Low K1 litho & Metro rquirements
Low K材料
Low-KIn semiconductor manufacturing, a Low-κ dielectric is a material with a small dielectric constant relative to silicon dioxide. Although the proper symbol for the dielectric constant is the Greek letter κ (kappa), in conversation such materials are referred to as being "low-k" (low-kay) rather than "low-κ" (low-kappa). Low-κ dielectric material implementation is one of several strategies used to allow continued scaling of microelectronic devices, colloquially referred to as extending Moore's law. In digital circuits, insulating dielectrics separate the conducting parts (wire interconnects and transistors) from one another. As components have scaled and transistors have gotten closer and closer together, the insulating dielectrics have thinned to the point where charge build up and crosstalk adversely affect the performance of the device. Replacing the silicon dioxide with a low-κ dielectric of the same thickness reduces parasitic capacitance, enabling faster switching speeds and lower heat dissipation.Low-κ MaterialsThe dielectric constant of SiO2, the insulating material used in silicon chips, is 3.9. This number is the ratio of the permittivity of SiO2divided by permittivity of vacuum, εSiO2/ε0,where ε0= 8.854x10-6pF/μm [1]. There are many materials with lower dielectric constants but few of them can be suitably integrated into a manufacturing process. Development efforts have focused primarily on three classes of materials:Fluorine Doped Silicon DioxideBy doping SiO2 with fluorine to produce fluorinated silica glass, the dielectric constant is lowered from 3.9 to 3.5. [2]Carbon Doped Silicon DioxideBy doping SiO2 with carbon, the dielectric constant can be lowered to 3.0. Major products of carbon doped silicon dioxide include Black Diamond from Applied Materials, [3] Aurora from ASM International N.V.. [4] The Aurora is the low-K material used in Intel 90nm, 65nm and 45nm lines, while the Black Diamond controlled about 80% of low-K material market. [5] Novellus Systems' Coral also falls in this category.Porous Silicon DioxideVarious methods may be employed to create large voids or pores in a silicon dioxide dielectric. Air has a dielectric constant of roughly 1.0005, thus the dielectric constant of the porous material may be reduced by increasing the porosity of the film. Dielectric constants lower than 2.0 have been reported. Integration difficulties related to porous silicon dioxide implementation include low mechanical strength and difficult integration with etch and polish processes.Porous Carbon doped Silicon DioxideBy UV curing, floating methyl group in carbon doped silicon dioxide can be eliminated and pores can be introduced to the carbon doped silicon dioxide low-K materials. Products in this categoryinclude Black Diamond II, [3] Aurora 2.7 and Aurora ULK. [4] The reported K value can be as low as 2.5.Spin-on organic polymeric dielectricsPolymeric dielectrics are generally deposited by a spin-on approach, such as those traditionally used to deposit photoresist, rather than chemical vapor deposition. Integration difficulties include low mechanical strength and thermal stability. SiLK from Dow Chemical is a well known example of low-K material in this category. [6] Other spin-on organic low-K include polyimide, polynorbornenes, Benzocyclobutene, PTFEPorous SiLKBy introducing pores into the SiLK resin, the dielectric constant value can be lowered to 2.2. [7]Spin-on silicone based polymeric dielectricThere are two kinds of silicone based polymeric dielectric materials, hydrogen silsesquioxane (HSQ) and methylsilsesquioxane (MSQ).References。
纳米压印技术
摘要半导体加工几十年里一直采用光学光刻技术实现图形转移,最先进的浸润式光学光刻在45 nm节点已经形成产能,然而,由于光学光刻技术固有的限制,已难以满足半导体产业继续沿着摩尔定律快速发展。
在下一代图形转移技术中,电子束直写、X射线曝光和纳米压印技术占有重要地位。
其中纳米压印技术具有产量高、成本低和工艺简单的优点,是纳米尺寸电子器件的重要制作技术。
介绍了传统纳米压印技术以及纳米压印技术的新进展,如热塑纳米压印技术、紫外固化纳米压印技术、微接触纳米压印技术等。
关键词:纳米压印；气压辅助压印；激光辅助压印；滚轴式压印AbtractTransfer of graphics is achived by oplical lithography for several decades in semiconductorprocess. The prodution capacity of 45 nm node has been formed. But now semiconductor industry is difficult to be developed according toMoore law because of the inherent limitations of oplical lithograhy. Nowelectron - beam directwriting, X - ray exposure and nanoimprint technology are the main technologies fornext generation graphics transfer technology. Nanoimprint technology has the advantages of high yield, lowcost and simple process. Introduce the traditional nanoimprint technology and its development, includinghot embossing lithography technology, ultraviloet nanoimprint,micro - contact nanoimprint.Key words:Nanoimprint lithography；Pressure-assisted nanoimprint；Laser-assisted nanoimprint；Roller-type nanoimprint- i -目录第1章绪论 (1)第2章纳米压印的技术方法..........................错误！未定义书签。
2022年Kawasaki KLX 跑车产品线说明书
June 1, 2021 NEW MODEL PRESS RELEASE2022 KAWASAKI KLX® OFF-ROAD MODEL RANGEGET OUT AND PLAYThe Kawasaki KLX® family of off-road Array motorcycles are widely popular with their easy-to-ridecharacter, incredible capabilities while on trails andtheir low maintenance needs. The eight off-roadmodels consist of four engine configurations and arebuilt to suit a wide variety of riders.The KLX®300R off-road motorcycle bridges thegap between a weekend play bike and a full race bike.As the flagship of the KLX® lineup, the KLX300Rcombines the best of both engine and chassisperformance to create the ultimate lightweight, fun off-road machine. The powerful 292cc fuel-injected, liquid-cooled four-stroke engine features an electric starterand keyless ignition. It has a user-friendly smooth-shifting six-speed transmission and manual clutch.The KLX300R comes equipped with full-size off-roadwheels and tires, using a 21” front and 18” rear, andlong travel suspension for optimal ground clearance.The KLX®230R off-road motorcycle is available in two model variations and has been purpose-built for serious fun in the dirt; with priority placed on both its engine and frame design. It was designed and built to be a lightweight and easily maneuverable motorcycle for a broad range of riders. A powerful 233cc fuel-injected, air-cooled four-stroke engine utilizes an electric starter and keyless ignition, and has been paired with a reliable, easy-to-use smooth-shifting six-speed transmission and manual clutch. The KLX230R comes equipped with full-size off-road wheels and tires, using a 21” front and 18” rear, and long travel suspension for optimal ground clearance. The shorter KLX®230R S off-road motorcycle is ideal for riders who prioritize a lower seat height and ample ground clearance while offering a full-size recreational trail bike option. The KLX230R S features modified front and rear