tempress扩散炉控制系统简介

Digital Process Controller Expert in Furnace technologyTempress® Systems, Inc.Technical Reference manualM410_02 January 2006Table of Contents1Introduction.......................................................................................................1-11.1Overview..............................................................................................................1-11.2System Features..................................................................................................1-11.3Technical definitions............................................................................................1-2 2Technical Description......................................................................................2-52.1Introduction..........................................................................................................2-52.2Digital I/O Board..................................................................................................2-52.3Analog I/O Board.................................................................................................2-52.4Boatloader Board.................................................................................................2-52.5Processor Board..................................................................................................2-52.6Communication Board.........................................................................................2-62.7Powersupply Board..............................................................................................2-62.8Battery Backup Board..........................................................................................2-62.9Voltage regulator board.......................................................................................2-72.10I/O Interconnection Board....................................................................................2-72.11Pressure interface board.....................................................................................2-72.12Safety board........................................................................................................2-72.13Hi/Low limit board................................................................................................2-82.14Temperature control............................................................................................2-8 3Recipe commands............................................................................................3-93.1Introduction..........................................................................................................3-93.2Recipes................................................................................................................3-93.2.1The message command..........................................................................3-93.2.2The time command..................................................................................3-93.2.3The temperature command.....................................................................3-93.2.4The boat command...............................................................................3-113.2.5The analog output command................................................................3-113.2.6The digital output command..................................................................3-113.2.7The alarm command.............................................................................3-123.2.8The branch command...........................................................................3-123.2.9The abort commands............................................................................3-133.2.10The wait command..............................................................................3-133.2.11The abort recipe command.................................................................3-143.3The variable command......................................................................................3-153.4Maintenance mode............................................................................................3-153.5Tube control mode.............................................................................................3-15 4Board layouts..................................................................................................4-17 5Appendix A Boards........................................................................................5-21II Index ……………………………………………………………………………………1 Introduction1.1 OverviewThe Digital Process Controller (DPC) has been designedfor high accuracy process control of all availableprocesses for diffusion, conveyor and small batch verticalfurnaces. The DPC provides a versatile means ofautomating diffusion processes when used in combinationwith the Digital temperature Controller (DTC).The DPC consists of two basic units:1. The process