涡轮分子泵电源说明书
分子泵说明书-2012
FF-160/750 FF-160/750Z LF160 CF160
金属密封CF接口专用 在分子泵的前级口上
胶圈密封LF接口专用 FF-160/750中LF接口分子泵 FF-200/1200中LF接口分子泵 FB-250/1600中LF接口分子泵 FB-400/4200
10
卡钳（LF专用）
个
5 6 10
4.4 分子泵选购件 表 3 选购配件表
序号
名 称
单位
规格
数量
备
4.2 分子泵适配电源 每种型号分子泵必须配用其专用电源，否则可能造成分子泵损坏。若由此引起的 损失本公司概不负责。适配电源见表1。 表1 分子泵适配电源表 序号 分子泵型号 适配电源 1 FF-160/620、FF-160/620F FK-620 2 FF-160/750、FF-160/750Z FK-750 3 FF-200/1200 FK-1200 4 FB-250/1600、FF-250/1600 FK-1600 5 FB-400/4200 FK-4200
14
XC
系列分子泵使用说明书
图 12、FB-400/4200 安装简图
15
XC
系列分子泵使用说明书
5.5 分子泵排气口简图
图 13 KF40 接口
图 14 KF50 接口
图 15 LF100 接口
16
XC
系列分子泵使用说明书
6.安装
分子泵说明书2.2
F-100/110
F-100/150
110
110
150
N2：108； H2：5×102
≤6×10-6 (DN100 LF)
≤6×10-8①；≤6×10-7②(DN100 CF)
KF25(DN25 ISO-KF)
LF100(DN100 ISO-K)、CF100
陶瓷轴承
普通轴承
42300
＜2
≤0.1
脂润滑 任意角度
29
① 此极限为前级泵采用二级旋片泵加扩散泵或涡轮分子泵得出；
② 此极限为水冷条件下的测试结果；
③ 动静叶片做耐腐蚀处理、润滑油采用耐腐蚀润滑油。
北京中科科仪技术发展有限责任公司（KYKY）
3-孔M8×20
图 2-9 FF-200/1200、FF-200/1200C 安装简图
图 2-10 FF-200/1200N 安装简图
150
脂润滑
安装方式
竖直±5°
任意角度
竖直±5°
任意角度
重量（kg）
29
19
① 此极限为前级泵采用二级旋片泵加扩散泵或涡轮分子泵得出；此极限为水冷条件下的测试结果； ② 此极限为水冷条件下的测试结果； ③ 动静叶片做耐腐蚀处理、润滑油采用耐腐蚀润滑油。
北京中科科仪技术发展有限责任公司（KYKY）
图 2-4 FF-160/500F 安装简图
北京中科科仪技术发展有限责任公司（KYKY）
水嘴
泵腿 前级接口
KF40
控制器接口
图 2-12 F-250/1500 安装简图
图 2-13 F-250/1500N安装简图
图 2-14 FF-250/1600安装简图
图 2-15 FF-250/1800安装简图
Turbo 90 泵说明书
Features:The Turbo™ 90 is designed to operate directly from a 1000RPM PTO shaft without attachments. Peak performance at slower rotation means longer life of the seals. The Turbo 90 can pump suspended materials without accumulation unlike a conventional turbine pump. This is possible because of Pressure Relief Passages from the seal cavities to the inlet port. The sus-pension circulates, and therefore is cleaned from the inner cavi-ties. It can be used for large quantity liquid transfer, from truck to tanks, for instance. It is well suited to high volume sprayer pumping applications.The impeller is made of low moisture absorption, corrosion-resist, engineering grade thermoplastic. It has been designed to increase pump life and smooth operation because of less rotation weight. Seals available are either face seals or lip seals. Specify face seals for severe service (such as abrasives). Face seals feature hard, wear-resistant phenolic rings pressing against ceramic seats.Bearings are isolated by drain cavities. 1 1/2” inlet and outlet ports permit unrestricted high volume flow. Because of the high capacity of the Turbo 90, sufficient bypass flow is available to main -tain maximum agitation. Shaft is made of stainless steel and has a 15/16” diameter with 1/4” keyway.Severe Service model: A Turbo 90 pump is available with a stain-less steel impeller and long life face seals for severe service. The stainless steel impeller will not swell or absorb chemicals because of its steel construction; is tough, durable and virtually indestructible; and is corrosion resistant.Caution: Failure to use a suction strainer, as specified, may void the product warranty.Note: A high capacity strainer with a 20-mesh screen must be used on the inlet side. Note: A 1000 RPM PTO coupler must be used. The capacity or flow of the Turbo 90 pump used with a 540 RPM PTO coupler is about zero.1000 RPM Quick Couplers: Quick couplers provide quick and simple on-off installation. The body is steel and the collar is Super T ough Nylon, color-coded International Orange for 35979, 1 3/8” PTO Coupler, and International Yellow for 35992, 1 3/4” PTO Cou-pler, according to safety standards.Collar Coupler: This coupler reduces the chances of vibration be-cause it clamps a full 360º on a 15/16” pump shaft, and on either 1 3/8” or 1 3/4” tractor PTO, like a collet. This provides better center-ing of the pump shaft to the tractor PTO. Both ends of the coupler must be wrench tightened onto the PTO shaft and the pump shaft prior to operation.Note: Do not force coupler onto the PTO spline too far. 1/4” to 3/8” of PTO spline should be visible after coupler is in position.Torque Bar and Chain: This part is needed to anchor a pump mounted directly on a PTO to keep it from turning with the PTO shaft.Turbo 90 Repair Kits: 28455-1 repair kit for 26556-11 cast iron pump with face seals includes one gasket, two seal rings, for O-rings, two ceramic seats, two seat rings, two springs, and two seal supports. P/N 28455-2 repair kit for 26556-4 cast iron pump with lip seals includes one gasket and two lip seals.Warning: When using PTO-driven equipment, leave shields in place. Do not wear loose-fitting clothing near rotating PTO shafts.Turbo™ 90 Flow Rates — Gallons per minutePump