suspension that lowers overall seat height by one inch from the KLX230R.The KLX®140R motorcycle is available in three model variations and is designed to provide an off-road experience with memories to last a lifetime. The powerful 144cc, four-stroke, air-cooled, single-cylinder engine features an electric starter and keyless ignition. Its broad and smooth high-revving 144cc engine utilizes a manual clutch and five-speed transmission to offer an efficient and user-friendly feel. The KLX140R uses a 17” front and 14” rear wheel, while the mid-sized KLX®140R L motorcycle is equipped with a 19” front and 16” rear wheels to accommodate taller riders, providing extra ground clearance. The KLX®140R F comes equipped with full-size off-road wheels and tires, using a 21” front and 18” rear.The KLX®110R is available in two model variations and is a great motorcycle for new riders looking to experience off-road for the first time. A high-tensile steel frame, 30mm telescopic fork, and single rear shock provide easy handling and maximum longevity. It also incorporates an automatic centrifugal clutch system that allows easy take off and shifting through the gears, helping the rider maintain focus on the terrain and to make the most of the 112cc single-cylinder, four-stroke engine. The larger KLX®110R L motorcycle has a taller seat height (28.7” compared to 26.8”for the KLX110R), longer suspension travel, an extra 1.9” of ground clearance and a four-speed transmission with a manual clutch. No matter your size or skill level, there is a KLX model motorcycleto allow you to get out and play with Kawasaki.2022 Model VariationsTo download high-resolution images, log on or register for the Kawasaki media site at ABOUT KAWASAKIKawasaki Heavy Industries, Ltd. (KHI) started full-scale production of motorcycles over a half century ago. The first Kawasaki motorcycle engine was designed based on technical know-how garnered from the development and production of aircraft engines, and Kawasaki’s entry into the motorcycle industry was driven by the company’s constant effort to develop new technologies. Numerous new Kawasaki models introduced over the years have helped shape the market, and in the process have created enduring legends based on their unique engineering, power, design and riding pleasure. In the future, Kawasaki's commitment to maintaining and furthering these strengths will surely give birth to new legends.Kawasaki Motors Corp., U.S.A. (KMC) markets and distributes Kawasaki motorcycles, ATVs, side x sides, and JET SKI® watercraft through a network of approximately 1,100 independent retailers, with close to an additional 7,700 retailers specializing in general purpose engines. KMC and its affiliates employ nearly 3,100 people in the United States, with approximately 260 of them located at KMC's Foothill Ranch, California headquarters.Kawasaki’s tagline, “Let the good times roll.®”, is recogniz ed worldwide. The Kawasaki brand is synonymous with powerful, stylish and category-leading vehicles. Information about Kawasaki’s complete line of powersports products and Kawasaki affiliates can be found on the Internet at .Kawasaki KLX®300R Color : Lime Green MSRP: $5,599 Availability: Now Kawasaki KLX®140R L Color : Lime Green MSRP : $3,499 Availability : NowKawasaki KLX® 230R Color : Lime Green MSRP : $4,499 Availability : NowKawasaki KLX®140R F Color : Lime Green MSRP : $3,799 Availability : NowKawasaki KLX®230RS Color : Lime Green MSRP : $4,499 Availability : NowKawasaki KLX®110R Color : Lime Green MSRP : $2,399 Availability : Now Kawasaki KLX®140R Color : Lime Green MSRP : $3,199 Availability : NowKawasaki KLX® 110R L Color : Lime Green MSRP : $2,599 Availability : Now。
Lincoln TTOMAHAWK 625 操作手册说明书
T OMAHAWK ™625OPERATORʼS MANUALIM10020January, 2012Safety Depends on YouLincoln arc welding and cutting equipment is designed and built with safety in mind. However,your overall safety can be increased by proper installation ... and thoughtful operation on your part. DO NO T INSTALL,O PERATE O R REPAIR THIS EQUIPMENT WITHO UT READ-ING THIS MANUAL AND THE SAFETY PRECAUTIO NS CO N-TAINED THRO UGHO UT.And,most importantly, think beforeyou act and be careful.NOTESvfor selecting a QUALITY product by Lincoln Electric. We want you to take pride in operating this Lincoln Electric Company product ••• as much pride as we have in bringing this product to you!Read this Operators Manual completely before attempting to use this equipment. Save this manual and keep it handy for quick reference. Pay particular attention to the safety instructions we have provided for your protection.The level of seriousness to be applied to each is explained below:HIGH FREQUENCY INTERFERENCE PROTECTIONThe TOMAHAWK™ 625 employs a touch start mech-anism for arc initiation which eliminates high frequen-cy emissions from the machine as compared with spark gap and solid state type high frequency genera-tors. Keep in mind, though, that these machines may be used in an environment where other high frequen-cy generating machines are operating. By taking the following steps, high frequency interference into the TOMAHAWK™ 625 can be minimized(1)Make sure the power supply chassis is connectedto a good earth ground. The work terminal ground does NOT ground the machine frame.(2)Keep the work clamp isolated from other workclamps that have high frequency.(3)If the work clamp cannot be isolated, then keepthe clamp as far as possible from other work clamp connections.(4)When the machine is enclosed in a metal building,several good earth driven electrical grounds around the periphery of the building are recom-mended.Failure to observe these recommended installation procedures may cause improper function of the TOM-AHAWK™ 625 or possibly even damage to the control system or power supply components.INPUT ELECTRICAL CONNECTIONS The TOMAHAWK™ 625 is rated for 208VAC and 230VAC input voltage. Before installing the machine, check that input supply voltage, phase, and frequency are the same as the machine's voltage, phase, and frequency as specified on the machine's rating plate.• The TOMAHAWK™ 625 should be connected only by a qualified electrician. Installation should be made in accordance with local codes.For use on engine drives, keep in mind the above input draw restrictions and the following precaution. The TOMAHAWK™ 625 can be operated on engine driven generators as long as the 230 volt auxiliary meets the following conditions:• The AC waveform peak voltage is below 400 volts.• The AC waveform frequency is between 45 and 65 Hz.