controller.2. Touch screen and/or TSC-II.In addition there are several boards:• Digital I/O board for connection digital In/Outputs• Analog I/O board for connection analog In/Outputs• Safety board (for external torch)• Pressure interface board (LPCVD systems)• Servo driver (Boatloader control)The user interface contains a Touch screen and/or TSC-II and are used to program the recipe commands and monitor current status. The Touch Screen is mounted in the control panel area while the TSC-II computer is free to locate.The DPC is a microprocessor-based controller, which can perform all process functions such as the selection of temperature recipe on the DTC, control of boat loader and gas flows as well as the sequencing of overall processing. The DPC interfaces directly with the DTC, which is a highly accurate microprocessor-based controller of temperatures in diffusion, conveyor and small batch vertical furnaces.1.2 System FeaturesRECIPES A maximum of 16 normal process recipes up to 750 bytes long or 8recipes 1500 bytes long can be stored. Up to 8 abort recipes with alength of 200 bytes can be used.MESSAGES A maximum of 16 messages, each of up to 12 characters long can bedisplayed to instruct operatorsBOAT LOADING CONTROL Auto position calibration. Inputs are monitored with alarm for left andright limit and boat fused.TEMPERATURE CONTROL Temperature Control is by connection to the DTC through an RS422Cserial interface. Up to 15 predefined temperature recipes can bestored and 1 free programmable temperature recipe. Eachtemperature recipe includes: temperature setpoint, ramping, type ofcontrol (paddle or spike), independent or master/slave control and Hiand Low alarm limit settings. Up to 16 profile recipes can be selectedfor automatic profiling.ANALOG OUTPUTS There are 8 analog outputs (optionally 16), which allow programmingof outputs in a variety of units and ranges, each with a setpointresolution of 1 digit.DIGITAL OUTP UTS There are 8 digital outputs (optionally 16, 24 or 32). It is possible tointerlock the digital outputs with analog outputs for soft start on MassFlow Controllers.DIGITAL INPUT The system will accept digital inputs for process monitoring. Theprocess monitoring includes provisions for pressure switches, doorswitches, etc.“WAIT FOR” PROVISION The system contains a “wait for” provision until condition is satisfiedfor start, time, temperature, boat, digital inputs, digital outputs,analog I/O on setpoint and pressure.DTC INTERFACE A 6850 Asynchronous Communications Interface Adapter (ACIA) isused for the RS422C compatible serial interface to the DTC. Baud rateis 9600 bits/s.BATTERY BACK-UP An external Ni-Mh battery maintains data stored in volatile memoryfor a minimum of 30 days after power is disconnected.Figure 1-1 DPC System connections overview1.3 Technical definitionsTimeResolution time :second.Maximum time per step number :255 hours, 59 minutes, 59 seconds.Boat loading ControlSpeed range :5-1000 mm/min.Speed resolution :1 mm/min.Position range :10-3000 mm.Position resolution :1 mm.Oscillation speed (only in combination with the soft :0, 10 or 100 mm/min. (down, up, reset)Introductioncontact loader).Auto zero position calibration.Monitoring inputs with alarm for left and right limit and boat used.Analog OutputsNo. of outputs :8 (optionally 16).Range :0-5V. Programming and monitoring may be in the following units and ranges:Units :%, SCCM, SLM, ºC, TORR, mTOR andmg/m, plus free programmable (max 4char)0-800, 0-1000, 0-1200, 0-0-500. Ranges :0-300,1500, 0-1800 and 0-2000, and freeprogrammable. Point positionprogrammable.Setpoint resolution :1 digit.Analog InputsNo. of inputs :8 (optionally 16) for monitoring analogoutputs with provision for alarms, wait for,branch on, and abort on. 8 separate inputs(optionally 16) for process monitoring.Digital OutputsNumber of outputs :8 (optionally 16,24 or 32).Darlington transistor outputs Specification :opto-isolatedmax 1A, 30V.Interlock possibility with analog outputs for soft start on Mass Flow Controllers. If a digital outputis interlocked, the valve automatically opens if the setpoint for the analog output is programmed.Digital InputsNumber of Inputs :8 (optionally 16, 24 or 32) opto-isolatedinputs for checking digital outputsfunctionality with alarm provision. 