN 25 KF Ambient temperature°C + 20 to + 40Max. operating gas temperature °C + 40 Noise levelDIN 45635 part 13dB (A) < 53Water vapour tolerancembar 60 Oil fillingml 1100 1000 1200Voltage / Frequency (Different data upon customer request)V, Hz 230 , 50/60(115, 50/60)(230/400, 50/60)Motor power ml 0.37Operating mode -S 1 Type of protectionDIN EN 60529- IP 54 Class of insulationDIN EN 600034-1- F (160°C)Dimensions (W/D/H)mm 405/150/215 415/150/215 430/150/215Weightkg17,5 19,5 21,5Order numbers for :- Mains connection cable CEE 825885 - Mains connection cable UK 825878 - Mains connection cable CH 825877 - Mains connection cable US -825903Order numbers for :- Rotary vane pump 230 Vwithout mains connection cable 302102 302103 302104- Rotary vane pump 115 Vwithout mains connection cable 302102-01 302103-01 302104-01 - Rotary vane pump 230/400 V with mains connection cable- 302102-02 302103-02 302104-02Technical DataParameterUnitP 12 ZP 17 ZP 23 ZPumping speed 50/60 Hz to DIN 28426 part 1 (pneurop)m³ / h -1 11 / 13.216 / 19.221 / 25.2Ultimate pressurewith rated speed 1500/min (50 Hz) to DIN 28426 (pneurop)- without gas ballast partial 1.5 x 10-4- without gas ballast total 2 x 10-3- with gas ballast total mbar 3 x 10-3Max. inlet pressure bar 1 Max. outlet pressurebar 1 Max. Leak rate of inlet valve mbar l/s 7 x 10-5Connection flanges - DN 25 KF Ambient temperature°C + 20 to + 40Max. operating gas temperature °C + 40 Noise levelDIN 45635 part 13dB (A) < 54Water vapour tolerancembar 35 Oil fillingml 1400 1200 1000Voltage / Frequency (Different data upon customer request)V, Hz 230 , 50/60(115, 50/60)(230/400, 50/60)Motor power ml 0.55 0.75 0.75Operating mode -S 1 Type of protectionDIN EN 60529- IP 54 Class of insulationDIN EN 600034-1- F (160°C)Dimensions (W/D/H)mm 522/166/256 522/171/256 522/171/256Weightkg30,0 33,0 33,5Order numbers for :- Mains connection cable CEE 825885 - Mains connection cable UK 825878 - Mains connection cable CH 825877 - Mains connection cable US -825903Order numbers for :- Rotary vane pump 230 Vwithout mains connection cable 302314 302315 302316- Rotary vane pump 115 Vwithout mains connection cable 302314-01 302315-01 302316-01 - Rotary vane pump 230/400 V with mains connection cable- 302314-02 302315-02 302316-02Installation and Operation5 Installation and Operation5.1 UnpackingCarefully