• The RMS voltage of the AC waveform is always greater than 208VAC.USER RESPONSIBILITYBecause design, fabrication, erection and cutting vari-ables affect the results obtained in applying this type of information, the serviceability of a product or struc-ture is the responsibility of the user. Variation such as plate chemistry, plate surface condition (oil, scale), plate thickness, preheat, quench, gas type, gas flow rate and equipment may produce results different than those expected. Some adjustments to procedures may be necessary to compensate for unique individ-ual conditions. Test all procedures duplicating actual field conditions.DESIGN FEATURES AND ADVANTAGESThe TOMAHAWK™ 625 design makes plasma cutting uncomplicated. This list of design features and advan-tages will help you understand the machine's total capabilities so that you can get maximum use from your machine.- Light weight and portable design for industrial use. - Continuous control, 10 - 40 amps.- Reliable touch start mechanism for plasma arc initi-ation.- Rapid arc restrike for fast cutting of expanded metal. - Input over voltage protection.- Bright 3.0 second timed pilot arc.- Purge section on output dial.- Air regulator and pressure gage included.- Internal water separator included.- Parts-in-Place mechanism to detect proper installa-tion of consumables and torch.- Preflow/Postflow timing. Preflow is eliminated if arc is re-initiated in Postflow.- Thermostatic Protection.- Solid state over-current protection.- Unique electrode and nozzle design for optimum cooling and long life.CUTTING CAPABILITYThe TOMAHAWK™ 625 is rated at 40 amps, at 35% duty cycle on a 10 minute basis. If the duty cycle is exceeded, a thermal protector will shut off the output of the machine until it cools to the normal operating temperature.Figure B.1 shows the cut capacity of the TOMA-HAWK™ 625 when cutting mild steel. (The graph plots cut thickness vs. torch travel speed with a torch standoff of 0.15".) CONSUMABLE LIFEThe expected life for the TOMAHAWK™ 625's elec-trode under normal operating conditions is approxi-mately 1000 starts/cuts. An erosion of .060" is typical for end of electrode life, however, the electrode life may last longer. A green and erratic arc will indicate definite electrode failure and the electrode should be replaced immediately.It is recommended that consumables be replaced in complete sets. (Example: Electrode and Nozzle). This will maximize the performance of the TOMAHAWK™625 system.Figure B.1 TOMAHAWK 625LIMITATIONSDo not exceed output current and duty cycle rating of machine. Do not use the TOMAHAWK™ 625 for pipe thawing.If the arc turns off while cutting using low input volt-age, that is below 208V, lower the air pressure by adjusting the regulator knob.When using with the Outback 180, gouging is not rec-ommended.Turn the machine's ON/OFF POWER SWITCH to the OFF position.• Connect the air supply to the machine.• Turn the main power on and the machine power switch to the ON position.- The fan will start.- The pre-charge circuit will operate for 3 seconds,then the green "Power" LED will illuminate.• Attach the work lead clamp to the workpiece before cutting.• Set the output current control knob to maximum position for higher cutting speed and less dross for-mation. Reduce the current, if desired to reduce the kerf (cut) width, heat affected zone, or travel speed as required.Note:If the circuit breaker trips while cutting at high-er amperages - reduce the cutting amperage on the unit, or provide an input circuit with higher current capacity.• Rotate the output knob into the purge zone to check or set the gas pressure. Pull the pressure regulator cap out and turn it to set the pressure.- Adjust the gas regulator for 75-80 PSI (0.50-0.55MPa).- Turn the output knob out of the purge zone.- The gas will immediately turn off. The pressure gage may show an increase in pressure after the air turns off but this is normal. Do NOT reset the pressure while the air is NOT flowing.PROCEDURE RECOMMENDATIONSWhen properly used, plasma arc cutting is a very eco-nomical process. Improper use will result in a very high operating cost.General - In All Cases• Follow safety precautions as printed throughout thisoperating manual and on the machine.• If piercing is required, slowly lower the torch at anangle of about 30° to blow the dross away from the torch tip and slowly rotate the torch to a ver-tical position as the arc becomes deeper. This process will blow a lot of molten metal and dross. Be careful! Blow the dross away from the torch, the operator and any flammable objects.• The nozzle should not be dragged on the metal surface. A drag spacer is provided to maintain a consistant touch height. Refer to Touch Parts Configurations in this Section.• Where possible, start the cut from the edge of thework piece.• Keep moving! A steady speed is necessary. Donot pause.• Replace the nozzle when the orifice exit is eroded away or oval shaped.• After the problem is found, or if there is nothing apparently wrong, reset the machine by turning the power switch OFF and then ON again. (It is possi-ble for electrical noise to trip the safety circuit on rare occasions. This should not be a regular occur-rence.)• If the machine does not reset or continues to trip,consult the Troubleshooting Section.• Use the proper cutting procedures referred to in Procedure Recommendations.PILOT ARC DISCUSSIONThe TOMAHAWK™ 625 has a smooth, continuous pilot arc. The pilot arc is only a means of transferring the arc to the workpiece for cutting. Repeated pilot arc starts, in rapid succession, is not recommended as these starts will generally reduce consumable life.Occasionally, the pilot arc may sputter or start inter-mittently. This is aggravated when the consumables are worn or the air pressure is too high. Always keep in mind that the pilot arc is designed to transfer the arc to the workpiece and not for numerous starts without cutting.The TOMAHAWK™ 625 does not utilize high frequen-cy starting. When the pilot arc is started, a slight impulse will be felt in the torch handle. This occur-rence is normal and is the mechanism which starts the plasma arc. This impulse can also be used to help troubleshoot a "no start" condition.Suggestions for Extra Utility from the TOMAHAWK™ 625 System:1. Occasionally an oxide layer may form over the tip of the electrode, creating an insulating barrier between the electrode and nozzle. This will result in the tripping of the TOMAHAWK™ 625's safety circuit. When this happens turn the power off,remove the nozzle and electrode and use the elec-trode to rub against the inside bottom surface of the nozzle. This will help remove any oxide buildup. Replace the nozzle, turn on the power and continue cutting. If the safety circuit continues to trip after cleaning the consumables, then replace them with a new set. Do not continue to try and cut with excessively worn consumables as this can cause damage to the torch head and will degrade cut quality. Do not allow torch cable or body to contact hot surface.2. To improve consumable life, here are some sug-gestions that may be useful:• Make sure the air supply to the TOMAHAWK™625 is clean and free of oil. Use several extra in line filters if necessary.