G ALLONS PER MINUTE (GPM) AT POUNDS PER SQUARE INCH AT THE GAUGE (PSIG) Speed (RPM) 0 10 20 30 40 50 60 70 80 90 100 600 45 30 19 8 — — — — — — — 800 60 47 37 27 19 11 3 — — — — 1000 75 65 55 46 37 30 24 18 12 6 —12009080736557494236312520Figure 1. Plumbing for Pump InstallationWhen using a quick coupler, line up key in thequick coupler with keyway on pump shaft and slide coupler into place, also lining up other set screw with spot on shaft. Tighten the set screw over the spot on the shaft first, then the keyway set screw.When using quick couplers, pull collar back andslide onto the PTO shaft until it locks into place, release collar.When using a Collar Coupler, slide onto pumpshaft, then PTO shaft, leaving 1/4” to 3/8” of PTO spline visible. Tighten both ends of the coupler witha wrench.Position pump below liquid level in tank to assurepriming.On other than PTO installations, check pumprotation. An arrow on the pump shows direction of rotation.To keep pump from rotating with PTO shaft, usea torque bar and chain assembly 33680 (Fig. 3). Bolt bar to pump, using two adjacent flange bolts. Snap one end of chain to the torque bar and the other end to a stationary part of the tractor. Mount the torque bar so the counter force will raise up onPump Installation1. 2. 3. 4. 5. 6.7. 8.9.10.11.the pump and help relieve the side pressure due to weight of the pump and hose. Do not fasten pump rigidly to the tractor.With the pump in position, connect the inlet hose to the IN port. Use a 1 1/2” I.D. hose if you need maximum flow rates (Fig. 1).A high capacity strainer with a 20-mesh screen must be used on the inlet side (Fig. 1). For in-line protection of nozzles, use a 40-mesh strainer in the boom feed line. Use a 3/4” or 1” Y-type strainer (Fig. 1).To regulate pressure, install either a 1 1/4” ballvalve or 1” pressure regulating valve downstream from the pump discharge (Fig. 1). Do not use a spring-loaded valve.Check all hose connections. Loose connections can permit air to be drawn in and the pump may not prime properly.Note: Support hoses where necessary to keep weight off the pump.Caution: Failure to use a suction strainer, as specified, may void the product warranty.Pump MaintenanceBearings require no lubrication. Drain. If pump remains installed on tractor,remove drain plug to drain pump. If pump hasbeen removed from tractor, use IN and OUTports for draining.Flush. After use, thoroughly flush pump with clearwater. If available, use a solution of one cup ofammonia in 10 gallons of water. This will dissolvemost residue remaining in the pump. Drain, let dry,then flush pump with light lubricating oil. Store.Caution: Gasoline, kerosene or fuel oil can attack materials in pump. Do not use as storing solution. If pump is to be stored, follow flush with a 50 percent permanent antifreeze solution. Plug ports.Maximum Recommended Pressure:100 PSIG (7 Bars)Maximum Recommended Temperature:120º F (50º C)Maximum Recommended PTO Speed:1250 RPMBefore starting, make sure all air is removed frompump and lines.Do not use rusty supply barrels or sandy water.Caution: Running pump dry can cause exces -sive heat and damage seals.Do not start pump before priming. The pump is NOT self-priming. Be sure suction line and pump are filled with liquid. Open the pressure regulating and boom regulating valves to be sure there is no back pressure on pump. Do not close the discharge line of the pump unless a means of bypassing the liquid relief valve has been installed. Pump can then be started and should prime. To assure ease in prime and the bleeding of air in pumping system, install pump so that ports are upright.Caution: Operating above maximum limits candamage pump.Do not operate pump at a PTO speed in excess of1250 RPM, or a pressure higher than 100 psi (7 bars), or a temperature higher than 120º F (50º C).Pump Operation1. 2. 3. 4. 