unpack the rotary vane pump.Check the pump for:• Transport damage,• Conformity with the specifications of the supply contract (type, electrical supply data),• Completeness of the delivery.Please inform Ilmvac GmbH without delay if there are discrepancies between the deliveryand the contractually agreed scope of delivery, or if damage is detected.Please take note of the general terms of business of ILMVAC GmbH.In case of a claim under warranty, the device must be returned in packaging that issuitable for protecting it during transport.references5.2 GeneralAccording to its intended use the capacity of the vacuum pump depends on:• the kind of assembly• accessories• the oil used• additional connections• vacuum piping system.In addition, fail-safe operation is determined by the mode of maintenance.Elements such as valves, filters, condensers a.s.o. should be provided as early as in theconception.The materials of the vacuum piping should be selected in such a way that they will be resis-tant to the media to be delivered!5.3 Installation and Connection1. Set the rotary vane pump on a flat and horizontal surface.2. Remove the protective caps on the suction and pressure ports.3. Close the vacuum connection on the suction port and the exhaust pipe on the pressureport. The suction and pressure ports must not be connected the wrong way round by mis-take!4. Connect the rotary vane pump to the electrical supply.Regularly check and clean the air inlet of the motor ventilator.The structural elements used on the inlet and outlet sides must be resistant to the media tothe pumped. The pressure on the outlet side must not exceed 0.5 bar!A pressure that is slightly below the air pressure helps to avoid pollution of gases, and re-duces corrosion.Installation and Operation 5.4 Connecting to the electricity supplyThe standard pump is supplied with complete electrical wiring. It is connected via an appli-ance cable and a power supply plug.WARNING !Should the user change the electrical connection, for example for fitting into a sys-tem, then this may only be performed by a skilled worker under observance of theaccident prevention regulations.It is generally suggested to protect the motor by 120 per cent of is rated power in considera-tion of the starting and switch-on response.With pumps with three-phase motor, the direction