8(optionally 16, 24 or 32) opto-isolatedinputs for process monitoring with alarm,wait for, branch on and abort on provision.Input voltage :5-30V.Step NumberEach step number can have any of the following commands: message, time, temperature, boat,analog outputs, digital outputs, alarm, branch, abort, wait for and abort recipe. A VariableCommand can be set in combination with several of the commands mentioned above to allowquick adjustments of those commands.MessagesNumber of messages: :16.Message Length: :12 characters.RecipesNumber of normal (process) recipes :8 or 16.Normal recipe length :1500 or 750 bytes.Number of abort recipes :8.Abort recipe length :200 bytes.Temperature ControlRS422C serial interface to the Digital Temperature Controller. Up to 15 preset temperature recipesmay be selected, one is freely programmable. Each temperature recipe includes temperaturesetpoint, ramping, type of control (paddle or spike), independent or master/slave control andAlarm Limit settings. Up to 16 profile recipes may be selected for automatic temperature profiling.Introduction“Wait for” provision for end of ramping, end of profiling and within temperature alarm limits. Other Technical DataOperating voltage :115/230V 50/60 Hz.Ambient temperature :0 - 40 o C.Serial interface to remote computer :RS422C compatible, baud rate 9600 bits/s. Dimension :125 x 290 x 310 mm.Battery backup :minimum 30 days memory retention time.2 Technical Description2.1 IntroductionThe basic Digital Process Controller (DPC) consists of a base unit with a motherboard for the plug-in boards, a main transformer, a battery board and a rear connector. The standard unit includes the power supply board, the processor board, one digital I/O board, one analog I/O board and the RS422 communication board. Four additional slots in the unit permit the expansion of both the analog and digital capabilities. A pressure interface board for low-pressure purposes, a safety board for hardware controlling the ratio of a H2 and O2 mixture (flame detection) and a Hi/Low limit board can be added to the process control loop. The pressure interface board, the safety board and the Hi/Low limit board are tied to the analog and digital I/O Interconnection boards.2.2 Digital I/O BoardEach digital I/O board has 8 optically isolated digital outputs and 8 optically isolated digital inputs. Each of the outputs has a Darlington transistor with a maximum current of 0.5 amp at 30 volts DC. This will drive most gas solenoids, relays or lights directly, without additional current drivers or relays. Each output has a corresponding optically isolated input for feedback. In addition, a 2mA control current is used to check the functionality of the pilot valves. If the pilot valve fails a digital output alarm is generated . To prevent unwanted alarms for these outputs, unused outputs must be tied to +24V via a 2K7 resistor through jumper settings.The 8digital inputs will be on when a voltage of between 5 and 30 volts is applied . Each digital input may be used for process monitoring with “alarm”, “wait for", "abort on” and "branch on" (only on inputs 1-16) provision.2.3 Analog I/O BoardEach analog I/O board has 8 analog outputs and 16 analog inputs with a range of 0-5V. The 12 bit digital-to-analog converter (DAC 800) is used in the range -5V to +5V. A negative output voltage is used only for a soft start on normally open Mass Flow controllers and is not programmable. Eight of the analog inputs are used in combination with the analog outputs. The analog output supplies the setpoint for a mass flow controller and the corresponding analog input is used for monitoring the actual flow ths providing feedback. All these combinations have “Limit Alarm”, “wait for", “branch on” and “abort on" provisions. Since software version 2.I.0 the range and units are free programmable. It is possible to define an I/O channel with a range of –200 to 2000 [xxx]. The other 8 inputs may be used for process monitoring.2.4 Boatloader BoardThe DPC is equipped with a slot for a Boatloader board. For current Tempress diffusion furnaces this slots will be empty, because a new loader control system replaces this board.2.5 Processor BoardThe hub of the system is a Motorola CMOS, 8-bit microprocessor. The on-board timer is used for all the timing functions. This card contains one socket housing for an 32Kb E-PROM and a further three sockets, each for an 8 Kb static RAM.There are two connectors. One is a 10-pole flat cable connector, which is used to connect to the obsolete 'One line Program and Display unit’ and is RS232C compatible. This option in not in use anymore. The 6-pole flat cable connector is used for connecting the Touch screen Display and is RS422 compatible. Both connectors share the same signal lines and can therefore not be used simultaneously.The board is provided with an automatic restart circuit. If the microprocessor stops for more than 5 seconds, the power supply supervisor will reset the system.Figure 2-1 Jumper position processorThis board contains jumper connections (see Figure 2-1 for jumper location), which provide the following functions:H1 is used for E-PROM memory allocation purposes.H1 DescriptionNo Jumper Not used1-2 set Default setting (memory allocation)2-3 set Not usedH2 is used to define the system configuration.2.6 Communication BoardThe communication board is a 3-channel communication board. This board provides the communication with the digital temperature