1.2.3.4.Figure 2. DimensionsFigure 3. Torque bar and chain assembly, installedFigure 5. Turbo™ 90 Exploded ViewNote: Turbo 90 pumps, P/N 26556-11 are equipped with face seals. These seals are six-piece as-semblies, P/N 51387. Replace worn face sealswith P/N 51387. Be sure Wave Spring side istoward impeller (5).Note: Turbo 90 pump P/N 26556-4 is equipped with lip seals. These seals are two-piece assemblieswhich include a seal and a seal adapter in each.If your pump is equipped with two-piece seal as-semblies, use P/N 45005 (Turbo 90 Lip Seal)as the replacement seal. This seal is about 13/4” in diameter.If the seal adapter has been damaged, use P/N 45006 as the replacement adapter. Whenreplacing seal, be sure spring side facesliquid flow.REF. NO.PART NO.DESCRIPTION QUANTITY REQUIRED 26556-411 26556-4Cast Iron T-90 Pump Assembly with lip seals and thermoplastic impeller26556-11Cast Iron T-90 Pump Assembly with face seals and thermoplastic impeller117902Hex Nut (3/8”-16 UNC)66239923-1End Plate, Cast Iron11339924-1Body, Cast Iron11426545Gasket11528709Impeller, Thermoplastic115a30512Hub11826544Woodruff Key11926548Snap ring, Internal221026665Dust Shield111116228Bearing, Shielded221239934Cap Screw, Hex Head (3/8”-16 UNCx1 5/8”)661326547Snap ring, External221439935Cap111534793Shaft111625785Pipe Plug, Square Head111745005Lip Seal Assembly - Includes Lip Seal and Adapter2—1851387Face Seal Assembly—2A31352-225WasherB51210Ceramic SeatC51211Seal RingD31352-214O-RingE51212O-RingF51213Wave Spring33680Torque Bar and Chain Assembly——28455-1*Repair Kit for 26556-11, pumps with Face Seals(includes one P/N 26545, gasket, and one P/N 51387, Face Seals)——28455-2*Repair Kit for 26556-4, with Lip Seals(includes one P/N 26545, gasket and two P/N 45005 lip seal assemblies)——*Both repair kits may be used in all Turbo 90 pumps.Parts ListT o avoid confusion and possible delays when placing an order, always specify the Part Number and Description. T o find the correct part number, first locate the part in the exploded view to the left and note the reference number.Then, using the corresponding reference number in the chart above, find the part number in the parts list. All parts are available through your dealer.RepairKitsTurbo™ 90 Pump and Accessories Parts ListThe numbers in parentheses are reference numbers that are found in the exploded view on page 4. Underlined parts areincluded in repair kits, and can be discarded if using kit.Figure 6. Pulling end plate from body1. If coupler is on pump shaft, remove.2. With a 9/16” wrench, unscrew 6 nuts (1) from capscrews (12) and remove capscrews.3. Screw two screws (12) into opposite threaded holes on end plate (2). Install puller (Fig. 6). Tighten puller with a wrench topull end plate (2) from body (3). Lift off end plate (2).Note: Although a puller is recommended, you can sepa -rate the end plate (2) from the body (3) by using a 1” diameter brass rod at the shaft end, tapping it with a hammer.4. Remove gasket (4).Note: Snap rings (9,13) bearings (11) and shaft (15) shouldnot be removed unless damage has occurred.5. Use snap ring pliers to remove snap ring (9) from end plate (2).6. To remove bearing (11), push out with arbor press or use a small piece of brass rod and gently tap with hammer.7. Remove dust shield (10).8. Use snap ring pliers to remove snap ring (9) from body (3).9. Using screwdriver, pry nameplate (14) from body (3).10. Push shaft (15) and bearing (11) out of body (3) with an arbor press or by using a small piece of brass rod and tapping with hammer.11. Remove snap rings (13) from shaft (15).12. Press bearing (11) from shaft (15).13. P/N 26556-11, pump with face seals (skip to next section if your pump has lip seals): a. Pry out ceramic seat (B) and seat ring (C) from end plate (2). b. Lift out dust shield (10) from end plate. c. Slide seal ring (C) with O-ring from shaft. d. Lift out three springs (F) from impeller (5). e. Lift impeller (5) from body (3). f. Remove Woodruff key (8) from shaft. g. Slide other seal ring (C) with O-ring from shaft. h. Pry out ceramic seat (B) and seal ring (C) from body (3). i. Remove dust shield (10) from body.14. P/N 26556-4 pump with lip seals (return to previous sectionif your pump has face seals): a. Lift impeller (5) from body (3).b. Remove Woodruff key (8) from shaft (15).c. Using screwdriver, pry nameplate (14) from body (3).d. Remove snap ring (13) from pump shaft.e. Push the pump shaft out using an arbor press or a small brass rod by gently tapping with a hammer.f. Using a drift punch, from the painted side of each casting, drive the old lip seal (17) out by hitting on the old seal case. Discard old lip seals.1. Thoroughly clean all metal parts in solvent with a soft-bristle brush.2. Coat metal parts with light lubricating oil to assure easier assembly.3. Obtain repair kit 28455 which contains parts listed on the parts list, page 5. Replace all old parts with new parts from repair kit.1. If bearings (11) were removed, lightly oil bearing cavities.2. Place dust shield (10) in end plate (2) and, applying pressure to outer bearing race, press bearing (11) downward until it bottoms.3. Install snap ring (9) in end plate (2).4. Press other bearing (11) into body (3).5. Install snap ring (9) in body. Install inner snap ring (13) on shaft (15) and press shaft into bearing (11). Install outer snap ring (13) on end of shaft (15).6. P/N 26556-11, pump with face seals (skip to next section if your pump has lip seals):a. Place seal support (A) in body (3).b. Place the ceramic seat into the pump body all the way downo n the O-ring (A).Note: Ceramic seat (B) is installed with O-ring groove andside with marking toward the outside of the pump.c. Lubricate the O-ring groove on the ceramic seat (B) with clean oil or petroleum jelly. Place the ceramic seat into the body. Carefully force the seat down over the O-ring until it is against the seal support.Caution: The ceramic seat may be cracked or broken if it isplaced in the body cocked or if excessive force or metal objects are used to drive it in place.d. Slide the new seal ring (C) onto the shaft with the internal O-ring groove toward the inside of the pump. The small diameter of seal ring should mate with the ceramic seat.Pump DisassemblyPump AssemblyPreparationAssemblye. Slide the small O-ring (D) onto the shaft. Push the O-ring outof the key way to avoid cutting the O-ring. Push the O-ringinto the groove in the seal ring.f. Slide the small washer (E) over the shaft and into the recessin the seal ring.g. Slide the wave spring (F) over the shaft and onto the washer(E). The spring will rest against the impeller hub.h. Install the face seal in the end plate (2) in the same way asinto the body (3).6. P/N 26556-4 pump with lip seals (return to previous sectionif your pump has face seals):a. Install lip seals (P/N 45005) using sealant such as Permatexon the mating surfaces. Press to the bottom of the seal bores in both end plate and body. See exploded view, page 4.b. Tap lip seal (17) into pump body using pipe nipple or sealdriver of a diameter large enough to push on the inside of theconcave side of the seal. The cupped, concave side of theseal faces towards the inside of the pump. The spring facestoward the liquid flow.c. Make sure the seal bottoms against the seal supporting edgemachined into the casting.d. Install Woodruff key (8) in shaft (15). Be sure the key bottoms.e. Slide impeller (5) onto shaft.f. Tap lip seal (17) into end plate adapter (45006) using pipenipple or seal driver. Cupped or concave side goes toward the inside of pump; spring faces toward liquid flow.g. Make sure the seal bottoms against the seal supporting edgemachined into the casting.7. Place gasket (4) on body (3).8. With an arbor press, press on inner race and press end plate(2) onto shaft (15).Caution: Uneven tightening of nuts (1) and capscrews (12) to pull end plate (2) down can crack casting.Note: Although an arbor press is recommended, if none is available, you can pull end plate onto body by care-fully tightening nuts (1) and capscrews (12).9. Install capscrews (12) and nuts (1) and tighten.10. Turn shaft to be sure the pump is not binding. If pump seems tobe binding, tap shaft lightly with a soft hammer.11. Replace nameplate (14) in body (3). Nameplate is merelypushed into place.Turbo™ 90 Troubleshooting GuidePROBLEM CAUSE PROCEDURE1. NO PRESSURE, OR NO CAPACITY a. Inlet line not immersed in liquid or low level a. Reposition inlet line or fill tank.b. Pump not primed b. Prime pump; be sure mounted below water level.c. Plugged strainer c. Clean strainer with water and soft brush if needed.d. Intake line air leaks d. Tighten all connections, using pipe joint compound.Check hoses for leaks.e. Intake line blocked e. Check line and clean.f. Pump turning wrong direction f. Check direction of arrow on pump, mount correctly.g. Pump parts worn g. Replace using Repair Kit, or return for repair or if under warranty.2. EXCESSIVE NOISE OR VIBRATION a. Loose couple a. Tighten or replace coupler.b. Bent or damaged shaft, improperly aligned b. Replace shaft.c. Intake line leaks; plugged strainer c. See PROCEDURES c. andd. above.d. Worn parts, broken rotor vanes d. See PROCEDURE g. above.3. PUMP RUNS, BUT LOW CAPACITY a. PTO speed too slow. a. 1000 RPM required.b. Intake line partially blocked or too small b. Clean line. Use 1 1/2” I.D. hose.c. Too many fittings, elbows, valves c. Replumb for more direct path.d. Plugged strainer or leaks d. See PROCEDURES c. and d., block 1.4. PRESSURE AT PUMP, BUT LOW OUTPUT AT NOZZLES a. Nozzle orifice too small or strainer plugged a. Replace nozzles; clean nozzle strainer.b. Discharge line too small b. Use 1 1/2” I.D. hose.c. Valves set incorrectly c. Check, adjust valves.5. IMPOSSIBLE