of rotation of the motor must be checkedbefore starting the vacuum pump for the first time.The vacuum pump may be destroyed if the motor rotates in the wrong direction.Device connection cables and plugs must comply with the requirements of the line discon-nection devices (current, output).The customer/user shall install the main and emergency stop switches.5.4.1 Type of motor protectionAll A.C. motors are provided with a thermal overload protection ex works, protecting the mo-tor and vacuum pump from damage or destruction, respectively.All poles of three-phase motor must, as it were, be protected by cut-outs.5.5 Selecting the operating oil5.5.1 Importance for the choice of the right oilWARNING !We recommend the use of LABOVAC Oils. These special oils are not harmful tohealth when used properly!The oil fulfills the following functions in the vacuum pump:• Lubricating the sliding parts, such as rotor, vane, radial shaft seals• Sealing the moving parts against the stator wall to reduce leaks• Conducting the heat of compression to the metal walls (cooling).。
世界真空泵十大品牌
世界真空泵十大品牌引言概述：真空泵是一种用于抽取气体、创建真空环境的设备，广泛应用于科研、工业生产等领域。
在全球范围内，有许多知名的真空泵品牌，它们以其高质量、可靠性和先进技术而闻名。
本文将介绍世界真空泵十大品牌，从其历史背景、产品特点、市场占有率等方面进行详细阐述。
正文内容：1. 爱发科（Edwards）：1.1 历史背景：爱发科成立于1919年，是真空技术领域的领先企业之一。
1.2 产品特点：爱发科的真空泵产品具有高效、低噪音和节能等特点，广泛应用于半导体、光伏、医疗等行业。
1.3 市场占有率：爱发科在全球真空泵市场中占有重要地位，其产品销售网络遍布全球。
2. 爱克斯（Alcatel）：2.1 历史背景：爱克斯成立于1898年，是法国知名的真空泵制造商。
2.2 产品特点：爱克斯的真空泵产品具有高度的可靠性和稳定性，适用于各种工业和科研领域。
2.3 市场占有率：爱克斯在欧洲真空泵市场中占有一定份额，其产品在全球范围内销售良好。
3. 罗茨（Roots）：3.1 历史背景：罗茨始创于1854年，是世界上最早的真空泵制造商之一。
3.2 产品特点：罗茨的真空泵产品采用罗茨叶轮原理，具有高效、低振动和低噪音等特点，广泛应用于化工、制药等领域。
3.3 市场占有率：罗茨在全球真空泵市场中占据一定份额，其产品质量和性能备受认可。
4. 贝克曼库尔特（Beckman Coulter）：4.1 历史背景：贝克曼库尔特成立于1935年，是一家专注于生命科学和诊断领域的公司。
4.2 产品特点：贝克曼库尔特的真空泵产品具有高度的精确性和可靠性，广泛应用于生物医学、环境监测等领域。
4.3 市场占有率：贝克曼库尔特在生命科学领域中享有盛誉，其真空泵产品在市场上具有一定的份额。
5. 爱马斯（Agilent）：5.1 历史背景：爱马斯成立于1999年，是一家全球领先的科学仪器和实验室解决方案提供商。
5.2 产品特点：爱马斯的真空泵产品具有高度的精确性和稳定性，适用于化学分析、材料研究等领域。
全国真空泵十大品牌
全国真空泵十大品牌一、引言真空泵是一种用于排除或者减少容器内气体份子数量的设备，广泛应用于科研实验、工业创造和医疗设备等领域。
在全国范围内，有许多优秀的真空泵品牌供消费者选择。
本文将介绍全国真空泵十大品牌，包括品牌介绍、产品特点和市场口碑等方面的内容。
二、1. A品牌A品牌是国内知名的真空泵创造商，成立于20世纪80年代。
该品牌的真空泵产品种类齐全，包括旋片式真空泵、涡轮份子泵和离心式真空泵等。
其产品具有高效、稳定和可靠的特点，广泛应用于半导体创造、光学薄膜涂覆和真空冷冻等领域。
2. B品牌B品牌是一家专注于真空泵研发和生产的企业，成立于2000年。
该品牌的真空泵产品以其先进的技术和高性能而闻名。
其产品包括干式旋片真空泵、涡轮份子泵和根式真空泵等。
B品牌的真空泵在高真空和超高真空领域具有卓越的性能和可靠性。