controller (DTC), to the servo control unit (loader) and the Tempress system controller (TSC) through 10-pole flatcables. The communication link with the DTC is a RS422 current one with a baudrate of 9600 baud. The links for the TSC and for a vertical loadsystem are also RS422 current ones. The baudrate is preselected on 9600 baud.An ACIA (6850) performs the parallel to serial conversion.2.7 Powersupply BoardThe power supply board in slot 11 rectifies the DPC transformer output to the following voltages:+ 10 Vdc the supply for the voltage regulator board+ 15 Vdc (stabilized) used by the analog I/O board+ 12 Vdc (stabilized) not usedThe power supply board contains fixed voltage regulator components. Adjustments cannot be made to any of the output voltages.The Powersupply board takes care for the voltage for the all DPC boards. The Powersupply board supplies +12/-12V as well as +15/-15V.2.8 Battery Backup BoardThe battery Backup Board for the DPC is provided by a 3.6V battery mounted at the top of the cageproviding backup the controller memory in case of power failure.The battery capacity is measured by an IC that operates LED D1. Green indicates that the battery is in good condition. Red LED means the battery should be replaced. TP1 and TP2 are points at which the battery voltage may be measured.Pins on JP1 are jumpered when the board is powered on. The jumper is removed for storage purposes (prevents battery discharge).2.9 Voltage regulator boardThe voltage regulator board is mounted at the back of the cage. P1 is used to adjust the 5 V output. This is factory set and should need no adjustment in the field. It contains 4 testpoints as shown in Figure 4-7.The four testpoints are as follows:Pin DesignationTP1 10 volt (not stabilised)TP2 GroundvoltTP3 5TP4 Supply to memory chip for backup2.10 I/O Interconnection BoardThe digital inputs and outputs are connected to the digital interconnection board and the analog inputs and outputs are connected to the analog interconnection board. These interconnections boards interface between the DPC and the actual valves and MFC’s and also allow for additional safety boards. Two additional flat cable connectors are provided for connecting a gas flow panel with lights (not used when a Touch screen Display is used) and a ratio and temperature safety board.An on board safety circuit switches off the +24V to the digital outputs in case the DPC ceases to trigger the circuit. This results in switching of the (dangerous) gases by closing the valves.The board contains several test points (TP) for checking current and steering signals, see A Figure 5-1 and Figure 5-2.2.11 Pressure interface boardThe pressure interface board will be used in Low Pressure Chemical Vapour Deposition (LPCVD) systems. On board is a stabilized power supply of + and - 15V for an externally connected pressure transducer and the electronic circuits. A +12V signal is supplied to the digital circuit. The external transducer supplies a 0-10V signal corresponding to the pressure of 0-10 TORR. This incoming signal amplifiedto give an output of 0-5V corresponding to 0-2000 mTORR. Alternatively, a 0-10 TORR rangeis selectable on the board by a wire-jumper.The output of this amplifier is connected to a comparator, which compares it with an adjustable setpoint. It is the safety circuit, which insures that the solenoid valves cannot be activated if the pressure is above the setpoint value.An evacuate line control circuit is on board to evacuate up to 6 separate gas lines in a safe manner, so to avoid the simultaneous evacuation of incompatible gases.2.12 Safety boardThe safety board Figure 5-3 is used to check the safety conditions when using hydrogen and oxygen in a Tempress external torch. It is used as a hardware protection. This safety board works only in combination with the Tempress DPC control system. It is not used in this configuration as a “stand-alone” unit.The safety conditions are:• Torch temperature above setpoint value• Correct H2/O2 Ratio• Torch flame presentBefore the Hydrogen MFC is activated the safety board checks whether the injector tip temperature and the gas ratio are safe. Only then the hydrogen valve will be opened and hydrogen is allowed toflow. After 20 seconds the presence of the hydrogen flame is checked for. If no flame is detected the hydrogen valve is deactivated and the hydrogen flow stops.The hydrogen valve will be closed if a ratio alarm or flame detection alarm occurs during subsequent processing. The alarm condition is latched until the the hydrogen valve is reset. LED’s shows the latched conditions. These conditions are also available for connection to the digital inputs of the Digital Process Controller. When the hydrogen valve was switched off by an alarm condition, it is only possible to open it again via de-activating the hydrogen output(in a process recipe in the Digital