TO ROTATE SHAFT a. Improper assembly a. Gasket in place? Review assembly instructions.b. Foreign material or corrosion in pump b. Disassemble and clean. Use clean water supply.6. LEAK a. Lip seal installed backward a. Check drawing page 4. Spring should be toward liquid.b. Worn parts b. Repair using repair kit.c. Worn casting c. Replace pump.ReturnsAll Delavan products are warranted against manufactur-ing defects (see warranty, below). In the event you feel you have a warranty-covered, returnable item, return the pump to your dealer, who will replace a warrantable pump for you. Delavan’s “No Hassle Warranty” puts you back in the field sooner!Important:Whether you are returning your pump for warranty or for repair, you must do the following:1. Flush chemical residue from the pump (best donein the field).2. Tag pump with type of chemicals having beensprayed.3. Include complete description of operation prob-lem, such as how pump was used, symptoms ofmalfunction, etc.Since pumps can contain residues of toxic chemicals these steps are necessary to protect all the people who handle return shipments, and to help pinpoint the rea-son for the breakdown.Delavan Products WarrantyAll products sold by Delavan are warranted only to pur-chasers from Delavan for resale or for use in purchas-ers’ own business or original equipment manufacture, against defects in workmanship or materials under nor-mal use, maintenance and service (rental use exclud-ed), if notice of said defect is received by Delavan at the factory within 90 days after installation or one year from date of shipment from the factory, whichever first occurs. The sole and exclusive obligation of Delavan under this or any implied warranty shall be to replace or, at its option, to repair, without charge, any product which is determined by Delavan to be defective in work-manship or materials after the product is returned to the Delavan factory, shipping costs prepaid. In no event shall Delavan be liable to any person for indirect or consequential damages or for injury or commercial loss resulting from any use or inability to use and Delavan product. Delavan expressly negates any other warranty, express or implied, including any warranty of merchant-ability or fitness for a particular purpose, or arising from any course of dealing or custom or usage of trade.No person, including any dealer or representative of Delavan, is authorized to make any representation or warranty on behalf of Delavan in addition to or inconsis-tent with these provisions. Purchasers to whom these provisions apply agree to hold Delavan harmless from claims by their customers in excess of the obligations of Delavan expressly set forth herein.1228 Chestnut Ave. • Minneapolis, MN 55403 Toll Free: 1-866-DELAVAN (335-2826)(612) 333-3189Toll Free Fax: 1-888-726-5906(612) 333-3231。
涡轮分子泵说明书
涡轮分子泵说明相关零件资料如下：TURBOMOLECULAR PUMP TG220FVWB-94 涡轮分子泵POWER SUPPLY TO TMP TC223-10 涡轮分子泵供电中频电源REMOTE TRANSFORM CABLE ON P/S SIDE 连接线MOTOR TRANSFORM CABLE ON P/S SIDE 连接线MOTOR TRANSFORM CABLE ON BODY SIDE 连接线该涡轮分子泵及配套电源用于电子束焊机电子枪室的抽真空，真空度要求高。
主要规格：排气速度：N2220L/s最大压缩比：N21×108到达压力：＜1×10-8Pa起动时间：1—1.2min停止时间： 2.5—3.5min所需冷却水量：0.4l/min以上所需电力：最大400VA工作原理：涡轮分子泵是应用高速旋转的叶轮将动量传给气体分子，使气体产生定向活动的原理来抽气。
其优点是启动快，耐大气冲击，无气体存储和解吸效应，无油蒸气污染或污染很少，能取得清洁的超高真空。
性能和特性：泵的排气压力与进气压力之比称为紧缩比。
紧缩比除与泵的级数和转速有关外，还与气体品种有关。
分子量大的气体有高的紧缩比。
对氮(或空气)的紧缩比为108～109;对氢为102～104；对分子量大的气体如油蒸气则大于1010。
泵的极限压力为10-9帕,工作压力范围为10-1～10-8帕,抽气速率为几十到几千升每秒(1升＝10-3米3)。
涡轮分子泵必需在分子流状态(气体分子的均匀自在程远大于导管截面最大尺寸的流态)下工作才干显现出它的优越性,因而请求配有工作压力为1～10-2帕的前级真空泵。
分子泵自身由转速为10000～60000转／分的中频电动机直联驱动。
维克斯（Vickers）单涡轮泵（Vane Pump）产品参数表说明书
Vane Type Single Pump (F3)-V10(*) Series -10 & 20 DesignsService Data Vickers®Vane PumpsRevised 05-01-87M-2005-S31767431767531767631767731767835564133181311156127824603964016662317681351247357286V10F control S/A2706 SeatTorque 41–61 N.m. (35–45 lb. ft.)229613233018232794232795232796232797232798232799233019233020923471923470923496923469923468923497923498295344432511295346SAE rated capacity (V10/F/P cartridge kits)USgpm Rotor Vane Kit Ring Pin (V10)Pin (V10F/V10P)Bolt (V10)Bolt (V10F)Bolt (V10P)Cart. Kitd d d d 1234567432509295344432511923499923500923501Pressure setting – V10P/V10F (Omit for V10)250 PSI 500 PSI 750 PSI 1000 PSI 1250 PSI 1500 PSI 1750 PSI 2000 PSI 2250 PSI 2500 PSICode A B C D E F G H J KPressure setting V10P/V10FV10P Spring252886228022822281z z x 2310422456351963d Included in V10 cartridge kit.YIncluded in seal kit 923548F3 equivalent seal kit 919772Eaton Hydraulics, Incorporated 2000All Rights