• Minimize dross buildup on the nozzle tip by starting the cut from the edge of the plate when possible.• Pierce cutting should be done only when nec-essary. If piercing, angle torch about 30° from the plane perpendicular to the work piece,transfer the arc, then bring the torch perpendic-ular to the work and begin parallel movement.• Reduce the number of pilot arc starts without transferring to the work.• Reduce the pilot arc time before transferring to the work.• Set air pressure to recommended setting. A higher or lower pressure will cause turbulence in the plasma arc, eroding the orifice of the nozzle tip.• Use only Lincoln consumable parts. These parts are patented and using any other replace-ment consumables may cause damage to the torch or reduce cut quality.TORCH PART CONFIGURATIONSThere are different torch configurations depending onthe cutting or gouging application.Standard Cutting Setup:In the Standard Cutting configuration the nozzle isdesigned not to touch the work piece. The advantageof this cutting method is good visibility of the arc.However it requires a steady hand to avoid touchingthe nozzle to the work piece which will cause prema-ture nozzle wear and a jagged cut. An optional dragspacer can be attached to the retaining cap to main-tain a consistent arc height.Contact Cutting Setup:Contact Cutting uses special expendable parts thatallow the torch to touch the work piece. The advan-tage of contact cutting is that the torch can touch thework piece, steadily dragging it across the surface.The disadvantage of contact cutting is the plasma arcis not as visible as with a standard torch set-up. Sincethis machine cuts at 40 amps or less it uses the directcontact torch configuration which allows a special noz-zle to come in contact with the work piece.Gouging Setup:If gouging metal and not cutting completely through the part is required, a special gouging nozzle is used in conjunction with a gouge shield to protect the noz-zle from molten metal blow back.Refer to the torch parts decal located on your machine or the parts pages at the back of this manual for the specific part numbers required for each of these setups.ALWAYS USE GENUINE LINCO LN ELECTRIC ELECTRO DES, NO ZZLES, AND EXPENDABLE PARTS FO R THE BEST CUTTING PERFO R-MANCE.GENERAL OPTIONS /ACCESSORIESThe following options/accessories are available for your Tomahawk Plasma cutter from your local Lincoln Distributor.K2377-1-Small Canvas CoverProtect your machine when not in use. Made from attractive red canvas that is flame retardant, mildew resistant and water repellent. It includes a convenient side pocket to hold the plasma torch.K2886-1- Plasma Circle Cutting KitFor cutting circles from 3” to 33” in diameter (77mm to 838mm).TORCHESThe following replacement torch is available:K2847-1 LC40 Handheld Plasma Torch 20' (6m) EXPENDABLE PARTSRefer to the torch parts decal located on your machine or the parts pages at the back of this manual for the specific part numbers required for each of the avail-able setups.This Troubleshooting Guide is provided to help you locate and repair possible machine malfunctions. Simply follow the three-step procedure listed below.Step 1.LOCATE PROBLEM (SYMPTOM).Look under the column labeled “PROBLEM (SYMPTOMS)”. This column describes possible symptoms that the machine may exhibit. Find the listing that best describes the symptom that the machine is exhibiting. Step 2.POSSIBLE CAUSE.The second column labeled “POSSIBLE CAUSE” lists the obvious external possibili-ties that may contribute to the machine symptom.Step 3.RECOMMENDED COURSE OF ACTIONThis column provides a course of action for the Possible Cause, generally it states to contact you local Lincoln Authorized Field Service Facility.If you do not understand or are unable to perform the Recommended Course of Action safely, contact you local Lincoln Authorized Field Service Facility.STATUS BOARD INDICATORSJapaneseChineseKoreanArabicREAD AND UNDERSTAND THE MANUFACTURER’S INSTRUCTION FOR THIS EQUIPMENT AND THE CONSUMABLES TO BE USED AND FOLLOW YOUR EMPLOYER’S SAFETY PRACTICES.SE RECOMIENDA LEER Y ENTENDER LAS INSTRUCCIONES DEL FABRICANTE PARA EL USO DE ESTE EQUIPO Y LOS CONSUMIBLES QUE VA A UTILIZAR, SIGA LAS MEDIDAS DE SEGURIDAD DE SU SUPERVISOR.LISEZ ET COMPRENEZ LES INSTRUCTIONS DU FABRICANT EN CE QUI REGARDE CET EQUIPMENT ET LES PRODUITS A ETRE EMPLOYES ET SUIVEZ LES PROCEDURES DE SECURITE DE VOTRE EMPLOYEUR.LESEN SIE UND BEFOLGEN SIE DIE BETRIEBSANLEITUNG DER ANLAGE UND DEN ELEKTRO-DENEINSATZ DES HERSTELLERS. DIE UNFALLVERHÜTUNGSVORSCHRIFTEN DES ARBEITGEBERS SIND EBENFALLS ZU BEACHTEN.JapaneseChineseKoreanArabicLEIA E COMPREENDA AS INSTRUÇÕES DO FABRICANTE PARA ESTE EQUIPAMENTO E AS PARTES DE USO, E SIGA AS PRÁTICAS DE SEGURANÇA DO EMPREGADOR.• Sales and Service through Subsidiaries and Distributors Worldwide •Cleveland, Ohio 44117-1199 U.S.A. TEL: 216.481.8100 FAX: 216.486.1751 WEB SITE: 。
Low-k_Wire_Bonding
Test Vehicle: Package: Die size: Pad open:
1st bond graphical optimization: BGA 37.5 * 37.5 552 I/O 8.0 * 8.0mm 52*61um
Pad pitch:
60um
Wire Bonder: K xx Capillary : M xx Gold wire : S xx 0.9mils Variable factors:
Low K Z1 Z2 Silicon
6/103
Feed rate
RPM
Power : 2W
Rep. Rate : 100k HZ
50 mm/s
50 mm/s
Low K Z1 Z2
40k
40k
Silicon
名詞解釋
1st step
關於laser cut
laser grooving + blade dicing 2nd step
11/103
Part I - Assembly Process Investigation (2)
( Wire Bond Process )
The purpose is to study any damage to bond pad for low-k structure with wire bonding process.
13/103
ቤተ መጻሕፍቲ ባይዱ
名詞解釋
The capillaries produced with the ATLAS material possess the following features: Higher fracture toughness supporting extremely small wall thickness Tighter tool tolerances increasing the process stability and robustness Smaller grain size enabling smoother surface finish and smaller hole diameter
PhotoIntroduction
42
0.1472 0.1526 0.1413 0.1458 0.1572
DOF and EL
0.17 0.165
0.16 0.155
0.15 0.145
0.14 0.135
0.13 0.125
0.12 0.1150来自11 -0.33-0.26
-0.19
-0.12
-0.05 Focus
AA window
ASML Scanner
Machine
Track: 涂敷显影机
Track内除了涂敷和显影之外，还有相关的热板和冷板，以及TARC或者BARC涂敷单元。 SMIC 使用的Track为 TEL所制。 在现今的 Fab, 以上曝光机和显影机会联在一起成为一个 “Photo In-line machine” 相对而言的， BARC coater, PI coater 和 PI developer 等Track机台，因为不和Scanner 或者 Stepper相联，所以称为“ Off-line Track”
52 50 48 46 44 42
0.02
DOF=0.12-(-0.20)=0.32
0.09
0.16 0.155
0.16
0.23
EL: energy latitude