Process Controller, set H2 MFC to 0slm).The O2:H2 ratio is guarded continuously and the hydrogen valve will be closed if the actual flows of O2 and H2 are reaching the explosive ratio 1:2. To compare the O2 and H2 flows correctly one must configure the safety board according to the O2 and H2 MFC maximum range properly.For example, an O2 MFC of 10 slm and a H2 MFC of 10 slm must be combined with the ratio jumper on the safety board set at 1:2.On the other hand, an O2 MFC of 10 slm and a H2 MFC of 20 slm must be combined with the ratio jumper on the safety board set at 1:1.2.13 Hi/Low limit boardThe Hi Low limit board is used in applications where a minimum or maximum flow of a specific gas is required for safe operation of other chemicals. For example, the use of TransLC® requires a minimum O2 flow for complete combustion (see Process manual details on the use of TransLC®). Using the Hi/Low limit board the actual flow (retun signal) of the O2 MFC is continuously compared to a safety value. The components used to operate TransLC® (bubble valves) will be closed should the actual O2 flow fall below this threshold value.!! Insert !! Figure !!2.14 Temperature controlAn RS422 compatible serial interface connects the DPC to the Digital Temperature Controller. The baud rate is 9600 bits/s. The DPC can select up to 16 temperature recipes and 16 profile recipes for automatic temperature profiling. The DPC has a “wait for” provision for end of ramping or end of automatic profiling. All the alarms of the DTC are sent to the DPC and passed on to the operator. The DPC has a “wait for", "branch on” or "abort on" provision on this temperature alarm.3 Recipe commands3.1 IntroductionThe standard recipe commands as programmed in the DPC can be used to make a process recipe. This chapter contains a description of all possible commands.3.2 RecipesThe DPC unit can store and execute 8 or 16 normal recipes and 8 abort recipes. A recipe consists of steps and commands. Each step has a unique number and may have the following commands: Message AlarmTime Branch Temperature recipe Abortfor Boat Wait Analog output Abort recipeDigital output Variable CommandStep number 0 of a normal process recipe is used for standby conditions where possible. See Process manual details on Process Recipe Setup).After starting the process recipe, the step numbers are executed sequentially. The sequence can be interrupted by active branch or abort conditions.An automatic or operator initiated abort causes the DPC to return to step 0 of the aborted process recipe immediately. An activatedabort recipe will intercept any abort command and will be executed like a normal recipe. The DPC returns to step number 0 of the aborted process recipe when the end of the abort recipe has been reached..3.2.1 The message commandThe message command will be displayed throughout the execution of the step. The messages that can be used are defined during the certification procedure.3.2.2 The time commandThe time command is used to program the time to wait before executing the next step number. Maximum program time per step is 255:59:59 (hh:mm:ss). If there is a WAIT command in the step the time is used for the wait alarm. In this case the next step will begin as soon as all the wait conditions have been satisfied. If the wait conditions are not satisfied by the end of the entered time, the alarm will sound and the wait alarm condition will be shown.To calculate a fairly realistic total process time, the time needed to satisfy all the wait conditions should be used. The remaining time in the process is recalculated at the start of each step, so the remaining time is corrected after each wait condition.3.2.3 The temperature commandThe “TEMP” command instructs the DTC to execute the indicated normal temperature recipe or profiling temperature recipe. Up to 16 normal process temperature recipes or profile temperature recipes area available from the normal temperature table or profiling temperature table. In addition, free programmable temperature settings are available through separate commands.3.2.3.1 Temperature normal recipeThe normal temperature recipe is used to define the actual process temperature needed for the process. Up to 15 preset normal temperature recipes (numbers 0-14) can be stored in the normal temperature table including temperature setpoint, ramp rate, high/low limits and gain for each zone, and the control type and which profiling temperature table to use. The last position (recipe 15) in the normal temperature table is free programmable and allows for unlimited temperatures recipes.3.2.3.2 Ramp all zones to setpoint temperature.The free programmable normal temperature recipe (#15) will be overwritten by the “Ramp all zones to setpoint temperature” command.3.2.3.3 Ramp one zone to setpoint temperatureSame as 3.2.3.2, only now it is possible to define one