ReservedShaft (See table) Model Shaft Key Nut Shaft typeV10–****–1 V10–****–3 V10–****–4 V10–****–6 V10–****–11 V10–****–12 V10–****–27 V10–****–34 V10–****–3837433837434037895938225037433937548038028137548538748114284316051606160989488948StraightTheadedTheadedStraightSplinedSplinedTangTheadedSplinedModelBodyV10–*F**–**–20V10–*P**–**–20V10–*S**–**–20V10–*T**–**–10574164352699317668370468 Typical Cutaway ViewK – 1 5/16–12 UN 2B thread P – 1” NPT threadS – 1 5/16–12 straight thread T – 1 3/16–12 straight threadF – Flow control cover P – Priority valve cover Omitted – Standard cover1 –2 Bolt flange (SAE “A ” size)2 – Foot bracket at 12 O ’Clock(Viewed from shaft end)23 – Foot bracket at 3 O ’Clock 26 – Foot bracket at 6 O ’Clock 29 – Foot bracket at 9 O ’ClockPump cover optionsModel CodeSpecial sealsVane PumpMountingF3 – Special “O ”Rings & seals for mineral oil & fire resistant fluidDesign & ModificationRotation(Viewed from shaft end of pump)Pressure setting ,V10F & V10P (Omit for standard cover)A – 250 psiB – 500 psiC – 750 psiD – 1000 psiE – 1250 psiCode Code F – 1500 psi G – 1750 psi H – 2000 psi J – 2250 psi K – 2500 psiL – Left hand for counterclockwise812345141011121315Series 10Outlet port connectionsK – 9/16–18 straight thread V10 standard cover V10F Flow control coverP – 3/4–16 straight thread T – 3/4–16 straight thread PressureTankP – 1/2” NPT threadT – 3/4–16 straight threadV10P Priority valve coverPrimary outletSecondary outletK – 3/4–16 straight thread K – 9/16–18 straight threadTankA – Opposite inletB – 90_ CCW from inletC – Inline with inletD – 90_ CCW from inletPressure port positions (Viewed from cover end)Flow rate in USGPM through orfice in cover1 – 1 USGPM (V10P)2 – 2 USGPM (V10F)Special feature suffixF – 1.156 DIS. portH – 1” O.D. tube connection K – 1 5/16–12 UN 2B thread P – 1” NPT threadS – 1 5/16–12 straight thread T – 1 3/16–12 straight threadInlet port connections61 – Straight –keyed 3 – Threaded 4 – Threaded6 – Straight stub –keyed 11 – Spline –9 tooth 12 – Spline –13 tooth 27 – Tang34 – Threaded38 – Spline –13 toothShaft types9SAE rated ring capacity USGPM(1200 RPM – 100 PSI)1 – 1 USgpm2 – 2 USgpm3 – 3 USgpm4 – 4 USgpm5 – 5 USgpm6 – 6 USgpm7 – 7 USgpm7Printed in U.S.A.。
Edwards nEXT Turbomolecular Pumps 商品介绍说明书
nEXT TURBOMOLECULAR PUMPSEDWARDS THE PARTNER OF CHOICEEdwards is a world leader in the design, technology and manufacture of vacuum pumps with over 95 years’ history and more than 75 years’ manufacturing experience.We believe in delivering results that bring value to our customers by using our breadth of industry experience to identify and apply solutions to your problems. Using the most innovative and up-to-date modelling techniques and know-how, we can optimise the pumping configuration to achieve the maximum performance in the most reliable and cost-effective way.ApplicationsResearch & Development»Chamber evacuation, coating systems,turbomolecular pump systemsHigh Energy Physics»Beam Lines, accelerators, mobile pump carts, Electron Microscopy»TEM, SEM, EPMA, sample prep benches Industrial»Glove boxes, coating systems, XRD/XRF systems, lamp evacuationnEXT240 nEXT300 nEXT400 The pump name refers to the true peak pumping speed for nitrogen gas.BOOST TECHNOLOGYFor our Analytica Instrument OEMs the “T” variants of nEXT employ a unique viscous pumping stage which can be used to ‘boost’ the performance of the backing pump. This offers a much simplified vacuum solution with greatly improved pumping speeds and system power reduction. The example in the image below shows how the boost ports can be used to replace a primary pump on a differentially pumped system.Customers in general laboratory and R&D applications will also benefit from the improved compression achieved with the "T" variant. To take maximum advantage of boost technology, please contact Edwards.END USER SERVICEABLITYNew technologies employed in nEXT have enabled the pumps to be serviced by the end user in the field. An interim oil lubrication cartridge change can be performed, where access allows, typically in less than 5 minutes and a full bearing change can also be performed by the end user in around 10 minutes both with the minimum of specialist tooling. These simple interventions will, in many cases, mean that the pump never requires a full return to base service during its lifetime.nEXT turbomolecular pumps will advise the user when aservice is due and what level of intervention is required.The user is alerted to a service request by a simple flashingLED sequence on the pumps