0.15
0.145
The energy range of CD in 0.14
Minotaur MSR127 安全门磁传感器用户手册说明书
Instrucciones de instalaciónTraducción de las instrucciones originalesRelés de seguridad para monitoreo Minotaur MSR127Número de catálogo 440R-N23124, 440R-N23125, 440R-N23126, 440R-N23127, 440R-N23128, 440R-N23129, 440R-N23129M, 440R-N23130, 440R N23131, 440R-N23132, 440R-N23132S, 440R-N23133, 440R-N23134, 440R-N23135, 440R-N23135M, 440R-N23135S, 440R-N23213Resumen de cambiosLa presente publicación contiene la siguiente información nuevao actualizada. Esta lista incluye solo las actualizaciones importantes y no pretende reflejar todos los cambios. Las versiones traducidas no siempre están disponibles para cada revisión.SeguridadEste dispositivo está concebido para formar parte del sistema de control relacionado con la seguridad de una máquina.Notas de seguridadAntes de la instalación, debe efectuarse una evaluación de riesgos para determinar si las especificaciones de este dispositivo son adecuadas para todas las características de funcionamiento y ambiente previsibles de la máquina en la que va a ser instalado. A intervalos regulares durante la vida útil de la máquina, compruebe que las características previstas siguen siendo válidas.Rockwell Automation no aceptará responsabilidad por el fallo de este dispositivo si no se siguen los procedimientos indicados en estasinstrucciones o si se utiliza fuera de las especificaciones recomendadas que aparecen en estas instrucciones.ReparaciónSi hubiera algún daño o mal funcionamiento, no intente repararlos. La unidad debe ser sustituida antes de volver a poner la máquina en funcionamiento.Declaración de conformidadRockwell Automation declara que todos los relés de seguridad MSR127 cumplen las directivas 2014/30/UE, 2006/42/CE y 2011/65/UE según se especifica en la declaración de conformidad disponible en rok.auto/certifications .Descripción funcionalLa unidad queda habilitada una vez que se enciende la fuente dealimentación y se cierran los circuitos de seguridad. El indicador de estado PWR está encendido.Una operación de restablecimiento válida activa las salidas de seguridad. Los indicadores de estado CH1 y CH2 de la salida están iluminados.A demanda de la función de seguridad y si se produce un fallo, se desenergizan las salidas de seguridad dentro del tiempo de respuesta especificado.Detección de falloSi se produce un fallo, el circuito de relé interno fuerza las salidas de seguridad a ir al estado desactivado (OFF). Uno o ambos indicadores de estado de salidas pueden estar apagados. El indicador PWR puede estar parpadeando. Elimine el fallo y apague y vuelva a encender la entrada de seguridad para volver a habilitar el dispositivo. Desconectar y volver a conectar la alimentación del relé de seguridad también puede eliminar la condición de fallo.TemaPágina Resumen de cambios 1Seguridad1Declaración de conformidad 1Descripción funcional 1Diagnósticos 2Entrada de seguridad 2Restablecimiento 2Ejemplos de cableado 2Diagrama de circuito 2Dimensiones aproximadas 3Instalación3Especificación de seguridad 3Especificaciones técnicas3TemaPágina Se actualizó el título de la publicación.1Se actualizó la sección Declaración de conformidad.1Se actualizó la sección Flanco positivo.2Se actualizó la sección Diagrama de circuito.2Se actualizó la sección Especificación de seguridad.3ATENCIÓN: Peligro de lesiones graves.El uso incorrecto puede ocasionar mal funcionamiento.•Solo personal autorizado y debidamente capacitado podrá poner en marcha, montar, instalar, manipular o readaptar el dispositivo.•La instalación deberá realizarse de acuerdo con estas instrucciones.•No neutralice, manipule indebidamente, retire ni anule la función de esta unidad.IMPORTANTELas entradas de seguridad de estos productos se describen como normalmente cerradas (N.C.), es decir, con la guarda cerrada, el accionador en su posición (cuando corresponda) y la máquina lista para arrancarla. Debe evitarse la exposición a golpes o vibraciones que superen lo que se indica en la norma IEC 60068, parte: 2-6/7.La observancia de las instrucciones de inspección y mantenimiento recomendadas forma parte de la garantía.ATENCIÓN: Los relés de seguridad MSR127 no pueden repararse.2Publicación de Rockwell Automation 440R-IN079C-ES-P - Mayo 2020Relés de seguridad para monitoreo Minotaur MSR127 Instrucciones de instalaciónDiagnósticosLas salidas auxiliares (N.C.) 41…42 monitorean el estado de las salidas de seguridad.Entrada de seguridadLa entrada de seguridad puede ser de canal individual o de doble canal. Dependiendo de las entradas del cableado, el monitoreo de lazo cruzado de las entradas estará habilitado o inhabilitado. El monitoreo de lazo cruzado puede estar habilitado para entradas de seguridad de 2canales en una conexión de 4hilos S11-S12, S21-S22. El monitoreo de lazo cruzado está inhabilitado para entradas de canal individual, entradas de doble canal en una conexión de 3hilos y señales de 24VCC. Con señales externas de 24VCC, el polo negativo debe conectarse a S21.RestablecimientoModos de restablecimiento: La unidad está disponible con arranqueautomático/manual (MSR127T/TP) y restablecimiento monitoreado manual (MSR127R/RP).Un arranque/restablecimiento válido solo se puede operar si el circuito de retroalimentación está cerrado. Los contactos de retroalimentación de los accionadores controlados se conectan en serie con el circuito de arranque/restablecimiento (S12-S34).T - Arranque automático/manualS12-S34 no se monitorea respecto a cambios de señal (no hay detección de flancos). El circuito de restablecimiento se puede cerrar antes o después de que se cierren las entradas de seguridad. La unidad está activa una vez que se han cerrado las entradas de seguridad y el circuito de restablecimiento se ha cerrado. Si las entradas de seguridad y el circuito de restablecimiento están cerrados simultáneamente durante el encendido, la unidad se activa de inmediato.R - Restablecimiento monitoreado manualEn el modo de restablecimiento monitoreado manual, se requiere y se monitorea un cambio en la señal del circuito de restablecimiento (S12-S34). El circuito de restablecimiento se debe cerrar después de que se cierren las entradas de seguridad.Flanco positivoy, a continuación, se cierra el circuito de restablecimiento.Ejemplos de cableadoFigura 1 - Compuertas de seguridad de doble canal, restablecimiento monitoreado manual, salida monitoreadaFigura 2 - Compuertas de seguridad de doble canal, restablecimiento automático, salida monitoreadaDiagrama de circuitohilosde 24VCC4hilos; los fallos cruzados requieren elrestablecimiento de los fallosTabla 1 - ConexionesTerminal Descripción A1, A2AlimentaciónS11, S12 (S10), S52, S21, S22Entrada de seguridad (N.C.)S34 (S33)Lazo de retroalimentación de monitoreo con botón de restablecimiento MSR127R, MSR127T, MSR127RP, MSR127TP13, 14, 23, 24, 33, 34Salida de seguridad (N.A.)41, 42Salida auxiliar (N.C.)MSR127.1T 13, 14, 23, 24Salida de seguridad (N.O.)33, 34, 43, 44Salida auxiliar (N.A.)Publicación de Rockwell Automation 440R-IN079C-ES-P - Mayo 20203Relés de seguridad para monitoreo Minotaur MSR127 Instrucciones de instalaciónDimensiones aproximadasFigura 3 - Dimensiones [mm (pulg.)]Instalación1.Montaje en envolvente (clasificación mínima de IP54).2.Para retirar los terminales (solo versiones P), inserte un destornillador y muévalo lentamente según se indica.Especificación de seguridadTodos los relés de seguridad MSR127 pueden utilizarse en circuitos de seguridad según las normas EN ISO 13849-1 e IEC 61508/IEC s especificaciones solo son aplicables si la función de seguridad se usa como mínimo una vez cada 6meses. Todas las pruebas de diagnóstico se realizan como mínimo antes del siguiente uso. Se adopta el tiempo de misión (TM) para el intervalo de prueba de calidad (PTI).Tasas de fallos de los componentes según SN29500.Especificaciones técnicasTabla 2 - Indicadores de estadoIndicador de estadoDescripciónPWR Verde = La unidad está encendida.Verde parpadeante = Fallos de lazo cruzado.CH1Verde = El canal de salida de seguridad 1 está activado.CH2Verde = El canal de salida de seguridad 2 está activado.Atributo Valor TM (PTI) [a]20dop [d] / hop [h] (1)(1)Tiempo de operación (día, hora)365 / 24tciclo [h]/[s] (2)(2)Tiempo de ciclo (hora, segundo)8 / 28,800Tabla 3 - Especificación de seguridadEN ISO 13849-1IEC 61508/IEC 62061Nivel de rendimiento PLe Nivel de integridad de seguridadSIL 3MTTFd [a]378PFH [1/h] 1.94E-09Cat.4HFT 1DC promedio99%DC99%114.5 (4.5)22.5(0.88)13 23 33 41(43))A1 S11 S52 S12(S10)PWRCH1CH2(S33)S21 S22 S34 A2(44)14 24 34 42(3.89)99AtributoValorFuente de alimentación eléctrica 24VCA/VCC, 115VCA, 230VCA0.85…1.1 x voltaje nominal 50/60Hz Consumo de potencia 2 WEntradas de seguridad 1 N.C., 2 N.C., 2 PNP para cortina óptica Simultaneidad de las entradas InfinitaResistencia de entrada permisible, máx.110ΩRestablecimiento Monitoreado manual y automático/manual SalidasMSR127RP/TP 3N.A. de seguridad, 1N.C. auxiliar MSR127.1T2N.A. de seguridad, 2N.A. auxiliar Clasificación de salida UL: B3005A/240VCAAC-15: 5A/250VCA DC-13: 3A/24VCCSalida de fusibles (externa) 6 A de fusión lenta o 10 A de fusión rápida Corriente/voltaje conmutados, mín.10mA/10V Material de contacto AgSnO 2 + 0.5µAuVida útil eléctrica (operaciones)100,000 (220VCA/4A/880VA cos φ = 0.35)500,000 (220VCA/1.7A/375VA cos φ = 0.6)1,000,000 (30VCC/2A/60W)2,000,000 (10VCC/0.01A/0.1W)Vida útil mecánica 10,000,000 ciclos Retardo de encendido 1 s Tiempo de respuesta 15ms Tiempo de recuperación100ms Voltaje impulsivo no disruptivo 2,500 V Grado de contaminación 2Grupo de instalación Categoría de sobrevoltaje III, VDE 0110-1Temperatura de funcionamiento -5 – +55 °C (23 – 131 °F)Humedad relativa 90%Protección del envolvente IP40 (NEMA 1)Protección de terminal IP20Cableado Utilice cobre capaz de resistir 60/75°C (140/167°F)Calibre de conductor 0.2…2.5mm² (24…12AWG)Ajustes de par - tornillos de terminales 0.6…0.8N•m (5…7lb•pulg.)Material del envolvente Poliamida PA 6.6Montaje Riel DIN de 35mm (1.4pulg.) en envolvente IP54 (mín.)Peso 24VCA/CC: 210g (0.463lb)115VCA o 230VCA: 260g (0.573lb)Vibración10…55Hz, 0.35mm (0.01pulg.)Publicación 440R-IN079C-ES-P - Mayo 2020Copyright © 2020 Rockwell Automation, Inc. Todos los derechos reservados. Impreso en EE. UU.PN-38754195302166 Ver. 08Allen-Bradley, expanding human possibility, Minotaur, Rockwell Automation y Rockwell Software son marcas comerciales de Rockwell Automation, Inc.Las marcas comerciales que no pertenecen a Rockwell Automation son propiedad de sus respectivas empresas.Sus comentarios nos ayudarán a atender mejor sus necesidades de documentación. Si tiene alguna sugerencia sobre cómo mejorar el contenido, rellene el formulario que encontrará en rok.auto/docfeedback .Para obtener asistencia técnica, visite rok.auto/support .Residuos de aparatos eléctricos y electrónicos (RAEE)Rockwell Automation mantiene información medioambiental actualizada sobre sus productos en su sitio web en rok.auto/pec.Para desechar este equipo al final de su vida útil, no se debe usar el servicio municipal de recolección de desechos no clasificados.。
TLC 产品说明书
Double the Dose for Severe or Chronic Problems
For severe or chronic clarity, odor, or sludge problems, use double the standard dose for one or two applicatio revert to the standard dose, and maintain standard dose thereafter. Occasionally, during severe heat or drought conditions, a month of double dosing will be effective and is highly recommended.
TLC Products Cleveland, OH 44135
Not a chemical Non-toxic Non-pathogenic 100% natural
Tips and Tricks for Dosing FarmPond Treatment
1. Know the surface area of your pond (see chart for dose) 2. Double the dose for severe problems 3. Apply most of each dose where problems are most severe
Powdered EcoSocks
EcoSocks are powdered sludge reducing bacteria and food grade nutrients. When placed into the pond, EcoSocks continuously release sludge digesting bacteria for a full month.
维克托利克公司产品说明书
ALWAYS REFER TO ANY NOTIFICATIONS AT THE END OF THIS DOCUMENT REGARDING PRODUCT INSTALLATION, MAINTENANCE OR SUPPORT.(By Others)Series 78USeries 786Series 78TSUPPLY1.0 PRODUCT DESCRIPTIONAvailable Sizes• ½ – 2”/DN15 – DN50Maximum Working Pressure • 400 psi/2758 kPa/27.6 bar Operating Temperature Range• –4°F to +230°F/–20°C to +110°CFunction• Provides simplified coil circuit installation that meets optimal hydronic system design requirements Application• Hot and cold water, including treated and untreated water systems • This KOIL-KIT ™ Coil Pack includes:• (1) Series 78T Ball Valve Union Combination – Sweat x Sweat • (1) Series 78U Union Port Fitting – Sweat x Male Union • (1) TA Series 786H Balancing Valve – Sweat x SweatNOTE• The Series 78T includes a PT port and a blow-down valve. The Series 78U includes a PT port and a manual air vent.2.0 CERTIFICATI N/LISTINGSProduct designed and manufactured under the Victaulic Quality Management System, as certified by LPCB in accordance with ISO-9001:2008.Series 78T/78U Manual Koil-Kit ™ Coil Pack with TA Series 786H Sweat Globe Style Valve08.63System No.Location Submitted ByDateSpec Section Paragraph ApprovedDateSeries 78T Ball Valve Union Combination Body: Dezincification resistant (DZR) brass alloy Union: DZR brass with EPDM O-ring Tailpiece: DZR brassStem: BrassStem O-Ring Seals: EPDMHandle: Steel with vinyl gripSeries 78U Union Port FittingBody: DZR brass alloyUnion: DZR brass with EPDM O-ringSeals: EPDM O-ringTailpiece: DZR brass alloyTA Series 786H Balancing ValveValve Body and Bonnet: AMETAL® DZR brass alloy Sealing (Body/Bonnet): EPDM O-ringValve Plug: AMETAL®Seat Seal: EPDM O-ringSpindle: AMETAL®Slip Washer: Polytetrafluoroethylene (PTFE) Spindle Seal: EPDM O-ringSpring: Stainless steelHand Wheel: Polyamide and TPEMeasuring Points: AMETAL®Measuring Point Seals: EPDMMeasuring Point Caps: Polyamide and TPENOTE• AMETAL® is the dezincification-resistant brass alloy of IMI TA.Series 78T Ball Valve Union CombinationNOTE• Optional tailpieces may be ordered for reductions and for changing end configurations from sweat to threaded or threaded to sweat. If needed, specify optional tailpiece when ordering.Series 78U Union Port FittingNOTE• Optional tailpieces may be ordered for reductions and for changing end configurations from sweat to threaded or threaded to sweat. If needed, specify optional tailpiece when ordering.4.3 OPTIONAL PARTSSeries 78T/78U Union Tailpieces (Optional)Female Tailpiece Sweat Tailpiece Male TailpieceHose End Drain Valve (Optional)A hose end drain valve is factory-installed on the Series 78T.4.5 OPTIONAL PARTSProbe Port (Optional)For Series 78T and Series 78UHandle Extension (Optional)For Series 78T4.7 OPTIONAL PARTSAir VentA manual air vent is factory-installed on the Series 78U. This product can also be mounted on the Series 78T or provided loose for other piping needs.C V /K V values for flow of water at +60°F/+16°C are shown in the table.Formulas for C V and K V valuesΔP = Q 2/C V 2 ΔP = Q 2/K V 2Q = C V × √ΔPQ = K V × √ΔPSeries 78T Ball Valve Union CombinationSeries 78U Union Port FittingFlow CoefficientC v K v Q (Flow)GPM m3/hr ΔP (Pressure Drop)psibarWhere:TA Series 786H Balancing Valve Valve Selection GuideNOTES• Balancing valves should be sized in accordance with the GPM/LPM flows (and not in relation to pipeline size). Sizing balancing valves based on the minimumor maximum flow rates is not recommended. Valves should be sized using the nominal flow rate only. The Minimum Flow is calculated from the minimum open setting of the valve and a minimum pressure drop 1 Ft. WG (= 3 kPa). The Nominal Flow is calculated from the maximum open setting of the valve and the minimum recommended pressure drop, 2 Ft. WG (= 6 kPa). The Maximum Flow is calculated from the maximum open setting of the valve and the maximum pressure drop, 20 Ft. WG (= 60 kPa). A computer program, TA-Select, is available for calculation of valve handwheel pre-set position and other applications.• For information regarding Allen Wrench sizes see the Material Specifications section on page 3.• Measuring Accuracy: The hand wheel zero position is calibrated and must not be changed. Valves have an accuracy of flow measurement of 2% to 3% whenused within their recommended flow range and installed in accordance with the figure below.• For the most accurate results, a Series 734 TA SCOPE or Series 73M CMI should be used. However, any differential pressure meter may be used.The illustration relates to the accuracy of differential pressure measurement and is not an installation requirement.2 D 10 D2 D 5 D 5.2 PERF RMANCETA Series 786H Balancing Valve Cv Values for Various Handle SettingsThe values below may be used when calculating and sizing a piping system.1C V = GPM at a ΔP of 1 psi/7 kPa) through the valve at any given setting.1 psi = 2.31 ft. of H 2O 2Full open valve.For liquids other than water, the flow values from the balancing wheel can be adjusted as follows:Divide the flow rate by the square root of the specific gravity.This applies to liquids having, on the whole, the same viscosity as water, i.e. most water/glycol mixtures and water/brine solutions at room temperature. At low temperatures, the viscosity increases and laminar flow may occur in certain valves. The risk increases with small valves, low settings and low differential pressures.A computer program (Hy-Select) is available for calculation of pre-setting values and other applications. When the flow setting is verified or changed to the final setting, the memory stop should be set. Contact Victaulic for further information. When Δp and the design flow rate are known, use the formula shown to calculate the C V value.A computer program, Hy-Select, is available from Victaulic for calculation of pre-setting values and other applications.5.4 PART CODES08.63 11841 Rev B Updated 04/2020 © 2020 Victaulic Company. All rights reserved.User Responsibility for Product Selection and SuitabilityEach user bears final responsibility for making a determination as to the suitability of Victaulic products for a particular end-use application, in accordance with industry standards and project specifications, and the applicable building codes and related regulations as well as Victaulic performance, maintenance, safety, and warninginstructions. Nothing in this or any other document, nor any verbal recommendation,advice, or opinion from any Victaulic employee, shall be deemed to alter, vary, supersede, or waive any provision of Victaulic Company's standard conditions of sale, installation guide, or this disclaimer.Intellectual Property RightsNo statement contained herein concerning a possible or suggested use of any material, product, service, or design is intended, or should be constructed, to grant any license under any patent or other intellectual property right of Victaulic or any of its subsidiaries or affiliates covering such use or design, or as a recommendation for the use of suchmaterial, product, service, or design in the infringement of any patent or other intellectual property right. The terms “Patented” or “Patent Pending” refer to design or utility patents or patent applications for articles and/or methods of use in the United States and/or other countries.NoteThis product shall be manufactured by Victaulic or to Victaulic specifications. Victaulic recommends all products to be installed in accordance with current IMI TA installation/assembly instructions. Victaulic and IMI TA reserve the right to change productspecifications, designs and standard equipment without notice and without incurring obligations.InstallationReference should always be made to the current IMI TA installation/assembly instructions for the product you are installing. For coupling and strainer installation, reference should always be made to the I-100 Victaulic Field Installation Handbook for the product you are installing. Handbooks are included with each shipment of Victaulic products for complete installation and assembly data, and are available in PDF format on our website at WarrantyRefer to the Warranty section of the current Price List or contact Victaulic for details.TrademarksVictaulic and all other Victaulic marks are the trademarks or registered trademarks of Victaulic Company, and/or its affiliated entities, in the U.S. and/or other countries.7.0 REFERENCE MATERIALS08.16: Victaulic Balancing Valves - TA Series 786H/787H/788/789 and Series 78KH I-KOIL-KIT: Victaulic KOIL-KIT™ Coil Pack Installation and Maintenance Instructions11。