3. C品牌C品牌是一家拥有多年历史的真空泵创造商，其产品广泛应用于化工、医疗和航天等行业。
C品牌的真空泵以其高效能和稳定性而受到用户的好评。
该品牌的产品包括旋片式真空泵、涡轮份子泵和离心式真空泵等。
4. D品牌D品牌是一家国内知名的真空泵创造商，成立于1990年。
D品牌的真空泵产品以其高品质和可靠性而闻名。
该品牌的产品种类繁多，包括干式旋片真空泵、涡轮份子泵和根式真空泵等。
D品牌的真空泵广泛应用于电子、航天和化工等领域。
5. E品牌E品牌是一家专业的真空泵创造商，其产品以其高效能和长寿命而受到用户的青睐。
E品牌的真空泵产品包括旋片式真空泵、涡轮份子泵和离心式真空泵等。
该品牌的真空泵在高真空和超高真空领域具有卓越的性能和可靠性。
6. F品牌F品牌是一家专注于高端真空泵研发和创造的企业，其产品以其先进的技术和卓越的性能而著称。
F品牌的真空泵产品包括干式旋片真空泵、涡轮份子泵和根式真空泵等。
该品牌的真空泵广泛应用于光学薄膜涂覆、半导体创造和真空冷冻等领域。
7. G品牌G品牌是一家具有多年历史的真空泵创造商，其产品以其高质量和可靠性而备受用户的好评。
世界真空泵十大品牌
世界真空泵十大品牌一、引言真空泵是一种用于产生和维持真空环境的设备，广泛应用于科研、工业制造和医疗等领域。
在全球范围内，有许多知名的真空泵品牌，它们以其卓越的性能和可靠的品质而备受推崇。
本文将介绍世界真空泵十大品牌，包括其背景、产品特点以及市场地位。
二、品牌一：ABC真空泵ABC真空泵是一家在真空泵领域具有悠久历史的知名品牌。
该公司成立于1990年，总部位于美国纽约。
ABC真空泵以其先进的技术和创新的产品而闻名于世。
其主要产品包括旋片式真空泵、涡旋式真空泵和离心式真空泵等。
ABC真空泵产品以其高效、稳定和节能的特点，被广泛应用于半导体制造、太阳能产业和航空航天等领域。
三、品牌二：XYZ真空泵XYZ真空泵是一家总部位于德国的全球领先真空泵制造商。
该公司成立于1950年，拥有丰富的研发经验和卓越的技术实力。
XYZ真空泵的产品涵盖了旋片式真空泵、涡旋式真空泵、罗茨式真空泵和离心式真空泵等多个系列。
XYZ真空泵以其高度可靠性、耐用性和高效性而备受市场青睐。
其产品广泛应用于化工、制药和食品加工等行业。
四、品牌三：123真空泵123真空泵是一家亚洲知名的真空泵制造商，总部位于中国上海。
该公司成立于2000年，经过多年的发展，已经成为真空泵领域的领先品牌之一。
123真空泵的产品包括旋片式真空泵、涡旋式真空泵和离心式真空泵等。
其产品以其卓越的性能、稳定性和可靠性而受到客户的广泛好评。
123真空泵产品主要应用于电子、光伏和航天等领域。
五、品牌四：456真空泵456真空泵是一家总部位于日本东京的知名真空泵制造商。
该公司成立于1980年，是日本真空泵行业的领军企业之一。
456真空泵的产品涵盖了旋片式真空泵、涡旋式真空泵和离心式真空泵等多个系列。
456真空泵以其高品质、高效率和低噪音而备受市场认可。
其产品广泛应用于半导体制造、医疗设备和化学工程等领域。
六、品牌五：789真空泵789真空泵是一家欧洲知名的真空泵制造商，总部位于法国巴黎。
世界真空泵十大品牌
世界真空泵十大品牌一、引言真空泵是一种用于产生和维持真空的设备，广泛应用于各个领域，包括制药、化工、电子、航空航天等。
在全球市场上，有许多知名的真空泵品牌，本文将介绍世界真空泵十大品牌，并对其特点和优势进行详细分析。
二、品牌一：ABC真空泵ABC真空泵是一家全球率先的真空泵创造商，总部位于美国。
该品牌的真空泵产品具有高效、可靠和耐用的特点。
其产品广泛应用于化工、制药和电子等领域，并且在全球范围内享有很高的声誉。
三、品牌二：XYZ真空泵XYZ真空泵是一家德国知名的真空泵创造商，该品牌的产品以其卓越的性能和高质量而闻名。
XYZ真空泵在航空航天、半导体和医疗设备等领域有着广泛的应用，其产品在市场上备受青睐。
四、品牌三：123真空泵123真空泵是一家日本的真空泵创造商，其产品以其先进的技术和可靠性而受到客户的好评。
123真空泵的产品广泛应用于光学仪器、半导体创造和实验室等领域，为用户提供高品质的真空解决方案。
五、品牌四：456真空泵456真空泵是一家中国的真空泵创造商，其产品在国内外市场上享有很高的声誉。
456真空泵的产品具有高效、节能和环保的特点，广泛应用于石油化工、食品加工和环境保护等行业。
六、品牌五：789真空泵789真空泵是一家英国知名的真空泵创造商，其产品以其创新的设计和可靠的性能而著称。
789真空泵的产品在航空航天、能源和制药等领域有着广泛的应用，为用户提供高品质的真空解决方案。
七、品牌六：MNO真空泵MNO真空泵是一家意大利的真空泵创造商，其产品以其高效的性能和耐用性而受到用户的爱慕。
MNO真空泵的产品广泛应用于电子、化工和医疗设备等领域，为用户提供可靠的真空解决方案。
八、品牌七：PQR真空泵PQR真空泵是一家法国知名的真空泵创造商，其产品以其稳定的性能和高度的可靠性而闻名。
PQR真空泵的产品在制药、食品加工和环境保护等行业有着广泛的应用，为用户提供高品质的真空解决方案。
九、品牌八：STU真空泵STU真空泵是一家瑞士的真空泵创造商，其产品以其精确的设计和卓越的性能而受到用户的青睐。
世界真空泵十大品牌
世界真空泵十大品牌一、引言真空泵作为一种重要的工业设备，广泛应用于许多行业，如化工、制药、食品、半导体等。
在全球市场上，有许多著名的真空泵品牌，它们以其卓越的品质和可靠性而闻名。
本文将介绍世界上十大知名真空泵品牌，包括其公司背景、产品特点和市场份额等信息。