and by serial comms notification.Flexibility is again key as these simple services can beperformed either by the end user, on site by an EdwardsField Service Technician, or the pump can be returned to anEdwards service hub.Using remote diagnostics, a user can interrogate the pumpto determine how long it is to the next service so that aproactive approach to preventative maintenance can beplanned.systems for maximum system rationalisationnEXT300 turbomolecular pump sectional viewintegration* a smaller backing pump may be used depending on application.Controllers and AccessoriesThe TIC (Turbo and Instrument Controller) automatically recognisesand supports one turbomolecular pump from the nEXT range, plusthree Edwards active gauges. Cooling and vent valve support is provideddirectly from the controller. Backing pump power is provided for acompact 24V diaphragm pump (on 200W versions only), or where greaterpumping speeds are required, mains backing pumps (up to RV12) may becontrolled via an optional relay box.nXDS and large XDS pumps can be controlled directly via the backingpump connector on a TIC 200. The relay box can also be used to controla mains heater band and backing line isolation valve. Time delays andnormal speed signals may be used to control events such as turbo startand there is a comprehensive selection of protection and safety interlockfeatures. The TIC turbo controller may be either rack or bench mountedand provides a useful hub for the flexible operation of a wide range ofvacuum system configurations.The TAG (Turbo and Active Gauge) controller is a small,compact, low cost pumping system controller, which issuitable for a wide range of vacuum applications. It is a 24Vcontroller that is compatible with all Edwards DX and nEXTturbomolecular pumps. It contains no power source andtherefore you either need to supply your own power or buythe optional power supply. In addition to a turbomolecularpump it can control a backing pump, a vent valve, an aircooler and an Edwards active gauge. The TAG Controlleris controlled by an easy to use interface. A large clear LEDdisplay shows the pump speed or vacuum pressure. Thecompact size of the controller is ideal for use on bench-topsor suitable mobile platforms.nEXT Turbomolecular PumpsEDWARDSnEXT240 nEXT300 nEXT400EMEAUK+44 1444 253 000(localrate************ Belgium+32 2 300 0730 France+33 1 4121 1256 Germany 0800 000 1456 Italy+ 39 02 48 4471 Israel+ 972 8 681 0633ASIA PACIFICChina+86 400 111 9618 India+91 20 4075 2222 Japan+81 47 458 8836 Korea+82 31 716 7070 Singapore+65 6546 8408 Taiwan +886 3758 1000 AMERICASUSA+1 800 848 9800 Brazil+55 11 3952 5000Publication Number: 3601 0096 01© Edwards Limited 2016. All rights reservedEdwards and the Edwards logo are trademarks ofEdwards LimitedWhilst we make every effort to ensure that weaccurately describe our products and services,we give no guarantee as to the accuracy orcompleteness of any information provided inthis brochure.Edwards Ltd, registered in England and WalesNo. 6124750, registered office: Innovation Drive,Burgess Hill, West Sussex, RH15 9TW, UK.Global contactsnEXT Turbomolecular Pumps EDWARDSPart of the Atlas Copco Group。
分子泵TURBOVAC 450说明书
分子泵TURBOVAC 450说明书分子泵安全使用说明在安装与使用分子泵前，泵的安装与操作人员都应仔细阅读本使用说明书，并按照说明书中规定的条款安装与操作，以免造成人员伤害与设备损坏。
安全警示说明危险：表示为了防止危及人身安全，需要引起高度注意且必须遵守的事项；警告：表示为了防止损伤或损坏泵，需要引起中度注意且必须遵守的事项：小心：表示为了使泵的使用效果最佳，需要引起轻度注意且需要遵守的事项。
保修说明凡购买我公司生产的分子泵，从发货之日起，用户凭保修单可保修一年。
凡属下列情况之一的，不予保修：1.用户未经授权对产品私自拆卸；2.用户保管或使用不当（如撞击、强放射性环境、强磁场环境等）;3.属于用户其他原因造成的损坏。
免责声明当用户严格遵照本说明书中的规定安装和使用时，分子泵TURBOVAC 450是安全、方便和有效的。
泵的操作人员必须仔细阅读并严格遵守本说明书中的条款。
由于用户没有仔细阅读说明书或未按照使用说明书的要求操作而造成的任何伤害和损失，KYKY 将不负担任何责任。
本说明书仅作为信息使用，如遇改版，恕不另行通知。
如本说明书与实际产品有所出入，本公司拥有最终解释权。
由本说明书引起、产生和包含的知识产权均属KYKY所有。
本说明书所列分子泵，按口径不同，从100mm到400mm （对应抽速从110l/s到3500/s）共5个系列，20种泵。
分子泵一般有两种结构形式，一种是由动静叶列组成的涡轮分子泵，一种是由涡轮级加牵引级构成的复合型分子泵。
复合型分子泵的特点是使得分子泵高压强区的抽速有所提高，另一特点是使得出口耐压得到提高，因此可以适当减小前级泵的规格，可使用户节省投资。
根据分子泵轴承润滑方式不同，分子泵有油润滑、脂润滑两种。
一一般情况下，油润滑分子泵需竖直安装（F一100/110、 F一100/150 可以水平安装），脂润滑分子泵可以任意角度安装。
B型TYFB-3600综合说明书
1.2 安装尺寸
初次使用分子泵时必须先注油！正常工作后，每 5000 小时即应换油一次！必须使用本厂提供的分子泵专用润
滑油，违规操作后果自负
4.3 高真空法兰的连接 分子泵的连接可利用高真空法兰吊装或将分子泵固定于基
座上，分子泵的高真空法兰通过金属波纹管与系统连接时分子泵 必须固定。
法兰密封面不得有划痕，
密封圈上不得有异物
闸板阀和隔断阀的密封面应在分子泵侧，当分子泵与真空室之间压差很大时（如预抽过程前后）， 能确保阀门不会在强气压差下被顶开。
旁抽阀密封面应在前级泵侧，当真空室恢复大气压时，能确保旁抽阀不会被大气压顶开。 隔断放气阀的密封面应在隔断阀和预抽阀一侧（其放气口在前级泵侧）。
第 10 页 共 20 页
10
6.6 电磁干扰
10
6.7 强放射性限制
10
6.8 前级泵
10
二、B-3600 分子泵电源
1、参数与功能
11
1.1 简介
11
1.2 安装尺寸
11
1.3 电气参数
11
1.4 前面板按键与接口功能
12
1.5 后面板接口功能
13
2、常规装配与通电试机
15
2.1 整机配电与注意事项
பைடு நூலகம்
15
2.2 遥控接口的应用
启动时间(min)
<10
