Lecture1 精密超精密加工课件

Lecture 1
The Evolution of Ultra-Precision Machining & Current Technology Trends
程凯 哈尔滨工业大学机电工程学院 电话: 0451-86412475 邮箱: kaicheng@
Defining Ultra-Precision
• Machining Systems adopting either Single Point Diamond Tools or Multi-Point Abrasive Wheels (and Polishing) • Machining Systems with: Slide geometric accuracy of less than 1µm Spindle error motions of less than 50nm Control and feedback resolutions of less than 10nm • Machining Systems able to generate: Dimensional accuracy in the range of some µm’s Surface form accuracy in the range of 100nm or better Surface texture in the range of 5nm or better • Machining Systems that exhibit high degrees of thermal stability, stiffness, damping, and smoothness of motion
Cranfield Precision
Moore Tool M18AG
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Circa 1980 - 1995 3-axis lathe (with B-axis) Double V rolling element guide ways; cast iron measuring machine base H-P laser feedback – 10 nm resolution Professional Instruments 10 inch spindle Allen-Bradley 7360 NC Control Capable of 10 nm Ra surface finish
Key Research & Academic Establishments
Either using or developing Ultra-Precision machines • • • • • • • • • • • • • • • • UNSW - Sydney Fudan University MAUPMC - China Suzhou University - China Hong Kong Polytechnic University NCIT - Taiwan MIRL/ITRI - Taiwan SIMTech - Singapore University of Rochester - USA University of North Carolina - USA LLNL - USA TU Berlin – Germany Fraunhofer IPT & IOF – Germany Cranfield University - UK Brunel University - UK University of Durham UK Harbin Institute of Technology, China
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Workspindle Developments
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The porous graphite double hemispherical spindle was originally developed at Y-12 Lab in US under the leadership of Phil Steger Professional Instruments also worked on stepped air bearings in the late 1950s for the US National Labs and the disk drive industry
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LT Ultra MTC 250/350 Diamond Turning Machine
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Circa 2010 - present Single point machining Hydrostatic (oil) bearing technology Granite machine base Active vibration isolation system Form measuring system Integrated tool measuring system Process camera Form tolerance: 100 nm within 100 mm Ø. Roughness: 2 nm (Ra)
Pneumo Precision ASG2500 & Nanoform 300
• • • • Circa 1987 - 2005 2-axis lathe Oil hydrostatic guide ways Evolved to use Zygo 2.5 nm resolution Axiom interferometer Pneumo ASG 2500 series followed the Ultra Precision 2000 which first incorporated hydrostatic guide ways in the 1985-86 timeframe which had itself evolved from a roller bearing concept
Bendix Special Diamond Turning Machine 1977
Note: Bridge structure for increased capacity
LODTM - 1983 LLNL PERL
PERL 1 Micro-Inch Steps
Early Commercial Applications of the Technology
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Circa 1977 - 1990 2-axis lathe Dovetail Air Bearing Slides with Porous Graphite Pads Pneumo designed orifice air bearing spindle with belt drive Ball Screws Natural Granite Base H-P laser feedback – 10 nm resolution Allen-Bradley 7360 NC Control Capable of 10 nm Ra surface finish
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Circa 1990 – today Two axis lathe Double-Vee rolling element guides Air bearing spindle 10 nm glass scale feedback
Pneumo MSG325
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Harold Arneson of Professional Instruments Modern Groove Compensated Spindle
1968 DTM1 at LLNL in US
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Moore #3 plain way X-Y base, capable of 25 nm repeatability/resolution? Heald porous graphite double hemisphere spindle Initially stepper motor drives later converted to an NC system Featured isolation system & 150 liters per minute oil shower system
Philips NL - History with Diamond Turning
• A Philips’ business unit had collaboration with LLNL during the 1970s to produce Germanium based military optics (Qioptiq) So-called ‘Colath’ machines were first built with hydrostatic guideways, friction drive motors, and aerostatic spindle in 1981-82; designed by Arie van Tooren, it performed at the 0.1 micron level Successor was the ESDO in 1988, it had a grinding spindle and was designed by Jelm Franse for CD optics with a capability of 20 nm and included an integrated Fizeau interferometer for quick form feedback
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Era of Commercialisation – 1980’s on…
Military Commercial
Era of Commercialisation – 2000’s on…
Military Commercial
beam
Modern Era of Commercialisation – 1980s on …