particular zone (1-5).3.2.3.4 Set High/Low limit for all zones.The High/Low limits can be used to check temperature fluctuations. If the actual temperature exceeds the temperature setpoint with more than the High limit, or drops below the setpoint with more than the Low limit a corresponding alarm is generated.The free programmable normal temperature recipe (#15) will be overwritten by the “Set High/Low limits for all zones” command.3.2.3.5 Set High/Low limit for one zoneSame as 3.2.3.4, only now it is possible to define one particular zone (1-5).3.2.3.6 Set gain for all zonesThe gain is an amplification factor for the PID control. Default value is 100%, maximum value 255%. The free programmable normal temperature recipe (#15) will be overwritten by the “Set gain for all zones” command.3.2.3.7 Set gain for one zoneSame as 3.2.3.6, only now it is possible to define one particular zone (1-5).3.2.3.8 Set temperature controlThe PID temperature control loop needs thermocouple signals as input. The “Set temperature control” command define which thermocouple should be used, Spike or Paddle. In addition, the master-slave or independent control must be selected here (default independent).3.2.3.9 Select profile tableThis function is to select one of the four (A-D) profile temperature tables.When a new temperature command is executed its values are sent to the DTC and overwrite the current DTC version of Normal Temperature Recipe 15. At the same time Normal Recipe 15 will be selected. In case of usage of new temperature commands it is not recommend to mix those with ‘old’ temperature commands, since Normal Temperature Recipe 15 will continuously be overwritten by the ‘new’ temperature command.CautionWhen a ‘new’ temperature command is in use, never write to DTC a normaltemperature table from the TSC. The latest setpoint in Normal Recipe 15 will beoverwritten.3.2.3.10 Temperature profile recipeTo improve temperature accuracy automatic or manual profiling can be used. Up to 16 profiling temperature recipes can be stored in the profiling temperature table. Each profiling temperature recipeRecipe commandscontains the paddle thermocouple setpoint, the corresponding spike thermocouple values and the required power output. Four different profiling temperatures tables (A, B, C, D) are available to accommodate different process environments.3.2.4 The boat commandThe boat command will program the boat position and the boat speed. The ancient oscillation speed command is nowadays used for Soft Contact Loader systems.. The boat loader moves to the position indicated at the programmed speed, slows down to 200mm/min when the position has approached setpoint within 20mm andstops completely when it reaches the setpoint position. In case a Soft Contact Loader system is used, the oscillation speed will be used to define the vertical movement of the paddle. An oscillation speed of 0mm means DOWN, 10mm means UP and 100mm means reset memory.3.2.5 The analog output commandThe analog output command is used to set the output voltage of the indicated analog output corresponding to the setpoint value in the range of 0-5V, and the digital output of corresponding number if an interlock was programmed. The range and units of the analog output and the interlocks are defined during the certification procedure. The analog outputs will be commonly used to manage mass flow controllers and bubbler temperatures.3.2.5.1 Set ramp time all analog outputsThe ramp time for all analog outputs defines the time that is allowed to reach the specified setpoint. Default value is 8 sec, maximum value is 255 sec.3.2.5.2 Set ramp time one analog outputSame as 3.2.5.1, only now for 1 particular analog output.3.2.6 The digital output commandThe digital output command is used to put the digital outputs into the ON or OFF condition. During the certification procedure a digital output can be interlocked to an analog output. This output cannot be programmed with a digital output command, but will be activated automatically if the setpoint of the matching analog output is >0. Most commonly a digital output will manage a gas valve.3.2.6.1 Digital Output as alarm outputUsing the TSC-2 system controller it is possible to define a digital output as alarm output and a digital input as alarm silence input, without having a touch screen. These output numbers has to be defined in the TSC system (version 5.2 or higher). The alarm output has the same functionality as the alarm output on the touch screen. That means that in case a new alarm is added to the current alarms, the output will be activated. The output can be reset by activating the alarm silence input. In case of a Message Warning, the output is activated intermittent, with a cycle time of about 3 seconds.)To prevent interference with other digital inputs and outputs, the name of theNotedefined I/O MUST be empty (8 spaces)。