停机时间(min)
<20
建议采用的前级泵（L／S）
30-70
冷却方式
水冷
冷却水温度（℃）
≤20
冷却水流量(L/min)
1
泵体烘烤温度（℃）
<80
环境温度（℃）
5-40
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注：若直接按下电源开关（13），则分子泵处于自由停车状态。 4.2.3 停车后再启动运转
在停机过程中，即只按下“停止”键（9）而未切断电源键（13）， 则可随时重新启动运行。
5.3 主电路电气测量 由于变频器的输入/输出电压和电流含有高次谐波，选择不同
强迫冷风
使用场所
无腐性气体、液体、无尘垢
环境温度 环
环境湿度 境
振动
-10℃～50℃（超过 40℃时须移至通风良好处） 90％RH 以下（无结霜）
20HZ 以 下 9.80665m/s2(1G) ， 20 ～ 50HZ ， 5.88 m/s2(0.6G)
重 量 （KG）
2023Biblioteka 272.3 型号及表示意义
电流 AXXX 是指本电源在运行中电源内的变频器的输出电流（不 是该电源的输出电流）。在启动前均为 A000，启动后则显示与该时刻 负载相对应的电流值。启动阶段电源大，启动完成后进入正常运行时， 电流最小。在正常运行时段因突发原因引起负载加大到一定限度时， 电流就会增大，直到发生故障报警并停止运行。
1 序言
本文件对 FD-
/
BG 型涡轮分子泵电源的用途和
实用范围,工作原理和结构特征,使用操作与维护保养,故障分析与排
除,运输储存与开箱检查,外行尺寸与安装均作了详细说明。在使用
前，请仔细阅读本说明书，以便正确使用。
本使用说明书使用后，务请随同电源妥善保存，以备随时查用。
本说明书实用于 FD-150/450BG、FD-250/1400BG、FD-400/3500BG
本电源在启．动．过．程．中．，“操作面板”上的频率显示有时会出现反 复。例如：运行频率显示已升至 75HZ 后，又降至 74HZ，然后又上升 至 75HZ、76HZ，又降至 75HZ，然后又上升，这样经过多次反复，基
-9-
本上在设定时间内，最后直至升到额定输出频率。出现上述现象的原 因是电流限流功能在起作用，也就是启动中电机的最大转矩限定在一 定范围内，也就是电机的实际转速的上升速度被限制，而频率的上升 是时间的函数。频率上升快了，就形成转差，转差增大，电流就增大， 当电流达到上限时，就反过来限制频率的上升速度，频率显示也跟着 出现反复。此现象一般在 FD—400/3500BG 电源有可能出现。 4.2.2 停机
⒉ 在下列情况下操作面板上的按钮可操作。 操作面板上的主显示器显示的内容设定为：设定频率 FXXX，运 行频率 HXXX，变频器运行时的输出电流 AXXX，及故障信息显示。 设定频率 FXXX 是指本电源输出电压频率的最高限额。如 FD—
-5-
150/450BG 型和 FD—250/1400BG 型电源设定频率为 F400，FD— 400/3500BG 型电源设定频率为 F250 等，设定频率是不变的。
电源按钮开关上的电源指示灯应点亮（图 3—2—2 中的 13） 操作面板上的显示器应显示 机箱内冷却风扇应正常运行 分子泵电机的旋转方向应符合标识。 特别注意： ⒈ 投入电源前凡水冷却分子泵必须通水！否则将对分子泵造成 损坏！ ⒉ 为防止干扰和保护人身安全，务必连接牢靠接地保护线。
-7-
说明： X2—分子泵电源输出插头座，电源箱附件（P284Q、P28K4A）。 X3—分子泵电源输出插入插座之一，分子泵附件，插座在泵体上。 X4—是一根控制线的两个端头。当需要用分子泵的冷却水来控制
等型涡轮分子泵电源。
2 概述
2.1 主要用途
FD-150/450BG、FD-250/1400BG、FD-400/3500BG 型分子泵电源
专门用来与我公司生产的 F-150/450、F-250/1400、F-400/3500 型的
涡轮分子泵配套使用，完成其拖动运行及各种故障保护等功能；也可
与国内外使用同类型电源的同型号分子泵调试后配套使用。
3.2.3 操作面板及按键说明
图 3—2—3 VFD-A/H 型变频器操作面板及按键说明图
特别说明： ⒈ 本电源的操作面板及按键是用于将分子泵电机运转的预定程
序写入变频器中，本电源在出厂之前已经预先将程序写入变频器了， 因此用户不能重新写入程序或更改原程序。否则，由此不作操作使用， 平常只操作电源箱面板上的启动按钮（8）、停止按钮（9）和电源按 钮（13）即可（如图 3—2—2）。
2.2 主要技术参数
表 2—1
型
号
FD-150/450BG FD-250/1400BG FD-400/3500BG
额定输出电压（V）
输 额定输出频率
（HZ）
400
最大启动电流（A）
＜4
出
正常工作电流（A）
＜1
3×50 400 ＜5 ＜1.2
250 ＜8 ＜2.5
-1-
型
号
FD-150/450BG FD-250/1400BG FD-400/3500BG
输 额定输入电压（V）
入
额定输入频率 （HZ）
控 控制方式
220±10％ 50/60±5％ 正弦波 PWM 方式
制 过负载耐量
输出最大启动电流的 140％，一分钟
特 启动加速时间
＜5 分
＜8 分
＜30 分
征 停车减速时间
＜10 分
＜20 分
＜60 分
保护功能
过电压、过电流、欠电压、过负载、过热等
冷却方式
操作面板上的其余各项键请勿操作。 4 操作运行
-6-
4.1 运行前检查和准备 4.1.1 检查输出接线是否正确、可靠、接地保护线要牢靠（输出线
的连接如图 4—1—1）。 4.1.2 输入电源是否符合技术参数的要求。 4.1.3 投入电源前使所有的开关处于断开状态，保证投入电源时，
本电源不会起动和不发生异常动作。 4.1.4 投入电源后
分子泵电源的运行，可将水压控制器的两个常开触点（无水断开，有 水闭合）串入即可；若不需要如此，就将两个端头短接（出厂时是短
-8-
接的）。
说明： 外控接线前需焊熔取掉④、⑤短接线
4.2 操作方法 4.2.1 按下机箱面板（2）（如图 3—2—2）上的电源开关键（13）， 分子泵电源得电，再按“启动”键（8），本电源就将按照预先设定的 启动和运行程序进行工作。操作面板上的显示器显示的运行频率或电 流应随即变化；运行频率由 000 逐渐上升，并在设定时间内达到额定 输出频率；若是电流显示，其值即表示本电源内的变频器的输出电流， 而非本电源的输出电流值。达到额定频率 1～3 分钟后，其显示的电 流值即为本电源在分子泵正常工作时变频器输出的电流值（但不是本 电源的输出电流值）。 特别说明：
FD — 400 / 3500 BG
BG 系列，变频器电源改进系列
配用涡轮分子泵的抽速
配用涡轮分子泵的进气口径
Fen Zi Beng Dian Yuan
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2.4 使用环境条件 2.4.1 工作环境应干燥、清洁、无灰尘、无腐蚀性气体、液体，无
可燃性气体、油雾、水滴、振动，不受阳光直晒，更应避免含 盐分的环境。 2.4.2 使用场所：室内。 2.4.3 使用环境温度：-10℃～+50℃，超过 40℃时，应移至通风良 好的环境。 2.4.4 相对湿度 20—95％，不因温度突变而产生结露。 2.4.5 海拔高度 H≤1000m。 2.4.6 振动≤5.9 m/s2(0.6G)。 2.5 工作条件 2.5.1 输入电源电压 220V±10％ 2.5.2 输入电源频率 50/60HZ±5％ 2.5.3 输入电源容量 4.5KV 以上 2.6 安装方法 2.6.1 本电源应平放，面板在前方，安装应紧固牢靠。 2.6.2 本电源运行时将产生热量，因此本电源周围应留有足够的空 间，保证良好的通风。若安装在电柜上，本电源上下应留出不 小于 40mm 的空间，且电柜应设送风排风装置，使用中温度不超 过表 2—1 所规定的值。 3 工作原理及结构说明 3.1 工作原理
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本电源的工作原理是将工频单相电源经过变频器后，变成频率可 调、电压可变的三相交流电，去驱动分子泵内的中频电机，从而带动 分子泵的涡轮加速旋转，在较短的时间内达到额定的转速，使分子泵 进入正常工作状态。 3.2 结构 3.2.1 电气原理
本电源主要由变频器、变压器、控制线路和故障报警线路及输出 等组成（见分子泵电源电路图 3—1—2）。
图 3—2—1 FD-
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BG 型分子泵电源电路图
3.2.2 产品结构与各部分名称（见图 3—2—2）
图 3—2—2 FD-
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BG 型分子泵电源外形及结构图
⒈面板 ⒋ 箱体底板 ⒌ 变频器 ⒍ 煞车电阻 ⒎ 变压器 ⒏ 启动按钮开关
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⒐ 停止按钮开关 ⒑ 蜂鸣器 ⒒ 报警指示灯 ⒓ 运行指示灯 ⒔ 电源开关 M 风扇 X1 外控输出插头座 X2 输出插头座
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钮开关即可，不要随意按动操作面板上的操作键。 操作面板（入图 3—2—2 上的“FUNC/DATA”、“MODE”、 键），可切换显示内容（电流或频率）。 发生故障跳闸时，将以代码方式显示故障原因，此时必 须停机检查，排除故障，然后复位，再重新启动运行。 复位方法如下：按下电源开关（13），断开电源约五分钟， 再重新开通电源，即可自动复位。 5 维护和检查 本电源的维护和检查，主要是对机内变频器（或称逆变器）的 维护和检查，为使变频器能长期可靠连续运行，防止发生故障，进行 日常和定期的检查是很必要的。变频器主要是由半导体器件组成。它 的老化和使用与使用条件（例如温度、尘、埃和振动）有关。为了延 长使用寿命和使之正常工作，要进行以下的日常和定期维修检查。 特别注意事项！！！ 至少要在切断电源 5 分钟之后进行维修。因为平滑电容器即使 在变频器关掉之后仍带有高压。以防止人身伤害！ 以下 5（维护和检查）和 6（故障诊断）两项主要是对变频器而 言。对整机而言，再加上对保险器、变压器、风扇、继电器和按钮开 关的检查和维护。 5.1 日常检查 通电和运行时不取去外盖，从外部检查变频器的运行，确认没 有异常情况。下列各点必须经常检查。