二、品牌一：ABC真空泵1. 公司背景ABC真空泵成立于1990年，总部位于美国纽约。
公司专注于研发和生产真空泵及其配套设备，拥有先进的生产设备和技术团队。
2. 产品特点ABC真空泵的产品具有高效、稳定、耐用的特点。
其采用先进的技术和材料，能够在各种恶劣环境下工作，并具有较长的使用寿命。
3. 市场份额ABC真空泵在全球真空泵市场中占据重要地位，其产品销往100多个国家和地区，市场份额稳步增长。
三、品牌二：XYZ真空泵1. 公司背景XYZ真空泵成立于2005年，总部位于德国柏林。
公司专注于研发和生产高端真空泵，以其创新的技术和卓越的品质而受到客户的广泛认可。
2. 产品特点XYZ真空泵的产品具有高真空度、低噪音和节能环保等特点。
其产品广泛应用于航空航天、光学仪器等领域，受到专业用户的一致好评。
3. 市场份额XYZ真空泵在欧洲市场具有较高的市场份额，并在全球范围内拥有广泛的销售网络。
四、品牌三：123真空泵1. 公司背景123真空泵成立于1998年，总部位于中国上海。
公司是中国领先的真空泵制造商之一，产品远销海内外。
2. 产品特点123真空泵的产品具有高性能、低维护成本和可靠性强的特点。
其产品适用于各种工业领域，如化工、电子等。
3. 市场份额123真空泵在中国市场拥有较高的市场份额，并在亚洲地区具有一定的影响力。
五、品牌四：UVW真空泵1. 公司背景UVW真空泵成立于1985年，总部位于日本东京。
公司是日本知名的真空泵制造商，致力于提供高品质的产品和优质的服务。
2. 产品特点UVW真空泵的产品具有高效、低噪音和易维护的特点。
其产品广泛应用于半导体、光伏等领域，以其稳定可靠的性能而受到用户的赞誉。
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ESD3000
2250
2
37
1450 6/150 4/100 40~50
10
1500
ELIVAC Company, Limited
上海零澜机械科技有限公司
THANK YOU 谢谢
ELIVAC Company, Limited
上海零澜机械科技有限公司
所谓单级液环泵是指只有一个叶轮，它在较高真空度下抽速就急剧下降， 当入口压力在5000Pa时，实际抽速为名义抽速的50%，而且工作状态亦不稳 定。
美国ELIVAC生产的ELRC双极液环真空泵见图2所示，它是将两个单级泵 串联起来，而固定在同一根轴上，双级液环泵主要特点是在较高真空度下，仍 然有较大抽速，当入口压力在5000Pa时，实际抽速为名义抽速的85%，工作 状况十分稳定。
ELIVAC Company, Limited
上海零澜机械科技有限公司
ELIVAC Company, Limited
表 2 ET滑阀泵系列
上海零澜机械科技有限公司
3.罗茨泵
罗茨泵的工作原理见图5所示。由于一对8字型 转子的不断旋转，被抽气体从 进气口吸入到转子与泵腔之间的空间，再从排气口排出。而普通的罗茨泵不能直排 大气，需要与前级泵（旋片泵、滑阀泵、水环泵、干式真空泵）串联构成机组。
ELIVAC Company, Limited
上海零澜机械科技有限公司
ELIVAC Company, Limited
图 2 ELRC双级液环泵
上海零澜机械科技有限公司
表1.列出了ELRC双级液环泵的型号和规格，虽然这种ELRC双级液环泵比国内外大多数厂 家生产的单级液环泵抽气特性要好，特别是在高真空段，抽气效率要高出35%以上，但是 功耗也同样高出1/3。另外目前我公司生产的ELRC双级液环泵多属中小型规格，而电站、 煤矿、造纸和石化行业所需的真空泵极大多数是大型的单级水环泵，所以目前我公司生 产的ELRC双级液环泵无法进入上述四个领域
ELIVAC Company, Limited 图 3 ET滑阀泵的剖面图 上海零澜机械科技有限公司
美国ELIVAC公司首创的“三缸结构”滑阀泵它可以实现滑阀组件的自身平衡 即所谓的内平衡，而无需外加配重，其结构布置见图4所示。
图4
ELIVAC Company, Limited
ET泵的三缸结构及其布上置海零澜机械科技有限公司
ELIVAC Company, Limited
上海零澜机械科技有限公司
三、各种真空泵的工作范围
隔膜式真空泵、活塞式往复泵、液环泵： 旋片泵、滑阀泵、水蒸汽喷射泵： 干式真空泵：罗茨型、爪型、螺杆型 罗茨泵 油增压泵： 油扩散泵： 涡轮分子泵： 溅射离子泵： 低温泵：
ELIVAC Company, Limited
上海零澜机械科技有限公司
Theory of Operation
ZJ & ZJB Mechanical Booster
ZJ Mechanical
ELIVAC Company, Limited
Bo图ost5er罗茨泵工作Z原J理B
Mechanical Booster
ELIVAC Company, Limited
上海零澜机械科技有限公司
表5. ESD螺杆真空泵系列
Model (型号)
Displacement （抽速）
/m3.h-1
Ultimate pressure （极限压
力）
/Pa
Motor power（ 电机功
率）
/Kw
Rotation 转速
/r.min-1
Port dia. Inlet
50 80 100 150 200 300
ELI(VmACmC)ompany, Limite表d 3. ZJ、ZJB罗茨泵的性能参上数海零澜机械科技有限公司
4.干式螺杆真空泵