浙东南地区磨石山群祝村组地层及其区域对比
浙东南地区磨石山群祝村组地层及其区域对比陈小友;王加恩;汪发祥【摘要】早白垩世期间浙东南地区火山岩地层磨石山群的祝村组的建组一直存有争议。
近年在浙江宁海地区深入开展的1：50000区域地质调查，发现此套中—酸性火山碎屑岩、凝灰质沉积岩夹酸性或中性熔岩地层，在岩性组合、岩相类型、岩石化学成分、火山活动类型等方面与下伏的九里坪组存在较大差异，并在宁海水车、永嘉大箬岩、丽水祝村等地出露广泛、厚度较大。
依火山岩地层划分原则，这套地层可作为一个组级岩石地层单位——祝村组。
通过对浙东南地区祝村组地层的区域对比认为：祝村组属早白垩世火山活动产物；岩性组合随当时火山活动强度及所处位置有所不同：分布于火山活动较强的破火山口内的祝村组地层，以火山碎屑流相为主，另有崩落相、火山泥石流相、空落相等岩相类型，岩石化学类型属中—酸性；分布于火山活动时喷时歇的火山洼地内的祝村组，以空落相火山碎屑岩与湖相、冲积扇相沉积岩互层产出为主，并有少量火山碎屑流相与喷溢相岩相类型，岩石化学类型属酸性。
% The Zhucun Formation is a constituent part of the Early Cretaceous-aged Moshishan Group volcanics within southeastern Zhejiang Province, and is of controversial origin. Recent mapping at1:50,000 scale by the Zhejiang Province regional geological survey has identified a set of acidic pyroclastic rocks and tuffaceous sedimentary rocks associated with acid or mafic lavas. This set of pyroclastics and tuffaceous sediments is lithological y, geochemical y, and volcanological y distinct from the underlying Jiliping Formation, and contains significantly different lithofacies units. These rocks are widely exposed in the study area, with units thickening towards the Shuiche area of Ninghai County, theDaruoyan area of Yongjia County, and the Zhucun area of the city of Lishui. Here, we define these units as a distinct lithostratigraphic formation, hereby termed the Zhucun Formation. A comparison with the Zhucun Formation outcropping in southeast Zhejiang suggests that this set of pyroclastics and tuffaceous sediments is associated with Early Cretaceous volcanism, with the lithologies preserved within these units spatial y varying with the intensity of volcanic activity. The Zhucun Formation present in distinct calderas associated with more intense volcanic activity is preserved as pyroclastic flow, avalanche, volcanic mudslide, and fallout lithofacies, and is geochemical y mafic to acidic; in comparison, Zhucun Formation units located in volcanic depressions that formed during low intensity periods of volcanism are acidic and preserve evidence of interbedding between airfal pyroclastic and lacustrine facies, in addition to al uvial fans and associated sediments, with only smal amounts of pyroclastic flow and effusive facies present in these areas.【期刊名称】《上海国土资源》【年(卷),期】2012(000)003【总页数】5页(P91-95)【关键词】火山岩地层;祝村组;区域对比;浙东南地区【作者】陈小友;王加恩;汪发祥【作者单位】浙江省地质调查院,杭州311203;浙江省地质调查院,杭州311203;浙江省地质调查院,杭州311203【正文语种】中文【中图分类】P534.53祝村组由浙江省区域地质调查大队于1989年定名，层型剖面位于浙江省丽水市余庄至祝村，被认为是浙东南地区晚侏罗世与早白垩世期间火山岩地层磨石山群的最末期的层位。
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D CD = 0
ITRS Process Resolution
© 2011 TSMC, Ltd
3
Evolution of RET & Design Constraints
High
TSMC Property
Provided by Dr. B. J. Lin
K1
predictability
Low
RET: Resolution Enhancement Technology
Hitachi Wafer/ Mask CDSEM
Random defect
Systematic defect by software modeling
• Process margin • Reticle • Design
Multi-eBeam: Hitachi Muti-EBI Partial Chip E-beam Defect Inspectors Review SEM:
Etch
T
K
& TN
diagnosis SPC APC
CMP
GDS
APC data: Systematic
© 2011 TSMC, Ltd
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Opportunity for future: Random data to Systematic data
• CD/Overlay/Defect decomposition methodology • In-line APC linked with off-line CD/Overlay solutions (APC-SPC) • Solution triggering index
10
day one fingerprint collection
TSMC Property
golden chamber fingerprint matching clean metrology
InCD/ CDO
Litho
CVD
Swing effect Substrate optimization
Dose Mapper
n 2 2 X A,i YA,i i 1
n 2 2 X B ,i YB ,i i 1
Depth asymmetry
Si
Mean depth
Overlay similarity: a new overlay index for metrology tool and scanner overlay fingerprint methodology, Proc. SPIE 7272, 72720E (2009)
5mm
© 2011 TSMC, Ltd
13
• New Metrologies: Focus Sensitivity of FDASML Target
TSMC Property
zebra FD target
0.3 ° SWA/nm focus
Measured Set-Get slope= 1
1:1 correlation in ± 50 nm range
DPT
TSMC Property
N20
half half
Dimension Specification
Defect = 0
interaction
D Overlay = 0 D CD = 0
CD, Overlay & Defect: not independent
© 2011 TSMC, Ltd
2 nm s ide wall as ymmetry
TE TM
500
550
600
650
700 [nm]
500
550
600
650 700 [nm]
Side wall parameters: slope and curvature
Cos Similarity
X
i 1
n
A,i
X B ,i YA,iYB ,i
pitch
© 2011 TSMC, Ltd
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• Complementary Information & Data Mining:
TSMC Property
Baseliner GridMa(iHOPC) GridMa(iHOPC ) SOC Alarm e-Mail/Hold-Lot FDC FDC FDC (WQ/MCC/ROPI) (WQ/MCC/ROPI) YS-IM KT (SOC) Inhibit Feedback or Re-build APC model KT (GridMa) YS (Baseliner) New (SOC/GridMa) (SOC/GridMa
TSMC Property
• Index for correctable and none-correctable APC data
• Index of CD/Overlay fingerprint • Data filtering methodology • Decomposition methodology for different modules • Fingerprint-linked dynamic sampling • Integrated metrology for more information
© 2011 TSMC, Ltd
12
• New Metrologies: in-chip, high sampling & device related
Nanometrics
TSMC Property
• SRAM Overlay/OCD
• Device overlay measurement
• IBO vs. DBO
InCD/ CDO
Litho
CVD
Swing effect Substrate optimization
Dose Mapper
CDU Etch CMP
Topography vs. dummy pattern
diagnosask OPC
© 2011 TSMC, Ltd
• New Methodologies • New Metrologies • New Index • Complementary Information & Data Mining • Opportunity for Future
© 2011 TSMC, Ltd
2
Silicon*
• Traditional Challenges
7
• New Challenges N45
DPT
TSMC Property
N20
half half
Dimension Specification
Defect = 0
interaction
D Overlay = 0 D CD = 0
CD/Hot Spots
CD, Overlay & Defect: not independent
© 2011 TSMC, Ltd
8
• New Challenges N45
DPT
TSMC Property
N20
half half
Dimension Specification
Defect = 0
Overlay/Hot Spots
interaction
D Overlay = 0 D CD = 0
Hot Spot CDU
Etch
Trim time
diagnosis SPC APC
CMP
Topography vs. dummy pattern
Mask OPC
© 2011 TSMC, Ltd
11
Defect Inspection & Metrology
TSMC Property
Inspection/ Review
Set focus=-5nm Get focus=-2nm
Set energy=32.8mj/cm^2 Get energy=32.6mj/cm^2
© 2011 TSMC, Ltd
14
• New Index: information linkage, control & metrology quality
Multiple Modules Error Diagnosis
Defect = 0
golden chamber fingerprint matching clean metrology
TN K
CD & TN K
Litho
CVD
Hot Spot CDU
CD
Decomposition
D Overlay = 0 D CD = 0
© 2011 TSMC, Ltd
4
• New Challenges N45
DPT
TSMC Property
N20
half half
Dimension Specification
Defect = 0
D Overlay = 0
D CD = 0
© 2011 TSMC, Ltd
5
• New Challenges N45
CD/Hot Spots
CD, Overlay & Defect: not independent
© 2011 TSMC, Ltd
9
day one fingerprint collection
TSMC Property
golden chamber fingerprint matching clean metrology