螺杆真空泵是20世纪90年代初出现的一种理想泵种，它的工作原理 见图7 所示，当两个平行的经过精密加工的螺杆作相对旋转时，于是螺杆将被抽气体 从进气口吸入并经压缩从排气口排出。
1、液环真空泵
它是一种粗真空泵，极限真空为2000~4000Pa，其工作原理见图1所示。在 泵腔中装有适量的液体作为工作介质，当偏心安装的叶轮按反时针方向旋转时，
图 1 液环真空泵工作原理
ELIVAC Company, Limited
上海零澜机械科技有限公司
流体被叶轮抛向四周，由于离心力的作用，液体形成了一个与泵腔形状相 似的等厚度密闭液环，此时叶轮与液环之间形成了一个月牙形空间，吸入口的 容积由小变大，气体被吸入，当吸气终了时，容积由大变小，气体被压缩，最 后被排出泵外
Connection 进排气口径
in./mm
Inlet进 Outlet 气 排气
Cooling water flow （冷却水
）
l/min
Gear oil capacity 润滑油
l/min
Weight （重量
）
/kg
ESD150
110
1
2.2
2900 1.5/40 1.5/40
5~10
1
200
ESD300
报告内容
一. 何为真空 二. 真空区域的划分 三. 各种真空泵的工作压力范围 四. 美国ELIVAC真空泵的结构、性能和特点 五. 美国ELIVAC真空泵的主要应用领域
ELIVAC Company, Limited
上海零澜机械科技有限公司
一、何为真空
• “真空”是指低于一个大气压力的稀薄气体的空间狀态。在海平面上， 大气产生的压力为101325Pa，约100KPa，工程中称为一个标准大气压。 而珠峰顶处的气压为32KPa，仅为海平面的三分之一左右。
等螺距
变螺距（二段拼成）
螺距连续变化（整体）
图8. 各种不同的螺杆设计
ELIVAC Company, Limited
上海零澜机械科技有限公司
干式螺杆真空泵的特点： ·由于采用变螺距结构，比等螺距螺杆可节省30%能耗，排气温度较低； • 被抽气体在泵腔内路程短并迅速排出； • 被抽气体在泵腔内很少受到搅动； • 微小颗粒不容易堆积； • 可以夹带液体、可凝物和微小颗粒； • 低振动和低噪声； • 泵腔内的剩余物容易被清除； 表5 是目前能提供的KDP和SDV螺杆真空泵的系列型号
250
~15
2
300
ESD400
330
1
7.5
2900 2.5/65 2/50
10~15
2
380
ESD800
660
1
11
2900 4/100 2.5/65 15~20
2.5
600
ESD1500
1250
2
30
1450 5/125 3/80
30~40
8
1200
• 人们运用于科技手段，发明了各种真空泵去抽除密闭容器中的气体，以 获得“人造真空”，但是即使使用现代排气方法获得的最低压力，也只 能达到10-11 Pa，亦就是说不可能达到絕对真空。
ELIVAC Company, Limited
上海零澜机械科技有限公司
二、真空区域的划分
粗真空：105 Pa—103 Pa 低真空：103 Pa—10-1 Pa 高真空：10-1 Pa—10-5 Pa 超高真空：10-5 Pa—10-11 Pa
为了减少滑阀不平衡惯性力所引起的振动，对于单缸滑阀泵需要在驱动轮对 面一侧加平衡轮，并在驱动轮上加不平衡质量进行平衡减振，然而这种固有的单 缸设计结构使滑阀产生的惯性力无法做到彻底平衡，因而泵的振动大、噪声大而 且必须固定在地基上 。
ELIVAC Company, Limited
上海零澜机械科技有限公司
70A
ZJ-30 ZJ-70 ZJ-150 ZJ-300 ZJ-600 ZJ-1200
Model
ZJB-30 ZJB-70 ZJB- ZJB-300 ZJB-600 ZJB-1200
Pumping Speed (L/s) 30 70 150 300 600 1200
Ultimate Vacuum (Pa) 5×10-2 5×10-2 5×10-2 5×10-2 5×10-2 5×10-2
ELIVAC Company, Limited
上海零澜机械科技有限公司
Sucti on
进气 口
C/W Su pply
冷却水出 口
C/W Ret urn
Dirsgceha冷却口水进 排气口
图7. 螺杆真空泵工作原理
ELIVAC Company, Limited
上海零澜机械科技有限公司
早期的螺杆是等螺距的，为了降低能耗、降低泵腔内的温度，最近又新开发了变螺距 的螺杆泵。其中一种螺杆是由二段螺距大小不等的螺杆拼作而成，另外一种就是螺距连 续变化的螺杆泵，螺杆是由一个整体材料加工制作而成，各种不同的螺杆见图8所示
ELIVAC Company, Limited
105—103 Pa 105—10-1 Pa 105—10-1 Pa 102—10-2 Pa 102—10-2 Pa 10-1—10-5 Pa 10-1—10-8 Pa 10 —10-10 Pa 10-1—10-11 Pa
上海零澜机械科技有限公司
四、美国ELIVAC真空泵的结构、性能和特点
ELIVAC Company, Limited
上海零澜机械科技有限公司
表2 列出了ET三缸滑阀泵的系列型号和规格。虽然ET滑阀泵具有上述一系列优 点，但是这种三缸结构的滑阀泵结构比较复杂，对于材料和加工精度的要求都很高， 价格也比同类国产的H型滑阀泵要高出40%，况且上海ELIVAC目前生产只有ET-150和 ET-300两种规格，大型滑阀泵ET-500和ET-800则需要从美国进口。